With Fluid Means Patents (Class 269/20)
  • Patent number: 11794314
    Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: October 24, 2023
    Assignee: KLA Corporation
    Inventors: Lim Chow Tian, Rajeev Patil, Harit Maganlal Gadhia
  • Patent number: 11646390
    Abstract: A device for transferring micro light-emitting diodes includes a collection tube and an elastic port. The collection tube has a first end and a second end arranged oppositely, and a caliber of the collection tube is greater than a diameter of the micro light-emitting diodes. The elastic port is disposed at the first end, and a caliber of the elastic port is less than the diameter of the micro light-emitting diodes. The micro light-emitting diodes are pressed into the collection tube from the elastic port. The collection tube can store the micro light-emitting diodes. The device can effectively improve transfer speed.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: May 9, 2023
    Assignee: TCL CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Wei Zhang, Yang Sun, Minggang Liu, Shujhih Chen
  • Patent number: 11298803
    Abstract: A workpiece support includes a workpiece support element and a suction device. A workpiece is mounted on a workpiece side of the workpiece support element during machining. Towards a remote lower side, the workpiece support element is permeable to a waste air flow loaded with machining-related emissions. The suction device includes a vacuum generator and a suction line. The vacuum generator is configured to generate the waste air flow flowing from the workpiece side to the lower side, to suck off the waste air flow into the suction line in a flow direction and to subsequently discharge the waste air flow via the suction line. The suction line has a suction opening having a flow cross section which can be passed by the waste air flow in the flow direction. An opening width of the flow cross section and/or a position of the suction opening can be variably adjusted.
    Type: Grant
    Filed: June 15, 2020
    Date of Patent: April 12, 2022
    Assignee: TRUMPF Laser- und Systemtechnik GmbH
    Inventors: Martin Blaser, Gunter Fischer
  • Patent number: 11267090
    Abstract: A system for supporting workpieces comprises a base and a plurality of support members (1), each support member (1) comprising a plate (11) and means for positioning the plate (11) in relation to the base. In at least some of the support members (1). The means for positioning the plate (11) comprise at least three controllably extendable members (13) arranged for determining the position and inclination of the plate (11) in relation to the base, thereby allowing for controlled positioning of the plate (11) in relation to the base and for controlled inclination of the plate (11).
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: March 8, 2022
    Assignee: FUNDACIÓN TECNALIA RESEARCH & INNOVATION
    Inventors: Antonio Rubio Mateos, Asun Rivero Rastrero, Arantxa Apaolaza Arroyo
  • Patent number: 11007613
    Abstract: A swiveling device includes a housing, an output shaft mounted in the housing and led out of the housing, a drive arranged in the housing for swiveling the output shaft, a swiveling element connected for conjoint rotation to the output shaft in the region thereof which is led out of the housing, and with a receptacle mounted in the swiveling element and connected thereto, wherein the receptacle can be arranged at different angular positions. The swiveling device provides that the swiveling element has a receiving profile for the receptacle, and the receptacle has a mating profile which corresponds to the receiving profile, wherein the receiving profile and the mating profile are configured so that the profiles can be arranged in different positions of receptacle and swiveling element with respect to each other.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: May 18, 2021
    Assignee: UNIVER S.P.A.
    Inventor: Luciano Migliori
  • Patent number: 10987771
    Abstract: An air rest button system comprising a body element and a plunger element configured to accept a rest button. The plunger element generally is configured to be inserted into a base in the top of the body element. The plunger element in turn has a bore or hole therein configured to receiving an air rest button, which may be substituted for other air rest buttons, facilitating the modularity of the present system.
    Type: Grant
    Filed: January 26, 2018
    Date of Patent: April 27, 2021
    Assignee: Carr Lane Manufacturing Co.
    Inventors: Colin W. Frost, Joshua M. Herschbach
  • Patent number: 10875135
    Abstract: A machining tool assembly is provided for machining a blank to form a firearm lower receiver. The assembly includes a pair of side plates positionable on opposed sides of the blank to capture the blank therebetween. A template plate having a template aperture is adapted to be removeably attachable to the side plates. The template aperture is aligned with a top surface of the blank and is adapted for machining a cavity within the blank having a peripheral contour complimentary to a peripheral contour of the template aperture. A centering mechanism is adapted to be removeably attachable to the template plate, with the centering mechanism including an opening aligned with a corresponding void formed on the blank to align the blank with the template plate.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: December 29, 2020
    Assignee: 80 Percent Arms Inc.
