Magnetic Field Patents (Class 257/421)
  • Patent number: 11963464
    Abstract: A memristor may include an exchange-coupled composite (ECC) portion to provide three or more nonvolatile magneto-resistive states. The ECC portion may include a continuous layer and a granular layer magnetically exchange coupled to the continuous layer. A plurality of memristors may be used in a system to, for example, define a neural network.
    Type: Grant
    Filed: February 22, 2021
    Date of Patent: April 16, 2024
    Assignee: Seagate Technology LLC
    Inventors: Cheng Wang, Pin-Wei Huang, Ganping Ju, Kuo-Hsing Hwang
  • Patent number: 11950432
    Abstract: A semiconductor package includes a first semiconductor device and a second semiconductor device. The first semiconductor device includes a first semiconductor substrate, a first bonding structure and a memory cell. The second semiconductor device is stacked over the first semiconductor device. The second semiconductor device includes a second semiconductor substrate, a second bonding structure in a second dielectric layer and a peripheral circuit between the second semiconductor substrate and the second bonding structure. The first bonding structure and the second bonding structure are bonded and disposed between the memory cell and the peripheral circuit, and the memory cell and the peripheral circuit are electrically connected through the first bonding structure and the second bonding structure.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiang-Ku Shen, Ku-Feng Lin, Liang-Wei Wang, Dian-Hau Chen
  • Patent number: 11944017
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes an insulation layer. A bottom electrode via is disposed in the insulation layer. The bottom electrode via includes a conductive portion and a capping layer over the conductive portion. A barrier layer surrounds the bottom electrode via. A magnetic tunneling junction (MTJ) is disposed over the bottom electrode via.
    Type: Grant
    Filed: May 5, 2023
    Date of Patent: March 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tai-Yen Peng, Yu-Shu Chen, Chien Chung Huang, Sin-Yi Yang, Chen-Jung Wang, Han-Ting Lin, Jyu-Horng Shieh, Qiang Fu
  • Patent number: 11944015
    Abstract: Spin-orbit-torque (SOT) segments are provided along the sides of free layers in magnetoresistive devices that include magnetic tunnel junctions. Current flowing through such SOT segments injects spin current into the free layers such that spin torque is applied to the free layers. The spin torque can be used as an assist to spin-transfer torque generated by current flowing vertically through the magnetic tunnel junction in order to improve the efficiency of the switching current applied to the magnetoresistive device.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: March 26, 2024
    Assignee: EVERSPIN TECHNOLOGIES, INC.
    Inventor: Han-Jong Chia
  • Patent number: 11925124
    Abstract: A magnetic structure, a magnetic device incorporating the magnetic structure and a method for providing the magnetic structure are described. The magnetic structure includes a magnetic layer, a templating structure and a resistive insertion layer. The magnetic layer includes a Heusler compound and has a perpendicular magnetic anisotropy energy exceeding an out-of-plane demagnetization energy. The templating structure has a crystal structure configured to template at least one of the Heusler compound and the resistive insertion layer. The magnetic layer is on the templating structure. The resistive insertion layer is configured to reduce magnetic damping for the Heusler compound and allow for templating of the Heusler compound.
    Type: Grant
    Filed: March 30, 2021
    Date of Patent: March 5, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jaewoo Jeong, Panagiotis Charilaos Filippou, Yari Ferrante, Chirag Garg, Mahesh Samant, Ikhtiar, Dmytro Apalkov
  • Patent number: 11917923
    Abstract: A magnetoresistive random access memory (MRAM) structure, including a substrate and multiple MRAM cells on the substrate, wherein the MRAM cells are arranged in a memory region adjacent to a logic region. An ultra low-k (ULK) layer covers the MRAM cells, wherein the surface portion of ultra low-k layer is doped with fluorine, and dents are formed on the surface of ultra low-k layer at the boundaries between the memory region and the logic region.
    Type: Grant
    Filed: April 28, 2021
    Date of Patent: February 27, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Ching-Hua Hsu, Si-Han Tsai, Shun-Yu Huang, Chen-Yi Weng, Ju-Chun Fan, Che-Wei Chang, Yi-Yu Lin, Po-Kai Hsu, Jing-Yin Jhang, Ya-Jyuan Hung
  • Patent number: 11864391
    Abstract: A magnetoresistive random access memory (MRAM) includes a first transistor and a second transistor on a substrate, a source line coupled to a first source/drain region of the first transistor, and a first metal interconnection coupled to a second source/drain region of the first transistor. Preferably, the first metal interconnection is extended to overlap the first transistor and the second transistor and the first metal interconnection further includes a first end coupled to the second source/drain region of the first transistor and a second end coupled to a magnetic tunneling junction (MTJ).
