Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20170054932
    Abstract: A first mobile electronic device includes an image sensor that outputs image data from an image of a subject received through a lens of the first mobile electronic device, a first communication circuit and a second communication circuit. The first communication circuit transmits the image data to a server. The second communication circuit is different from the first communication circuit and transmits information by which to obtain the image data from the server to a second mobile electronic device so that the image data can be obtained from the server by the second mobile electronic device using the information.
    Type: Application
    Filed: November 3, 2016
    Publication date: February 23, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yosuke KUSAKA, Shoei NAKAMURA
  • Publication number: 20170052290
    Abstract: A multilayer film reflective mirror for reflecting incident light is provided with: a substrate; a first multilayer film formed by alternately layering a Mo layer and a Si layer on a surface of the substrate; a detachable layer detachable from the first multilayer film; and a second multilayer film formed by alternately layering the Mo layer and the Si layer on the detachable layer, and the second multilayer film is removable by detaching the detachable layer by dissolving it with acid. When reflectance of the multilayer film reflective mirror is reduced, the reflectance can be increased by a simple operation.
    Type: Application
    Filed: August 23, 2016
    Publication date: February 23, 2017
    Applicant: NIKON CORPORATION
    Inventor: Katsuhiko MURAKAMI
  • Publication number: 20170054913
    Abstract: For example, in an operation of determining a composition while zooming in a plurality of areas and confirming positional relationship of mutual images such as, for example, a case of horizontal leveling and the like performed when a construction is photographed, it has been necessary to perform a complicated operation of repeating designation and release of zoom-in areas among the plurality of the areas. Therefore, an imaging apparatus is provided, the imaging apparatus being provided with a display unit that displays an image, and a display control unit that zooms in and displays a plurality of partial areas within the image, and also displays on the display unit positional information representing positions of the plurality of partial areas within the image.
    Type: Application
    Filed: August 26, 2016
    Publication date: February 23, 2017
    Applicant: NIKON CORPORATION
    Inventor: Shinya HARA
  • Patent number: 9575417
    Abstract: An exposure apparatus which transfers a pattern formed on a mask onto a photosensitive substrate placed in proximity to the mask, the apparatus including an illumination optical device which illuminates the mask with an energy beam, a mask holding device which holds a periphery area of a pattern area of the mask from above, and makes a force at least within a plane parallel to a predetermined plane act on the mask and a substrate holding device which moves along the predetermined plane holding the substrate.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: February 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9577550
    Abstract: Provided is a vibration actuator including: an electromechanical transduction member that transduces electric power to a mechanical vibration; a transmission member that transmits the vibration from the electromechanical transduction member as a driving force; and an abutting portion that abuts on the transmission member and moves relative to the transmission member in response to the driving force. One of the transmission member and the abutting portion includes pores in its surface contacting the abutting portion or the transmission member at an area occupancy of 2% or higher. In this vibration actuator, the average area of the pores may be 3 ?m2 or larger. The other of the transmission member and the abutting portion may include iron in its surface contacting the one.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: February 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Makoto Nakazumi, Masaaki Tanabe
  • Patent number: 9578186
    Abstract: A first mobile electronic device includes a camera that has a lens and that outputs image data from a subject; a first communication circuit that transmits the image data to a server; and a second communication circuit different from the first communication circuit and that transmits information related to the server to a second mobile electronic device.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: February 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yosuke Kusaka
  • Publication number: 20170045543
    Abstract: There is a possibility that an arrangement of a cleaning device and a drying device may result in an inefficient usage of a space for an installation. A cleaning and drying apparatus 30 for a plate including a biochip is provided with: a cleaning device 310 that is configured to clean the plate 60; and a drying device 320 that is configured to dry the plate 60, the drying device 320 is arranged above the cleaning device 310.
    Type: Application
    Filed: November 25, 2014
    Publication date: February 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Tadao ISAMI, Muneki HAMASHIMA, Takehiko UEDA
  • Publication number: 20170045829
    Abstract: An exposure apparatus has a substrate holding member, a first supporting member, a second supporting member, and a driving system. The first supporting member supports the substrate holding member from below. The second supporting member supports the first supporting member from below such that the first supporting member and the second supporting member are capable of moving relative to each other. The driving system moves the substrate holding member, the first supporting member and the second supporting member. The driving system includes a first driving device and a second driving device, the first driving device moving the substrate holding member and the first supporting member in a direction along a predetermined axis, and the second driving device moving the second supporting member in the direction along the predetermined axis.
