Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Patent number: 9715176
    Abstract: A first drive system of a first stage and a second drive system of a second stage are controlled based on measurement information of a first encoder system and a second encoder system, respectively, and so that a mask and a substrate are moved relative to illumination light in scanning exposure of the substrate. To move the second stage in another second area, one head of the second encoder system, different from two heads, of three heads used in one second area is switched to another head so that drive control of the second stage by three heads, including the another head and the two heads, that are used in the another second area is performed, instead of drive control of the second stage by the three heads used in the one second area. The switching is performed while the second stage is in a first area.
    Type: Grant
    Filed: June 14, 2016
    Date of Patent: July 25, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9715175
    Abstract: A reticle protection device capable of keeping a reticle therein is provided with an inner pod capable of keeping the reticle therein; an outer pod capable of keeping the inner pod therein; an electroconductive movable contact portion provided on at least one of the inner pod and the outer pod and being capable of coming into contact with an electroconductive film of the reticle; and a leaf spring for achieving electric conduction of the contact portion to at least one of the inner pod and the outer pod. The reticle is kept in the inner pod and the inner pod is kept in the outer pod, thereby enabling stable grounding of the reticle.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: July 25, 2017
    Assignee: NIKON CORPORATION
    Inventor: Kazuya Ota
  • Patent number: 9715127
    Abstract: A compact imaging lens includes, in order from an object side: a first lens group having positive refractive power and consisting of a single lens element; and a second lens group having positive refractive power and consisting of a plurality of lens components. A position of the first lens group is fixed with respect to an image plane. At least a portion of the second lens group is moved as a shift lens group in a direction including a component perpendicular to an optical axis. Specified conditional expressions are satisfied.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: July 25, 2017
    Assignee: Nikon Corporation
    Inventor: Toshinori Take
  • Publication number: 20170205614
    Abstract: A microscope device includes an interface detector that detects the position of an interface present in a container containing an observation object and a controller that performs focus maintenance control for maintaining the focal position of an objective lens in a reference position distant from the interface detected by the interface detector in the direction of the optical path of the objective lens by a predetermined distance (an offset value) and, in a time period when an image capture unit is capturing images, changes the focal position from the reference position by moving at least one of the objective lens and observation object in the direction of the optical path with reference to the reference position.
    Type: Application
    Filed: May 30, 2014
    Publication date: July 20, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yoshitaro NAKANO, Takaaki OKAMOTO
  • Publication number: 20170208166
    Abstract: A cellular phone is capable of telephone-calling with an external device, and includes an antenna by which to communicate with the external device; a lens; an image sensor that outputs an image signal; a display; a loudspeaker; and a processer. The processor controls the display to display an announcement of an incoming call from the external device after receiving a calling signal via the antenna, and in a case that the calling signal is received during operation of the image sensor in a moving image mode, the processor permits communication between the cellular phone and the external device via the antenna and using the loudspeaker and a microphone of the cellular phone after the announcement of the incoming call is displayed by the display and after the processor receives an instruction from an input device of the cellular phone to allow starting of the telephone-calling with the external device.
    Type: Application
    Filed: March 31, 2017
    Publication date: July 20, 2017
    Applicant: NIKON CORPORATION
    Inventors: Itaru HOMMA, Chiyuki KUWATA, Akira OHMURA
  • Patent number: 9709779
    Abstract: Comprising, in order from an object side: a first lens group G1 having positive refractive power; a second lens group G2 having negative refractive power; an aperture stop S; a third lens group G3 having positive refractive power; and a fourth lens group G4 having positive refractive power; upon zooming from a wide-angle end state to a telephoto end state, the distance between the first lens group G1 and the second lens group G2, the distance between the second lens group G2 and the aperture stop S, the distance between the aperture stop S and the third lens group G3, and the distance between the third lens group G3 and the fourth lens group G4 being varied, and the distance between the aperture stop S and the fourth lens group G4 being constant; and a predetermined conditional expression being satisfied, thereby providing a variable magnification optical system which is compact in size and has a high variable magnification ratio and high optical performance, an optical apparatus, and a method for manufacturi
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: July 18, 2017
    Assignee: Nikon Corporation
    Inventor: Akihiko Obama
  • Patent number: 9709786
    Abstract: A non-linear microscopy includes an illuminating unit collecting an illuminating light supplied from a light source on a specimen and making a coherent non-linear optical process takes place at a collecting point; a detecting unit detecting a coherent object light occurred in the non-linear optical process and generating a signal indicating light intensity at a light detecting part; and a controlling unit scanning a specimen plane of the specimen by the collecting point and measuring a distribution of the signal on the specimen plane; in which at least one of an optical path of the illuminating light from the light source toward the specimen and an optical path of the object light from the specimen toward the light detecting part is duplicated to a pair of optical paths, and a relationship between the pair of optical paths is set to a symmetric relationship with respect to the specimen plane.