    Type: Grant
    Filed: December 26, 2022
    Date of Patent: January 2, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Sheng-Yuan Hsueh, Te-Wei Yeh, Chien-Liang Wu
  • Patent number: 11864467
    Abstract: A top electrode of a magnetoresistive random access memory (MRAM) device over a magnetic tunnel junction (MTJ) is formed using a film of titanium nitride oriented in a (111) crystal structure rather than a top electrode which uses tantalum, tantalum nitride, and/or a multilayer including tantalum and tantalum nitride.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jung-Tang Wu, Wu Meng Yu, Szu-Hua Wu, Chin-Szu Lee, Han-Ting Tsai, Yu-Jen Chien
  • Patent number: 11856869
    Abstract: The present disclosure provides a semiconductor structure, including a first metal line over a first region of the substrate, a first magnetic tunnel junction (MTJ) and a second MTJ over the first region of the substrate, and a top electrode extending over the first MTJ and the second MTJ, wherein the top electrode includes a protruding portion at a bottom surface of the top electrode.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yu-Feng Yin, Tai-Yen Peng, An-Shen Chang, Han-Ting Tsai, Qiang Fu, Chung-Te Lin
  • Patent number: 11856791
    Abstract: A nonvolatile storage device includes first interconnections extending in a first direction and second interconnections extending in a second direction intersecting the first direction. Memory cells are formed at intersections between first and second interconnections. Each memory cell includes a resistance change element and a selector. In the arrangement of memory cells, all memory cells that are connected to any particular first interconnection are aligned along that first interconnection, and all memory cells connected to any particular second interconnection are alternately staggered in the first direction across a width of that second interconnection.
    Type: Grant
    Filed: May 20, 2022
    Date of Patent: December 26, 2023
    Assignee: Kioxia Corporation
    Inventors: Masahiko Nakayama, Kazumasa Sunouchi, Gaku Sudo, Tadashi Kai
  • Patent number: 11849646
    Abstract: A magnetic tunnel junction (MTJ) is disclosed wherein first and second interfaces of a free layer (FL) with a first metal oxide (Hk enhancing layer) and second metal oxide (tunnel barrier), respectively, produce perpendicular magnetic anisotropy (PMA) to increase thermal stability. In some embodiments, a capping layer that is a conductive metal nitride such as MoN contacts an opposite surface of the Hk enhancing layer with respect to the first interface to reduce interdiffusion of oxygen and nitrogen compared with a TiN capping layer and maintain an acceptable resistanceƗarea (RA) product. In other embodiments, the capping layer may comprise an insulating nitride such as AlN that is alloyed with a conductive metal to minimize RA. Furthermore, a metallic buffer layer may be inserted between the capping layer and Hk enhancing layer. As a result, electrical shorts are reduced and the magnetoresistive ratio is increased.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jodi Mari Iwata, Guenole Jan, Ru-Ying Tong, Vignesh Sundar, Jian Zhu, Huanlong Liu
  • Patent number: 11844287
    Abstract: A magnetic memory device includes a spin-orbit torque (SOT) induction spin Hall electrode and a free layer of a magnetic tunnel junction (MTJ) stack disposed on the spin Hall electrode which is a synthetic anti-ferromagnetic structure. The free layer has a magnetic moment which is askew of the long axis of the MTJ stack and askew the direction of current flow through the spin Hall electrode. The MTJ stack internally generates a magnetic field to switch the state of the free layer. The free layer includes a first layer separated from a second layer by a spacer layer, where the first layer and the second layer may have the same or different crystalline structures.
    Type: Grant
    Filed: January 8, 2021
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Min Lee, Shy-Jay Lin
  • Patent number: 11839162
    Abstract: Magnetoelectric or magnetoresistive memory cells may include a plurality of reference layers and optionally a plurality of free layers to enhance the tunneling magnetoresistance (TMR) ratio.