    Inventor: Tilden Alan Smith
  • Patent number: 10794526
    Abstract: The invention relates to a sound absorber comprising a housing with an inlet for connection with the exhaust gas line of a suction gripper, the housing comprising at least one elastic segment comprising at least one though hole, and also to a process of sound absorption for a suction gripper. The application of pressurized exhaust gas to the elastic segment leads to its expansion and to enlargement of the opening of the through hole. The expansion and/or the elasticity of the elastic segment in which the through hole is arranged, and the passing of the exhaust gas through the opened through hole in the elastic segment reduce the sound emitted along with the exhaust gas.
    Type: Grant
    Filed: January 21, 2016
    Date of Patent: October 6, 2020
    Assignee: DEUTSCHES INSTITUT FUR LEBENSMITTELTECHNIK E.V.
    Inventor: Bernhard Hukelmann
  • Patent number: 10646978
    Abstract: The device (1) for locking workpieces on machine tools comprises:—a base body (2) fixable to a machine tool (M) and provided with an oil hydraulic cylinder (3, 4, 5); 5—a rod (8, 9) partly inserted in the oil hydraulic cylinder (3, 4, 5) slidably;—roto-translation means (14, 15, 16) designed to divide the motion of the rod (8, 9) into:—a first stretch (12) of roto-translation; and—a second stretch (13) of translation; 10—a clamp element (19, 20) associated with the rod (8, 9) and movable between:—a home configuration;—an intermediate configuration; and—an operating configuration; 15—at least a prismatic guiding body (21) associated with the base body (2) and prismatically couplable with the clamp element (19, 20) during the shifting of the rod (8, 9) along the second stretch (13).
    Type: Grant
    Filed: February 17, 2017
    Date of Patent: May 12, 2020
    Assignee: Hydroblock S.R.L.
    Inventor: Davide Zanni
  • Patent number: 10518390
    Abstract: The fluid clamp apparatus includes: a sliding piston member that vertically partitions its cylinder bore; first and second fluid pressure operation chambers; a fluid passage that, during an upward light-load stroke of the piston member, causes the back pressure in the second fluid pressure operation chamber to be received by the output rod to advance the output rod; a force multiplying mechanism that, during a heavy-load stroke of the piston member, multiplies the force acting on the piston member and transmits this force to the output rod; and a link mechanism that, during unclamping lowering operation of the piston member, links together the output rod and the piston member after lowering by a predetermined stroke amount.
    Type: Grant
    Filed: March 4, 2015
    Date of Patent: December 31, 2019
    Assignee: Pascal Engineering Corporation
    Inventor: Takuya Takahashi
  • Patent number: 10219970
    Abstract: A treatment device for medical and/or cosmetic therapy includes a negative-pressure chamber receiving a lower half of a person's body. The negative-pressure chamber is designed as a tube and has an admission opening sealed off from the person's body by a closure element. A first part of a table is arranged in the interior of the negative-pressure chamber. A second part of the table is arranged outside the negative-pressure chamber. The first part and the second part are each guided longitudinally on a linear guide. The first part can be moved at least partially out of the negative-pressure chamber and the second part can be moved away from the admission opening. A synchronization between the first part and the second part allows the first and second parts to be moved at the same speed in the same direction.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: March 5, 2019
    Assignee: WEYERGANS HIGH CARE AG
    Inventor: Rudolf Weyergans
  • Patent number: 10032601
    Abstract: A platen support structure adapted to thermally insulate a heated platen portion from a cold base plate while providing substantially leak-free gas transport therebetween and while allowing thermal expansion and contraction of the platen portion. Various examples provide of the support structure provide a tubular flexure having an internal gas conduit, a platen portion mounting tab connected to the flexure and having an internal gas input slot that is in fluid communication with the internal gas conduit of the flexure, the platen portion mounting tab being adapted for connection to a platen portion of a platen, and a base plate mounting tab connected to the flexure and having an internal gas output slot that is in fluid communication with the internal gas conduit of the flexure, the base plate mounting tab being adapted for connection to a base plate of the platen.
