Mobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool
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The broken lines in the drawings illustrate the display screen and portions of the graphical user interface and form no part of the claimed design.
Claims
The ornamental design for a mobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool, as shown and described.
7120511 | October 10, 2006 | Tanzer et al. |
D578132 | October 7, 2008 | Lee |
D589527 | March 31, 2009 | Shamma |
D593114 | May 26, 2009 | Vakkalanka |
D594019 | June 9, 2009 | Ball |
D622730 | August 31, 2010 | Krum |
D636779 | April 26, 2011 | Boush et al. |
8209223 | June 26, 2012 | Fink |
8239359 | August 7, 2012 | Barsook |
D667835 | September 25, 2012 | Chaudri |
D669090 | October 16, 2012 | Rosen |
8302020 | October 30, 2012 | Louch |
D673165 | December 25, 2012 | Ospina Gonzalez |
D678309 | March 19, 2013 | Kobayashi |
D684160 | June 11, 2013 | Truelove |
D684161 | June 11, 2013 | Truelove |
D684164 | June 11, 2013 | Friedlander |
D685811 | July 9, 2013 | Shia et al. |
D687458 | August 6, 2013 | Philopoulos |
D688259 | August 20, 2013 | Pearcy et al. |
D688685 | August 27, 2013 | Rhee |
D689086 | September 3, 2013 | Philopoulos |
D690312 | September 24, 2013 | Cherian et al. |
D691160 | October 8, 2013 | Schupp et al. |
D693361 | November 12, 2013 | Arnold et al. |
D696684 | December 31, 2013 | Yuk |
D696688 | December 31, 2013 | Yuk |
D700194 | February 25, 2014 | Kim |
8667540 | March 4, 2014 | Hoshall |
8875126 | October 28, 2014 | Feeser |
D719968 | December 23, 2014 | Ebtekar |
9032296 | May 12, 2015 | Jeffs |
D732563 | June 23, 2015 | Kitch |
D732564 | June 23, 2015 | Kitch |
D733738 | July 7, 2015 | Omiya |
D734353 | July 14, 2015 | Soojun |
D735222 | July 28, 2015 | Ebtekar |
D737840 | September 1, 2015 | Omiya |
9129087 | September 8, 2015 | Grab |
D741351 | October 20, 2015 | Kito |
D742908 | November 10, 2015 | Lee |
D751592 | March 15, 2016 | Link |
9311053 | April 12, 2016 | Baughman |
D757060 | May 24, 2016 | Lee |
D757077 | May 24, 2016 | Blank |
D760756 | July 5, 2016 | Koeten |
D762232 | July 26, 2016 | Howard |
D762234 | July 26, 2016 | Li |
20020183880 | December 5, 2002 | Arima et al. |
20050004780 | January 6, 2005 | Lin et al. |
20060259198 | November 16, 2006 | Brcka et al. |
20080098333 | April 24, 2008 | Champion |
20080184117 | July 31, 2008 | Alsbury |
20090228408 | September 10, 2009 | Kaushal et al. |
20100153848 | June 17, 2010 | Saha |
20120036552 | February 9, 2012 | Dare |
20120239317 | September 20, 2012 | Lin |
20130061267 | March 7, 2013 | Cansino |
20130100475 | April 25, 2013 | Kuroyanagi |
20130104042 | April 25, 2013 | Meaney |
20130174223 | July 4, 2013 | Dykeman |
20140033256 | January 30, 2014 | Cox |
20140115470 | April 24, 2014 | Meaney |
20140115471 | April 24, 2014 | Demkin |
20140173517 | June 19, 2014 | Chaudhri |
0020843010028 | November 2012 | EM |
0013536010046 | February 2013 | EM |
2005-527986 | September 2005 | JP |
2016/057551 | April 2016 | WO |
2016/057565 | April 2016 | WO |
- U.S. Appl. No. 29/504,989, “Mobile device graphical user interface design for supporting service maintenance and tracking activities in semiconductor tool,” Vincent Wong et al., filed Oct. 10, 2014.
- U.S. Appl. No. 14/876,203, “Mobile device user interface for supporting service maintenance and tracking activities in semiconductor tool,” Simon Gosselin et al., filed Oct. 6, 2015.
- U.S. Appl. No. 14/876,213, “Mobile connectivity and control of semiconductor manufacturing equipment,” Roger Patrick et al., filed Oct. 6, 2015.
- TW patent application No. 104301852, Office Action mailed Nov. 13, 2015.
- TW patent application No. 104301861, Office Action mailed Jan. 21, 2016.
- KR patent application No. 30-2015-0018420, Office Action mailed Nov. 12, 2015.
- KR patent application No. 30-2015-0018445, Office Action mailed Nov. 12, 2015.
- WO patent application No. PCT/US2015/054306, International Search Report and Written Opinion mailed Mar. 18, 2016.
- WO patent application No. PCT/US2015/054290, International Search Report and Written Opinion mailed Mar. 18, 2016.
- KR patent application No. 30-2015-0018420, Decision of Grant of Design mailed Mar. 2, 2016.
- KR patent application No. 30-2015-0018445, Decision of Grant of Design mailed Mar. 2, 2016.
- TW patent application No. 104301852, Notice of Allowance mailed Apr. 19, 2016.
- TW patent application No. 105300569, Notice of Allowance mailed Apr. 18, 2016.
Type: Grant
Filed: Oct 10, 2014
Date of Patent: May 30, 2017
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventors: Vincent Wong (Pleasanton, CA), Ronald Ramnarine (Fremont, CA), Robert Housley (Los Gatos, CA), Sandy Shih-Hsun Chao (Fremont, CA), Mukesh Shah (Fremont, CA), Robert Ahrens (San Jose, CA)
Primary Examiner: Kevin Rudzinski
Application Number: 29/504,990