    Type: Grant
    Filed: June 25, 2021
    Date of Patent: December 5, 2023
    Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
    Inventors: Alan Kalitsov, Derek Stewart, Bhagwati Prasad, Goran Mihajlovic
  • Patent number: 11839161
    Abstract: The present disclosure provides a semiconductor structure including a first electrode via, a first electrode on the first electrode via, a magnetic tunneling junction (MTJ) over the first electrode, a second electrode over the MTJ, a first dielectric layer on the first electrode via, a second dielectric layer on the first dielectric layer. The first dielectric layer is a planar layer. A sidewall of the MTJ is in contact with the second dielectric layer, and a bottom surface of the second dielectric layer is higher than a bottom surface of the first electrode.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 11832526
    Abstract: A spin-orbit-torque magnetization rotational element includes: a ferromagnetic metal layer, a magnetization direction of the ferromagnetic metal layer being configured to change; a spin-orbit torque wiring which extends in the first direction intersecting a lamination direction of the ferromagnetic metal layer and is joined to the ferromagnetic metal layer; and two via wires, each of which extends in a direction intersecting the spin-orbit torque wiring from a surface of the spin-orbit torque wiring opposite to a side with the ferromagnetic metal layer and is connected to a semiconductor circuit, wherein a via-to-via distance between the two via wires in the first direction is shorter than a width of the ferromagnetic metal layer in the first direction.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: November 28, 2023
    Assignee: TDK CORPORATION
    Inventors: Keita Suda, Tomoyuki Sasaki
  • Patent number: 11825751
    Abstract: A manufacturing method of a memory device includes the following steps. Memory units are formed on a substrate. Each of the memory units includes a first electrode, a second electrode, and a memory material layer. The second electrode is disposed above the first electrode in a vertical direction. The memory material layer is disposed between the first electrode and the second electrode in the vertical direction. A conformal spacer layer is formed on the memory units. A non-conformal spacer layer is formed on the conformal spacer layer. A first opening is formed penetrating through a sidewall portion of the non-conformal spacer layer and a sidewall portion of the conformal spacer layer in the vertical direction.
    Type: Grant
    Filed: July 15, 2021
    Date of Patent: November 21, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Wei Kuo, Chung-Yi Chiu
  • Patent number: 11818963
    Abstract: An apparatus is provided which comprises: a magnetic junction including: a stack of structures including: a first structure comprising a magnet with an unfixed perpendicular magnetic anisotropy (PMA) relative to an x-y plane of a device, wherein the first structure has a first dimension along the x-y plane and a second dimension in the z-plane, wherein the second dimension is substantially greater than the first dimension. The magnetic junction includes a second structure comprising one of a dielectric or metal; and a third structure comprising a magnet with fixed PMA, wherein the third structure has an anisotropy axis perpendicular to the plane of the device, and wherein the third structure is adjacent to the second structure such that the second structure is between the first and third structures; and an interconnect adjacent to the third structure, wherein the interconnect comprises a spin orbit material.
    Type: Grant
    Filed: January 18, 2022
    Date of Patent: November 14, 2023
    Assignee: Intel Corporation
    Inventors: Sasikanth Manipatruni, Kaan Oguz, Chia-Ching Lin, Christopher Wiegand, Tanay Gosavi, Ian Young
  • Patent number: 11812669
    Abstract: A magnetoresistive random access memory (MRAM), including a bottom electrode layer on a substrate, a magnetic tunnel junction stack on the bottom electrode layer, a top electrode layer on the magnetic tunnel junction stack, and a hard mask layer on said top electrode layer, wherein the material of top electrode layer is titanium nitride, a material of said hard mask layer is tantalum or tantalum nitride, and the percentage of nitrogen in the titanium nitride gradually decreases from the top surface of top electrode layer to the bottom surface of top electrode layer.
    Type: Grant
    Filed: June 9, 2022
    Date of Patent: November 7, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Chen-Yi Weng, Chin-Yang Hsieh, Yi-Hui Lee, Ying-Cheng Liu, Yi-An Shih, Jing-Yin Jhang, I-Ming Tseng, Yu-Ping Wang, Chien-Ting Lin, Kun-Chen Ho, Yi-Syun Chou, Chang-Min Li, Yi-Wei Tseng, Yu-Tsung Lai, Jun Xie
  • Patent number: 11810702
    Abstract: The disclosed technology relates generally to the field of magnetic devices, in particular to magnetic memory devices or logic devices. The disclosed technology presents a magnetic structure for a magnetic device, wherein the magnetic structure comprises a magnetic reference layer (RL); a spacer provided on the magnetic RL, the spacer comprising a first texture breaking layer provided on the magnetic RL, a magnetic bridge layer provided on the first texture breaking layer, and a second texture breaking layer provided on the magnetic bridge layer. Further, the magnetic structure comprising a magnetic pinned layer (PL) or hard layer (HL) provided on the spacer, wherein the magnetic RL and the magnetic PL or HL are magnetically coupled across the spacer through direct exchange interaction.