    Type: Grant
    Filed: February 21, 2014
    Date of Patent: July 24, 2018
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Roger B. Fish, Steven Anella, Todd Lewis MacEachern
  • Patent number: 9981831
    Abstract: A device for handling an artifact of substantially cylindrical shape, having a bed (10) and supporting means fixed to the bed (10) and connected to actuators. The supporting means being positioned along at least an arc of circumference lying in a plane orthogonal to the development axis ? of the bed (10) and having rolling elements (3) adapted to support and handle an artifact, at least one of them being motorized. Each rolling element (3) is connected to one of a plurality of corresponding actuators operatively connected to each other and adapted to regulate a movement of the rolling elements (3) in response to forces exerted by the artifact on each rolling element (3), in such a way as to distribute the forces uniformly on each rolling element (3) to position one or more resultants of the forces in one or more points.
    Type: Grant
    Filed: February 15, 2017
    Date of Patent: May 29, 2018
    Assignee: INDUSTRIE COMETTO S.P.A.
    Inventors: Pierluigi Terzuolo, Fabrizio Lippi
  • Patent number: 9884395
    Abstract: Provided is a machine tool which performs a cutting work on a workpiece, in which holes are provided at three or more points in a circumferential direction of a jig in the vicinity of a point at which the jig comes into contact with the workpiece when the workpiece is placed on the jig, and the workpiece is moved toward a rotation center of the jig by blowing air from an air supply unit toward the workpiece through the holes.
    Type: Grant
    Filed: June 19, 2015
    Date of Patent: February 6, 2018
    Assignee: FANUC CORPORATION
    Inventor: Shinji Okuda
  • Patent number: 9757900
    Abstract: A pin actuated printhead includes an orifice through which a material is ejected, a chamber to hold the material to be ejected, a channel connecting the chamber to the orifice, and an actuated pin, to enter the orifice and to eject the material from the orifice. The printhead is configured to eject a material with a viscosity of 10,000 cP or more at an elevated temperature.
    Type: Grant
    Filed: May 20, 2015
    Date of Patent: September 12, 2017
    Assignee: XEROX CORPORATION
    Inventors: Peter J. Nystrom, Barry P. Mandel, Andrew W. Hays, Jun Ma, David Allen Mantell, Gary D. Redding, Peter M. Gulvin
  • Patent number: 9669446
    Abstract: The die cushion force setting apparatus according to an aspect of the present invention allows die cushion forces (component forces) acting on plural driving shafts to be set easily, makes it easy to apply strong or weak die cushion forces to a complex-shaped drawn part in a plane of a cushion pad, and provides a smooth die cushion force distribution. An operator manually enters a total die cushion force, axial component force of a left front hydraulic cylinder, and center-of-force position by operating an input device. Based on the information entered via the input device, the numerical computing device B1 calculates axial component forces of three hydraulic cylinders through numerical computations. The one axial component force thus entered and three axial component forces thus computed numerically are set as the axial component forces of four hydraulic cylinders.
    Type: Grant
    Filed: June 13, 2014
    Date of Patent: June 6, 2017
    Assignee: AIDA ENGINEERING, LTD.
    Inventors: Yasuyuki Kohno, Kazufumi Tsuchida, Junji Makabe
  • Patent number: 9566678
    Abstract: A variable hydrostatic track system for vertical lathes includes a plurality of sectors arranged between the periphery and the central opening of an annular base. Each sector includes an upper housing with a hydraulic fluid outlet such that when the injected hydraulic fluid overflows from the housings, it forms a film between the rotating chuck and the sectors. The track system further includes a positioning mechanism having a plurality of hydraulic cylinders fixed on the annular base in a radial direction between the central opening and the sectors. The rod of each hydraulic cylinder is coupled to a piston and to one of the sectors. Each sector is guided in a radial guidance element such that, due to the action of the hydraulic cylinder, the sector is movable between an inner radial position and an outer radial position.
    Type: Grant
    Filed: November 15, 2010
    Date of Patent: February 14, 2017
    Assignee: BOST MACHINE TOOLS COMPANY, S.A.
    Inventors: Emilio Garcia Calderón, Elisabete Bengoechea Ubarrechena
  • Patent number: 9440322
    Abstract: In an object positioning and fixing device that positions and fixes a work pallet on a base member: a reference seating surface is formed on the base member; a contacting surface is formed on the work pallet; fitting cylindrical portions of a plurality of reference members are fixed in a plurality of fitting holes in the base member; a plurality of annular engagement members are installed in the work pallet; each of the reference members has an engagement projection; a base end contacting surface of the base end of the engagement projection is brought into contact with the reference seating surface so as to set the height position of the engagement projection; and the annular engagement member engaged over the outside of the engagement projection is elastically deformed in the radially outward direction so that it tightly contacts against the tapered engagement surface.