    Type: Grant
    Filed: September 7, 2013
    Date of Patent: July 18, 2017
    Assignee: NIKON CORPORATION
    Inventor: Naoki Fukutake
  • Patent number: 9709820
    Abstract: A refractive Fresnel lens used for an optical system including an image plane, which includes a plurality of zone lens surfaces disposed concentrically and a plurality of side wall surfaces each formed between adjacent zone lens surfaces, is characterized in that the side wall surfaces are modulated so as to spatially spread in the image plane noise light due to reflection and/or refraction at the side wall surfaces.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: July 18, 2017
    Assignees: Essilor International (Compagnie Generale D'Optique), Nikon Corporation
    Inventors: Toru Fujii, Alain Goulet
  • Patent number: 9709900
    Abstract: A liquid immersion exposure apparatus includes a projection optical system via which exposure light is projected, a first stage that is movable below the projection optical system and having a holding portion that holds a substrate, a second stage that is movable below the projection optical system, and a nozzle member having an opening through which the exposure light is projected, a supply opening via which the liquid is supplied and a first recovery opening via which the liquid is collected. During exposure of the substrate, a portion of a surface of the substrate is covered by the liquid while performing liquid supply from the supply opening and liquid collection from the first recovery opening. One or both of the first and second stages has a second recovery opening via which the liquid that comes from a gap between the first stage and the second stage is recovered.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: July 18, 2017
    Assignee: NIKON CORPORATION
    Inventors: Tomoharu Fujiwara, Yuichi Shibazaki
  • Patent number: 9712769
    Abstract: An image sensor having a pixel part generating a signal in accordance with a light, a signal processing part performing signal processing on the signal read from the pixel part, and a power supply part connected to the signal processing part via a first wiring, and supplying a power supply to the signal processing part, and a storage package storing the image sensor, and having a second wiring configuring a parallel circuit by being connected to the first wiring. Accordingly, it is possible to solve a problem such that a wiring resistance is increased when a power supply circuit is configured inside of a solid state image sensor.
    Type: Grant
    Filed: December 27, 2012
    Date of Patent: July 18, 2017
    Assignee: NIKON CORPORATION
    Inventor: Takafumi Komaba
  • Patent number: 9709785
    Abstract: A structured illumination apparatus includes a light modulator being disposed in an exit flux of light from a light source and in which a sonic wave propagation path is arranged in a direction traversing the exit flux of light; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; and an illuminating optical system making mutually different diffracted components of the exit flux of light passed through the sonic wave propagation path to be interfered with each other, and forming interference fringes of the diffracted components on an observational object.
    Type: Grant
    Filed: April 11, 2013
    Date of Patent: July 18, 2017
    Assignee: NIKON CORPORATION
    Inventor: Tatsushi Nomura
  • Publication number: 20170199171
    Abstract: An observation apparatus includes: an area calculation unit that calculates a colony area based on an image in which a cell colony is captured; a cell number calculation unit that calculates, based on the image, the number of cells included in a target colony of which an area is calculated by the area calculation unit; and a density calculation unit that calculates, based on the area of the target colony calculated by the area calculation unit and the number of the cells included in the target colony calculated by the cell number calculation unit, a density of the cells included in the target colony.
    Type: Application
    Filed: June 16, 2014
    Publication date: July 13, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yasujiro KIYOTA, Hiroaki KII
  • Publication number: 20170199120
    Abstract: An image analysis apparatus includes: a calculator that generates, on the basis of a plurality of sample images obtained by irradiating a biological tissue with light having N wavelength bands selected from a wavelength bandwidth from 950 nm or more to 1600 nm or less as a predetermined wavelength bandwidth, sample data on the tissue in the predetermined wavelength bandwidth; and a data generator that compares the sample data with training data on a substance that is a training target, to generate distribution data indicating a distribution of the substance in the tissue.
