Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20170179175
    Abstract: A solid-state image sensor includes: a pixel array that includes first pixels, each having first and second photoelectric conversion units, and second pixels, each having third and fourth photoelectric conversion units; first to fourth transfer gates via which a signal charge respectively generated in the first to fourth photoelectric conversion units is respectively transferred to first to fourth charge voltage conversion units. At least one of a gate width, a gate length and an installation position of at least one transfer gate among the first to fourth transfer gates is altered to achieve uniformity in voltage conversion efficiency at the first to fourth charge voltage conversion units.
    Type: Application
    Filed: March 2, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventor: Satoshi SUZUKI
  • Publication number: 20170176181
    Abstract: A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a predetermined region of a specimen placed on a placement unit to perform an inspection on the shape of the predetermined region of the specimen includes: a setting unit that sets a three-dimensional region to be detected on the specimen; and a sliced-region selection unit that sets a plurality of sliced regions on the region to be detected, calculates, for each of the plurality of sliced regions, an amount of displacement of the predetermined region that is required to detect the region to be detected when the plurality of sliced regions is regarded as the predetermined region, and selects a sliced region for the inspection from among the plurality of sliced regions on the basis of each of the calculated amounts of displacement.
    Type: Application
    Filed: March 1, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventors: Nobukatsu MACHII, Fuminori HAYANO, Akitoshi KAWAI
  • Publication number: 20170176874
    Abstract: A liquid immersion exposure apparatus includes a liquid-immersion-area-forming-member having an opening through which an exposure light is projected, the-liquid-immersion-area-forming-member having a first liquid supply inlet facing downward, a second liquid supply inlet provided opposite to an outer surface of the final optical element, and a first removal outlet facing downward. A liquid immersion area is formed on a portion of an upper surface of a substrate while performing a liquid supply via the first liquid supply inlet to a gap between the liquid-immersion-area-forming-member and the upper surface of the substrate, a liquid supply via the second liquid supply inlet to a gap between the liquid-immersion-area-forming-member and a final optical element of a projection system and a liquid removal via the first removal outlet from the gap between the liquid-immersion-area-forming-member and the upper surface of the substrate.
    Type: Application
    Filed: March 6, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventor: Hiroyuki NAGASAKA
  • Publication number: 20170176216
    Abstract: An encoder includes a scale unit having a substrate configured of a metal material and in which a pattern is formed on a first surface of the substrate and a passive state member is formed on a second surface different from the first surface in the substrate, and a detection unit that is configured to move relative to the scale unit and detects the pattern.
    Type: Application
    Filed: March 1, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventors: Shintaro HIKICHI, Hideaki SUGIYAMA
  • Patent number: 9684154
    Abstract: A compact zooming optical system having high zooming ratio and superb optical performance and a manufacturing method are provided. The zooming optical system includes, in order from an object along the optical axis, a first lens group having positive refractive power, a second lens group having negative refractive power, a third lens group having positive refractive power, a fourth lens group having negative refractive power, and a fifth lens group having negative refractive power. Upon zooming from a wide angle end state to a telephoto end state, respective distances between the first lens group and the second lens group, between the second lens group and the third lens group, between the third lens group and the fourth lens group, and between the fourth lens group and the fifth lens group, are varied.
    Type: Grant
    Filed: August 27, 2014
    Date of Patent: June 20, 2017
    Assignee: Nikon Corporation
    Inventor: Akihiko Obama
  • Patent number: 9684176
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventor: Mitsunori Toyoda
  • Patent number: 9684175
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventor: Mitsunori Toyoda
  • Patent number: 9684242
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, a deflecting member arranged in the optical path on an incidence side of the optical integrator, which deflects the illumination light, a lens element arranged in the optical path between the deflecting member and the optical integrator, which distributes the illumination light in a region, on a pupil plane of the illumination optical apparatus, away from an optical axis of the illumination optical apparatus, and a polarization member arranged in the optical path between the lens element and the optical integrator, which changes a polarization state of the illumination light so that a polarization direction of the illumination light in the region is substantially coincident with a circumferential direction about the optical axis.
