Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20170082925
    Abstract: An exposure apparatus includes an optical member that can be provided on a stage. The optical member has a first surface contacting a liquid when moved to face a projection system, and a second surface contacting a gas and transmitting light having come from the projection system via the liquid and the first surface. The optical member is configured such that at least a large-angle ray of the light, which has an angle with an optical axis of the projection system sufficiently large to undergo total reflection at an end surface of the projection system when the liquid is absent, travels from the projection system to the second surface without passing through gas. The second surface transmits the large-angle ray, which is received by the light-receiving surface.
    Type: Application
    Filed: December 5, 2016
    Publication date: March 23, 2017
    Applicant: NIKON CORPORATION
    Inventors: Hisashi NISHINAGA, Ikuo HIKIMA, Mitsunori TOYODA, Masahiro NAKAGAWA, Tsuneyuki HAGIWARA, Yasushi MIZUNO, Naonori KITA, Osamu TANITSU, Nozomu EMURA
  • Publication number: 20170079741
    Abstract: A scanning projection apparatus includes: an irradiation unit that irradiates a biological tissue with detection light; a light detection unit that detects light that is radiated from the tissue irradiated with the detection light; an image generation unit that generates data on an image about the tissue by using a detection result of the light detection unit; and a projection unit including a projection optical system that scans the tissue with visible light on the basis of the data, the projection unit being configured to project the image on the tissue through the scanning with the visible light.
    Type: Application
    Filed: December 2, 2016
    Publication date: March 23, 2017
    Applicant: NIKON CORPORATION
    Inventor: Susumu MAKINOUCHI
  • Publication number: 20170082546
    Abstract: A super-resolution observation device includes an illumination optical system that focus a first illuminating light at optical frequency ?1 and a second illuminating light at optical frequency ?2 on a region of an observation object plane; a modulation unit that modulates a property of the first illuminating light heading toward the region at a modulation frequency fm; and an extraction unit that extracts a component at the optical frequency ?1 or ?2 from a light generated in the region according to the first illuminating light and the second illuminating light, the component of which the property changes at a frequency higher than the modulation frequency fm.
    Type: Application
    Filed: September 26, 2016
    Publication date: March 23, 2017
    Applicant: NIKON CORPORATION
    Inventors: Fumihiro DAKE, Hiroki YAZAWA
  • Publication number: 20170082545
    Abstract: A super-resolution observation device includes an illumination optical system collecting a first illuminating light having a first optical frequency co, on a first region of an observation object, collecting a second illuminating light having a second optical frequency ?2? on a second region partially overlapping the first region, and collecting a third illuminating light having a third optical frequency ?2 on a third region containing a non-overlap region which is a region of the first region and does not overlap the second region; and an extraction unit extracting a signal light generated in accordance with a change in an energy level of a substance in the non-overlap region from a light generated in all of the first region, the second region, and the third region.
    Type: Application
    Filed: September 26, 2016
    Publication date: March 23, 2017
    Applicant: NIKON CORPORATION
    Inventors: Fumihiro DAKE, Tomoko UJIKE, Hiroki YAZAWA
  • Patent number: 9599808
    Abstract: A microscope apparatus includes: a light source; an illumination optical system configured to illuminate a specimen with light from the light source, the illumination optical system having a spatial light modulation element capable of adjusting a light intensity distribution; an imaging optical system configured to image light from the specimen; a solid-state imaging device configured to generate an image of the specimen based on light from the imaging optical system; and a controller capable of adjusting the spatial light modulation element, the controller being configured to, based on a first image output from the solid-state imaging device when the specimen is illuminated with first illumination light, adjust the spatial light modulation element and illuminate the specimen with second illumination light.
    Type: Grant
    Filed: September 19, 2014
    Date of Patent: March 21, 2017
    Assignee: Nikon Corporation
    Inventor: Naoki Fukutake
  • Patent number: 9599907
    Abstract: An exposure apparatus where liquid supply operation and liquid recovery operation for forming a liquid immersion region are excellently performed to form the liquid immersion region in a desired condition, enabling high exposure accuracy and measurement accuracy to be achieved. An exposure apparatus (EX) is an apparatus that exposes a substrate (P) by emitting exposure light (EL) on the substrate (P) through liquid (LQ). The exposure apparatus has a liquid supply mechanism (10) having a supply opening (13) capable of supplying the liquid (LQ) in the direction substantially parallel to the surface of the substrate (P).
