Gap Maintenance Or Defined Tool-workpiece Gap Patents (Class 205/652)
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Patent number: 10821521Abstract: Manufacturing methods are disclosed that can electropolish a metal surface by disposing an electrode over the metal surface, and a permeable dielectric spacer between the metal surface and the electrode. An electrolyte is infiltrated into the permeable dielectric spacer, and an electrical voltage differential is applied to the electrode and the metal surface.Type: GrantFiled: April 11, 2017Date of Patent: November 3, 2020Assignee: HAMILTON SUNSTRAND CORPORATIONInventors: Mark R. Jaworowski, Sergey Mironets, Gary M. Lomasney, Weilong Zhang
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Patent number: 10487415Abstract: There is provided a method of adjusting a plating apparatus and a measuring apparatus that can obtain position adjustment amounts/a position adjustment amount of a substrate holder, an anode holder, a regulation plate, and/or a paddle without carrying out plating treatment. There is provided the method of adjusting the plating apparatus that has a plating bath configured to be able to hold the substrate holder, the anode holder, and an electric field adjusting plate.Type: GrantFiled: August 31, 2018Date of Patent: November 26, 2019Assignee: EBARA CORPORATIONInventors: Jumpei Fujikata, Masashi Shimoyama, Yuji Araki, Mizuki Nagai
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Patent number: 10130957Abstract: A flow element, for a separation device, of simple construction and stably connectable to similarly constructed flow elements, includes a disc-shaped base body including a first side and a second side opposite the first side, wherein the first and/or second side includes a plurality of channels through which, in the mounted condition of the flow element in the separation device, a fluid is guidable outwards from a central opening in the base body, which is arranged centrally in the disc-shaped base body, or from the outside towards the centrally arranged central opening, wherein the base body includes a plurality of receiving portions at least on the first side and a plurality of projections at least on the second side, wherein, in the mounted condition of the flow element, the projections are engageable with the receiving portions of a further, similarly constructed flow element that is placed on the flow element.Type: GrantFiled: October 14, 2015Date of Patent: November 20, 2018Assignee: ElringKlinger AGInventors: Simon Buck, Stefan Dwenger
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Patent number: 9914138Abstract: A separation disc for a centrifugal separator and a method for manufacturing the separation disc are disclosed. The separation disc is of metal material and adapted to be compressed in a stack of separation discs inside a centrifugal rotor for separating a liquid mixture. The separation disc has a truncated conical shape with an inner surface and an outer surface and a plurality of spacing members extending a certain height above at least one of the inner surface and the outer surface for providing interspaces between mutually adjacent separation discs in the stack. The spacing members are of such small size that each one of them has a width which is less than 2 mm along the surface of the separation disc. The surface of the separation disc is configured with a distribution pattern of the small-sized spacing members, in such a way as to provide equidistant interspaces in the compressed disc stack.Type: GrantFiled: August 7, 2012Date of Patent: March 13, 2018Assignee: ALFA LAVAL CORPORATE ABInventors: Sven-Åke Nilsson, Peter Thorwid
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Patent number: 9496444Abstract: The invention is related to a method for forming dendritic silver with periodic structure as light-trapping layer, includes these steps: form a photoresist layer on a conductive substrate, and at least two coherent light beams is provided in using a laser interference lithography apparatus, to form a plurality of particular patterns respectively on the setting-exposure positions of the conductive substrate in sequence till the particular periods pattern formed. Thereafter, form the dendritic silver nanostructure with period pattern on the conductive substrate via electrochemical process, wherein operating voltage is 2V or higher, and electrochemical reaction time is 10 sec or higher.Type: GrantFiled: February 3, 2015Date of Patent: November 15, 2016Assignee: INSTITUTE OF NUCLEAR ENERGY RESEARCH ATOMIC ENERGY COUNCIL, EXECUTIVE YUANInventors: Der-Jun Jan, Shih-Shou Lo, Wei-Hsun Lai, Wei-Hsiu Hsu
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Patent number: 9333337Abstract: A method of fabricating electrical feedthroughs coats of a plurality of electrically conductive wires with an electrically insulating material and bundles the coated wires together in a substantially parallel arrangement. The bundled coated wires are secured to each other by joining the electrically insulating material of adjacent wires together to form a monolithic block which is then cut transverse to the wires to produce a block section having opposing first and second sides with a plurality of electrically conductive feedthroughs extending between them.Type: GrantFiled: May 16, 2012Date of Patent: May 10, 2016Assignee: Lawrence Livermore National Security, LLCInventors: Kedar G. Shah, William J. Benett, Satinderpall S. Pannu