    Type: Grant
    Filed: February 13, 2013
    Date of Patent: September 13, 2016
    Assignee: Pascal Engineering Cooperation
    Inventor: Hiroaki Takai
  • Patent number: 9443542
    Abstract: An apparatus for securing an HGA to a tester includes a housing with a cylindrical cavity disposed about an axis, and having, at its top end, a mounting surface with a central aperture, for receiving an HGA base plate with a boss hole of the HGA overlying the central aperture. Axially elongated clamp fingers, radially dispersed about a spreader pin, move along the axis between (i) a loading position with upper ends extending through and relatively far beyond the central aperture, and (ii) a clamping position with the upper ends disposed at or near the mounting surface. With an HGA on the mounting surface, and the clamp fingers at their loading position, the clamp fingers are driven downward, while simultaneously, the clamp fingers are driven outward by the spreader pin, and the clamp fingers engage boss hole edges, securing the HGA to the tester.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: September 13, 2016
    Assignee: Guzik Technical Enterprises
    Inventors: Nahum Guzik, Wei Zhuang, Konstantin Perevoztchikov
  • Patent number: 9406542
    Abstract: A holding device including a first sucking section for sucking a wafer (substrate) from a side on which a dicing tape (supporting film) is adhered; a structure that supports a dicing frame (frame part) and covers a first region which (i) is on a surface of the dicing tape to which surface the wafer is not adhered and (ii) is between the wafer and the dicing frame; and a second sucking section for sealing a boundary between the structure and at least one of the dicing frame and the first region.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: August 2, 2016
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventor: Atsushi Miyanari
  • Patent number: 9205533
    Abstract: One example of the present disclosure relates to a method of processing first and second workpieces. The method includes constraining the second workpiece; abutting first and second workpieces together to form a joint; applying first and second selectively adjustable forces against the first workpiece to bias the first workpiece against the second workpiece; friction stir welding the first and second workpieces along the joint; maintaining the forces equal to each other while friction stir welding; and automatically varying at least one of the forces responsive to thermal size variations of the first and second workpieces. An apparatus for carrying out this method is also provided.
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: December 8, 2015
    Assignee: The Boeing Company
    Inventors: Mike P. Matlack, Kurt A. Burton, John A. Baumann
  • Patent number: 9027914
    Abstract: An optical fiber fusion splicer includes: a windshield cover having a rotating shaft and rotating around the rotating shaft so as to be openable and closable; a cable member wrapping unit coupled and fixed to the windshield cover on the same axis as the rotating shaft of the windshield cover or formed as a portion of the windshield cover, the cable member wrapping unit being rotatable in a normal direction or in a reverse direction around the rotating shaft; a first cable member winding unit that is a rotary pulley, a non-rotary pulley, or a rotary gear; and a closed-loop member including a deformable cable member wound around the cable member wrapping unit and the first cable member winding unit, the closed-loop member constituting a closed loop.
    Type: Grant
    Filed: November 27, 2013
    Date of Patent: May 12, 2015
    Assignee: Fujikura Ltd.
    Inventor: Katsumi Sasaki
  • Publication number: 20150115513
    Abstract: A clamp for selectively inhibiting movement of a first object relative to a second object includes (i) a first clamp component coupled to the first object; (ii) a second clamp component coupled to the second object; and (iii) a fluid source that directs a fluid to the second clamp component to create a fluid bearing between the first clamp component and the second clamp component that allows for movement of the first clamp component relative to the second clamp component, and wherein the fluid source directs less fluid to the second clamp component to inhibit relative movement.
    Type: Application
    Filed: October 28, 2014
    Publication date: April 30, 2015
    Inventors: Fardad A. Hashemi, Travis D. Bow, Patrick Chang
  • Publication number: 20150104909
    Abstract: An approach is provided for aligning and leveling a chip package portion. The approach involves filling, at least partially, a reservoir formed between a first sidewall portion having a first slanted surface and a second sidewall portion having a second slanted surface with a fluid. The approach also involves placing a chip package portion into the reservoir. The approach further involves draining the fluid from the reservoir to cause the chip package portion to align with respect to a center of the reservoir. The chip package portion aligns with respect to the center of the reservoir and levels based on a relationship between the chip package portion, an angle of the first slanted surface, an angle of the second slanted surface, and the fluid. The chip package portion is secured in the aligned and leveled state by a molding compound.