    Type: Grant
    Filed: May 9, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Takehito Kudo, Shigeru Hirukawa
  • Patent number: 9684247
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 9684246
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 9684248
    Abstract: A lithographic apparatus includes a substrate table capable of holding a substrate, a projection system that projects a patterned beam of radiation onto the substrate held by the substrate table, and a sensor table that is not capable of holding a substrate but that includes a sensor capable of sensing a property of the patterned beam of radiation. In addition, a first positioning system is connected to the substrate table and displaces the substrate table into and out of a path of the patterned beam of radiation, and a second positioning system is capable of positioning the sensor table into the path of the patterned beam of radiation when the substrate table is displaced out of the path of the patterned beam of radiation.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20170168400
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Application
    Filed: February 21, 2017
    Publication date: June 15, 2017
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Tohru KIUCHI
  • Publication number: 20170167867
    Abstract: A range finder including a sighting optical system that forms an optical image of a sighting target by sighting a target object and includes a correcting member in an optical path thereof that is driven to correct image blur of an optical image; a driving section that drives the correcting member based on a shaking amount applied to the sighting optical system; a light transmitting section that emits measurement light to a sighting target; a light receiving section that receives returned light from the sighting target and outputs a received light signal; a distance calculating section that calculates distance to the sighting target based on a timing when the measurement light is output and a timing when the return light is received by the light receiving section; and a power changing section that controls a focal distance of the light receiving section according to driving of the correcting member.
    Type: Application
    Filed: February 27, 2017
    Publication date: June 15, 2017
    Applicant: NIKON VISION CO., LTD.
    Inventor: Hitoshi OHMURO
  • Publication number: 20170168143
    Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
    Type: Application
    Filed: February 27, 2017
    Publication date: June 15, 2017
    Applicants: Nikon Corporation, Nikon Metrology NV
    Inventors: Mina A. Rezk, Anthony R. Slotwinski, Daniel G. Smith, Eric Peter Goodwin, Alexander Cooper, Thomas M. Hedges
  • Publication number: 20170166858
    Abstract: An incubated state evaluating device includes an image reading unit, a feature value calculating unit, a frequency distribution calculating unit, and an evaluation information generating unit. The image reading unit reads a plurality of images in which a plurality of cells incubated in an incubation container are image-captured in time series. The feature value calculating unit obtains each of feature values representing morphological features of cells from. the images for each of the cells included in the images. The frequency distribution calculating unit obtains each of frequency distributions of the feature values corresponding to the respective images. The evaluation information generating unit generates evaluation information evaluating an incubated state of cells in the incubation container based on a variation of the frequency distributions between images.
    Type: Application
    Filed: December 30, 2016
    Publication date: June 15, 2017
    Applicants: NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, NIKON CORPORATION
    Inventors: Hiroyuki HONDA, Ryuji KATO, Wakana YAMAMOTO
  • Patent number: 9678433
    Abstract: In corner sections of first to fourth quadrants whose origin point is a center of an upper surface of a stage, three each of two-dimensional heads are provided. The three each of two-dimensional heads include one first head and two second heads. The stage is driven, while measuring a position of the stage using three first heads that face a two-dimensional grating of a scale plate provided above the stage from the four first heads, and during the driving, difference data of measurement values of the two second heads with respect to the first head in a measurement direction are taken in for head groups to which the three first heads belong, respectively, and using the difference data, grid errors are calibrated.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: June 13, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9678301
    Abstract: A lens assembly includes a first lens holder that holds a first lens, a first guiding shaft that guides the first lens holder in a parallel direction to an optical axis of the first lens, a first driver that drives the first lens holder in an axial direction of the first guiding shaft, a second lens holder that holds a second lens that is different from the first lens, and a second driver that drives the second lens holder in a direction of the optical axis. Here, the first guiding shaft, the second driver, and the first driver are arranged in the stated order in a circumferential direction of a circle that is centered on the optical axis.