    Type: Grant
    Filed: June 12, 2013
    Date of Patent: March 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Hiroyuki Nagasaka, Hirotaka Kohno, Yasufumi Nishii
  • Patent number: 9599905
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Grant
    Filed: November 25, 2011
    Date of Patent: March 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
  • Patent number: 9599906
    Abstract: A method for driving a spatial light modulator includes setting a plurality of mirror elements in a first region into a state of phase 0, setting a plurality of optical elements in a second region adjacent in a Y-direction to the first region into a state of phase ?, and setting auxiliary pattern elements consisting of a plurality of mirror elements arranged at a pitch P over a resolution limit of a projection optical system in an X-direction in a boundary region extending in the X-direction between the first region and the second region, into the state of phase ?. In projecting a pattern onto an object with use of the spatial light modulator having the array of optical elements, the pattern can be formed in position accuracy or shape accuracy finer than the width of images of the optical elements.
    Type: Grant
    Filed: September 26, 2011
    Date of Patent: March 21, 2017
    Assignee: Nikon Corporation
    Inventor: Yoji Watanabe
  • Publication number: 20170075227
    Abstract: A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member having first reflective surfaces, and a light receiving system has a light receiving prism member having second reflective surfaces arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.
    Type: Application
    Filed: November 22, 2016
    Publication date: March 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yasuhiro HIDAKA, Tadashi NAGAYAMA
  • Publication number: 20170078612
    Abstract: The image recording apparatus according to the present invention is provided with a conversion device that converts an optical image of a subject to an electrical signal, a recording circuit that records the electrical signal achieved through the conversion device in a storage device as image data and a display control circuit that detects an available capacity at the storage device and the length of time that power supply by a source is possible and displays them on a display as available capacity information and remaining power supply time information. The available capacity information indicates the length of available recording time remaining at the available capacity that has been detected.
    Type: Application
    Filed: November 4, 2016
    Publication date: March 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Masahiro JUEN, Masaharu ITO, Hirotake NOZAKI, Masahide TANAKA, Kenji TOYODA
  • Publication number: 20170075235
    Abstract: An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the liquid, a driving apparatus configured to move the second member with respect to the first member; and a controller configured to control the driving apparatus. The controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows.
    Type: Application
    Filed: November 25, 2016
    Publication date: March 16, 2017
    Applicant: NIKON CORPORATION
    Inventor: Shinji SATO
  • Patent number: 9594313
    Abstract: In an exposure station, positional information of a holding member that holds a wafer is measured by a first measurement system including a measurement member, and in a measurement station positional information of the holding member that holds a wafer is measured by a second measurement system including another measurement member. An exposure apparatus has a third measurement system which can measure positional information of the holding member when the holding member is carried from the measurement station to the exposure station. A controller, coupled to the first and the second measurement systems, controls a movement of the holding member based on the positional information measured by the first measurement system in the exposure station and also controls a movement of the holding member based on the positional information measured by the second measurement system in the measurement station.
    Type: Grant
    Filed: October 17, 2014
    Date of Patent: March 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9594292
    Abstract: An electronic device includes a camera; an acceleration sensor that detects an acceleration applied to a housing; a posture determining unit that determines a posture of the housing based on a value detected by the acceleration sensor; and an activation control unit that activates the camera when the posture determining unit determines that the posture of the housing becomes an upright posture.
    Type: Grant
    Filed: February 7, 2014
    Date of Patent: March 14, 2017
    Assignee: NIKON CORPORATION
    Inventors: Takeshi Yagi, Mikiya Tanaka, Takayuki Sawajiri
  • Patent number: 9596407
    Abstract: An imaging device includes an imaging section, an image segmenting section, and a blur enhancement section. The imaging section images a field to generate photographic image data. The image segmenting section partitions an image of the photographic image data into a first region that is a main subject region and a second region where the main subject is not included. The blur detecting section detects degree of blur of an image of the second region of the image of the photographic image data. The blur enhancement section performs blur enhancement processing on the image of the second region to enlarge the degree of blur of the image after image processing in proportion to the magnitude of the detected degree of blur of the image.
