Fluent Material Supply Or Flow Directing Means Patents (Class 313/231.01)
  • Patent number: 11963287
    Abstract: Some embodiments herein are directed to devices and methods for automatically starting a plasma utilizing a wand. In some embodiments, the wand may be used to start a plasma in a plasma torch such as, for example, a microwave plasma torch or an induction plasma torch, as discussed below. The wand may comprise an elongate, hollow wand member comprising a closed distal end, a proximal end, and one or more apertures extending from a hollow interior of the wand member to an exterior surface of the wand member; and an elongate wire member positioned within the hollow interior of the wand member and extending along at least a portion of a length of the wand member, wherein the wire member is configured to be placed in operable communication through the aperture with a power source, such that the power source can be activated to in turn start the plasma within the plasma torch.
    Type: Grant
    Filed: September 20, 2021
    Date of Patent: April 16, 2024
    Assignee: 6K Inc.
    Inventors: Zongren Shang, Michael C. Kozlowski
  • Patent number: 11821625
    Abstract: Aspects of the invention are directed to systems and apparatuses for efficiently burning fuels. According to one aspect of the invention, apparatus for efficiently burning hydrocarbons includes a housing having a first opening for receiving a fuel, a second opening for expelling the fuel, and a tubular passageway extending between the first opening and the second opening. The tubular passageway includes a central region and an outer region surrounding the central region. The apparatus also includes a plurality of magnets disposed within the passageway. Each of the magnets has a spherical or an ovoid shape. The plurality of magnets define void spaces for passing the fuel such that a central flow rate of the fuel in the central region of the passageway is equivalent to the an outer flow rate of the fuel in an outer region of the passageway.
    Type: Grant
    Filed: June 25, 2018
    Date of Patent: November 21, 2023
    Assignee: Temple University of the Commonwealth System of Higher Education
    Inventors: Oleksandr Diloyan, Haykazuni Andreasyan
  • Patent number: 11600971
    Abstract: A prechamber spark plug. The prechamber spark plug includes: a housing, and a cap which has at least one pass-through opening, the cap being situated at a combustion chamber-side end of the housing. The cap and the housing form a prechamber. An outer cap surface area of the cap, which faces away from the prechamber, has at least one predefined ratio to respectively one further geometric feature of the cap.
    Type: Grant
    Filed: March 25, 2020
    Date of Patent: March 7, 2023
    Assignee: ROBERT BOSCH GMBH
    Inventors: Bernd Mueller, Stephan Kaske, Thomas Steidten, Ugur Yilmaz
  • Patent number: 11400465
    Abstract: An electrode device includes a discharge electrode and a counter electrode, and discharges when a voltage is applied across the discharge electrode and the counter electrode. The discharge electrode is a columnar electrode having a discharge portion on its front end. The counter electrode faces the discharge portion. The counter electrode has a peripheral electrode portion and a projecting electrode portion. The peripheral electrode portion is disposed to surround an axis of the discharge electrode. The projecting electrode portion projects from a part of the peripheral electrode portion toward the axis of the discharge electrode. A distance from the peripheral electrode portion to the discharge portion is shorter than a distance from the projecting electrode portion to the discharge portion.
    Type: Grant
    Filed: February 20, 2020
    Date of Patent: August 2, 2022
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Hayato Kikuchi, Yasunori Matsui, Hiroyuki Inoue, Yohei Ishigami, Masato Kinoshita
  • Patent number: 11367587
    Abstract: A gas field ionization source for forming an electric field for ionizing gas comprises: an emitter tip having a tip end; an extraction electrode facing the emitter tip and having an aperture at a position distant therefrom; a gas supply means for supplying the gas in the vicinity of the emitter tip; a vacuum partition made of a metal having a hole; and a high voltage power source for applying voltage between the emitter tip and the extraction electrode. The hole is constructed so that the tip end of the emitter tip can pass therethrough and the vacuum partition has a micro protrusion, around the hole, protruding toward a side of the extraction electrode.
    Type: Grant
    Filed: March 9, 2020
    Date of Patent: June 21, 2022
    Assignee: HITACHI, LTD.
    Inventor: Shinichi Matsubara
  • Patent number: 10784721
    Abstract: Aspects of the subject disclosure may include, regulating an alternating magnetic flux in a magnetic core having a first portion separable from a second portion of the magnetic core. The regulation of the alternating magnetic flux causes a coupling force between the first portion of the magnetic core and the second portion of the magnetic core. Responsive to detecting a signal, modifying the regulation of the alternating magnetic flux to reduce the coupling force between the first portion of the magnetic core and the second portion of the magnetic core. Other embodiments are disclosed.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: September 22, 2020
    Assignee: AT&T Intellectual Property I, L.P.