    Type: Grant
    Filed: March 5, 2014
    Date of Patent: June 13, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hisanori Togawa
  • Patent number: 9678332
    Abstract: To optionally forming a multilevel light intensity distribution on an illumination pupil plane, the illumination apparatus implements Köhler illumination on an illumination target surface, using as a light source the light intensity distribution formed on the illumination pupil plane on the basis of light from a light source. The illumination apparatus has a spatial light modulator, a condensing optical system, and a controller. The spatial light modulator has reflecting surfaces which are two-dimensionally arranged and postures of which can be controlled independently of each other. The condensing optical system condenses light from the reflecting surfaces to form a predetermined light intensity distribution on the illumination pupil plane. The controller controls the number of reflecting surfaces contributing to arriving light, for each of points on the illumination pupil plane forming the light intensity distribution, according to a light intensity distribution to be formed on the illumination pupil plane.
    Type: Grant
    Filed: March 20, 2015
    Date of Patent: June 13, 2017
    Assignee: NIKON CORPORATION
    Inventor: Osamu Tanitsu
  • Patent number: 9678324
    Abstract: The present microscope system has: a microscope, which has a light source, an aperture stop, a condenser lens, and an objective lens; a camera, which has a microlens array and an image pickup element; and an image processing unit, which constitutes a computer. The image processing unit divides a plurality of pixels allocated to each of the microlenses into bright-field image detection regions to be used for detecting bright-field images, and dark-field image detection regions to be used for detecting darkfield images, in accordance with the size of an aperture of the aperture stop. The image processing unit generates bright-field image data of a sample and darkfield image data of the sample.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: June 13, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuki Yoshida
  • Patent number: 9678437
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator, a polarization member arranged in an optical path of the illumination light on an incidence side of the optical integrator, which changes a polarization state of the illumination light, and a distribution changing member arranged in the optical path between the polarization member and the optical integrator, which can change a light amount distribution of the illumination light on a pupil plane of the illumination optical apparatus. The polarization member changes the polarization state of the illumination light so that a polarization direction of the illumination light, which is distributed away from an optical axis of the illumination optical apparatus on the pupil plane, is substantially coincident with a circumferential direction about the optical axis on the pupil plane.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 13, 2017
    Assignee: NIKON CORPORATION
    Inventors: Takehito Kudo, Shigeru Hirukawa
  • Publication number: 20170160649
    Abstract: A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate moves below the projection optical system. A measurement system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled based on the positional information measured with the measurement system, while compensating for a measurement error of the measurement system that occurs due to the heads.
    Type: Application
    Filed: February 15, 2017
    Publication date: June 8, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170160651
    Abstract: A liquid immersion exposure apparatus includes a first flow path which receives a first portion of immersion liquid from a liquid supply path; a second flow path which receives a second portion of immersion liquid from the liquid supply path; a first supply port connected to the first flow path and from which a portion of the first portion of the immersion liquid can be supplied and a second supply port connected to the second flow path and from which a portion of the second portion of the immersion liquid can be supplied; first and second adjusting devices which adjust a quantity of the immersion liquid to be supplied from the first arid second supply ports; and third and fourth flow paths which allow receipt of the immersion liquid that has not been introduced to the first and second supply ports from the first and second flow paths.
    Type: Application
    Filed: February 22, 2017
    Publication date: June 8, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yoshitomo NAGAHASHI
  • Publication number: 20170158606
    Abstract: A compound represented by formula (e): where R1 represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and Rf1 and Rf2 represent fluorinated alkoxy groups.
    Type: Application
    Filed: February 15, 2017
    Publication date: June 8, 2017
    Applicants: KANAGAWA UNIVERSITY, NIKON CORPORATION
    Inventor: Kazuo YAMAGUCHI
  • Publication number: 20170163923
    Abstract: An image sensor includes a first photoelectric conversion unit that converts light incident through a first opening to an electric charge, a second photoelectric conversion unit that converts light incident through a second opening which is smaller than the first opening to an electric charge, and a signal output wiring that outputs a first signal generated by the electric charge converted by the first photoelectric conversion unit and a second signal generated by the electric charge converted by the second photoelectric conversion unit. The second photoelectric conversion unit is disposed between the second opening and the signal output wiring.