    Type: Application
    Filed: October 27, 2016
    Publication date: February 16, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yasuo AOKI
  • Patent number: 9567560
    Abstract: An incubated state evaluating device includes an image reading unit, a feature value calculating unit, a frequency distribution calculating unit, and an evaluation information generating unit. The image reading unit reads a plurality of images in which a plurality of cells incubated in an incubation container are image-captured in time series. The feature value calculating unit obtains each of feature values representing morphological features of cells from the images for each of the cells included in the images. The frequency distribution calculating unit obtains each of frequency distributions of the feature values corresponding to the respective images. The evaluation information generating unit generates evaluation information evaluating an incubated state of cells in the incubation container based on a variation of the frequency distributions between images.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: February 14, 2017
    Assignees: NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, NIKON CORPORATION
    Inventors: Hiroyuki Honda, Ryuji Kato, Wakana Yamamoto
  • Patent number: 9568826
    Abstract: A mark forming method includes: a step of forming, on a device layer of a wafer, an intermediate layer to which a polymer layer containing a block copolymer is adherable, the device layer including a shot area and a scribe line area; a step of removing a portion, of the intermediate layer, formed in the scribe line area; a step of exposing an image of a mark on the scribe line area and forming, based on the image of the mark, a mark including recessed portion; and a step of applying the polymer layer containing the block copolymer on the device layer of the wafer. When a circuit pattern is forced by using the self-assembly of the block copolymer, it is possible to form the mark simultaneously with the formation of the circuit pattern.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Tomoharu Fujiwara
  • Patent number: 9571767
    Abstract: When the amplification ratio is low and strong incident light causes a large charge, the signal retrieved from regions where the incident light is weak is also weak, but when the amplification ratio is high in regions where the incident light is weak, the signal retrieved from regions where the incident light is strong becomes saturated. Therefore, the dynamic range of the imaging unit is narrow. Provided is an imaging unit comprising an imaging section that includes a first group having one or more pixels and a second group having one or more pixels different from those of the first group; and a control section that, while a single charge accumulation is performed in the first group, causes pixel signals to be output by performing charge accumulation in the second group a number of times differing from a number of times charge accumulation is performed in the first group.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shiro Tsunai
  • Patent number: 9568844
    Abstract: A drive unit drives a wafer table in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer table in the Y-axis direction and based on known correction information in accordance with position information of the wafer table in a non-measurement direction (e.g. Z, ?z and ?x directions) that is measured by an interferometer at the time of the measurement by the encoder. That is, the wafer table (a movable body) is driven in the Y-axis direction based on the measurement value of the encoder that has been corrected by correction information for correcting a measurement error of the encoder that is caused by a relative displacement of a head and a scale in the non-measurement direction.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9568834
    Abstract: A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: February 14, 2017
    Assignee: Nikon Corporation
    Inventor: Yasuhiro Omura
  • Patent number: 9568338
    Abstract: An encoder includes a positional information generation unit configured to generate first positional information based on a detected signal which is output by a sensor unit, and an IIR filter unit configured to output second positional information obtained by performing filtering on the first positional information. In the IIR filter unit, a counter unit stores a predetermined high-order digit of the first positional information as a count value, and an input unit subtracts the count value from the first positional information to thereby generate input information. A computation unit generates an internal computation result based on delay information which is an internal computation result stored in a delay information storage unit, input information, and a predetermined filter coefficient, and generates output information on which filtering is performed. An output unit adds the count value and the output information to thereby generate second positional information.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Kiichiro Yamanobe
  • Patent number: 9568828
    Abstract: A liquid immersion member including first and second members forming the immersion space; first member having a first lower surface disposed at a portion of the optical member surrounding, second member having a second upper surface opposite to the first lower surface via a gap and a second lower surface opposing the substrate and second member disposed at a portion of exposure light optical path surrounding; driving apparatus to move the second member with respect to the first; controlling the driving apparatus so the second member's operation in the substrate first operation movement is between exposure termination and start of a first and second shot regions differently from a second member's operation in the substrate second movement period which is between exposure termination and start of a third and fourth shot regions; first and second shot regions are in the same row contrary to third and fourth shot regions.