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Publication number: 20150132598Abstract: Manufacturing an exterior decor panel for a home appliance includes laminating a photosensitive dry film on a front surface of a metal sheet, the photosensitive dry film having a higher etch resistance than the metal sheet against an electrolytic solution, photo-masking the photosensitive dry film attached to the metal sheet to create a pattern having a minimum width of 0.1 mm in the photosensitive dry film to thereby expose the front surface of the metal sheet corresponding to the pattern in the photosensitive film, electrolytic-polishing the photo-masked metal sheet by dipping the photo-masked metal sheet in an electrolytic bath to allow the electrolytic solution to contact the exposed front surface of the metal sheet and form the pattern in the front surface of the metal sheet, and performing post-treatment on the metal sheet, the post-treatment including washing and removing the photosensitive dry film.Type: ApplicationFiled: November 5, 2014Publication date: May 14, 2015Inventors: Wonseok CHOI, Taihun LIM, Seonkyu KIM, Bonghyang KIM
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Patent number: 9023188Abstract: A method of producing a component includes the steps of: providing a workpiece generated by hot isostatic pressing a powder metal form; and electropolishing a surface of the workpiece to remove a substantially uniform surface layer of the workpiece to produce the component. Following the electropolishing step, the component has substantially the same shape as the workpiece produced by the hot isostatic pressing step.Type: GrantFiled: December 13, 2012Date of Patent: May 5, 2015Assignee: Rolls-Royce plcInventor: Paul Edward Williams
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Patent number: 8597489Abstract: Conventional electrochemical machining process requires fixed shaped tool cathodes, which makes retooling time consuming and expensive. Flexible tool cathodes include elastically deformable cathodes that can deform in two or three dimensions and can adapt to the contour of the workpiece while the workpiece is moving relative to the flexible tool cathode. That is, the flexible tool cathode can perform tracing. Certain flexible tool cathodes can be also used for special configurations such corners and edges. The flexible tool cathodes can be used to polish, finish, or shape the workpiece through electrochemical processes.Type: GrantFiled: July 8, 2010Date of Patent: December 3, 2013Assignee: General Electric CompanyInventors: Yuefeng Luo, William Edward Adis, Laurence Scott Duclos
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Publication number: 20130180866Abstract: A method for cutting by a traveling wire, wherein the wire traveling direction of the wire and/or the workpiece are/is inclined alternately in relation to one another into at least two different specific angular positions in the cutting direction, with the result that the effective cutting height (s) on the workpiece (2) becomes smaller than the entire workpiece height.Type: ApplicationFiled: December 26, 2012Publication date: July 18, 2013Applicant: Agie Charmilles SAInventor: Agie Charmilles SA
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Patent number: 8455783Abstract: A process for preparing the cutting edge of a cutting tool having a rake face and a clearance face. The process comprises the elimination of material from the cutting edge by providing a series of rapidly recurring electrical spark discharges in a gap located between the tool edge and a counterface. The spark discharges vaporize and melt the tool edge to form a desired radius.Type: GrantFiled: August 27, 2009Date of Patent: June 4, 2013Assignee: McMaster UniversityInventor: Philip Koshy
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Patent number: 8101060Abstract: Methods and apparatuses for removing material from a microfeature workpiece are disclosed. In one embodiment, the microfeature workpiece is contacted with a polishing surface of a polishing medium, and is placed in electrical communication with first and second electrodes, at least one of which is spaced apart from the workpiece. A polishing liquid is disposed between the polishing surface and the workpiece and at least one of the workpiece and the polishing surface is moved relative to the other. Material is removed from the microfeature workpiece and at least a portion of the polishing liquid is passed through at least one recess in the polishing surface so that a gap in the polishing liquid is located between the microfeature workpiece and the surface of the recess facing toward the microfeature workpiece.Type: GrantFiled: January 14, 2010Date of Patent: January 24, 2012Assignee: Round Rock Research, LLCInventor: Whonchee Lee
