Showerhead for a semiconductor processing chamber

- APPLIED MATERIALS, INC.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is an isometric top view of a showerhead for a semiconductor processing chamber showing my new design.

FIG. 2 is an isometric bottom view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a side elevational view thereof, the other side elevational views being identical.

FIG. 6 is a cross-sectional view thereof taken along lines 6-6 of FIG. 3.

FIG. 7 is an enlarged view of a portion of FIG. 6; and,

FIG. 8 is an enlarged view of a portion of FIG. 1.

Claims

The ornamental design for a showerhead for a semiconductor processing chamber, as shown and described.

Referenced Cited
U.S. Patent Documents
6086677 July 11, 2000 Umotoy et al.
D566228 April 8, 2008 Neagoe
D593640 June 2, 2009 Schoenherr
7658800 February 9, 2010 Chen
D639385 June 7, 2011 Flowers
D641829 July 19, 2011 Angelov
D694359 November 26, 2013 Schoenherr
D707328 June 17, 2014 Schoenherr
D733257 June 30, 2015 Schoenherr
D736348 August 11, 2015 Tan
D751176 March 8, 2016 Schoenherr
D752708 March 29, 2016 Chung
D757893 May 31, 2016 Walker
9343307 May 17, 2016 Anikitchev
9353439 May 31, 2016 Kashyap
9464353 October 11, 2016 Park
9484190 November 1, 2016 Glukhoy
20030140851 July 31, 2003 Janakiraman et al.
20050173569 August 11, 2005 Noorbakhsh et al.
20060021703 February 2, 2006 Umotoy et al.
20060234514 October 19, 2006 Gianoulakis et al.
20090179085 July 16, 2009 Carducci et al.
Patent History
Patent number: D794753
Type: Grant
Filed: Apr 8, 2016
Date of Patent: Aug 15, 2017
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventor: Aaron Miller (Sunnyvale, CA)
Primary Examiner: Robin V Webster
Application Number: 29/560,672