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Publication number: 20170038553
    Abstract: A lens barrel in which tilt adjustment can be made depending on the position of a lens unit in the optical axis direction. This lens barrel includes: at least three guide bars provided so as to extend along the optical axis direction; a driving unit that respectively drives the at least three guide bars in the optical axis direction; a lens frame holding unit that holds an image-capturing lens, the lens frame holding unit being attached to at least three guide bars and being driven in the optical axis direction by the at least three guide bars; and a control unit that controls said at least three linear actuators so as to adjust the respective drive amounts in the optical axis direction of the at least three guide bars and to tilt the lens frame holding unit from a direction orthogonal to the optical axis.
    Type: Application
    Filed: October 19, 2016
    Publication date: February 9, 2017
    Applicant: NIKON CORPORATION
    Inventor: Kunihiro Fukino
  • Publication number: 20170038694
    Abstract: A liquid immersion exposure apparatus includes a projection system, a liquid supply inlet, a liquid collection outlet, a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the liquid collection outlet, from the other, a first flow-meter which measures an amount of the liquid collected via the liquid collection outlet, and a second flow-meter which measures an amount of liquid to be supplied via the liquid supply inlet.
    Type: Application
    Filed: October 24, 2016
    Publication date: February 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Nobutaka MAGOME, Naoyuki KOBAYASHI
  • Publication number: 20170038300
    Abstract: A structured illumination microscopic device includes a first spatial modulation unit spatially modulating a fluorescent sample using an excitation light having a sinusoidal illumination distribution of a spatial frequency K and having an optical frequency ?1 for shifting a fluorescent substance to an excitation level; a second spatial modulation unit spatially modulating the fluorescent sample using a stimulation light having a sinusoidal illumination distribution of a spatial frequency K and having an optical frequency ?2 for shifting the excited fluorescent substance to a base level; and an imaging unit obtaining, as a modulated image, an image of the fluorescent sample with spontaneously emitted light generated at the fluorescent sample in accordance with the excitation light and the stimulation light.
    Type: Application
    Filed: October 20, 2016
    Publication date: February 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Fumihiro DAKE, Hiroki YAZAWA
  • Publication number: 20170038572
    Abstract: An optical apparatus includes a first optical element and a second optical element capable of separating incident light according to a wavelength of the incident light. The first optical element includes a first separation section having first optical characteristics for reflecting light in a first wavelength band, transmitting light in a second wavelength band, and partially transmitting and partially reflecting light in a third wavelength band. The second optical element includes a second separation section having second optical characteristics for separating incident light that is incident in two wavelength bands including the first wavelength band or the second wavelength band and the third wavelength band into the light in the first wavelength band or the light in the second wavelength band and the light in the third wavelength band according to the wavelength.
    Type: Application
    Filed: December 8, 2014
    Publication date: February 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Susumu MORI, Tomoya SAITO
  • Publication number: 20170041519
    Abstract: An image-capturing device includes: a plurality of micro-lenses disposed in a two-dimensional pattern near a focal plane of an image forming optical system; an image sensor that includes a two-dimensional array of element groups each corresponding to one of the micro-lenses and made up with a plurality of photoelectric conversion elements which receive, via the micro-lenses light fluxes from a subject having passed through the photographic optical system and output image signals; and a synthesizing unit that combines the image signals output from the plurality of photoelectric conversion elements based upon information so as to generate synthetic image data in correspondence to a plurality of image forming areas present on a given image forming plane of the image forming optical system, the information specifying positions of the photoelectric conversion elements output image signals that are to be used for generating synthetic image data for each image forming area.
    Type: Application
    Filed: October 18, 2016
    Publication date: February 9, 2017
    Applicant: NIKON CORPORATION
    Inventor: Toru IWANE
  • Patent number: 9563116
    Abstract: A circular cylinder-shaped mask is used to form an image of a pattern on a substrate via a projection optical system. The mask has a pattern formation surface on which the pattern is formed and that is placed around a predetermined axis, and the mask is able to rotate, with the predetermined axis taken as an axis of rotation, in synchronization with a movement of the substrate in at least a predetermined one-dimensional direction. When a diameter of the mask on the pattern formation surface is taken as D, and a maximum length of the substrate in the one-dimensional direction is taken as L, and a projection ratio of the projection optical system is taken as ?, and circumference ratio is taken as ?, then the conditions for D?(?×L)/? are satisfied.