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Patent number: 8052861Abstract: The present invention relates to a method and apparatus for partial etching or pattern etching using an electrolysis reaction, wherein, conventionally, there was the problem that an etching line could not be finely formed on a cell edge because of apparatus problems concerning alignment accuracy. The present invention provides a method and apparatus with which fine line etching is possible and which can form a line on a cell edge. Provided is a an electrolytic etching method of a substrate which is formed having a subject etching layer on a surface, having the steps of providing a fixed gap from a substrate end surface which is external to an end surface of the substrate for placing a working part of a working electrode and passing current between the substrate and the working electrode.Type: GrantFiled: February 17, 2010Date of Patent: November 8, 2011Assignee: Canon Kabushiki KaishaInventors: Tsutomu Murakami, Koji Tsuzuki
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Patent number: 7897029Abstract: The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate.Type: GrantFiled: May 13, 2008Date of Patent: March 1, 2011Assignee: Air Products and Chemicals, Inc.Inventors: Chun Christine Dong, Richard E. Patrick, Gregory Khosrov Arslanian
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Patent number: 7785452Abstract: An apparatus and method for finishing an electrically conductive part through electrochemistry is disclosed. The cathode electrode is configured so as to fit simultaneously in one or more windows or pockets or in a combination thereof. In one embodiment of the present invention a disc-covering cathode electrode is provided that can simultaneously finish all of the windows and pockets using an electrolyte.Type: GrantFiled: March 16, 2006Date of Patent: August 31, 2010Assignee: Super Alloy Industrial Co., Ltd.Inventor: Daniel C. Wei
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Publication number: 20100140104Abstract: The present invention relates to a method and apparatus for partial etching or pattern etching using an electrolysis reaction, wherein, conventionally, there was the problem that an etching line could not be finely formed on a cell edge because of apparatus problems concerning alignment accuracy. The present invention provides a method and apparatus with which fine line etching is possible and which can form a line on a cell edge. Provided is a an electrolytic etching method of a substrate which is formed having a subject etching layer on a surface, having the steps of providing a fixed gap from a substrate end surface which is external to an end surface of the substrate for placing a working part of a working electrode and passing current between the substrate and the working electrode.Type: ApplicationFiled: February 17, 2010Publication date: June 10, 2010Applicant: CANON KABUSHIKI KAISHAInventors: Tsutomu Murakami, Koji Tsuzuki
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Patent number: 7691241Abstract: The present invention relates to a method and apparatus for partial etching or pattern etching using an electrolysis reaction, wherein, conventionally, there was the problem that an etching line could not be finely formed on a cell edge because of apparatus problems concerning alignment accuracy. The present invention provides a method and apparatus with which fine line etching is possible and which can form a line on a cell edge. Provided is a an electrolytic etching method of a substrate which is formed having a subject etching layer on a surface, having the steps of providing a fixed gap from a substrate end surface which is external to an end surface of the substrate for placing a working part of a working electrode and passing current between the substrate and the working electrode.Type: GrantFiled: November 30, 2004Date of Patent: April 6, 2010Assignee: Canon Kabushiki KaishaInventors: Tsutomu Murakami, Koji Tsuzuki
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Patent number: 7638030Abstract: An electrolytic processing apparatus which, while eliminating a CMP processing entirely or reducing a load on a CMP processing to the least possible extent, can process and flatten a conductive material formed in the surface of a substrate, or can remove (clean) extraneous matter adhering to the surface of a workpiece such as a substrate. The present invention includes an electrode section including a plurality of electrode members disposed in parallel, each electrode member including an electrode and an ion exchanger covering the surface of the electrode, a holder for holding a workpiece, which is capable of bringing the workpiece close to or into contact with the ion exchanger of the electrode member, and a power source to be connected to the electrode of each electrode member of the electrode section. The ion exchanger of the electrode member includes an ion exchanger having an excellent surface smoothness and an ion exchanger having a large ion exchange capacity.Type: GrantFiled: September 25, 2003Date of Patent: December 29, 2009Assignee: Ebara CorporationInventors: Osamu Nabeya, Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Takeshi Iizumi, Nobuyuki Takada, Koichi Fukaya, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki, Kaoru Yamada, Yuji Makita
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Publication number: 20090308760Abstract: A method and apparatus separates recoverable components (210) from conductive matrix composites (200) for further use or reuse. In an embodiment, the process uses an electrochemical apparatus that includes a cathode (220) and an anode. The conductive composite is electrically connected to the anode, and a non-acidic electrolyte (250) is supplied to an inter-electrode gap between the cathode and the anode.Type: ApplicationFiled: December 22, 2005Publication date: December 17, 2009Applicant: DIAMOND INNOVATIONS, INC.Inventors: Bin Wei, Padraic S. O'Neill