    Type: Application
    Filed: December 21, 2016
    Publication date: July 13, 2017
    Applicant: NIKON CORPORATION
    Inventors: Zhen LIU, Takeshi HATAGUCHI, Hiroki ISHIKAWA
  • Patent number: 9703085
    Abstract: Projection optical system for forming an image on a substrate and including an illumination relay lens and a projection lens each of which is a catadioptric system. The projection lens may include two portions in optical communication with one another, the first of which is dioptric and the second of which is catadioptric. In a specific case, the projection optical system satisfies 4 < ? ? I ? ? ? T ? < 30 , where ?I and ?T are magnifications of the first portion and the overall projection lens. Optionally, the projection lens may be structured to additionally satisfy 6 < ? ? II ? ? ? T ? < 20 , where ?II is a magnification of the second portion. A digital scanner including such projection optical system and operating with UV light having a spectral bandwidth on the order of 1 picometer. Method for forming an image with such projection optical system.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: July 11, 2017
    Assignee: Nikon Corporation
    Inventor: David M. Williamson
  • Patent number: 9704902
    Abstract: A backside illumination image sensor that includes a semiconductor substrate with a plurality of photoelectric conversion elements and a read circuit formed on a front surface side of the semiconductor substrate, and captures an image by outputting, via the read circuit, electrical signals generated as incident light having reached a back surface side of the semiconductor substrate is received at the photoelectric conversion elements includes: a light shielding film formed on a side where incident light enters the photoelectric conversion elements, with an opening formed therein in correspondence to each photoelectric conversion element; and an on-chip lens formed at a position set apart from the light shielding film by a predetermined distance in correspondence to each photoelectric conversion element. The light shielding film and an exit pupil plane of the image forming optical system achieve a conjugate relation to each other with regard to the on-chip lens.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: July 11, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yosuke Kusaka
  • Patent number: 9703204
    Abstract: An optical apparatus capable of illuminating an irradiation surface under a required illumination condition capable of achieving a high light efficiency while keeping a small light loss due to, for example, the overlap error of illuminating fields. The optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: July 11, 2017
    Assignee: NIKON CORPORATION
    Inventors: Hideki Komatsuda, Yoshio Kawabe
  • Patent number: 9706186
    Abstract: An imaging apparatus including an image generating section that generates first parallax image data based on the output of the first pixel and second parallax image data based on the output of the second pixel. When the imaging element captures an image of an object point located in an unfocused region on the optical axis, a pixel value of a center pixel corresponding to the optical axis in the first parallax image data is greater than or equal to 50% of a pixel value of a peak pixel in the first parallax image data, and a pixel value of a center pixel corresponding to the optical axis in the second parallax image data is greater than or equal to 50% of a pixel value of a peak pixel in the second parallax image data.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: July 11, 2017
    Assignee: NIKON CORPORATION
    Inventors: Kiyoshige Shibazaki, Muneki Hamashima, Susumu Mori, Fumiki Nakamura, Mamoru Iesaka, Junya Hagiwara, Kenichi Ishiga
  • Patent number: 9706190
    Abstract: So as to obtain color parallax images, it has been necessary to prepare an image capturing optical system and an image capturing element that are complex, to capture the parallax images. In view of the above, provided is an image processing apparatus including: an image obtaining section; a disparity amount operation section; and an image converting section.
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: July 11, 2017
    Assignee: NIKON CORPORATION
    Inventors: Kiyoshige Shibazaki, Muneki Hamashima, Susumu Mori, Yumi Suzuki
  • Publication number: 20170192209
    Abstract: An inverted equal-magnification relay lens includes, in order from an object side: a first lens group having a positive power, and disposed near an object; a second lens group having a positive power, and disposed at a predetermined distance from the first lens group; and a third lens group having a negative power; wherein an entrance pupil position is more toward an object surface side than the first lens group, an exit pupil position is more toward a third lens group side than an image surface, and the following Formulas (1) and (2) are satisfied: 0.65?|G1F/G2F|?2.0 . . . (1); 0.35?|G3F/G2F|?3.1 . . . (2); where: G1F: a focal length of the first lens group; G2F: a focal length of the second lens group; and G3F: a focal length of the third lens group.