    Type: Grant
    Filed: February 11, 2015
    Date of Patent: March 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Ikuya Saito
  • Patent number: 9594316
    Abstract: A surface position detecting apparatus includes a light projection system that projects a beam from an oblique direction onto a detection target surface, and a light reception system that receives a beam reflected on the detection target surface, said surface position detecting apparatus adapted to detect a surface position of the detection target surface based on an output from the light reception system. At least one of the light projection system and the light reception system includes a total reflection prism member including an internal reflection surface which totally reflects an incident beam. Upon detection of the surface position of the detection target surface, a refractive index of an optical material forming the total reflection prism member and an angle of incidence of the incident beam to the internal reflection surface of the total reflection prism member are set so as to satisfy a predetermined relation.
    Type: Grant
    Filed: March 21, 2013
    Date of Patent: March 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yasuhiro Hidaka
  • Publication number: 20170068176
    Abstract: A device manufacturing method forms a liquid immersion area under a projection system via which an exposure light is projected, while supplying a liquid via a liquid supply inlet of a liquid retaining member and collecting the supplied liquid along with a gas via a liquid recovery outlet of the liquid retaining member. The liquid retaining member surrounds a tip portion of the projection system, which has a last optical element having a surface. The liquid retaining member has a surface opposite to the surface of the last optical element with a gap between the surfaces. A substrate is exposed with the exposure light through the liquid of the liquid immersion area, while moving the substrate below and relative to the projection system and the liquid retaining member. One of the liquid and the gas is separated from the other which have been collected via the liquid recovery outlet.
    Type: Application
    Filed: November 17, 2016
    Publication date: March 9, 2017
    Applicants: NIKON CORPORATION, NIKON ENGINEERING CO., LTD.
    Inventors: Hiroyuki NAGASAKA, Takeshi OKUYAMA
  • Publication number: 20170069677
    Abstract: A detector comprises a plurality of photoelectric converters to output an electrical signal corresponding to an incident light, and a plurality of filter circuits provided corresponding to each of the plurality of photoelectric converters or to each of a plurality of element groups respectively including a predetermined number of the photoelectric converters of the plurality of photoelectric converters, the plurality of filter circuits attenuating a signal having a predetermined frequency from the electrical signal output from the plurality of photoelectric converters, In the above-described detector, the plurality of photoelectric converters may be provided in a first substrate, and the plurality of filter circuits may be provided in a second substrate laminated on the first substrate.
    Type: Application
    Filed: September 20, 2016
    Publication date: March 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Osamu SARUWATARI, Shigeru AOKI, Kazuya OKAMOTO, Isao SUGAYA, Masashi OKADA, Hiroshi OHKI
  • Patent number: 9586867
    Abstract: CaF2 translucent ceramics includes at least two rare earth elements selected from a group consisting of La, Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb, and Lu.
    Type: Grant
    Filed: May 5, 2014
    Date of Patent: March 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hitoshi Ishizawa
  • Patent number: 9587977
    Abstract: Boresight and other pointing errors are detected based on a monitor beam formed by diverting a portion of a probe beam. The monitor beam is directed to a position sensitive photodetector, and the optical power received at the position sensitive photodetector is used to estimate or correct such pointing errors.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: March 7, 2017
    Assignee: Nikon Corporation
    Inventors: Daniel G. Smith, W. Thomas Novak
  • Patent number: 9588322
    Abstract: Provided is a zoom lens (ZL) including, in order from an object along an optical axis: a first lens group (G1) having negative refractive power; a second lens group (G2) having positive refractive power, and a third lens group (G3) having a positive refractive power. At least the first lens group (G1) and the second lens group (G2) are moved along the optical axis upon zooming from a wide-angle end state to a telephoto end state, so that the distance between the first lens group (G1) and the second lens group (G2) decreases, and the distance between the second lens group (G2) and the third lens group (G3) increases, the first lens (G2) includes one positive lens, and the second lens (G2) includes one negative lens.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: March 7, 2017
    Assignee: Nikon Corporation
    Inventor: Toshiyuki Shimada
  • Patent number: 9588432
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, a deflecting member arranged in the optical path on an incidence side of the optical integrator, which deflects the illumination light, a lens element arranged in the optical path between the deflecting member and the optical integrator, which distributes the illumination light in a region, on a pupil plane of the illumination optical apparatus, away from an optical axis of the illumination optical apparatus, and a polarization member arranged in the optical path between the lens element and the optical integrator, which changes a polarization state of the illumination light so that a polarization direction of the illumination light in the region is substantially coincident with a circumferential direction about the optical axis.