    Type: Grant
    Filed: August 15, 2013
    Date of Patent: February 7, 2017
    Assignee: Nikon Corporation
    Inventor: Yuichi Shibazaki
  • Patent number: 9563130
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Grant
    Filed: December 8, 2014
    Date of Patent: February 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Koji Shigematsu
  • Patent number: 9562997
    Abstract: This optical system (100) comprises a prism (12) and a diffractive optical element (13). The prism (12) has a non-rotationally-symmetric aspheric surface for correcting eccentric aberration, and the diffractive optical element (13) includes a diffractive optical surface (DM) having a lattice structure that is as about an optical axis (Ax) of the optical system (100). The following condition is satisfied where ?Ne represents the refractive index difference of the diffractive optical surface (DM) in relation to the e-line (546.074 nm). 0.53>?Ne>0.
    Type: Grant
    Filed: October 19, 2011
    Date of Patent: February 7, 2017
    Assignee: Nikon Corporation
    Inventor: Kenzaburo Suzuki
  • Patent number: 9563133
    Abstract: An exposure apparatus includes a projection system; a liquid supply system configured to supply liquid to a space under the projection system; a liquid recovery system configured to recover the supplied liquid via a recovery opening; a separator fluidically connected to the recovery opening, which separates one of the liquid and gas, which has been collected via the recovery opening, from the other; a flow-meter fluidically connected to the recovery opening; a stage system configured to move a movable member on which a substrate is held; and a measurement system having a light receiving part which receives a measurement light through a light-transmissive member provided at the movable member and through the liquid between the projection system and the light-transmissive member.
    Type: Grant
    Filed: November 24, 2014
    Date of Patent: February 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Kazuya Ono
  • Patent number: 9563043
    Abstract: The present invention has, in order along the optical axis from the object side: a first lens group (G1) that has positive refractive power; a second lens group (G2) that has negative refractive power; a third lens group (G3) that has positive refractive power; a fourth lens group (G4) that has positive refractive power; and a fifth lens group (G5). The fourth lens group (G4) is constituted by a single positive lens (L41), and the fifth lens group (G5) is constituted by a single lens (L51), which is fixed with respect to an image plane while power is being varied. The following conditional expression (1) is satisfied. 0.9<?2t·?3w/(?2w·?3t)<1.7 . . . (1), where ?2w denotes a magnification of the second lens group (G2) in the wide-angle end state, ?3w denotes a magnification of the third lens group (G3) in the wide-angle end state, ?2t denotes a magnification of the second lens group (G2) in the telephoto end state, and ?3t denotes a magnification of the third lens group (G3) in the telephoto end state.
    Type: Grant
    Filed: January 24, 2015
    Date of Patent: February 7, 2017
    Assignee: Nikon Corporation
    Inventor: Saburo Masugi
  • Patent number: 9565332
    Abstract: To provide an image evaluation apparatus and camera which are capable of evaluating an image which is comprehensively good. An image evaluation apparatus comprising: a storage portion which stores a plurality of images when an imaging portion of a camera has continuously imaged in a predetermined time interval a plurality of frames of a subject in a photographing area of the camera, and an image evaluation portion which evaluates a plurality of the images stored in the storage portion, based on a characteristic amount showing a state in which the subject in the photographing area changing in chronological sequence, when the plurality of the images is imaged.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: February 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hiroshi Takeuchi
  • Patent number: 9563048
    Abstract: A microscope includes an illuminating optical system that illuminates the test object under predetermined illumination conditions, an imaging optical system that forms an image of the test object, and an image sensor that outputs an image signal. A computer includes an image analyzing unit that acquires an image feature amount of the test object on the basis of the image signal detected by the image sensor, a comparison unit that compares the image feature amount of the test object with image feature amounts of a plurality of sample test objects and specifies an image feature amount of a sample test object closest to the image feature amount of the test object, and a setting unit that sets illumination conditions of the illuminating optical system on the basis of an illumination state suitable for observation of a sample test object having the image feature amount specified by the comparison unit.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: February 7, 2017
    Assignee: Nikon Corporation
    Inventors: Naoki Fukutake, Shinichi Nakajima, Hirohisa Taira
  • Patent number: 9563245
    Abstract: An electronic device comprising a connecting section; a first IF circuit that communicates through the connecting section with an external device connected via the connecting section, at a first communication speed; a second IF circuit that communicates through the connecting section with the external device, at a communication speed that is higher than the first communication speed; and a control section that, when one of the first IF circuit and the second IF circuit is selected as an IF circuit to be used for communication, limits a power supply to the other IF circuit.