    Type: Grant
    Filed: December 8, 2020
    Date of Patent: November 7, 2023
    Assignee: IMEC vzw
    Inventors: Robert Carpenter, Johan Swerts
  • Patent number: 11800812
    Abstract: An integrated circuit includes a dielectric layer, a memory device, and a resistor. The memory device includes a bottom electrode via, a bottom electrode, a resistance switching element, and a top electrode. The bottom electrode via is in the dielectric layer. The dielectric layer has a first portion extending along sidewalls of the bottom electrode via, a second portion extending laterally from the first portion, and a third portion. The bottom electrode is over the bottom electrode via. The resistance switching element is over the bottom electrode. The top electrode is over the resistance switching element. The resistor is over the third portion of the dielectric layer. A thickness of the third portion of the dielectric layer is greater than a thickness of the second portion of the dielectric layer.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tai-Yen Peng, Chien-Chung Huang, Yu-Shu Chen, Sin-Yi Yang, Chen-Jung Wang, Han-Ting Lin, Chih-Yuan Ting, Jyu-Horng Shieh, Hui-Hsien Wei
  • Patent number: 11800811
    Abstract: A MTJ stack is deposited on a bottom electrode. A metal hard mask is deposited on the MTJ stack and a dielectric mask is deposited on the metal hard mask. A photoresist pattern is formed on the dielectric mask, having a critical dimension of more than about 65 nm. The dielectric and metal hard masks are etched wherein the photoresist pattern is removed. The dielectric and metal hard masks are trimmed to reduce their critical dimension to 10-60 nm and to reduce sidewall surface roughness. The dielectric and metal hard masks and the MTJ stack are etched wherein the dielectric mask is removed and a MTJ device is formed having a small critical dimension of 10-60 nm, and having further reduced sidewall surface roughness.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Dongna Shen, Yi Yang, Jesmin Haq, Yu-Jen Wang
  • Patent number: 11793087
    Abstract: The disclosure is directed to spin-orbit torque (ā€œSOTā€) magnetoresistive random-access memory (ā€œMRAMā€) (ā€œSOT-MRAMā€) structures and methods. A SOT channel of the SOT-MRAM includes multiple heavy metal layers and one or more dielectric dusting layers each sandwiched between two adjacent heavy metal layers. The dielectric dusting layers each include discrete molecules or discrete molecule clusters of a dielectric material scattered in or adjacent to an interface between two adjacent heavy metal layers.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: October 17, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shy-Jay Lin, Mingyuan Song
  • Patent number: 11793001
    Abstract: A spin-orbit torque magnetoresistive random-access memory device formed by fabricating a spin-Hall-effect (SHE) layer above and in electrical contact with a transistor, forming a spin-orbit-torque (SOT) magnetoresistive random access memory (MRAM) cell stack disposed above and in electrical contact with the SHE rail, wherein the SOT-MRAM cell stack comprises a free layer, a tunnel junction layer, a reference layer, and a diode structure, forming a write line disposed in electrical contact with the SHE rail, forming a protective dielectric layer covering a portion of the SOT-MRAM cell stack, and forming a read line disposed above and adjacent to the diode structure.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: October 17, 2023
    Assignee: International Business Machines Corporation
    Inventors: Eric Raymond Evarts, Virat Vasav Mehta, Oscar van der Straten
  • Patent number: 11785863
    Abstract: A method for fabricating a magnetic tunneling junction (MTJ) structure is described. A first dielectric layer is deposited on a bottom electrode and partially etched through to form a first via opening having straight sidewalls, then etched all the way through to the bottom electrode to form a second via opening having tapered sidewalls. A metal layer is deposited in the second via opening and planarized to the level of the first dielectric layer. The remaining first dielectric layer is removed leaving an electrode plug on the bottom electrode. MTJ stacks are deposited on the electrode plug and on the bottom electrode wherein the MTJ stacks are discontinuous. A second dielectric layer is deposited over the MTJ stacks and polished to expose a top surface of the MTJ stack on the electrode plug. A top electrode layer is deposited to complete the MTJ structure.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi Yang, Dongna Shen, Yu-Jen Wang
  • Patent number: 11778920
    Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a cap layer adjacent to and directly contacting the MTJ, a first inter-metal dielectric (IMD) layer around the MTJ, a top electrode on the MTJ, a metal interconnection under the MTJ, and a second IMD layer around the metal interconnection. Preferably, the cap layer is a single layer structure made of dielectric material and an edge of the cap layer contacts the first IMD layer directly.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: October 3, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Yu-Ping Wang
  • Patent number: 11778924
    Abstract: A magnetic memory device includes a magnetic tunnel junction (MTJ) stack, a spin-orbit torque (SOT) induction wiring disposed over the MTJ stack, a first terminal coupled to a first end of the SOT induction wiring, a second terminal coupled to a second end of the SOT induction wiring, and a selector layer coupled to the first terminal.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: MingYuan Song, Shy-Jay Lin, William J. Gallagher, Hiroki Noguchi
  • Patent number: 11778918