    Type: Grant
    Filed: May 9, 2013
    Date of Patent: March 7, 2017
    Assignee: NIKON CORPORATION
    Inventors: Takehito Kudo, Shigeru Hirukawa
  • Patent number: 9588436
    Abstract: An exposure apparatus (EX) exposes a substrate (P) by irradiating exposure light (EL) on the substrate (P) via a projection optical system (PL) and a liquid (LQ) supplied from a liquid supply mechanism (10). The exposure apparatus (EX) has a pressure adjustment mechanism (90) for adjusting pressure of the liquid (LQ) supplied from the liquid supply mechanism (10). A liquid immersion area is satisfactorily formed to obtain high exposure accuracy and measurement accuracy.
    Type: Grant
    Filed: October 12, 2011
    Date of Patent: March 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hiroyuki Nagasaka
  • Patent number: 9588443
    Abstract: A carrier apparatus positions a chuck member above a wafer mounted on a fine movement stage, relatively moves the chuck member and the fine movement stage in a vertical direction, makes the chuck member approach a position which is a predetermined distance away from the upper surface of the wafer, makes the chuck member hold the wafer from above in a non-contact manner, and makes the chuck member holding the wafer and the fine movement stage move apart within a predetermined plane after making the chuck member holding the wafer and the fine movement stage move apart in the vertical direction. Further, the carrier apparatus loads the wafer held in a non-contact manner from above by the chuck member on the fine movement stage.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: March 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9589328
    Abstract: A group point spread function (238) for a blurry image (18) can be determined by dividing the blurry image (18) into a plurality of image regions (232), estimating a region point spread function (234) for at least two of the image regions (232); and utilizing at least two of the region point spread functions (234) to determine the group point spread function (238). The group point spread function (238) can be determined by the decomposition of the estimated region point spread functions (234) into some basis function, and subsequently determining a representative coefficient from the basis functions of the region point spread functions (234) to generate the group point spread function (238).
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: March 7, 2017
    Assignee: Nikon Corporation
    Inventors: Gazi Ali, Li Hong, Radka Tezaur, Mark Takita
  • Publication number: 20170060002
    Abstract: An exposure apparatus that exposes a substrate by exposure light via liquid between an optical member and the substrate includes: a liquid immersion member that forms an immersion liquid space on an object and comprises first and second members, the first member disposed at at least a portion of surrounding of the optical member, the second member disposed at at least a portion of surrounding of an optical path of the exposure light below of the first member, being movable with respect to the first member and comprising a second upper surface and a second lower surface, the second upper surface being opposite to a first lower surface of the first member via a gap, the second lower surface being capable of being opposite to the object, the object being movable below the optical member; and a vibration isolator that suppresses vibration of the first member.
    Type: Application
    Filed: November 14, 2016
    Publication date: March 2, 2017
    Applicant: NIKON CORPORATION
    Inventor: Shinji SATO
  • Patent number: 9581913
    Abstract: An exposure apparatus exposes a substrate via a projection optical system and liquid. The exposure apparatus includes a first pipe section that flows liquid supplied from a liquid supplying device, and a second pipe section that is disposed at an outside of the first pipe section so as to surround the first pipe section and flows liquid supplied from the liquid supplying device.