    Inventors: Giovanni Vannucci, Farhad Barzegar, Harold Rappaport, Irwin Gerszberg, Thomas M. Willis, III, Paul Shala Henry, Robert Bennett, Donald J. Barnickel
  • Patent number: 10384214
    Abstract: An electrostatic collector including: a collection chamber delimited by a tubular wall oriented along a first axis; a collection electrode configured to be disposed inside the collection chamber against the wall; a discharge electrode, of elongate form, that extends along the first axis and includes an end, in a shape of a tip, the end being disposed opposite the collection electrode; a first part of a first diameter, emerging on the tip-shaped end, a second part of a second diameter, the second diameter being greater than or equal to twice the first diameter, the second diameter for example being between 2 and 6 times the first diameter; and a sudden widening, extending between the first part and the second part.
    Type: Grant
    Filed: June 25, 2015
    Date of Patent: August 20, 2019
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Jean-Maxime Roux, Roland Sarda Esteve
  • Patent number: 10245338
    Abstract: A solution for generating ultraviolet diffusive radiation is provided. A diffusive ultraviolet radiation illuminator includes at least one ultraviolet radiation source located within a reflective cavity that includes a plurality of surfaces. At least one of the plurality of surfaces can be configured to diffusively reflect at least 70% of the ultraviolet radiation and at least one of the plurality of surfaces can be configured to transmit at least 30% of the ultraviolet radiation and reflect at least 10% of the ultraviolet radiation.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: April 2, 2019
    Assignee: Sensor Electronic Technology, Inc.
    Inventors: Saulius Smetona, Alexander Dobrinsky, Yuri Bilenko, Michael Shur
  • Patent number: 10150120
    Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: December 11, 2018
    Assignee: Edwards Limited
    Inventors: Andrew James Seeley, Alexander Michael Pope, Thomas Frank Cohn
  • Patent number: 9939132
    Abstract: Shielding radio frequency interference (RFI) using reflector optics is disclosed. A simplified non-sealed reflector is used in conjunction with a mounting system, resulting in desired amounts of visible and non-visible light using radio frequency driven luminaries and emitters without sacrificing output or coverage area. Configurations are disclosed such that achieved RF grounding is compliant with FCC regulations. Accordingly, the disclosed RFI shielding improves optical design options, increased output, and decreased manufacturing costs over traditional sealed enclosures.
    Type: Grant
    Filed: July 17, 2015
    Date of Patent: April 10, 2018
    Assignee: IUNU, INC.
    Inventors: Adam Phillip Takla Greenberg, Kyle Terrence James Rooney, Travis Anthony Conrad
  • Patent number: 9928992
    Abstract: A plasma generation device includes: a pair of electrodes that cause plasma to be generated in atmospheric pressure by a voltage being applied between the pair of electrodes; and a power source that includes a step-up transformer that has a coupling coefficient of 0.9 or greater and 0.9999 or less and generates the voltage.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: March 27, 2018
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Yoshihiro Sakaguchi, Shin-Ichi Imai
  • Patent number: 9865436
    Abstract: The present invention provides a charged particle source comprising a plasma processing chamber that has a plasma source, a gas supply and an ion extraction grid that are each operatively connected to the processing chamber. A conducting plate is located adjacent to a wall of the plasma source. The conducting plate has a surface with a plurality of grooves that face the wall of the plasma source. A substrate support is disposed within an interior portion of the processing chamber for supporting a substrate.
    Type: Grant
    Filed: July 10, 2016
    Date of Patent: January 9, 2018
    Assignee: PLASMA-THERM NES LLC
    Inventors: Sarpangala H. Hegde, VIncent Lee
  • Patent number: 9685295
    Abstract: Provided herein are electron emission devices and device components for optical, electronic and optoelectronic devices, including cantilever-based MEMS and NEMS instrumentation. Devices of certain aspects of the invention integrate a dielectric, pyroelectric, piezoelectric or ferroelectric film on the receiving surface of a substrate having an integrated actuator, such as a temperature controller or mechanical actuator, optionally in the form of a cantilever device having an integrated heater-thermometer. Also provided are methods of making and using electron emission devices for a range of applications including sensing and imaging technology.