    Type: Grant
    Filed: April 3, 2014
    Date of Patent: February 7, 2017
    Assignee: Nikon Corporation
    Inventor: Masaki Hayashi
  • Patent number: 9563967
    Abstract: A photographic subject tracking device includes: a first degree-of-similarity calculation unit that calculates degree of similarity between a template image for tracking and an image in search area; a photographic subject position identification unit that identifies a tracked photographic subject position in the input image based on calculated degree of similarity; a second degree-of-similarity calculation unit that calculates a degree of similarity between each of multiple template images for resizing determination, which are generated based on template image for tracking, and image in search area; a matching position identification unit that identifies matching positions of the multiple template images for resizing determination, respectively, in the input image based on calculated degrees of similarity; and a size changing unit that changes an image size of template image for tracking and template images for resizing determination based on a density of the plurality of matching positions identified.
    Type: Grant
    Filed: July 17, 2013
    Date of Patent: February 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hiroshi Kintou
  • Patent number: 9562215
    Abstract: An imaging section of a microscope apparatus captures a plurality of microscope images each having the focal position which differs in the field being same with a light flux having passed through a microscopic optical system. A region separating section separates a cellular region from a non-cellular region by using the plurality of the microscope images. A focusing position calculating section finds a focusing position in a target pixel included in the cellular region based on a brightness change in the position being same in the plurality of the microscope images. A three dimensional information generating section generates three dimensional information of a cultured cell based on a position of the cellular region and the focusing position in the target pixel.
    Type: Grant
    Filed: August 27, 2010
    Date of Patent: February 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yasujiro Kiyota
  • Publication number: 20170034420
    Abstract: An exchangeable lens includes: a mount unit at which a camera body is detachably engaged; a plurality of drive target members, conditions of which change as a drive force is applied thereto; an initialization unit that executes initialization processing for each of the plurality of drive target members; an initialization status transmission unit that transmits initialization statuses, each indicating a status of the initialization processing executed for one of the drive target members, to the camera body via a first transmission path over predetermined first cycles; and a drive condition transmission unit that transmits a drive condition of at least one drive target member among the plurality of drive target members to the camera body via a second transmission path different from the first transmission path over predetermined second cycles different from the predetermined first cycles.
    Type: Application
    Filed: October 13, 2016
    Publication date: February 2, 2017
    Applicant: NIKON CORPORATION
    Inventors: Masafumi OIKAWA, Kazuharu IMAFUJI, Shigeo TAKAHASHI, Shunji NAGAYA
  • Patent number: 9557455
    Abstract: An optical element formed by stacking each of two resin layers on a glass substrate, wherein when the second resin layer of the two resin layers counting from the glass substrate is formed, an external circumferential part of the second resin layer is formed so as to be located inward of the outer circumferential part of the first resin layer, which is located closer to the glass substrate than the second resin layer.
    Type: Grant
    Filed: April 4, 2012
    Date of Patent: January 31, 2017
    Assignee: Nikon Corporation
    Inventor: Toshihiko Kurata
  • Patent number: 9557656
    Abstract: A stage apparatus includes a first movable stage that moves while holding an article, an electrical contact that is provided on the first movable stage, and a grounding device that comes into contact with the electrical contact and grounds the first movable stage when the article is not processed.
    Type: Grant
    Filed: November 30, 2005
    Date of Patent: January 31, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9557654
    Abstract: A liquid immersion exposure apparatus includes a projection system having a final element and a liquid immersion member that forms a liquid immersion space under the final element. The liquid immersion member includes a first member that surrounds the final element and that has a liquid supply port and a liquid suction port and a second member at least a portion of which is disposed below the first member, and that is movable with respect to the first member. The first member has a channel therein, one end of the channel is open to a first space between the final element and the first member, the other end of the channel is disposed below the one end and is open to a second space different from the first space, and the channel is provided such that liquid is allowed to flow into the channel.