    Type: Application
    Filed: May 8, 2015
    Publication date: July 6, 2017
    Applicant: NIKON CORPORATION
    Inventor: Tomohiko YAMAHIRO
  • Publication number: 20170193994
    Abstract: To take security into account and increase user friendliness, an information processing device includes: an input unit to which information is input; an extracting unit extracting predetermined words from the information input to the input unit; a classifying unit classifying the words extracted by the extracting unit into first words and second words; and a converting unit converting the first words by a first conversion method and converting the second words by a second conversion method, the second conversion method being different from the first conversion method.
    Type: Application
    Filed: March 17, 2017
    Publication date: July 6, 2017
    Applicant: NIKON CORPORATION
    Inventors: Hideo HOSHUYAMA, Hiroyuki AKIYA, Kazuya UMEYAMA, Keiichi NITTA, Hiroki UWAI, Masakazu SEKIGUCHI
  • Patent number: 9696146
    Abstract: The present invention relates to a scanning probe (100) for the dimensional acquisition of an object (400) by irradiating the object (400) with light and detecting reflected light comprising: a detection unit (120) comprising an imaging sensor (122) and a sensor lens assembly (124) for detecting the reflected light, a light projecting unit (141) comprising a light source (142) for generating light, and source optics (145) for focusing the light, and light plane generating optics (143) for generating a light plane (149) for irradiating the object, and an adjustment mechanism (155) comprised in the light projecting unit (141), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe (100).
    Type: Grant
    Filed: March 28, 2013
    Date of Patent: July 4, 2017
    Assignee: NIKON METROLOGY NV
    Inventors: Patrick Blanckaert, Frank Thys, Raf Nysen, Geert Vandenhoudt
  • Publication number: 20170184978
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Application
    Filed: February 3, 2017
    Publication date: June 29, 2017
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Hirohisa TANAKA, Kinya KATO, Takashi MORI
  • Publication number: 20170183438
    Abstract: Low refractive index and high dispersion material which can produce a bonded-multilayer DOE having an excellent optical performance is obtained, and the optical member using this is obtained. The resin precursor for optical materials obtained through the addition reaction of the composite containing a di (meth) acrylate shown in the following Chemical Expression 1. where, R?H or CH3, and m+n=1 to 10.
    Type: Application
    Filed: February 24, 2017
    Publication date: June 29, 2017
    Applicant: NIKON CORPORATION
    Inventors: Shiho NISHIMURA, Yosuke INOKUCHI
  • Publication number: 20170184425
    Abstract: An encoder, including: a scale that has a pattern and is mountable to a rotary member of an object to be measured; a main body including a detector that detects the pattern, the main body being mountable to a non-rotating portion of the object to be measured; and a holding member including: an abutment portion that is removably provided to the main body from outside the main body and passes through the main body to abut the scale; and a pushing portion that is capable of pushing the abutment portion toward the scale.
    Type: Application
    Filed: March 16, 2017
    Publication date: June 29, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi MITSUHASHI
  • Publication number: 20170184811
    Abstract: A focus adjustment control apparatus is provided which includes: a focus detection unit that calculates an evaluation value with regard to contrast of an image via an optical system to detect a focus adjustment state of the optical system; an acquisition unit that acquires from a lens barrel at least one of a maximum value and a minimum value of an image plane movement coefficient that represents correspondence relationship between a movement amount of a focus adjustment lens included in the optical system and a movement amount of an image plane; and a control unit that uses at least one of the maximum value and the minimum value of the image plane movement coefficient to determine a drive speed for the focus adjustment lens when the focus detection unit detects the focus adjustment state.