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Patent number: 7625468Abstract: An electrode containing a dielectric layer on a surface of the electrode and an active zone containing a metal embedded below the surface of the electrode, wherein the electrode is configured to form a groove pattern on a workpiece by an electrochemical machining process is disclosed. The electrode is capable of manufacturing a workpiece such as a counter plate, a sleeve journal or a conical bearing containing a groove pattern for fluid dynamics bearing, the groove pattern having a pitch of less than 80 microns. The electrode could be made by a method including depositing a dielectric layer on a surface of a metal, depositing a photoresist layer on the dielectric layer, printing a groove pattern on the photoresist layer, etching or physico-chemically removing portions of the dielectric photoresist layers to form grooves in the dielectric layer; removing the photoresist layer; and filling the grooves with a metal to produce the electrode.Type: GrantFiled: March 15, 2006Date of Patent: December 1, 2009Assignee: Seagate Technology, LLCInventors: Alexander Parkhomovsky, Lev M. Dvoskin, Roger A. Addy, Robert M. Pelstring
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Patent number: 7594987Abstract: A method and an apparatus for electroerosive material machining of a workpiece with an elongated tool electrode are described. The tool electrode is guided in an electrode guide, in which an oval void is embodied. The wire segment located in the void is exposed to a magnetic field, as a result of which the wire segment can be deflected laterally. The lateral deflection is converted into an axial motion of the wire segment located in the region of the workpiece, in order to create an optimal work gap between the workpiece and the free end part of the wire segment.Type: GrantFiled: November 12, 2002Date of Patent: September 29, 2009Assignee: Robert Bosch GmbHInventor: Boris Lukic
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Publication number: 20090223831Abstract: The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate.Type: ApplicationFiled: May 13, 2008Publication date: September 10, 2009Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Chun Christine Dong, Richard E. Patrick, Gregory Khosrov Arslanian
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Patent number: 7575667Abstract: An electrode (10) is provided for electrochemical reduction of a workpiece (20) that is to be treated. The electrode (10) has a predefined contour and contains an electrically conductive material. The electrically conductive material of the predefined contour forms an electrode core (12). The outside of the electrode core (12) is covered with an insulation layer (13). The insulation layer (13) is porous and is made of an electrically non-conductive material.Type: GrantFiled: December 10, 2008Date of Patent: August 18, 2009Assignee: MTU Aero Engines GmbHInventors: Erwin Bayer, Martin Bussmann, Thomas Kraenzler, Albin Platz, Juergen Steinwandel
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Patent number: 7479214Abstract: An ECM apparatus includes a stationary cathode tool having a passage, and a drive mechanism for moving a bar-shaped workpiece through the passage of the cathode tool while simultaneously rotating the workpiece. Electrolyte flows, from a manifold on one end of the cathodic tool to a manifold at the other end, through the passage, between the wall of the passage and the workpiece. An electric current is simultaneously established in the electrolyte, between the wall of the passage and the workpiece. The internal shape of the cathodic tool wall has a gradual transition from a circular entry opening to a lobed exit opening, and lobes formed in the wall of the tool are shaped so that they twist in the direction of workpiece rotation, in order to form helical lobes in the workpiece.Type: GrantFiled: July 8, 2004Date of Patent: January 20, 2009Assignee: Lehr Precision, Inc.Inventors: Terry Lievestro, John Reynolds
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Patent number: 7427345Abstract: A method and device for regenerating an ion exchanger can regenerate an ion exchanger easily and quickly, and can minimize a load upon cleaning of the regenerated ion exchanger and disposal of waste liquid. A method for regenerating a contaminated ion exchanger includes: providing a pair of a regeneration electrode and a counter electrode, a partition disposed between the electrodes, and an ion exchanger to be regenerated disposed between the counter electrode and the partition; and applying a voltage between the regeneration electrode and the counter electrode while supplying a liquid between the partition and the regeneration electrode and also supplying a liquid between the partition and the counter electrode.Type: GrantFiled: November 29, 2002Date of Patent: September 23, 2008Assignee: Ebara CorporationInventors: Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Masayuki Kumekawa, Hozumi Yasuda, Osamu Nabeya, Kazuto Hirokawa, Mitsuhiko Shirakashi, Yasushi Toma, Itsuki Kobata