    Type: Grant
    Filed: February 4, 2016
    Date of Patent: January 31, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Patent number: 9557548
    Abstract: There is provided a reflective imaging optical system forming an image of a first plane onto a second plane, wherein the numerical aperture with respect to a first direction on the second plane is greater than 1.1 times a numerical aperture with respect to a second direction crossing the first direction on the second plane. The reflecting imaging optical system has an aperture stop defining the numerical aperture on the side of the second plane, and the aperture stop has an elliptic-shaped opening of which size in a major axis direction is greater than 1.1 times that in a minor axis direction. The reflective image-forming optical system is applicable to an exposure apparatus using, for example, EUV light and capable of increasing numerical aperture while enabling optical path separation of light fluxes.
    Type: Grant
    Filed: November 24, 2010
    Date of Patent: January 31, 2017
    Assignee: Nikon Corporation
    Inventor: Hideki Komatsuda
  • Publication number: 20170020481
    Abstract: A calibration object is imaged in a radiographic system such as a CT system. The images are processed to calibrate the system, without prior measurement of the calibration object. Initial estimates are refined to improve accuracy.
    Type: Application
    Filed: November 25, 2014
    Publication date: January 26, 2017
    Applicant: NIKON METROLOGY NV
    Inventors: Sam HAWKER, Gemma FARDELL, Patrick BLANKAERT
  • Publication number: 20170023783
    Abstract: A microscope objective lens includes, in order from an object side, a first lens group having positive refractive power, a second lens group having positive refractive power, and a third lens group having negative refractive power, and is configured such that the first lens group includes, on the most object side, a positive meniscus lens whose concave surface is directed to the object side, such that the second lens group includes a diffractive optical element having positive refractive power, and such that the diffractive optical element is arranged at a position closer to the image than a portion at which the diameter of a light flux passing through the first lens group and the second lens group is the larges
    Type: Application
    Filed: April 18, 2016
    Publication date: January 26, 2017
    Applicant: NIKON CORPORATION
    Inventor: Miwako YOSHIDA
  • Publication number: 20170025644
    Abstract: A film forming apparatus, a substrate processing apparatus, and a device manufacturing method are provided, which improve the film thickness uniformity of a thin film that is formed on a substrate by spraying a thin film material. The film forming apparatus which forms a thin film on a substrate is provided with a nozzle that sprays a thin film material and an exhaust unit that discharges a gas. An exhaust port of the exhaust unit is arranged on a side that is opposite to the direction in which the gravity acts with respect to the substrate. The substrate processing apparatus performs a predetermined process on the substrate using the film forming apparatus. The device manufacturing method manufactures a device using the film forming apparatus.
    Type: Application
    Filed: October 3, 2016
    Publication date: January 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yasutaka NISHI, Makoto NAKAZUMI
  • Publication number: 20170023868
    Abstract: An exposure apparatus that can prevent disadvantages due to a leaked liquid is provided. The exposure apparatus includes a substrate holder that includes a peripheral wall portion and supporting portions located on an inside of the peripheral wall portion and that supports a substrate with the supporting portions by negatively pressurizing a space surrounded by the peripheral wall portion, and a recovery mechanism that includes a collection inlets provided on the inside of the peripheral wall portion and a vacuum system connected to the collection inlets, in which a liquid penetrated from an outer periphery of the substrate is sucked and recovered, in the state with an upper surface of the peripheral wall portion and a back surface of the substrate being spaced at a first distance.
    Type: Application
    Filed: October 3, 2016
    Publication date: January 26, 2017
    Applicant: NIKON CORPORATION
    Inventor: Makoto SHIBUTA
  • Publication number: 20170026632
    Abstract: Reception of the invisible light wavelength band in an incident luminous flux has not been considered. In view of this, an image sensor is provided, the image sensor including: a visible parallax pixel that is associated with a visible range light-receiving photoelectric conversion pixel having any of a plurality of types of aperture mask each including an aperture that is positioned to allow passage, to a photoelectric converting element, of a mutually different partial luminous flux of an incident luminous flux in a visible light wavelength band; and an invisible parallax pixel that is associated with an invisible range light-receiving photoelectric conversion pixel having any of a plurality of types of aperture mask each including an aperture positioned to allow passage, to the photoelectric converting element, of a mutually different partial luminous flux in an incident luminous flux in an invisible light wavelength band.