    Type: Application
    Filed: March 16, 2017
    Publication date: June 29, 2017
    Applicant: NIKON CORPORATION
    Inventors: Hiroyuki TOMITA, Toshiaki MAEDA
  • Patent number: 9690214
    Abstract: A partial section of an aerial image measuring unit is arranged at a wafer stage and part of the remaining section is arranged at a measurement stage, and the aerial image measuring unit measures an aerial image of a mark formed by a projection optical system. Therefore, for example, when the aerial image measuring unit measures a best focus position of the projection optical system, the measurement can be performed using the position of the wafer stage, at which a partial section of the aerial image measuring unit is arranged, in a direction parallel to an optical axis of the projection optical system as a datum for the best focus position. Accordingly, when exposing an object with illumination light, the position of the wafer stage in the direction parallel to the optical axis is adjusted with high accuracy based on the measurement result of the best focus position.
    Type: Grant
    Filed: October 22, 2014
    Date of Patent: June 27, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9690205
    Abstract: While a wafer stage moves linearly in a Y-axis direction, surface position information of a wafer surface at a plurality of detection points set at a predetermined interval in an X-axis direction is detected by a multipoint AF system, and by a plurality of alignment systems arranged in a line along the X-axis direction, marks at different positions on the wafer are each detected, and a part of a chipped shot of the wafer is exposed by a periphery edge exposure system. This allows throughput to be improved when compared with the case when detection operation of the marks, detection operation of the surface position information (focus information), and periphery edge exposure operation are performed independently.
    Type: Grant
    Filed: August 22, 2014
    Date of Patent: June 27, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9693036
    Abstract: Provided is an imaging apparatus including an imaging section that generates, from a single scene, captured image data including reference image data, first parallax image data having a first parallax in one direction relative to a subject of the reference image data, and second parallax image data having a second parallax in another direction that is opposite the one direction; an adjustment condition acquiring section that acquires an adjustment condition relating to parallax amount adjustment; and an image processing device that processes the reference image data, the first parallax image data, and the second parallax image data, based on the adjustment condition, to generate third parallax image data having a third parallax that is in the one direction and different from the first parallax and fourth parallax image data having a fourth parallax that is in the other direction and different from the second parallax.
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: June 27, 2017
    Assignee: NIKON CORPORATION
    Inventors: Kiyoshige Shibazaki, Muneki Hamashima
  • Patent number: 9690206
    Abstract: An exposure apparatus exposes a substrate to light passing through liquid, and includes a stage that holds the substrate. The stage includes a substrate holder including a support member that supports a rear surface of the substrate and a first circumferential wall surrounding the support member. A second circumferential wall surrounds the substrate holder and forms a first groove between the second circumferential wall and the substrate holder, and a second groove on an outer side thereof. A plate member surrounds the substrate on the support member, and a recovery passage recovers liquid flowing from a liquid supply system to a gap between the plate member and the substrate. The second circumferential wall is under the gap so that part of an upper surface of the second circumferential wall faces the substrate rear surface and another part of the upper surface faces a rear surface of the plate member.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: June 27, 2017
    Assignee: NIKON CORPORATION
    Inventor: Makoto Shibuta
  • Patent number: 9690198
    Abstract: Non-linear metallic thermal resist structure having more than two layers of different metals and effective eutectic temperature that is lower than eutectic temperature of a reference non-linear metallic thermal resist having only two layer of same different metals. Optionally, at least one the layers of such resist structure is doped with material different from host metals and/or deposited under conditions resulting in strain or stress in a layer at hand. Method of multi-exposure-based patterning of a substrate carrying such structure with laser pulses characterized by irradiance at levels equal to or below 10 mJ/cm2. The sequence of steps producing the required pattern on the substrate may be explicitly lacking a step of removal of a portion of the resist structure between two consecutive exposures.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: June 27, 2017
    Assignee: Nikon Corporation
    Inventor: Shane R. Palmer
  • Patent number: 9690209
    Abstract: In a measurement device, positional information of a mark of an object is measured. A holding member that holds the object, with a movable member that is supported by levitation on a base member, moves so that the mark is detected with a detection system having an optical member that irradiates the mark with a detection light, the base member being disposed below the detection system so that a surface of the base member is substantially parallel to a predetermined plane. The holding member is supported by the movable member and has a mounting area for the object on an upper surface side of the holding member in a direction orthogonal to the predetermined plane and being provided with a measurement surface on a lower surface side of the holding member, the measurement surface having a grating.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: June 27, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20170176216
    Abstract: An encoder includes a scale unit having a substrate configured of a metal material and in which a pattern is formed on a first surface of the substrate and a passive state member is formed on a second surface different from the first surface in the substrate, and a detection unit that is configured to move relative to the scale unit and detects the pattern.