    Type: Application
    Filed: February 22, 2017
    Publication date: June 8, 2017
    Applicant: NIKON CORPORATION
    Inventor: Hironobu MURATA
  • Patent number: 9671290
    Abstract: There is provided a temperature measurement method for measuring a temperature of an ultraviolet light transmittance member transmitting ultraviolet light. The method includes: detecting ultraviolet light transmitted through the ultraviolet light transmittance member using a spectroscopic measurement unit, and obtaining an absorption edge wavelength of the ultraviolet light transmittance member; and deriving a temperature of the ultraviolet light transmittance member on the basis of the obtained absorption edge wavelength.
    Type: Grant
    Filed: June 24, 2016
    Date of Patent: June 6, 2017
    Assignee: NIKON CORPORATION
    Inventor: Masafumi Mizuguchi
  • Patent number: 9671586
    Abstract: Provided is an optical system having, in order from an object, a positive first lens group (G1), an aperture stop (S) and a second lens group (G2), wherein the first lens group (G1) includes, in order from the object, a negative lens component (L1), a positive lens component (L2) and a first lens component (L3, L4), the image side surface of which is a concave surface facing the aperture stop (S), the second lens group (G2) includes, in order from the object, a second lens component (L5, L6), the object side surface of which is a concave surface facing the aperture stop (S), and a positive lens component (L8) disposed closest to the image, the first lens component (L1) and the second lens component (L2) face each other sandwiching the aperture stop (S), and the following conditional expressions (1) and (2) are satisfied: 1.5<fG1/f<2.6 . . . (1) and 2.1<TL/f<3.1 . . .
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: June 6, 2017
    Assignee: Nikon Corporation
    Inventor: Keigo Koida
  • Publication number: 20170152172
    Abstract: An optical glass which is suitable for mold press molding. The optical glass contains, in weight %, 10-25% of B2O3, 30-60% of P2O5, 0-5% of Al2O3, 0.1-10% of Li2O, 0-15% of SrO, 10-50% of BaO, 0-12% of ZnO, 0-5% of Y2O3 and 0-5% of Gd2O3, while not containing La2O3.
    Type: Application
    Filed: February 9, 2017
    Publication date: June 1, 2017
    Applicant: NIKON CORPORATION
    Inventors: Kohei YOSHIMOTO, Hiroshi YAMAMOTO
  • Publication number: 20170155854
    Abstract: A shutter device includes: a first light shielding member disposed at a position further frontward relative to an image-capturing surface of an image sensor, which blocks a light flux from a subject by traveling along a predetermined direction of travel; and a second light shielding member disposed at a position further frontward relative to the image-capturing surface of the image sensor, which blocks the light flux by traveling along the direction of travel, wherein: at least either a length of a light shielding range of the first light shielding member, measured along the direction of travel, or a length of a light shielding range of the second light shielding member, measured along the direction of travel, is smaller than a length of the image-capturing surface along the direction of travel.
    Type: Application
    Filed: March 24, 2015
    Publication date: June 1, 2017
    Applicant: NIKON CORPORATION
    Inventor: Masanori HASUDA
  • Patent number: 9665894
    Abstract: A retrieval support system includes a database which stores commodity image data; a retrieval unit which acquires commodity image data having image characteristic information which is the same as or similar to image characteristic information indicating a characteristic in an image of input image data, from the database, with respect to the input image data; and a condition setting unit which sets a retrieval condition including at least one of time information relating to time, place information relating to places and occasion information relating to occasions. The retrieval unit performs retrieval of the commodity image data based on the retrieval condition set by the condition setting unit. The commodity image data acquired by the retrieval unit and information relating to a commodity different from a commodity corresponding to the commodity image data are output together.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: May 30, 2017
    Assignee: NIKON CORPORATION
    Inventors: Masami Kumazawa, Hideya Inoue, Koji Yamagaki
  • Patent number: 9667851
    Abstract: An electronic device includes: an operation unit; a detection unit that detects a position or an orientation; a communication unit that communicates with an external device including an image capture unit; and a storing unit that stores image data, wherein the communication unit receives image data generated by the image capture unit from the external device after transmitting information instructing the image capture unit included in the external device to capture an image in response to an operation of the operation unit, and the storing unit stores the image data received and information on the position detected by the detection unit or information on the orientation detected by the detection unit.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: May 30, 2017
    Assignee: NIKON CORPORATION
    Inventors: Kaoru Yoshino, Hiroshi Kasai, Tomoyuki Sashima, Mayuko Ito, Kaori Tsuruta, Masakazu Sekiguchi, Hiroshi Kamehara, Yu Murakoshi