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: June 20, 2017
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: William P. King, Lane W. Martin, Patrick C. Fletcher
  • Patent number: 9610587
    Abstract: An electrostatic collection device of particles in suspension in a gas including a collecting chamber with a collecting wall, part of which forms a collecting electrode. The collecting electrode faces a discharge electrode in the form of a wire, so as to create a corona discharge between the discharge electrode and the collecting electrode, the collecting wall extends to the periphery of the discharge electrode. The discharge electrode is maintained at a first end by a first holder and at the second end by a second holder, both holders made of electrically insulating material(s). At least one traversal wall protrudes from the collecting wall, and has a shape adapted to deflect the path of a liquid present in the gas and flowing on the collecting wall to the transversal wall such that it does not come into contact with the second holder.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: April 4, 2017
    Assignee: Commissariat á l'ènergie atomique et aux ènergies alternatives
    Inventor: Jean-Maxime Roux
  • Patent number: 9593996
    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: March 14, 2017
    Assignee: MKS Instruments, Inc.
    Inventor: Gerardo A. Brucker
  • Patent number: 9562942
    Abstract: A probe apparatus can suppress a spark from occurring near a wafer surface simply and efficiently when inspecting electrical characteristics of a semiconductor device at wafer level. A spark preventing device 50 mounted in the probe apparatus includes a surrounding member 52 which surrounds probe needles 24G and 24S between a probe card 16 and a mounting table 12; and a gas supply device 54 configured to supply a gas to a vicinity of the probe needles 24G and 24S through an inside or a vicinity of the surrounding member 52 to form an atmosphere of a preset pressure higher than an atmospheric pressure in the vicinity of the probe needles 24G and 24S when inspecting the electrical characteristics of each chip on a semiconductor wafer W. A contact plate 34 also serves as the surrounding member 52.
    Type: Grant
    Filed: July 11, 2014
    Date of Patent: February 7, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Eiichi Shinohara, Kenji Yamaguchi, Masataka Hatta
  • Patent number: 9410910
    Abstract: A sensor for measuring conductivity of a fluid containing dissolved ions, particularly for measuring conductivity of salt water, features a cylindrical tube (57) of poorly conductive material such as glass, a first electrode (51A) and a second electrode (51B) inside the tube, connected together (56) to maintain a common electrical potential, a first transformer (52,53) concentrically arranged around the tube (57) to drive current through the fluid in the tube, and a second transformer (54, 55) arranged to sense a value of the current flowing in the fluid, and a digital processing circuit (62) coupled to receive an output signal of the second transformer, and to derive therefrom a value representing the conductivity of the fluid. The sensor is adapted to be towed behind a research ship, or to be deployed on an autonomous underwater vehicle (AUV) or the like. Current signals are preferably processed by digital switching measurement technology (dMST).
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: August 9, 2016
    Assignee: D-2 INC.
    Inventor: Alan J Fougere
  • Patent number: 9041272
    Abstract: A liquid-filled light emitting diode (LED) bulb including a base, a shell connected to the base forming an enclosed volume, a thermally conductive liquid held within the enclosed volume, a support structure connected to the base, and several LEDs attached to the support structure. The thermally conductive liquid has an oxygen content of at least 5 cubic centimeters of oxygen per liter of the thermally conductive fluid.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: May 26, 2015
    Assignee: Switch Bulb Company, Inc.
    Inventors: Brian Cumpston, David Horn, Ronan Le Toquin
  • Patent number: 8969838
    Abstract: A device is described herein which may comprise a chamber, a fluid line, a pressurized source material in the fluid line, a component restricting flow of the source material into the chamber, a sensor measuring flow of a fluid in the fluid line and providing a signal indicative thereof, and a pressure relief valve responsive to a signal to reduce a leak of source material into the chamber in the event of a failure of the component.
    Type: Grant
    Filed: July 23, 2009
    Date of Patent: March 3, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Georgiy O. Vaschenko, Krishna Ramadurai, Richard Charles Taddiken
  • Publication number: 20150024582
    Abstract: A method of making a Si containing gas distribution member for a semiconductor plasma processing chamber comprises forming a carbon member into an internal cavity structure of the Si containing gas distribution member. The method includes depositing Si containing material on the formed carbon member such that the Si containing material forms a shell around the formed carbon member. The Si containing shell is machined into the structure of the Si containing gas distribution member wherein the machining forms gas inlet and outlet holes exposing a portion of the formed carbon member in an interior region of the Si containing gas distribution member.