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Publication number: 20080179195Abstract: A method for removing a metal layer comprising the steps of providing a part having a slot, providing a porous metallic cathode comprising a recess bounded by a wall having an outer surface corresponding to the slot, inserting the porous metallic cathode into the slot, introducing an electrolyte into the recess of the porous metallic cathode, and removing a portion of an inner surface of the slot by flowing an electric current between the part and the porous metallic cathode.Type: ApplicationFiled: February 21, 2008Publication date: July 31, 2008Applicant: UNITED TECHNOLOGIES CORPORATIONInventor: Frederick R. Joslin
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Patent number: 7344623Abstract: A system and method are described for radially positioning a workpiece for electrochemical machining. In one embodiment, a pressurized air chamber is configured to contain pressurized air. In addition, an expandable diaphragm is configured to position the workpiece radially relative to an electrode assembly in response to the pressurized air being released into the pressurized air chamber.Type: GrantFiled: October 22, 2003Date of Patent: March 18, 2008Assignee: Seagate Technology LLCInventor: Dustin A. Cochran
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Patent number: 7270735Abstract: A system and method are described for holding and releasing a workpiece for electrochemical machining. In one embodiment, a workpiece holder has a workpiece surface that couples to the workpiece when negative pressure is applied to provide a seal between the workpiece and the workpiece surface. A plenum located within the workpiece holder has a proximal end capable of being removably coupled to the workpiece. A piston is configured to move upward in the plenum and to lift the workpiece off of the workpiece surface in response to positive pressure being applied.Type: GrantFiled: December 22, 2003Date of Patent: September 18, 2007Assignee: Seagate Technology LLCInventors: Mark Greg Steele, Dustin Alan Cochran
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Patent number: 7255778Abstract: An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.Type: GrantFiled: April 21, 2004Date of Patent: August 14, 2007Assignees: Ebara CorporationInventors: Yuzo Mori, Mitsuhiko Shirakashi, Yasushi Toma, Itsuki Kobata, Takayuki Saito
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Patent number: 7208076Abstract: A substrate processing apparatus can perform an electrolytic processing, which is different from a common, conventional etching, to remove (clean off) a conductive material (film) formed on or adhering to a bevel portion, etc. of a substrate, or process a peripheral portion of a substrate through an electrochemical action. The substrate processing apparatus includes: an electrode section having a plurality of electrodes which are laminated with insulators being interposed, and having a holding portion which is to be opposed to a peripheral portion of a substrate; an ion exchanger disposed in the holding portion of the electrode section; a liquid supply section for supplying a liquid to the holding position of the electrode section; and a power source for applying a voltage to the electrodes of the electrode section so that the electrodes alternately have different polarities.Type: GrantFiled: September 11, 2002Date of Patent: April 24, 2007Assignee: Ebara CorporationInventors: Itsuki Kobata, Mitsuhiko Shirakashi, Masayuki Kumekawa, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki, Kaoru Yamada, Yuji Makita, Hozumi Yasuda
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Patent number: 7204926Abstract: A tandem blisk is mounted in a multiaxis electrochemical machine. A first row of blades is electrochemically machined in sequence. A second row of blades is then electrochemically machined in sequence while the blisk is still mounted in the machine. The machine is initially set up for machining both stages without removal of the blisk between the machining sequences.Type: GrantFiled: November 26, 2001Date of Patent: April 17, 2007Assignee: General Electric CompanyInventors: Michael Scott Lamphere, John Scott Graham, Richard Spicer Robertson
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Patent number: 7144482Abstract: An apparatus, method and means is provided for electrochemical machining of hydrodynamic bearing assemblies in spindle motors. In an aspect, a cartridge is provided that receives and accurately positions an electrode in three dimensions in a near frictionless manner. The electrode reaches and maintains an equilibrium position in response to a first and second predetermined force, the equilibrium position being a predetermined three dimensional orientation relative to the work piece and defining a critical orifice with the work piece. In an aspect, a hydrostatic bearing is employed within the electrode for radially adjusting the electrode.Type: GrantFiled: June 17, 2003Date of Patent: December 5, 2006Assignee: Seagate Technology LLCInventors: Mark Greg Steele, Dustin Alan Cochran, Alexander Gredinberg