    Abstract: A method for manufacturing a memory device includes forming a via trench in a substrate and forming a via in the via trench. A lower portion of the via includes a first metal and an upper portion of the via includes a second metal that is different from the first metal. The method further includes forming a magnetic tunneling junction over the via and forming a top electrode over the magnetic tunneling junction.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsiang-Ku Shen, Liang-Wei Wang, Dian-Hau Chen
  • Patent number: 11770979
    Abstract: A memory device includes a bottom electrode, a conductive layer such as an alloy including ruthenium and tungsten above the bottom electrode and a perpendicular magnetic tunnel junction (pMTJ) on the conductive layer. In an embodiment, the pMTJ includes a fixed magnet, a tunnel barrier above the fixed magnet and a free magnet on the tunnel barrier. The memory device further includes a synthetic antiferromagnetic (SAF) structure that is ferromagnetically coupled with the fixed magnet to pin a magnetization of the fixed magnet. The conductive layer has a crystal texture which promotes high quality FCC <111> crystal texture in the SAF structure and improves perpendicular magnetic anisotropy of the fixed magnet.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: September 26, 2023
    Assignee: Intel Corporation
    Inventors: Daniel Ouellette, Justin Brockman, Tofizur Rahman, Angeline Smith, Andrew Smith, Christopher Wiegand, Oleg Golonzka
  • Patent number: 11770978
    Abstract: A magnetization rotational element includes a spin-orbit torque wiring, and a first ferromagnetic layer which is located in a first direction with respect to the spin-orbit torque wiring and in which spins are injected from the spin-orbit torque wiring. The spin-orbit torque wiring has a plurality of spin generation layers and insertion layers located between the plurality of spin generation layers in the first direction. The insertion layers have a lower electrical resistivity than the spin generation layers.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: September 26, 2023
    Assignee: TDK CORPORATION
    Inventors: Yugo Ishitani, Tomoyuki Sasaki, Yohei Shiokawa
  • Patent number: 11770937
    Abstract: A magnetic memory device includes a substrate including a cell region and a peripheral circuit region, lower contact plugs on the cell region, data storage structures on the lower contact plugs, and a peripheral interconnection structure on the peripheral circuit region. The peripheral interconnection structure includes a line portion extending in a direction parallel to a top surface of the substrate, and contact portions extending from the line portion toward the substrate. A height of each of the contact portions is less than a height of each of the lower contact plugs.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: September 26, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Han-Na Cho, Bok-Yeon Won, Oik Kwon
  • Patent number: 11770981
    Abstract: Provided are a magnetoresistance effect element and a magnetic memory having a shape magnetic anisotropy and using a recording layer having an anti-parallel coupling. A first magnetic layer (3) and a second magnetic layer (5) of the magnetoresistance effect element include a ferromagnetic substance, have a magnetization direction variable to the direction perpendicular to a film surface and are magnetically coupled in an anti-parallel direction, and a junction size D (nm), which is a length of the longest straight line on an end face perpendicular to the thickness direction of the first magnetic layer (3) and the second magnetic layer (5), a film thickness t1 (nm) of the first magnetic layer (3), and a film thickness t2 (nm) of the second magnetic layer (5) satisfy relationships D<t1 and D?t1 or D?t1 and D<t2.
    Type: Grant
    Filed: February 19, 2019
    Date of Patent: September 26, 2023
    Assignee: TOHOKU UNIVERSITY
    Inventors: Hiroaki Honjo, Tetsuo Endoh, Shoji Ikeda, Hideo Sato, Koichi Nishioka
  • Patent number: 11765980
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming a memory cell. In some embodiments, a memory film is deposited over a substrate and comprises a bottom electrode layer, a top electrode layer, and a data storage film between the top and bottom electrode layers. A hard mask film is deposited over the memory film and comprises a conductive hard mask layer. The top electrode layer and the hard mask film are patterned to respectively form a top electrode and a hard mask over the top electrode. A trimming process is performed to decrease a sidewall angle between a sidewall of the hard mask and a bottom surface of the hard mask. An etch is performed into the data storage film with the hard mask in place after the trimming process to form a data storage structure underlying the top electrode.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: September 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Min-Yung Ko, Chern-Yow Hsu, Chang-Ming Wu, Shih-Chang Liu
  • Patent number: 11758821
    Abstract: A magnetic memory structure includes a heavy-metal layer, a plurality of magnetic tunneling junction (MTJ) layer, a conductive layer and an insulation layer. In an example, the pinned-layer of the MTJ layers are arranged in a string form and disposed over the barrier-layer. In an example also disclosed, the pinned-layer, the free-layer of the MTJ layers are arranged in a string form. Whereas the pinned-layers are disposed over the barrier-layer and the free-layers are disposed over the heavy-metal layer. The conductive layer is formed under the heavy-metal layer and includes a first conductive portion and a second conductive portion separated from each other and connected with two end of the heavy-metal layer respectively. The insulation layer fills up an interval between the first conductive portion and the second conductive portion. The conductive layer has an electric conductivity higher than that of the heavy-metal layer.