    Type: Application
    Filed: October 9, 2014
    Publication date: January 22, 2015
    Inventor: Travis Robert Taylor
  • Patent number: 8796652
    Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: August 5, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Alan Panzer
  • Patent number: 8759788
    Abstract: In one embodiment an ion source includes an arc chamber and an emitter having a surface disposed in the arc chamber, where the emitter is configured to generate a plasma in the arc chamber. The ion source further includes a repeller having a repeller surface positioned opposite the emitter surface, and a hollow cathode coupled to the repeller and configured to provide a feed material into the arc chamber.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: June 24, 2014
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventor: Neil Bassom
  • Publication number: 20140055024
    Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.
    Type: Application
    Filed: August 22, 2012
    Publication date: February 27, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventor: Frank Goerbing
  • Publication number: 20140048705
    Abstract: A particle inlet system comprises a first chamber having a limiting orifice for an incoming gas stream and a micrometer controlled expansion slit. Lateral components of the momentum of the particles are substantially cancelled due to symmetry of the configuration once the laminar flow converges at the expansion slit. The particles and flow into a second chamber, which is maintained at a lower pressure than the first chamber, and then moves into a third chamber including multipole guides for electromagnetically confining the particle. The vertical momentum of the particles descending through the center of the third chamber is minimized as an upward stream of gases reduces the downward momentum of the particles. The translational kinetic energy of the particles is near-zero irrespective of the mass of the particles at an exit opening of the third chamber, which may be advantageously employed to provide enhanced mass resolution in mass spectrometry.
    Type: Application
    Filed: October 30, 2013
    Publication date: February 20, 2014
    Applicant: UT-BATTELLE, LLC
    Inventor: Peter T.A. Reilly
  • Patent number: 8581484
    Abstract: A liquid metal ion gun 3 includes a liquid metal ion source 31 and a beam limiting aperture 33. The liquid metal ion source 31 includes a reservoir 36 and an emitter 35. The reservoir 36 is made of tungsten (W) and holds liquid metal gallium (Ga). The emitter 35 is made of W. The beam limiting aperture 33 is formed with a liquid metal member 44 made of Ga placed on a base 46 made of W, has an opening 41 that enables an ion beam 2 extracted from the liquid metal ion source 31 to pass therethrough, and limits the diameter of the ion beam 2. The beam limiting aperture 33 has a groove structure 45 that causes the liquid metal 44 to gather into a region located around the opening 41. The lifetime of the beam limiting aperture can be increased, and an emission can be maintained stable for a long time period and reproducibly restored to a stable state.
    Type: Grant
    Filed: May 14, 2010
    Date of Patent: November 12, 2013
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hiroyasu Kaga, Kanehiro Nagao, Motohide Ukiana
  • Patent number: 8568663
    Abstract: The present invention provides a glow discharge cell comprising an electrically conductive cylindrical vessel having a first end and a second end, and at least one inlet and one outlet; a hollow electrode aligned with a longitudinal axis of the cylindrical vessel and extending at least from the first end to the second end of the cylindrical vessel, wherein the hollow electrode has an inlet and an outlet; a first insulator that seals the first end of the cylindrical vessel around the hollow electrode and maintains a substantially equidistant gap between the cylindrical vessel and the hollow electrode; a second insulator that seals the second end of the cylindrical vessel around the hollow electrode and maintains the substantially equidistant gap between the cylindrical vessel and the hollow electrode; a non-conductive granular material disposed within the gap, wherein the non-conductive granular material (a) allows an electrically conductive fluid to flow between the cylindrical vessel and the hollow electrode
    Type: Grant
    Filed: August 2, 2012
    Date of Patent: October 29, 2013
    Assignee: Foret Plasma Labs, LLC
    Inventor: Todd Foret
  • Patent number: 8563924
    Abstract: An ionization device comprises: a plasma source configured to generate a plasma. The plasma comprises light, plasma ions and plasma electrons. The plasma source comprises an aperture disposed such that at least part of the light passes through the aperture and is incident on a gas sample. The ionization device further comprises an ionization region; and a plasma deflection device comprising a plurality of electrodes configured to establish an electric field, wherein the electric field substantially prevents the plasma ions from entering the ionization region.
    Type: Grant
    Filed: June 28, 2011
    Date of Patent: October 22, 2013
    Assignee: Agilent Technologies, Inc.