    Type: Application
    Filed: October 11, 2013
    Publication date: April 16, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jui Hsieh LAI, Ying-Hao KUO, Kuo-Chung YEE
  • Publication number: 20150014908
    Abstract: The present invention provides a work piece chuck of manipulator in the field of mechanical technology. The chuck comprises a chuck sleeve and an ejector pin set within the chuck sleeve. An elastic clamping element is provided at the front end of the chuck sleeve. The ejector pin could move between a first position and a second position along the axial direction of the chuck sleeve. When the ejector pin is in the first position, the outer circumference of the ejector pin extrudes the clamping element to distort and expand outward to form an expansion state. When the ejector pin is in the second position, the outer circumference of the ejector pin is out of contact with the clamping element to restore the clamping element. The chuck has a number of advantages including firm connection, high reliability and high use value.
    Type: Application
    Filed: June 30, 2014
    Publication date: January 15, 2015
    Applicant: TAIZHOU FEDERAL ROBOT TECHNOLOGY CO., LTD
    Inventor: Qiyue Chen
  • Patent number: 8931769
    Abstract: The invention relates to a deblocking device and an associated method for deblocking optical workpieces, for example, eyeglass lenses. The deblocking device has a first moving apparatus for rotating a workpiece blocked on a block piece about a workpiece rotational axis, a nozzle assembly having a nozzle for discharging a high-pressure pressure medium jet in a direction substantially perpendicular to the workpiece rotational axis onto an edge area between the workpiece and block piece, and a second moving apparatus for generating a relative motion between the workpiece and the nozzle along the workpiece rotational axis.
    Type: Grant
    Filed: August 14, 2010
    Date of Patent: January 13, 2015
    Assignee: Satisloh AG
    Inventors: Gregor Pavel, Thorsten Kraft, Holger Schäfer
  • Patent number: 8919754
    Abstract: A mandrel for producing a fiber-reinforced composite part, in particular a blade for a wind turbine is disclosed. The mandrel includes an expandable body with an outer surface onto which a fiber material of the fiber-reinforced composite part is layable out. The expandable body is expandable in an expanded state, wherein in the expanded state the outer surface forms an interior shape of the fiber-reinforced composite part to be produced. Moreover, the expandable body is collapsible in a collapsed state.
    Type: Grant
    Filed: March 4, 2011
    Date of Patent: December 30, 2014
    Assignee: Siemens Aktiengesellschaft
    Inventor: Karsten Schibsbye
  • Patent number: 8899565
    Abstract: A sputtering device includes a chamber; and a substrate transferring unit for loading a substrate into, or unloading the substrate from the chamber, the substrate transferring unit including a gas injection assembly forming a gas cushion between the substrate and an upper surface of the substrate transferring unit.
    Type: Grant
    Filed: June 9, 2010
    Date of Patent: December 2, 2014
    Assignee: LG Display Co., Ltd.
    Inventor: Sung Eun Kim
  • Patent number: 8899245
    Abstract: Machine (10) and method for treating containers (12) of liquids comprising in succession at least a loading station (15), into which the containers (12) to be treated are loaded, and all disposed according to a determinate first orientation, and a washing station (17), in which the containers (12) are subjected at least to washing and are disposed in a second orientation able to promote the fall due to gravity of the dirt and/or washing liquid present in the containers (12). The machine (10) comprises, downstream of the washing station (17) and outside it, a manipulator device (41) which automatically rotates the containers (12) exiting form the washing station (17) so as to reposition the containers (12) according to the first determinate orientation.
    Type: Grant
    Filed: May 31, 2010
    Date of Patent: December 2, 2014
    Assignee: Steelco SpA
    Inventor: Fabio Zardini
  • Publication number: 20140346723
    Abstract: The present invention relates to a method and apparatus to be used when welding two abutting sections of pipe or tubing, and also to purge blocks for establishing a localized inert atmosphere inside two abutting pipe sections in the region of a desired weld joint. The present invention comprises an inflatable bladder with elongated engaging members that can be removable positioned within the ends of two abutting pipe sections in order to center the two abutting sections of pipe and create the purge block.
    Type: Application
    Filed: August 11, 2014
    Publication date: November 27, 2014
    Inventor: John M. Boatner, JR.
  • Publication number: 20140339750
    Abstract: The present invention is an improved cutting board device. The device allows a user to prepare food on one side of the cutting board while the other is being cleaned. The device provides a user a quick and easy transition to a new, clean, cutting board work surface without the need to carry waste to a disposal bin, without having to stop to wash and dry the soiled surface of the cutting board.