  • Patent number: 9665016
    Abstract: A positioning apparatus in a lithographic apparatus for projecting a patterned beam of radiation onto a substrate has a first table connected to a first positioning system that displaces the first table into and out of a path of the patterned beam, and a second table connected to a second positioning system that displaces the second table into the path of the patterned beam when the first table is displaced out of the path of the patterned beam. The first and second tables, one of which is positioned in the path of the patterned beam of radiation, are moved relative to an immersion region formed with the supplied liquid under the projection system such that the immersion region is maintained under the projection system by the other of the first and second tables positioned in the path of the patterned beam in place of the one table.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: May 30, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20170150589
    Abstract: An X-ray generation device that emits X-rays due to an electron beam emitted from a cathode arriving at a target, includes: first and second high voltage power supplies that are connected in series between the cathode and the target, and both of which accelerate the electron beam; and wherein the second high voltage power supply outputs a second high voltage so that, with respect to a phase of a ripple component of a first high voltage generated by the first high voltage power supply, a phase of a ripple component of the second high voltage generated by the second high voltage power supply has a predetermined relationship.
    Type: Application
    Filed: March 27, 2014
    Publication date: May 25, 2017
    Applicant: NIKON CORPORATION
    Inventors: Takeshi ENDO, Satoshi MIURA
  • Publication number: 20170146913
    Abstract: An exposure method and apparatus for illuminating a pattern with an illumination system to expose a substrate through a projection system. The pattern is illuminated with illumination light with a light amount distribution in which an amount of light is larger in a pair of first areas and a pair of second areas than in an area other than the first and second areas on a pupil plane of the illumination system. The pair of the first areas being arranged outside an optical axis, the pair of the second areas being arranged on ten same straight line as the pair of the first areas are arranged on, and the pair of the second areas being arranged outside the pair of the first areas.
    Type: Application
    Filed: February 6, 2017
    Publication date: May 25, 2017
    Applicant: NIKON CORPORATION
    Inventors: Takehito KUDO, Shigeru HIRUKAWA
  • Publication number: 20170148164
    Abstract: An image analysis apparatus includes: a distribution data generator that generates, on the basis of a sample image obtained by irradiating a biological tissue with light having an infrared bandwidth, distribution data indicating a distribution of light intensity in the infrared bandwidth in the tissue; a differential calculator that calculates, on the basis of the distribution data, an Nth-order derivative of the distribution of the light intensity in a first wavelength band in the infrared bandwidth, where N is an integer of 2 or more, for each region in the sample image; and an image data generator that converts the Nth-order derivative into a gray-scale value to generate image data.
    Type: Application
    Filed: January 10, 2017
    Publication date: May 25, 2017
    Applicant: NIKON CORPORATION
    Inventors: Masahiro TOTSU, Takeshi HATAGUCHI
  • Patent number: 9658537
    Abstract: A liquid immersion lithography apparatus includes an optical assembly having a last optical element, a first outlet facing downward, via which an immersion liquid is released, a first inlet via which the immersion liquid is drawn, and a containment member arranged to surround a last portion of the optical assembly. The containment member has (i) a second inlet facing downward, which is arranged radially-outwardly from the first outlet with respect to a space under the last optical element and via which fluid is removed from a gap formed under the containment member, and (ii) a second outlet facing downward, via which gas is supplied to the gap formed under the containment member, the second outlet being arranged radially-outwardly from the second inlet with respect to the space.
    Type: Grant
    Filed: December 1, 2015
    Date of Patent: May 23, 2017
    Assignee: NIKON CORPORATION
    Inventors: Andrew J. Hazelton, Michael Sogard
  • Publication number: 20170139328
    Abstract: In a measurement device, positional information of a mark of an object is measured. A holding member that holds the object, with a movable member that is supported by levitation on a base member, moves so that the mark is detected with a detection system having an optical member that irradiates the mark with a detection light, the base member being disposed below the detection system so that a surface of the base member is substantially parallel to a predetermined plane. The holding member is supported by the movable member and has a mounting area for the object on an upper surface side of the holding member in a direction orthogonal to the predetermined plane and being provided with a measurement surface on a lower surface side of the holding member, the measurement surface having a grating.