    Type: Application
    Filed: March 1, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventors: Shintaro HIKICHI, Hideaki SUGIYAMA
  • Publication number: 20170176874
    Abstract: A liquid immersion exposure apparatus includes a liquid-immersion-area-forming-member having an opening through which an exposure light is projected, the-liquid-immersion-area-forming-member having a first liquid supply inlet facing downward, a second liquid supply inlet provided opposite to an outer surface of the final optical element, and a first removal outlet facing downward. A liquid immersion area is formed on a portion of an upper surface of a substrate while performing a liquid supply via the first liquid supply inlet to a gap between the liquid-immersion-area-forming-member and the upper surface of the substrate, a liquid supply via the second liquid supply inlet to a gap between the liquid-immersion-area-forming-member and a final optical element of a projection system and a liquid removal via the first removal outlet from the gap between the liquid-immersion-area-forming-member and the upper surface of the substrate.
    Type: Application
    Filed: March 6, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventor: Hiroyuki NAGASAKA
  • Publication number: 20170179175
    Abstract: A solid-state image sensor includes: a pixel array that includes first pixels, each having first and second photoelectric conversion units, and second pixels, each having third and fourth photoelectric conversion units; first to fourth transfer gates via which a signal charge respectively generated in the first to fourth photoelectric conversion units is respectively transferred to first to fourth charge voltage conversion units. At least one of a gate width, a gate length and an installation position of at least one transfer gate among the first to fourth transfer gates is altered to achieve uniformity in voltage conversion efficiency at the first to fourth charge voltage conversion units.
    Type: Application
    Filed: March 2, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventor: Satoshi SUZUKI
  • Publication number: 20170176181
    Abstract: A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a predetermined region of a specimen placed on a placement unit to perform an inspection on the shape of the predetermined region of the specimen includes: a setting unit that sets a three-dimensional region to be detected on the specimen; and a sliced-region selection unit that sets a plurality of sliced regions on the region to be detected, calculates, for each of the plurality of sliced regions, an amount of displacement of the predetermined region that is required to detect the region to be detected when the plurality of sliced regions is regarded as the predetermined region, and selects a sliced region for the inspection from among the plurality of sliced regions on the basis of each of the calculated amounts of displacement.
    Type: Application
    Filed: March 1, 2017
    Publication date: June 22, 2017
    Applicant: NIKON CORPORATION
    Inventors: Nobukatsu MACHII, Fuminori HAYANO, Akitoshi KAWAI
  • Patent number: 9684154
    Abstract: A compact zooming optical system having high zooming ratio and superb optical performance and a manufacturing method are provided. The zooming optical system includes, in order from an object along the optical axis, a first lens group having positive refractive power, a second lens group having negative refractive power, a third lens group having positive refractive power, a fourth lens group having negative refractive power, and a fifth lens group having negative refractive power. Upon zooming from a wide angle end state to a telephoto end state, respective distances between the first lens group and the second lens group, between the second lens group and the third lens group, between the third lens group and the fourth lens group, and between the fourth lens group and the fifth lens group, are varied.
    Type: Grant
    Filed: August 27, 2014
    Date of Patent: June 20, 2017
    Assignee: Nikon Corporation
    Inventor: Akihiko Obama
  • Patent number: 9684175
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventor: Mitsunori Toyoda
  • Patent number: 9684242
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, a deflecting member arranged in the optical path on an incidence side of the optical integrator, which deflects the illumination light, a lens element arranged in the optical path between the deflecting member and the optical integrator, which distributes the illumination light in a region, on a pupil plane of the illumination optical apparatus, away from an optical axis of the illumination optical apparatus, and a polarization member arranged in the optical path between the lens element and the optical integrator, which changes a polarization state of the illumination light so that a polarization direction of the illumination light in the region is substantially coincident with a circumferential direction about the optical axis.