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Patent number: 7063601Abstract: An internal magnetic-force polishing system is disclosed for finishing a interior metal surface of a material. The system comprises a magnetic electrolysis-polishing which is adapted for finishing the interior metal surface of the material. A cathode terminal is provided for contacting pre-finished material and a transfer unit is also provided for transferring material from the cathode terminal to the magnetic electrolysis-polishing unit. The system has an electrolyte feeding unit which stores electrolytes and supplies the electrolyte to the magnetic electrolysis-polishing unit. A control unit is provided for controlling the transfer unit, the magnetic electrolysis-polishing unit and the electrolyte feeding unit.Type: GrantFiled: January 19, 2005Date of Patent: June 20, 2006Assignees: Sejong University Industry-Academy Cooperation FoundationInventor: Jeong-Du Kim
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Patent number: 7056429Abstract: Method for deburring and/or rounding a side face of a thin-sheet and annular metal element (1), such as a ring element (1) for use in a push belt for continuously variable transmission, wherein the ring element (1), in a machining step, is received in a device for electrochemical machining (“ECM”) of the ring element (1), an electrode (5) being positioned in the device opposite an axially oriented side face (3) of the ring element (1), which electrode (5), as seen in a thickness or radial direction of the ring element (1), has a dimension which is at least twice as great as a dimension of the ring element (1) in the said thickness direction.Type: GrantFiled: June 9, 2003Date of Patent: June 6, 2006Assignee: Van Doorne's Transmissie B.V.Inventors: Cornelis Hendricus Maria Van Oirschot, Jozias Pieter Polderman
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Patent number: 6913683Abstract: A method for the production of pipe segments from a pipe (10) in which the pipe (10) is rotated about its longitudinal axis, while an electrode (20) is positioned in the vicinity of the outer surface (11) of the pipe (10) and electrolyte (30) is fed to the space between the pipe (10) and the electrode (20). The electrode (20) and the pipe (10) are connected to a voltage source (40), with the result that an electric current is brought about via the electrolyte (30). Thus, the pipe (10) is divided into pipe segments in an electrochemical way.Type: GrantFiled: February 13, 2001Date of Patent: July 5, 2005Assignee: Van Doorne's Transmissie B.V.Inventors: Cornelus Hendricus Maria Van Oirschot, Roland Theo Anton Kals, Hendrikus Van Den Boomen
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Patent number: 6875335Abstract: An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultrapure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultrapure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultrapure water, with no impurities left behind on the processed surface of the workpiece.Type: GrantFiled: June 2, 2003Date of Patent: April 5, 2005Assignees: Ebara CorporationInventors: Yuzo Mori, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Akira Fukunaga, Itsuki Kobata
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Patent number: 6866769Abstract: A drive head for a bolt, fastener, coupling, nut or other driveable head made from a less malleable metal such as a powder metal nickel alloy. The drive head has an upper drive portion having at least six convex corners spaced around the outer periphery thereof, each corner terminating in an edge. The drive head also has a lower flange portion adjacent to the drive portion and having an edge extending radially outwardly to at least the edge of each corner. The drive portion and the flange portion of the drive head is formed by subjecting a blank having a generally circular head to electrochemical machining (ECM). A tool is also provided for the ECM method to form the drive portion and flange portion of the drive head.Type: GrantFiled: November 6, 2002Date of Patent: March 15, 2005Assignee: General Electric CompanyInventors: William C. Anderson, Edward I. Stamm, Vicky S. Budinger, Terry L. Lievestro
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Patent number: 6858125Abstract: A multi-axis machine, with numerical control on each axis, is used to drive the tool and workpiece movements necessary to machining complex airfoil geometry. Tooling is typically made of a metal such as brass or other low cost material and rotates during machining. The tooling may be any shape(cylindrical, conical) and size depending on application. A DC power (continuous or pulsed) is used to provide voltage across the tool and workpiece. A medium such as water, de-ionized water, or electrolyte (such as sodium nitrite) is provided between the tool and workpiece. Workpiece metal is removed in a controlled manner by high intensity thermal erosion.Type: GrantFiled: December 27, 2002Date of Patent: February 22, 2005Assignee: General Electric CompanyInventors: Bin Wei, Roger Etherington, Michael Lamphere
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Patent number: 6855239Abstract: A plating method and apparatus using contactless electrode is described. In one embodiment an inductive element is placed proximally to a substrate and a moving electromagnetic field generates an emf in the substrate to plate the surface. In another embodiment, a conductive plate is used, so that the conductive plate and the wafer, separated by a dielectric material, operate as two plates of a capacitor when voltage is applied to the conductive plate. The resulting electrostatic field impresses a charge potential on the substrate to plate the surface of the substrate.Type: GrantFiled: September 27, 2002Date of Patent: February 15, 2005Inventor: Rahul Jairath