    Type: Application
    Filed: January 27, 2017
    Publication date: May 18, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170139630
    Abstract: An information storage device is a device that communicates over a network with another device that is used by another user different from an own user who uses an own device, and includes a storage unit including a first storage area available to the own user and a second storage area available to the other user, an information output unit that outputs information of the own user stored in the first storage area to the other device over the network, an information writing unit that stores information of the other user output by the other device over the network, in the second storage area, and a use control unit that controls whether the second storage area is available to the own user on the basis of an instruction of the other user.
    Type: Application
    Filed: December 16, 2016
    Publication date: May 18, 2017
    Applicant: NIKON CORPORATION
    Inventors: Takeaki SUGIMURA, Kazuyuki KAZAMI, Atsushi TANAKA, Soichiro TSUBOI, Genshi YOSHIOKA, Daisuke YUKI
  • Publication number: 20170139331
    Abstract: A liquid immersion member including first and second members forming the immersion space; first member having a first lower surface disposed at a portion of the optical member surrounding, second member having a second upper surface opposite to the first lower surface via a gap and a second lower surface opposing the substrate and second member disposed at a portion of exposure light optical path surrounding; driving apparatus to move the second member with respect to the first; controlling the driving apparatus so the second member's operation in the substrate first operation movement is between exposure termination and start of a first and second shot regions differently from a second member's operation in the substrate second movement period which is between exposure termination and start of a third and fourth shot regions; first and second shot regions are in the same row contrary to third and fourth shot regions.
    Type: Application
    Filed: January 26, 2017
    Publication date: May 18, 2017
    Applicant: NIKON CORPORATION
    Inventor: Shinji SATO
  • Patent number: 9651868
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: May 16, 2017
    Assignee: NIKON CORPORATION
    Inventors: Masaki Kato, Tohru Kiuchi
  • Patent number: 9654709
    Abstract: A solid-state imaging device includes a second image sensor having an organic photoelectric conversion film transmitting a specific light, and a first image sensor which is stacked in layers on a same semiconductor substrate as that of the second image sensor and which receives the specific light having transmitted the second image sensor, in which a pixel for focus detection is provided in the second image sensor or the first image sensor. Therefore, an AF method can be realized independently of a pixel for imaging.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: May 16, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hironobu Murata
  • Patent number: 9651873
    Abstract: A liquid immersion member used in an immersion exposure apparatus, and capable of forming a liquid immersion space on a surface of an object opposite to an emitting surface of an optical member which emits exposure light. The liquid immersion member includes a first member that includes a first part disposed at surrounding of an optical path of the exposure light, and in which a first opening part, through which the exposure light is able to pass, and a first liquid supply part, is disposed at at least a portion of surrounding of the first opening part and capable of opposing the surface of the object, are provided at the first part, and a second member includes a first liquid recovery part which can be opposing the surface of the object and is movable with respect to the first member outside the first part with respect to the optical path.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: May 16, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Patent number: 9651871
    Abstract: A spatial light modulator has a plurality of mirror elements each of which is controllable into a first state in which the mirror element reflects incident light with a change in a phase thereof by a first phase and a second state in which the mirror element reflects the incident light with a change in the phase thereof by a second phase 180° different from the first phase; and a boundary portion arranged between the mirror elements, which changes the phase of the incident light by a third phase substantially (90°+k·180°) (where k is an integer) different from the first phase. In projecting a pattern with the use of the spatial light modulator, an error caused in the pattern can be reduced even if the light quantity of light passing a gap region between the optical elements in the spatial light modulator is large.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: May 16, 2017
    Assignee: Nikon Corporation
    Inventors: Soichi Owa, Yoji Watanabe, Tomoharu Fujiwara
  • Publication number: 20170134509
    Abstract: An information processing apparatus includes: a storage unit that stores data that belongs to a user; a movement prediction unit that predicts a movement destination of the user; and a transmission unit that transmits the data that belongs to the user to an apparatus provided at the movement destination.