    Type: Application
    Filed: July 30, 2014
    Publication date: November 20, 2014
    Inventors: John Constantino, JR., John Constantino, SR.
  • Patent number: 8860940
    Abstract: A method and system of aligning color filter array are disclosed. Other embodiments are disclosed herein.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: October 14, 2014
    Assignee: Arizona Board of Regents, a body corporate of the State of Arizona, Acting for and on behalf of Arizona State University
    Inventors: Cynthia Bell, John Stowell, Donald E. Adams
  • Publication number: 20140283368
    Abstract: A group of fixtures for thin-walled shell/cylindrical components (10) while they are being machined internally and externally, has a mounting base (1) having mounting holes, positioning pins and clamps to locate one end of the thin-walled component. A supporting arbour or cylinder (5) is fixed in the base. A circular lid (12) is fixed to the supporting arbour or cylinder and has a wedged step to locate the other end of the cylindrical component for internal and external machining, or the major open end of shell component for internal machining. A pair of modified vehicle wheel inner tubes (8) are disposed around the supporting arbour or cylinder. A multi-layered sacrificial liner (7) surrounds the pressure element and is adapted to fit between it and the thin-walled components.
    Type: Application
    Filed: March 24, 2014
    Publication date: September 25, 2014
    Applicant: THE UNIVERSITY OF SHEFFIELD
    Inventor: Zunmin GENG
  • Publication number: 20140265093
    Abstract: A workpiece adjustment assembly is disclosed. The assembly can include a shaft, a spherical bearing, and a wafer support. A spherical housing receives the spherical bearing and allows the bearing to rotate therein. The housing and bearing may form an air bearing. A seal may be formed in the housing to prevent gas from the air bearing and the ambient atmosphere from migrating to a process chamber side of the housing. A set of spherical air pads may be positioned on an ambient side of the bearing to press the bearing against the housing when the process chamber is not under vacuum conditions. The seal can include a set of differentially pumped grooves. The spherical bearing enables the wafer manipulation end, and a wafer attached thereto, to be moved with four degrees of freedom. The arrangement facilitates isocentric scanning of a workpiece. Methods for using the assembly are also disclosed.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: James P. Buonodono, Michael Esposito
  • Publication number: 20140232051
    Abstract: In a clamping device, a detection mechanism detects a state of clamping/unclamping and includes: a detected body that moves together with a piston and a piston rod; a circuit board disposed to face the detected body and capable of detecting the position of the detected body; and an indicator lamp that is connected to the circuit board and is lit/extinguished depending on the state of clamping/unclamping. By pressing a setting button provided on the detection mechanism when the rotation angle of the arm is changed, the second detection position of the circuit board for detecting the unclamped state is changed, making it possible to detect the detected body at a newly set detection position.
    Type: Application
    Filed: August 23, 2012
    Publication date: August 21, 2014
    Applicant: SMC KABUSHIKI KAISHA
    Inventor: Takuya Higurashi
  • Patent number: 8807551
    Abstract: A clamping system for the purpose of securing clamping blocks in place on a clamping bar, wherein each clamping block comprises at least one swivel element with a clamping lever disposed thereon, which swivel element laterally projects from the clamping bar, thereby making it possible for the clamping lever to engage in a recess or under a projection of the clamping bar where it is able to interact with the clamping bar, thus producing a clamped connection.
    Type: Grant
    Filed: November 27, 2009
    Date of Patent: August 19, 2014
    Assignee: ZeroClamp GmbH
    Inventor: Klaus Hofmann
  • Publication number: 20140209578
    Abstract: A stage unit may include a frame, a first guide device, a stage, a second guide device and a pad. The first guide device may be arranged over an upper surface of the frame and configured to guide the stage in a first direction. T he stage may be movably connected to the first guide device. The second guide device may be arranged over an upper surface of the stage and configured to guide the pad in a second direction substantially perpendicular to the first direction. The pad may be movably connected to the second guide device and configured to support a substrate. Therefore, the substrate may be supported by and uniformly floated by the frame, the stage and the pad.
    Type: Application
    Filed: August 8, 2013
    Publication date: July 31, 2014
    Applicant: Samsung Display Co., Ltd.