    Type: Grant
    Filed: December 8, 2021
    Date of Patent: September 12, 2023
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Ziaur Rahaman Shakh, I-Jung Wang, Jeng-Hua Wei
  • Patent number: 11751481
    Abstract: A Magnetic Tunnel Junction (MTJ) device can include a reference magnetic layer having one or more trenches disposed therein. One or more sections of a tunnel barrier layer can be disposed on the walls of the one or more trenches. One or more sections of a free magnetic layer can be disposed on the one or more sections of the tunnel barrier layer in the one or more trenches. One or more sections of a conductive layer can be disposed on the one or more sections of the free magnetic layer in the one or more trenches. One or more insulator blocks can be disposed between corresponding sections of the tunnel barrier layer, corresponding sections of the free magnetic layer and corresponding sections of the conductive layer in the one or more trenches.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: September 5, 2023
    Assignee: Integrated Silicon Solution, (Cayman) Inc.
    Inventor: Satoru Araki
  • Patent number: 11751486
    Abstract: A device including a templating structure and a magnetic layer is described. The templating structure includes D and E. A ratio of D to E is represented by D1-xEx, with x being at least 0.4 and not more than 0.6. E includes a main constituent. The main constituent includes at least one of Al, Ga, and Ge. E includes at least fifty atomic percent of the main constituent. D includes at least one constituent that includes Ir. D includes at least 50 atomic percent of the at least one constituent. The magnetic layer is on the templating structure and includes at least one of a Heusler compound and an L10 compound. The magnetic layer is in contact with the templating structure and being magnetic at room temperature.
    Type: Grant
    Filed: November 20, 2020
    Date of Patent: September 5, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jaewoo Jeong, Panagiotis Charilaos Filippou, Yari Ferrante, Chirag Garg, Stuart Stephen Papworth Parkin, Mahesh Samant
  • Patent number: 11744083
    Abstract: A semiconductor device structure includes a metallization stack comprising one or more patterned metal layers. A bi-layer dielectric cap is disposed on and in contact with the metallization stack. At least one memory device is disposed on the bi-layer dielectric cap. A method for forming the metallization stack includes receiving a structure comprising a metallization layer and a first dielectric cap layer formed over the metallization layer. The metallization layer includes a logic area and a memory area. At least one memory stack is formed over the first dielectric cap layer. A self-assembled monolayer is formed over and in contact with the memory stack. A second dielectric cap layer is formed on and in contact with the first dielectric cap layer. The second dielectric cap layer is not formed on the self-assembled monolayer.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: August 29, 2023
    Assignee: International Business Machines Corporation
    Inventors: Ashim Dutta, Ekmini Anuja De Silva, Chih-Chao Yang
  • Patent number: 11729996
    Abstract: An embedded eMRAM device for eFlash replacement including an MTJ pillar located between a top electrode and a bottom electrode for forming an MRAM array. The bottom electrode is disposed above a substrate and surrounded by a first dielectric spacer, while the top electrode is disposed above the MTJ pillar and surrounded by a second dielectric spacer. A bottom metal plate is disposed on opposing sides of the bottom electrode between first and second dielectric layers and is electrically separated from the bottom electrode by the first dielectric spacer. A top metal plate is disposed on opposing sides of the top electrode between third and fourth dielectric layers and is electrically separated from the top electrode by the second dielectric spacer. A bias voltage applied to the top metal plate and the bottom metal plate generates an external electric field on the MTJ pillar for creating a VCMA effect.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: August 15, 2023
    Assignee: International Business Machines Corporation
    Inventors: Heng Wu, Ruilong Xie, Julien Frougier, Bruce B. Doris
  • Patent number: 11723216
    Abstract: According to one embodiment, a magnetic memory device includes: a plurality of first films and a plurality of second films stacked alternately; a first insulating layer passing through the plurality of first and second films; a second insulating layer passing through the plurality of first and second films and in contact with a surface of the first insulating layer; a first magnet including a first pillar portion provided between the second insulating layer and the plurality of first and second films, and a first terrace portion coupled to one end of the first pillar portion; a first interconnect layer coupled to the other end of the first pillar portion of the first magnet; and a first magnetoresistance effect element coupled to the first terrace portion of the first magnet.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: August 8, 2023
    Assignee: Kioxia Corporation
    Inventor: Yasuhito Yoshimizu
  • Patent number: 11711925
    Abstract: A magnetic memory of an embodiment includes: a first magnetic member including a first and second portions and extending in a first direction; a first and second wirings disposed to be apart from the first magnetic member and extending in a second direction intersecting the first direction, the first and the second wirings being separated from each other in a third direction intersecting the first and second directions, the first magnetic member being disposed to be apart from a region between the first wiring and the second wiring in the first direction; and a second magnetic member surrounding at least parts of the first and second wirings, the second magnetic member including a third portion located to be more distant from the first magnetic member, a fourth portion located to be closer to the first magnetic member, and a fifth portion located in the region.