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Patent number: 6852208Abstract: Deposition of conductive material on or removal of conductive material from a workpiece frontal side of a semiconductor workpiece is performed by providing an anode having an anode area which is to face the workpiece frontal side, and electrically connecting the workpiece frontal side with at least one electrical contact, outside of the anode area, by pushing the electrical contact and the workpiece frontal side into proximity with each other. A potential is applied between the anode and the electrical contact, and the workpiece is moved with respect to the anode and the electrical contact. Full-face electroplating or electropolishing over the workpiece frontal side surface, in its entirety, is thus permitted.Type: GrantFiled: October 3, 2002Date of Patent: February 8, 2005Assignee: NuTool, Inc.Inventors: Jalal Ashjaee, Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Uzoh
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Publication number: 20040195111Abstract: Substantially uniform deposition of conductive material on a surface of a substrate, which substrate includes a semiconductor wafer, from an electrolyte containing the conductive material can be provided by way of a particular device which includes first and second conductive elements. The first conductive element can have multiple electrical contacts, of identical or different configurations, or may be in the form of a conductive pad, and can contact or otherwise electrically interconnect with the substrate surface over substantially all of the substrate surface. Upon application of a potential between the first and second conductive elements while the electrolyte makes physical contact with the substrate surface and the second conductive element, the conductive material is deposited on the substrate surface. It is possible to reverse the polarity of the voltage applied between the anode and the cathode so that electro-etching of deposited conductive material can be performed.Type: ApplicationFiled: April 16, 2004Publication date: October 7, 2004Inventors: Homayoun Talieh, Cyprian Uzoh, Bulent M. Basol
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Publication number: 20040195110Abstract: An electrochemical planarization apparatus for planarizing a metallized surface on a workpiece includes a polishing pad and a platen. The platen is formed of conductive material, is disposed proximate to the polishing pad and is configured to have a negative charge during at least a portion of a planarization process. At least one electrical conductor is positioned within the platen. The electrical conductor has a first end connected to a power source. A workpiece carrier is configured to carry a workpiece and press the workpiece against the polishing pad. The power source applies a positive charge to the workpiece via the electrical conductor so that an electric potential difference between the metallized surface of the workpiece and the platen is created to remove at least a portion of the metallized surface from the workpiece.Type: ApplicationFiled: May 17, 2004Publication date: October 7, 2004Applicant: SPEEDFAM-IPEC CORPORATIONInventors: Ismail Emesh, Saket Chadda, Nikolay N. Korovin, Brian L. Mueller
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Publication number: 20040140225Abstract: An apparatus, method and means is provided for electrochemical machining of hydrodynamic bearing assemblies in spindle motors. In an aspect, a cartridge is provided that receives and accurately positions an electrode in three dimensions in a near frictionless manner. The electrode reaches and maintains an equilibrium position in response to a first and second predetermined force, the equilibrium position being a predetermined three dimensional orientation relative to the work piece and defining a critical orifice with the work piece. In an aspect, a hydrostatic bearing is employed within the electrode for radially adjusting the electrode.Type: ApplicationFiled: June 17, 2003Publication date: July 22, 2004Inventors: Mark Greg Steele, Dustin Alan Cochran, Alexander Gredinberg
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Publication number: 20040140226Abstract: An apparatus and method for electrochemically etching grooves in a working surface. A frame holds a working surface about an axis and facing a movable electrode movable along the axis. The electrode is axially movable and has a surface carrying a groove pattern to fix on the working surface. A source of electrolyte is pumped at a fixed static pressure rate between the surface of the movable electrode and the working surface. A support fixture is provided for supporting the electrode for movement toward and away from the working surface with minimal frictional restriction. A force biases the electrode surface toward the working surface so that a gap through which the electrolyte flows between the surface of the movable electrode and the working surface is determined primarily by the static flow rate of the electrolyte and the force bias of the electrode toward the working surface.Type: ApplicationFiled: June 30, 2003Publication date: July 22, 2004Inventor: Dustin Alan Cochran