    Type: Application
    Filed: October 4, 2016
    Publication date: January 26, 2017
    Applicant: NIKON CORPORATION
    Inventor: Kenichi ISHIGA
  • Publication number: 20170023785
    Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.
    Type: Application
    Filed: October 7, 2016
    Publication date: January 26, 2017
    Applicant: NIKON CORPORATION
    Inventor: So NISHIKAWA
  • Publication number: 20170025097
    Abstract: A control device includes: a control unit that changes a positional relationship between a detection device detecting an operation by a user on a display in midair and the display by controlling the display, wherein: the control unit is capable of changing the positional relationship by user.
    Type: Application
    Filed: December 26, 2014
    Publication date: January 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Hidenori KURIBAYASHI, Tatsuyoshi TANABE, Marie SHIMOYAMA, Hidefumi TOKI, Daisaku KOMIYA
  • Publication number: 20170026639
    Abstract: A display apparatus includes a display section and a changing section. The display section displays an image that gives a stereoscopic perspective to an observer. The changing section changes an amount by which the stereoscopic perspective in the image displayed by the display section is enhanced according to a setting of the observer.
    Type: Application
    Filed: October 6, 2016
    Publication date: January 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Hideya INOUE, Hirohisa TAIRA, Koji YAMAGAKI
  • Patent number: 9552619
    Abstract: An image processing apparatus includes a plurality of image processing module parts, a module arbiter part, and a DMAC (Direct Memory Access Controller) part. Each of the image processing module parts includes a module core for executing a predetermined image processing. The plurality of image processing module parts is connected to the module arbiter part. The module arbiter part arbitrates memory access which is given by the plurality of image processing module parts through a bus. The DMAC part is connected between the module arbiter part and the bus, and executes memory access related to the arbitration result obtained by the module arbiter part.
    Type: Grant
    Filed: April 1, 2013
    Date of Patent: January 24, 2017
    Assignees: MegaChips Corporation, Nikon Corporation
    Inventors: Shogo Iwai, Kazuma Takahashi, Nobuhiro Minami, Kensuke Uchida, Toru Miyakoshi
  • Patent number: 9554108
    Abstract: An image processing device includes an imaging unit generating RAW image data of a shot image and a gradation conversion unit. The imaging unit includes an imaging sensor which converts an image of a subject into an electrical signal. Then the gradation conversion unit performs gradation conversion according to a shooting condition for each of color signals based on a pixel array of the imaging sensor on the RAW image data of continuously shot images. Thus, it is possible to efficiently compress the RAW image data of continuously shot images.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: January 24, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shigeru Doida
  • Patent number: 9551938
    Abstract: Disclosed is a light source optimizing method wherein: a light source shape obtained as the result of SMO is set as a target, the SMO being an optimizing calculation method for optimizing a mask pattern and illumination light source, a spatial light modulator is controlled such that a deviation from the target is within an acceptable range, and the shape of the illumination light source is set; the image of the pattern obtained as the results of the SMO is formed on a wafer, using illumination light emitted from the illumination light source having the set light source shape, an OPE is evaluated as image-forming performance using the detection results obtained by detecting the image of the pattern thus formed; and the light source shape is optimized.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: January 24, 2017
    Assignee: NIKON CORPORATION
    Inventors: Tomoyuki Matsuyama, Naonori Kita
  • Patent number: D777775
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: January 31, 2017
    Assignee: Nikon Corporation
    Inventor: Hiroki Hosaka
  • Patent number: D779349
    Type: Grant
    Filed: September 2, 2015
    Date of Patent: February 21, 2017
    Assignee: Nikon Vision Co., Ltd.
    Inventors: Yuki Kobayashi, Kenji Abe, Tomohiro Hoshi
  • Patent number: D779574
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: February 21, 2017
    Assignee: Nikon Corporation
    Inventor: Mitsuo Nakajima
  • Patent number: D779575
    Type: Grant
    Filed: September 2, 2015
    Date of Patent: February 21, 2017
    Assignee: Nikon Corporation
    Inventor: Tatsuya Kobayashi