    Type: Grant
    Filed: March 1, 2021
    Date of Patent: July 25, 2023
    Assignee: Kioxia Corporation
    Inventors: Hiroki Tokuhira, Tsuyoshi Kondo, Mutsumi Okajima, Yoshihiro Ueda
  • Patent number: 11693068
    Abstract: An exchange-coupled film includes a antiferromagnetic layer and a pinned magnetic layer including a ferromagnetic layer stacked together, the antiferromagnetic layer having a structure including an IrMn layer, a first PtMn layer, a PtCr layer, and a second PtMn layer stacked in that order, the IrMn layer being in contact with the pinned magnetic layer. The second PtMn layer preferably has a thickness of more than 0 ? and less than 60 ?, in some cases. The PtCr layer preferably has a thickness of 100 ? or more, in some cases. The antiferromagnetic layer preferably has a total thickness of 200 ? or less, in some cases.
    Type: Grant
    Filed: June 24, 2021
    Date of Patent: July 4, 2023
    Assignee: ALPS ALPINE CO., LTD.
    Inventors: Masamichi Saito, Fumihito Koike
  • Patent number: 11675028
    Abstract: A magnetic sensor comprises a magnetoresistive effect element including a first side surface and a second side surface facing in opposite directions along a first axis and a first end surface and a second end surface facing in opposite directions along a second axis substantially orthogonal to the first axis. The sensor has a sensitivity axis extending in a direction of the first axis, a first yoke unit provided adjacent to the first side surface of the magnetoresistive effect element, and a first bias magnetic field generation unit provided adjacent to the first end surface of the magnetoresistive effect element. The first bias magnetic field generation unit is provided to be capable of applying a bias magnetic field on the magnetoresistive effect element and the first yoke unit.
    Type: Grant
    Filed: October 24, 2022
    Date of Patent: June 13, 2023
    Assignee: TDK Corporation
    Inventors: Kenichi Takano, Tsuyoshi Umehara, Yuta Saito, Hiraku Hirabayashi
  • Patent number: 11678588
    Abstract: A Hall effect device includes a semiconductor region and at least three contacts to the semiconductor region, which are arranged in the semiconductor region substantially along a line or curve. The line or curve functionally separates the semiconductor region in a first region and a second region. The Hall effect device further including a first electrode that is electrically isolated against the first region and a second electrode that is electrically isolated against the second region. Two of the at least three contacts supply electric energy to the first region and to the second region, and the remaining at least one contact taps an output signal of the first region and/or the second region that responds to a magnetic field component.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: June 13, 2023
    Assignee: Infineon Technologies AG
    Inventor: Udo Ausserlechner
  • Patent number: 11665973
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) stack on a substrate; forming a top electrode on the MTJ stack; performing a first patterning process to remove the MTJ stack for forming a first MTJ; forming a first inter-metal dielectric (IMD) layer around the first MTJ; and performing a second patterning process to remove the first MTJ for forming a second MTJ and a third MTJ.
    Type: Grant
    Filed: May 3, 2022
    Date of Patent: May 30, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Yu-Ping Wang
  • Patent number: 11665975
    Abstract: An apparatus is provided which comprises: a bit-line; a first word-line; a second word-line; and a source-line; a magnetic junction comprising a free magnet; an interconnect comprising spin orbit material, wherein the interconnect is adjacent to the free magnet of the magnetic junction; and a first device (e.g., a selector device) coupled at one end of the interconnect and to the second word-line; and a second device coupled to the magnetic junction, the first word-line and the source-line.