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Patent number: 6756307Abstract: The present invention pertains to apparatus and methods for electroplanarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by use of a flexible planar cathode and a spacing pad thereon. Methods of the invention are electropolishing methods. During electroplanarization, the flexible planar cathode conforms to the global contour of the work piece (e.g. a wafer) while the spacing pad conforms to local topography of the metal layer being planarized. In this way, dishing is reduced in the final planarized metal layer.Type: GrantFiled: July 29, 2002Date of Patent: June 29, 2004Assignee: Novellus Systems, Inc.Inventors: John Kelly, Wilbert G. H. van den Hoek, John S. Drewery
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Patent number: 6743349Abstract: An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.Type: GrantFiled: July 5, 2001Date of Patent: June 1, 2004Assignees: Ebara CorporationInventors: Yuzo Mori, Mitsuhiko Shirakashi, Yasushi Toma, Itsuki Kobata, Takayuki Saito
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Patent number: 6723223Abstract: For an electromechanical machining of a work piece there is an optimal pulse duration for the machining pulses corresponding to the maximum copying accuracy. Such an optimal pulse duration corresponds to a certain value of the gap. By alternating the machining pulses with measurement pulses it is possible to obtain an accurate information about the gap dimensions on-line during the electrochemical machining process. The process control means (20) are used to automate the electromechanical machining, while keeping it in the optimal mode. For this purpose the process control means (20) comprise the pulse control unit (26) to establish the pulse duration of the voltage pulses to be applied across the gap (4).Type: GrantFiled: May 7, 2002Date of Patent: April 20, 2004Assignee: Koninklijke Philips Electronics N.V.Inventors: Alexandr Zaitsev, Sergey Bezroukov, Igor Leonidovich Agafonov, Aleksandr Leonidovich Belogorsky, Maxim Smirnov, Vladimir Zhitnikov
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Patent number: 6689269Abstract: The invention relates to a method for electrochemically processing a workpiece (61) in which a pulsating or alternating electrical voltage is applied between the workpiece and a workpiece electrode (62) which are arranged at a distance from one another in an electrolyte. A distance range is defined by precisely dimensioning the mean value of the applied pulsating voltage and of the voltage amplitudes measured with regard to this mean value. A double layer charge reversal on the workpiece which is sufficient for bringing about the desired electrochemical reaction results within said distance range, whereas workpiece areas situated at further distances do not experience a sufficient double layer charge reversal. The dimensions of the space between the workpiece and the workpiece electrode are proportioned in such a way that only points of the area of the workpiece to be processed lie within said distance range.Type: GrantFiled: June 26, 2001Date of Patent: February 10, 2004Assignee: Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.Inventors: Rolf Schuster, Viola Kirchner
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Patent number: 6660138Abstract: The present invention is an electropolishing process and device for electropolishing an inner surface of a long tube, especially applied to a long tube of greater than two meters and a diameter range between 0.3 and 5 cm. Wherein, the present invention comprises at least one tube, and one complex electrode. An inner surface of the tube is for electropolishing process, and it is an anode as well. The electrode is a cathode and placed on a center of a partition. An end of electrode connects to a cable, the cable is driven by an axial mechanism to be moved the electrode toward the axial mechanism itself. Inside of the tube is full o electrolyte, which is an electrifying medium to connect both anode and cathode. Further, electrolyte cooperates with the electrode to perform the electropolishing process on the inner surface of tube.Type: GrantFiled: February 19, 2002Date of Patent: December 9, 2003Assignee: Industrial Technology Research InstituteInventors: Chun-Hung Lin, Chen-Der Tsai, Yun-Sheng Chung, Chin-Ching Wu, Yuh-Feng Chen, Hann-Tsong Wang
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Publication number: 20030217931Abstract: An electrolytic machining method includes electrolytically machining a workpiece that is positioned opposite to an electrode tool while filling an electrolytic solution between the workpiece and the electrode tool and applying a current across the workpiece and the electrode tool. The electrolytic machining is performed by having at least a part of opposing sections of the workpiece and the electrode tool immersed in the electrolytic solution reserved in a machining and storing section, while the machining surface of the workpiece is positioned at a depth of about 5 mm to about 35 mm from the surface of the electrolytic solution reserved in the machining and storing section, and by supplying the electrolytic solution to be filled in a gap at the opposing sections between the workpiece and the electrode tool.Type: ApplicationFiled: March 4, 2003Publication date: November 27, 2003Applicant: SANKYO SEIKI MFG. CO., LTD.Inventors: Motonori Usui, Toshimasa Kobayashi