    Inventor: Hiroyuki FUJITA
  • Patent number: 8777197
    Abstract: An annular piston is vertically movable and rotatable. A guide groove is provided in an outer peripheral portion of the annular piston, and an engaging ball to be fitted into the guide groove is provided on an inner peripheral wall of a cylinder hole. A transmission mechanism prevents the clamp rod and the annular piston from rotating relatively to each other and permits them to move relatively to each other in a vertical direction. When the clamp rod is moved from a released raised position to a locked lowered position, the annular piston descends while rotating via a rotational groove and the engaging ball, and the annular piston causes the clamp rod to rotate, causing the clamp rod to descend straight down.
    Type: Grant
    Filed: January 17, 2011
    Date of Patent: July 15, 2014
    Assignee: Kosmek Ltd.
    Inventor: Hideaki Yokota
  • Patent number: 8770563
    Abstract: A vacuum hold-down system for use with workpieces of various shapes and/or sizes is disclosed. The system comprising a vacuum hold-down table defining a mask support plane and an apertured vacuum table mask which is selectably positionable on said mask support plane, wherein said vacuum hold-down table and said vacuum table mask is configured to define a plurality of selectable different contiguous arrays of vacuum apertures, by suitable relative positioning of said vacuum table mask and said vacuum hold-down table in said mask support plane.
    Type: Grant
    Filed: January 14, 2011
    Date of Patent: July 8, 2014
    Assignee: Orbotech Ltd.
    Inventor: Asher Katz
  • Publication number: 20140174655
    Abstract: A chemical mechanical polishing to that can provide uniform polishing across a wafer even when polishing hard wafers such as AlTiC wafers used in the formation of magnetic recording sliders. The chemical mechanical polishing to has a wafer carrier that includes a diaphragm or bladder that is configured such that an inner portion of the bladder can be pneumatically pressurized so as to bow outward, while outer portions remain unpressurized.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Applicant: HGST NETHERLANDS B.V.
    Inventors: Sergey Grinberg, David A. Hansen, Tom K. Harris, III, Junsheng Yang, Honglin Zhu
  • Patent number: 8746666
    Abstract: A media carrier, adapted to hold a plurality of pieces of magnetic media, is disclosed. This media carrier can be placed on the workpiece support, or platen, allowing the magnetic media to be processed. In some embodiments, the media carrier is designed such that only one side of the magnetic media is exposed, requiring a robot or other equipment to invert each piece of media in the carrier to process the second side. In other embodiments, the media carrier is designed such that both sides of the magnetic media are exposed. In this scenario, the media carrier is inverted on the platen to allow processing of the second side.
    Type: Grant
    Filed: May 5, 2011
    Date of Patent: June 10, 2014
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Richard Hertel, Julian Blake, Edward Macintosh, Alexander Kontos, Frank Sinclair, Christopher Rowland, Mayur Jagtap, Sankar Ganesh Kolappan
  • Patent number: 8746664
    Abstract: A clamp has a housing with a piston assembly positioned in the housing. A detent mechanism is coupled with the piston rod and is positioned in the housing. A clamping arm is coupled with the piston rod. The clamping arm is moved by a biasing mechanism from a position parallel to the piston rod, when in a retracted position, to a position substantially perpendicular to the piston rod, when in a clamping position.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: June 10, 2014
    Assignee: Delaware Capital Formation, Inc.
    Inventor: Matthew Rentz
  • Patent number: 8728334
    Abstract: A protective chuck is disposed on a substrate with a gas layer between the bottom surface of the protective chuck and the substrate surface. The gas layer protects a surface region against a fluid layer covering the substrate surface. In some embodiments, the pressure fluctuation at the gas layers is monitored, and through the dynamic feedback, the gas flow rate can be adjusted to achieve a desired operation regime. The dynamic control of operation regime setting can also be applied to high productivity combinatorial systems having an array of protective chucks.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: May 20, 2014
    Assignee: Intermolecular, Inc.