    Type: Grant
    Filed: June 19, 2018
    Date of Patent: May 30, 2023
    Assignee: Intel Corporation
    Inventors: Tanay Gosavi, Chia-Ching Lin, Sasikanth Manipatruni, Ian Young
  • Patent number: 11641782
    Abstract: The present disclosure relates to a spin-orbit torque-based switching device and a method of fabricating the same. The spin-orbit torque-based switching device of the present disclosure includes a spin torque generating layer provided with a tungsten-vanadium alloy thin film exhibiting perpendicular magnetic anisotropy (PMA) characteristics and a magnetization free layer formed on the spin torque generating layer.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: May 2, 2023
    Assignee: Korea University Research and Business Foundation
    Inventors: Young Keun Kim, Gyu Won Kim
  • Patent number: 11631781
    Abstract: A method of manufacturing display device is disclosed. A substrate includes a basal layer and metal contacts on the top surface. An insulation layer is disposed on the top surface and includes a first mounting surface and a bottom surface. Multiple grooves are formed on the insulation layer and each extends from the first mounting surface to the bottom surface. The grooves respectively correspond to the metal contacts and expose respective metal contacts. An electromagnetic force is provided with a direction from the basal layer toward the insulation layer. A droplet containing multiple micro components is provided on the first mounting surface. A configuration of an electrode of the micro component corresponds to a configuration of one of the grooves. The electrode is attracted to the corresponding groove by the electromagnetic force so as to electrically contact the metal contact.
    Type: Grant
    Filed: February 21, 2021
    Date of Patent: April 18, 2023
    Assignee: PlayNitride Inc.
    Inventors: Tzu-Yu Ting, Yu-Hung Lai, Hsiang-Wen Tang, Yi-Chun Shih
  • Patent number: 11631804
    Abstract: A perpendicular magnetization type three-terminal SOT-MRAM that does not need an external magnetic field is provided. A magnetoresistance effect element where a first magnetic layer/nonmagnetic spacer layer/recording layer are disposed in order, and the first magnetic layer and the nonmagnetic spacer layer are provided to a channel layer.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: April 18, 2023
    Assignee: TOHOKU UNIVERSITY
    Inventors: Yoshiaki Saito, Shoji Ikeda, Hideo Sato, Tetsuo Endoh
  • Patent number: 11605778
    Abstract: A magnetic field magnetic field sensor and method of making the sensor. The sensor and method of making the sensor may comprise a material or structure that prevents the admission of light in certain wavelengths to enhance the stability of the magnetic field sensor over a period of time. The sensor and method of making the sensor may comprise an adsorption prevention layer which protects the semiconductor portion of the magnetic. The sensor may also comprise an insulating layer formed between semiconductor layers and a substrate layer.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: March 14, 2023
    Assignee: Lake Shore Cryotronics, Inc.
    Inventors: David Daughton, Patrick Gleeson, Bo-Kuai Lai, Daniel Hoy
  • Patent number: 11600660
    Abstract: An ultra-fast magnetic random access memory (MRAM) comprises a three terminal bottom-pinned composite SOT magnetic tunneling junction (bCSOT-MTJ) element including (counting from top to bottom) a magnetic flux guide (MFG) having a very high magnetic permeability, a spin Hall channel (SHC) having a large positive spin Hall angle, an in-plane magnetic memory (MM) layer, a tunnel barrier (TB) layer, and a magnetic pinning stack (MPS) having a synthetic antiparallel coupling pinned by an antiferromagnetic material. The magnetic writing is significantly boosted by a combined effort of enhanced spin orbit torque (SOT) and Lorentz force generated by current-flowing wire (CFW) in the SHC layer and spin transfer torque (STT) by a current flowing through the MTJ stack, and further enhanced by a magnetic close loop formed at the cross section of MFG/SHC/MM tri-layer.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: March 7, 2023
    Inventors: Rongfu Xiao, Yimin Guo, Jun Chen
  • Patent number: 11587708
    Abstract: In one aspect, the disclosed technology relates to a magnetic device, which may be a magnetic memory and/or logic device. The magnetic device can comprise a seed layer; a first free magnetic layer provided on the seed layer; an interlayer provided on the first free magnetic layer; a second free magnetic layer provided on the interlayer; a tunnel barrier provided on the second free magnetic layer; and a fixed magnetic layer. The first free magnetic layer and the second free magnetic layer can be ferromagnetically coupled across the interlayer through exchange interaction.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 21, 2023
    Assignees: IMEC vzw, Katholieke Universiteit Leuven
    Inventors: Van Dai Nguyen, Sebastien Couet, Olivier Bultynck, Danny Wan, Eline Raymenants