    Type: Application
    Filed: January 23, 2017
    Publication date: May 11, 2017
    Applicant: NIKON CORPORATION
    Inventors: Takeaki SUGIMURA, Kazuyuki KAZAMI, Atsushi TANAKA, Soichiro TSUBOI, Genshi YOSHIOKA, Daisuke YUKI
  • Publication number: 20170132784
    Abstract: An object is to measure the shape of an object to be measured under a more appropriate condition. A shape measuring device includes a projection unit configured to project a pattern onto a measurement target by light, an image capturing unit configured to capture a picture image of the measurement target onto which the pattern is projected by the projection unit, a movement unit capable of moving a projected position of the pattern on the measurement target by relatively moving the projection unit and the measurement target, and a region-of-interest setting unit configured to set a region of interest for acquiring information used to measure the measurement target to be in at least part of a region captured by the image capturing unit, so as to include an image of the pattern.
    Type: Application
    Filed: June 13, 2014
    Publication date: May 11, 2017
    Applicant: NIKON CORPORATION
    Inventor: Tomoaki YAMADA
  • Patent number: 9644720
    Abstract: Focus arrangements for laser radar and other applications provide compensation of orientation-dependent gravitational forces. A linear stage can be preloaded and provided with balanced linear encoders so that gravitational force induced pitch, yaw, and roll can be reduced, detected, or compensated. Alternatively, movable focus elements can be secured to actuator driven spring assemblies that are controlled to compensate orientation-dependent gravitational forces.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: May 9, 2017
    Assignee: Nikon Corporation
    Inventors: Alec Robertson, Douglas C. Watson, Alexander Cooper
  • Patent number: 9645373
    Abstract: Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a plane-parallel plate after light of unnecessary wavelength is removed by a filter. The plane-parallel plate is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.
    Type: Grant
    Filed: April 3, 2014
    Date of Patent: May 9, 2017
    Assignee: NIKON CORPORATION
    Inventors: Yuki Yoshida, Naoshi Aikawa
  • Patent number: 9645390
    Abstract: The spatial light modulator is provided with: a substrate; a fixed electrode disposed on a surface of the substrate; a connecting section, which has one end of the connecting section connected to the surface of the substrate; a movable section, which is connected to another end of the connecting section; a supporting post section, which extends in the thickness direction of the substrate with one end of the supporting post section connected to the movable section; a reflecting member, which is connected to another end of the supporting post section; a movable electrode, which is disposed on a surface of the reflecting member, the surface of the reflecting member facing the fixed electrode; and a conductive layer, which is disposed on the supporting post section with a film thickness larger than that of the movable electrode, and which electrically connects between the movable section and the movable electrode.
    Type: Grant
    Filed: January 2, 2015
    Date of Patent: May 9, 2017
    Assignee: Nikon Corporation
    Inventors: Junji Suzuki, Yoshihiko Suzuki
  • Patent number: 9645413
    Abstract: A line of sight detection device calibration method, which calibrates a line of sight detection device that measures movement of an eyeball of a subject wearing eyeglasses and detects a transmission point at which a line of sight of the subject passes through a lens of the eyeglasses based on a result of measurement, includes: a measurement step of measuring the movement of the eyeball of the subject in a condition in which a first baseline is arranged at a predetermined position relative to the lens of the eyeglasses and the first baseline reflected in a corner cube substantially corresponds to a second baseline of the corner cube; and a calibration step of calibrating the line of sight detection device based on a result of measurement by the measurement step.
    Type: Grant
    Filed: March 18, 2015
    Date of Patent: May 9, 2017
    Assignee: NIKON CORPORATION
    Inventor: Naoshi Aikawa
  • Patent number: D789434
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: June 13, 2017
    Assignee: Nikon Corporation
    Inventors: Kenji Abe, Makoto Imamizu, Yuki Kobayashi, Kenichi Soejima
  • Patent number: D789439
    Type: Grant
    Filed: August 27, 2015
    Date of Patent: June 13, 2017
    Assignee: Nikon Corporation
    Inventor: Shiki Inoue