    Type: Grant
    Filed: July 24, 2014
    Date of Patent: February 28, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yoshitomo Nagahashi
  • Patent number: 9580331
    Abstract: A CaF2 polycrystalline body which is a polycrystalline body constituted of CaF2 and of which an average grain size of crystalline grains is 200 ?m or more, and a method for producing a CaF2 polycrystalline body, the method including a process of introducing a compact which is obtained by using a CaF2 powder raw material into a vacuum sintering furnace and sintering at a temperature of not higher than 1400° C. for six hours or more, thereby obtaining the CaF2 polycrystalline body.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: February 28, 2017
    Assignee: NIKON CORPORATION
    Inventors: Seishi Fujiwara, Naoyasu Uehara, Yuka Narukawa
  • Patent number: 9581811
    Abstract: Improvement of pupil luminance distribution includes: a fifth process in which an index value obtained from the illumination pupil, using evaluation method of a first process to fourth process; a sixth process wherein a unit change amount of the index value in the discrete data acquired in the previous process is acquired for each unit pupil area; a seventh process wherein discrete data modulated by an improving technique using the unit change amount so that the index value nears a target index value is acquired; and an eighth process wherein an index value obtained corresponding to the modulated discrete data in the seventh process is acquired, using the evaluation method of the first process to the fourth process, and by repeatedly performing the sixth process to eighth process so an error of the index value obtained corresponding to the modulated discrete data falls within permissible range.
    Type: Grant
    Filed: April 30, 2013
    Date of Patent: February 28, 2017
    Assignee: NIKON CORPORATION
    Inventor: Naonori Kita
  • Patent number: 9581818
    Abstract: Provided is a head-mounted display optical system (LS) having: an optical deflection element (M1); a first lens group (G1); a second lens group (G2); and an optical reflection element (M2). The head-mounted display optical system is configured such that light from a light source, which is reflected on a reflection surface (M2r) of the optical reflection element (M2) and reaches a drawing surface (I) assumed to be located on a retina when a user wears the head-mounted display, moves on the drawing surface (I) according to the change of a travelling direction of the light caused by the optical deflection element (M1), and an image is drawn on the drawing surface (I). The first lens group (G1) includes a free-shaped surface lens having a free-shaped surface which is rotationally asymmetrical with respect to a reference axis, and the reflection surface (M2r) of the optical reflection element (M2) is formed to be rotationally asymmetrical with respect to a reference axis.
    Type: Grant
    Filed: July 23, 2013
    Date of Patent: February 28, 2017
    Assignee: Nikon Corporation
    Inventor: Kenzaburo Suzuki
  • Publication number: 20170052290
    Abstract: A multilayer film reflective mirror for reflecting incident light is provided with: a substrate; a first multilayer film formed by alternately layering a Mo layer and a Si layer on a surface of the substrate; a detachable layer detachable from the first multilayer film; and a second multilayer film formed by alternately layering the Mo layer and the Si layer on the detachable layer, and the second multilayer film is removable by detaching the detachable layer by dissolving it with acid. When reflectance of the multilayer film reflective mirror is reduced, the reflectance can be increased by a simple operation.
    Type: Application
    Filed: August 23, 2016
    Publication date: February 23, 2017
    Applicant: NIKON CORPORATION
    Inventor: Katsuhiko MURAKAMI
  • Publication number: 20170054932
    Abstract: A first mobile electronic device includes an image sensor that outputs image data from an image of a subject received through a lens of the first mobile electronic device, a first communication circuit and a second communication circuit. The first communication circuit transmits the image data to a server. The second communication circuit is different from the first communication circuit and transmits information by which to obtain the image data from the server to a second mobile electronic device so that the image data can be obtained from the server by the second mobile electronic device using the information.
    Type: Application
    Filed: November 3, 2016
    Publication date: February 23, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yosuke KUSAKA, Shoei NAKAMURA
  • Publication number: 20170054913
    Abstract: For example, in an operation of determining a composition while zooming in a plurality of areas and confirming positional relationship of mutual images such as, for example, a case of horizontal leveling and the like performed when a construction is photographed, it has been necessary to perform a complicated operation of repeating designation and release of zoom-in areas among the plurality of the areas. Therefore, an imaging apparatus is provided, the imaging apparatus being provided with a display unit that displays an image, and a display control unit that zooms in and displays a plurality of partial areas within the image, and also displays on the display unit positional information representing positions of the plurality of partial areas within the image.