    Inventor: Rajesh Kelekar
  • Patent number: 8684344
    Abstract: A protective envelope for a lid of a plastic cup comprises a vacuous plastic film stuck on the top of the lid which was beforehand vaporized by an antiseptic liquid, without alcohol, then dried. The plastic film includes a detachable part, activated by a thread to be pulled, which is positioned above the opening to drink of the lid. So, when a consumer is ready to drink, he removes the detachable part by pulling the thread, so freeing the opening to drink. With such protection the lid is protected from bacteria and virus which can cause diseases. In brief, the steps of conception of the antiseptic lid are: to vaporize the lid with an antiseptic liquid without alcohol, to dry the lid, to put a thin film of plastic onto the lid by positioning the detachable part over the drink opening and to stick the film onto the lid by means of a vacuum.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: April 1, 2014
    Inventor: Pierre Stewart
  • Patent number: 8684343
    Abstract: A composite fabrication vent assembly for connection to an inflatable bladder, the combination of a vent assembly and an inflatable bladder, and a method of mechanically connecting a vent assembly and a bladder. The vent assembly comprises a body member having a first clamping surface, a clamping member having a second clamping surface, and a carriage member interconnecting the body member and the clamping member, with the first and second clamping surfaces in opposing relationship. With the open end of an inflatable bladder inserted between the opposed clamping surfaces, the carriage member is adapted to translate the body member and clamping member toward one another to form an airtight seal with the inflatable bladder. A controlled source of pressurized gas, connected to a gas inlet of the vent assembly, can then inflate and deflate the bladder in a controlled manner through one or more passageways in the vent assembly.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: April 1, 2014
    Assignee: Rubbercraft Corporation of California Ltd
    Inventors: Alan D. Hiken, David H. Lee, Robert L. Harshberger, Leo H. Phan, Rufino Santos
  • Patent number: 8671533
    Abstract: A gripper device (10) is provided for mounting rubber elastic rings (5) on the inner wall (62) of a workpiece opening and/or on the exterior of a workpiece. The device includes a basic housing (12), forming jaws (14) that are displaced in relation to the basic housing (12) and bearing jaws (16). To displace the plate element together with the jaws that are located on the element in an axial direction, the element is provided with a piston (20) which engages in a piston cylinder (22) in the basic housing. The displacement of the jaws that are located on the plate element (18) is mechanically coupled by a common actuator (24) and the actuator (24) is driven by an actuator piston (25) that is located in the piston (20).
    Type: Grant
    Filed: August 10, 2007
    Date of Patent: March 18, 2014
    Assignee: Schunk GmbH & Co. KG Spann-und Greiftechnik
    Inventors: Matthias Haag, Ralf Winkler, Andre Hermes
  • Patent number: 8662554
    Abstract: Disclosed is a vacuum pick-up end effecter to pick and place a component in a manufacturing process. The vacuum pick-up end effecter may comprise: a vacuum path to provide a vacuum flow to pick-up the component; and a pin moveably mounted within the vacuum pick-up end effecter. When the component is picked-up by the vacuum flow, the pin abuts against the component and is moved to a first position and, when the vacuum flow is cut-off to place the component, the pin moves to a second position and pushes against the component to aid in releasing the component.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: March 4, 2014
    Assignee: Western Digital Technologies, Inc.
    Inventors: Jakkapong Srisupun, Somchai Laksanasittiphan, Komgrit Sungkhaphong
  • Publication number: 20140048993
    Abstract: The described embodiment relates generally to the use of a specialized workpiece fixture to keep a workpiece surface covered with cutting fluid during a machining operation. More specifically the specialized workpiece fixture allows a downward facing undercut area to remain covered with coolant by utilizing nozzles arranged underneath the undercut area for coolant delivery.
    Type: Application
    Filed: August 17, 2012
    Publication date: February 20, 2014
    Applicant: Apple Inc.
    Inventor: Piotr S. TRZASKOS
  • Patent number: 8646764
    Abstract: The invention relates to a negative pressure clamp that includes a bearing plate including a plurality of chambers into each of which gives a suction duct, said working plate being covered with a flexible and formable working plate having suction openings formed therein for drawing a part to be maintained and perforations in which are inserted the lugs of the bearing plate arranged about the chambers.
    Type: Grant
    Filed: August 28, 2008
    Date of Patent: February 11, 2014
    Assignee: Cirtes SRC
    Inventors: Claude Barlier, Thibaut Jannot, Rudy Michel, Romain Siegel
  • Publication number: 20140020233
    Abstract: A clearance increasing jig of a heat transfer tube, includes: a jig main body inserted into a clearance between adjacent heat transfer tubes; an inflow hole provided in the jig main body and configured to allow a fluid to flow into the jig main body; and an increasing unit provided in the jig main body and configured to increase the clearance as the fluid flows into the jig main body.
    Type: Application
    Filed: February 15, 2013
    Publication date: January 23, 2014
    Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD.
    Inventors: Takeshi Yamamoto, Kenichi Kawanishi, Masahito Matsubara, Yoshihisa Fujiwara, Tomochika Hamamoto, Yukihide Shimazu