    Type: Grant
    Filed: May 9, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Takehito Kudo, Shigeru Hirukawa
  • Patent number: 9684246
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 9684176
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventor: Mitsunori Toyoda
  • Patent number: 9684247
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 9684248
    Abstract: A lithographic apparatus includes a substrate table capable of holding a substrate, a projection system that projects a patterned beam of radiation onto the substrate held by the substrate table, and a sensor table that is not capable of holding a substrate but that includes a sensor capable of sensing a property of the patterned beam of radiation. In addition, a first positioning system is connected to the substrate table and displaces the substrate table into and out of a path of the patterned beam of radiation, and a second positioning system is capable of positioning the sensor table into the path of the patterned beam of radiation when the substrate table is displaced out of the path of the patterned beam of radiation.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20170167867
    Abstract: A range finder including a sighting optical system that forms an optical image of a sighting target by sighting a target object and includes a correcting member in an optical path thereof that is driven to correct image blur of an optical image; a driving section that drives the correcting member based on a shaking amount applied to the sighting optical system; a light transmitting section that emits measurement light to a sighting target; a light receiving section that receives returned light from the sighting target and outputs a received light signal; a distance calculating section that calculates distance to the sighting target based on a timing when the measurement light is output and a timing when the return light is received by the light receiving section; and a power changing section that controls a focal distance of the light receiving section according to driving of the correcting member.
    Type: Application
    Filed: February 27, 2017
    Publication date: June 15, 2017
    Applicant: NIKON VISION CO., LTD.
    Inventor: Hitoshi OHMURO
  • Publication number: 20170166858
    Abstract: An incubated state evaluating device includes an image reading unit, a feature value calculating unit, a frequency distribution calculating unit, and an evaluation information generating unit. The image reading unit reads a plurality of images in which a plurality of cells incubated in an incubation container are image-captured in time series. The feature value calculating unit obtains each of feature values representing morphological features of cells from. the images for each of the cells included in the images. The frequency distribution calculating unit obtains each of frequency distributions of the feature values corresponding to the respective images. The evaluation information generating unit generates evaluation information evaluating an incubated state of cells in the incubation container based on a variation of the frequency distributions between images.
    Type: Application
    Filed: December 30, 2016
    Publication date: June 15, 2017
    Applicants: NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, NIKON CORPORATION
    Inventors: Hiroyuki HONDA, Ryuji KATO, Wakana YAMAMOTO
  • Publication number: 20170168400
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Application
    Filed: February 21, 2017
    Publication date: June 15, 2017
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Tohru KIUCHI
  • Publication number: 20170168143
    Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
    Type: Application
    Filed: February 27, 2017
    Publication date: June 15, 2017
    Applicants: Nikon Corporation, Nikon Metrology NV
    Inventors: Mina A. Rezk, Anthony R. Slotwinski, Daniel G. Smith, Eric Peter Goodwin, Alexander Cooper, Thomas M. Hedges
  • Patent number: 9678332
    Abstract: To optionally forming a multilevel light intensity distribution on an illumination pupil plane, the illumination apparatus implements Köhler illumination on an illumination target surface, using as a light source the light intensity distribution formed on the illumination pupil plane on the basis of light from a light source. The illumination apparatus has a spatial light modulator, a condensing optical system, and a controller. The spatial light modulator has reflecting surfaces which are two-dimensionally arranged and postures of which can be controlled independently of each other. The condensing optical system condenses light from the reflecting surfaces to form a predetermined light intensity distribution on the illumination pupil plane. The controller controls the number of reflecting surfaces contributing to arriving light, for each of points on the illumination pupil plane forming the light intensity distribution, according to a light intensity distribution to be formed on the illumination pupil plane.
    Type: Grant
    Filed: March 20, 2015
    Date of Patent: June 13, 2017
    Assignee: NIKON CORPORATION
    Inventor: Osamu Tanitsu
  • Patent number: D791211
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: July 4, 2017
    Assignee: Nikon Corporation
    Inventors: Chikara Fujita, Hiroyuki Asano
  • Patent number: D791212
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: July 4, 2017
    Assignee: Nikon Corporation
    Inventors: Chikara Fujita, Hiroyuki Asano
  • Patent number: D791793
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: July 11, 2017
    Assignee: Nikon Corporation
    Inventors: Yuuki Aoki, Kenji Tonegawa, Miho Hara