    Type: Application
    Filed: August 26, 2016
    Publication date: February 23, 2017
    Applicant: NIKON CORPORATION
    Inventor: Shinya HARA
  • Patent number: 9577550
    Abstract: Provided is a vibration actuator including: an electromechanical transduction member that transduces electric power to a mechanical vibration; a transmission member that transmits the vibration from the electromechanical transduction member as a driving force; and an abutting portion that abuts on the transmission member and moves relative to the transmission member in response to the driving force. One of the transmission member and the abutting portion includes pores in its surface contacting the abutting portion or the transmission member at an area occupancy of 2% or higher. In this vibration actuator, the average area of the pores may be 3 ?m2 or larger. The other of the transmission member and the abutting portion may include iron in its surface contacting the one.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: February 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Makoto Nakazumi, Masaaki Tanabe
  • Patent number: 9575417
    Abstract: An exposure apparatus which transfers a pattern formed on a mask onto a photosensitive substrate placed in proximity to the mask, the apparatus including an illumination optical device which illuminates the mask with an energy beam, a mask holding device which holds a periphery area of a pattern area of the mask from above, and makes a force at least within a plane parallel to a predetermined plane act on the mask and a substrate holding device which moves along the predetermined plane holding the substrate.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: February 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9578186
    Abstract: A first mobile electronic device includes a camera that has a lens and that outputs image data from a subject; a first communication circuit that transmits the image data to a server; and a second communication circuit different from the first communication circuit and that transmits information related to the server to a second mobile electronic device.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: February 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yosuke Kusaka
  • Publication number: 20170045829
    Abstract: An exposure apparatus has a substrate holding member, a first supporting member, a second supporting member, and a driving system. The first supporting member supports the substrate holding member from below. The second supporting member supports the first supporting member from below such that the first supporting member and the second supporting member are capable of moving relative to each other. The driving system moves the substrate holding member, the first supporting member and the second supporting member. The driving system includes a first driving device and a second driving device, the first driving device moving the substrate holding member and the first supporting member in a direction along a predetermined axis, and the second driving device moving the second supporting member in the direction along the predetermined axis.
    Type: Application
    Filed: October 27, 2016
    Publication date: February 16, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yasuo AOKI
  • Publication number: 20170045543
    Abstract: There is a possibility that an arrangement of a cleaning device and a drying device may result in an inefficient usage of a space for an installation. A cleaning and drying apparatus 30 for a plate including a biochip is provided with: a cleaning device 310 that is configured to clean the plate 60; and a drying device 320 that is configured to dry the plate 60, the drying device 320 is arranged above the cleaning device 310.
    Type: Application
    Filed: November 25, 2014
    Publication date: February 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Tadao ISAMI, Muneki HAMASHIMA, Takehiko UEDA
  • Patent number: 9568844
    Abstract: A drive unit drives a wafer table in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer table in the Y-axis direction and based on known correction information in accordance with position information of the wafer table in a non-measurement direction (e.g. Z, ?z and ?x directions) that is measured by an interferometer at the time of the measurement by the encoder. That is, the wafer table (a movable body) is driven in the Y-axis direction based on the measurement value of the encoder that has been corrected by correction information for correcting a measurement error of the encoder that is caused by a relative displacement of a head and a scale in the non-measurement direction.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9568834
    Abstract: A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: February 14, 2017
    Assignee: Nikon Corporation
    Inventor: Yasuhiro Omura
  • Patent number: 9568826
    Abstract: A mark forming method includes: a step of forming, on a device layer of a wafer, an intermediate layer to which a polymer layer containing a block copolymer is adherable, the device layer including a shot area and a scribe line area; a step of removing a portion, of the intermediate layer, formed in the scribe line area; a step of exposing an image of a mark on the scribe line area and forming, based on the image of the mark, a mark including recessed portion; and a step of applying the polymer layer containing the block copolymer on the device layer of the wafer. When a circuit pattern is forced by using the self-assembly of the block copolymer, it is possible to form the mark simultaneously with the formation of the circuit pattern.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Tomoharu Fujiwara
  • Patent number: 9567560
    Abstract: An incubated state evaluating device includes an image reading unit, a feature value calculating unit, a frequency distribution calculating unit, and an evaluation information generating unit. The image reading unit reads a plurality of images in which a plurality of cells incubated in an incubation container are image-captured in time series. The feature value calculating unit obtains each of feature values representing morphological features of cells from the images for each of the cells included in the images. The frequency distribution calculating unit obtains each of frequency distributions of the feature values corresponding to the respective images. The evaluation information generating unit generates evaluation information evaluating an incubated state of cells in the incubation container based on a variation of the frequency distributions between images.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: February 14, 2017
    Assignees: NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, NIKON CORPORATION
    Inventors: Hiroyuki Honda, Ryuji Kato, Wakana Yamamoto
  • Patent number: 9571767
    Abstract: When the amplification ratio is low and strong incident light causes a large charge, the signal retrieved from regions where the incident light is weak is also weak, but when the amplification ratio is high in regions where the incident light is weak, the signal retrieved from regions where the incident light is strong becomes saturated. Therefore, the dynamic range of the imaging unit is narrow. Provided is an imaging unit comprising an imaging section that includes a first group having one or more pixels and a second group having one or more pixels different from those of the first group; and a control section that, while a single charge accumulation is performed in the first group, causes pixel signals to be output by performing charge accumulation in the second group a number of times differing from a number of times charge accumulation is performed in the first group.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shiro Tsunai
  • Patent number: 9568828
    Abstract: A liquid immersion member including first and second members forming the immersion space; first member having a first lower surface disposed at a portion of the optical member surrounding, second member having a second upper surface opposite to the first lower surface via a gap and a second lower surface opposing the substrate and second member disposed at a portion of exposure light optical path surrounding; driving apparatus to move the second member with respect to the first; controlling the driving apparatus so the second member's operation in the substrate first operation movement is between exposure termination and start of a first and second shot regions differently from a second member's operation in the substrate second movement period which is between exposure termination and start of a third and fourth shot regions; first and second shot regions are in the same row contrary to third and fourth shot regions.
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Patent number: 9568338
    Abstract: An encoder includes a positional information generation unit configured to generate first positional information based on a detected signal which is output by a sensor unit, and an IIR filter unit configured to output second positional information obtained by performing filtering on the first positional information. In the IIR filter unit, a counter unit stores a predetermined high-order digit of the first positional information as a count value, and an input unit subtracts the count value from the first positional information to thereby generate input information. A computation unit generates an internal computation result based on delay information which is an internal computation result stored in a delay information storage unit, input information, and a predetermined filter coefficient, and generates output information on which filtering is performed. An output unit adds the count value and the output information to thereby generate second positional information.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: February 14, 2017
    Assignee: NIKON CORPORATION
    Inventor: Kiichiro Yamanobe
  • Patent number: D779349
    Type: Grant
    Filed: September 2, 2015
    Date of Patent: February 21, 2017
    Assignee: Nikon Vision Co., Ltd.
    Inventors: Yuki Kobayashi, Kenji Abe, Tomohiro Hoshi
  • Patent number: D779574
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: February 21, 2017
    Assignee: Nikon Corporation
    Inventor: Mitsuo Nakajima
  • Patent number: D779575
    Type: Grant
    Filed: September 2, 2015
    Date of Patent: February 21, 2017
    Assignee: Nikon Corporation
    Inventor: Tatsuya Kobayashi
  • Patent number: D779981
    Type: Grant
    Filed: September 2, 2015
    Date of Patent: February 28, 2017
    Assignee: Nikon Vision Co., Ltd.
    Inventors: Yuki Kobayashi, Kenji Abe, Tomohiro Hoshi
  • Patent number: D780818
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: March 7, 2017
    Assignee: Nikon Corporation
    Inventor: Tatsuya Kobayashi
  • Patent number: D780819
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: March 7, 2017
    Assignee: Nikon Corporation
    Inventors: Sumito Watanabe, Tatsuya Kobayashi