    Inventors: James Edward Cooley, Sameer Kothari
  • Patent number: 8448419
    Abstract: An electrospray source useful for a variety of applications and including an emitter with a porous media flow distributor having a surface forming multiple Taylor cones. A casing about the porous media flow distributor controls the direction of a working fluid through the porous media. An extractor is at a potential different than the emitter for forming the Taylor cones. A guard electrode is disposed between the emitter and the extractor and is at or above the potential of the emitter for shaping the electric field formed between the emitter and the extractor.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: May 28, 2013
    Assignee: Busek Company, Inc.
    Inventors: Nathaniel Demmons, Vlad Hruby, Douglas Spence, Thomas Roy
  • Patent number: 8439649
    Abstract: A sputter ion pump including an evacuateable envelope having a chamber, first and second cathodes and an anode disposed in the chamber. The anode can have an outer layer of a non-evaporable getter (NEG) material so as to permit NEG pumping of gases by the anode. In another aspect of the invention, the anode can be formed with spaced-apart first and second sheet portions disposed in juxtaposition to each other and having a plurality of holes extending through the sheets for forming a plurality of anode cells.
    Type: Grant
    Filed: November 2, 2009
    Date of Patent: May 14, 2013
    Assignee: Duniway Stockroom Corp.
    Inventors: Sherman Lloyd Rutherford, Jeffrey Richard Winkler
  • Patent number: 8324591
    Abstract: A method for generating a pulsed flux of energetic particles comprises the following steps: —initiating an ion plasma at a first electrode (111) in a vacuum chamber (110) and allowing said plasma to develop towards a second electrode (112) in said vacuum chamber, —at a time at which said ion plasma is in a transitional state with a space distribution of ions or electrons at a distance from said second electrode, applying between said electrodes a short high voltage pulse so as to accelerate said distributed ions or electrons towards said second electrode, whereby a high-energy flux of charged particles is generated while overcoming the space charge current limit of a conventional vacuum diode, and —generating said energetic particles at said second electrode (112). A particle source is also disclosed. Application in particular to ultra-short pulse neutron generation.
    Type: Grant
    Filed: July 25, 2007
    Date of Patent: December 4, 2012
    Assignee: Sage Innovations Inc.
    Inventor: Peter Choi
  • Patent number: 8304744
    Abstract: A closed drift ion source is provided, having an anode that serves as both the center magnetic pole and as the electrical anode. The anode has an insulating material cap that produces a closed drift region to further increase the electrical impedance of the source. The ion source can be configured as a round, conventional ion source for space thruster applications or as a long, linear ion source for uniformly treating large area substrates. A particularly useful implementation uses the present invention as an anode for a magnetron sputter process.
    Type: Grant
    Filed: October 19, 2007
    Date of Patent: November 6, 2012
    Assignee: General Plasma, Inc.
    Inventor: John Eric Madocks
  • Patent number: 8278810
    Abstract: The present invention provides a glow discharge cell comprising an electrically conductive cylindrical vessel having a first end and a second end, and at least one inlet and one outlet; a hollow electrode aligned with a longitudinal axis of the cylindrical vessel and extending at least from the first end to the second end of the cylindrical vessel, wherein the hollow electrode has an inlet and an outlet; a first insulator that seals the first end of the cylindrical vessel around the hollow electrode and maintains a substantially equidistant gap between the cylindrical vessel and the hollow electrode; a second insulator that seals the second end of the cylindrical vessel around the hollow electrode and maintains the substantially equidistant gap between the cylindrical vessel and the hollow electrode; a non-conductive granular material disposed within the gap, wherein the non-conductive granular material (a) allows an electrically conductive fluid to flow between the cylindrical vessel and the hollow electrode
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: October 2, 2012
    Assignee: Foret Plasma Labs, LLC
    Inventor: Todd Foret
  • Publication number: 20120146507
    Abstract: An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.
    Type: Application
    Filed: March 25, 2011
    Publication date: June 14, 2012
    Inventors: Tatsuya Yanagida, Osamu Wakabayashi
  • Patent number: 8198793
    Abstract: A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: June 12, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Fu-Ching Tung, Tean-Mu Shen, Jung-Chen Ho, Pei-Shan Wu, Chia-Ming Chen, Kuan-Chou Chen, Jung-Chen Chien, Muh-Wang Liang
  • Patent number: 8101922
    Abstract: A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.
    Type: Grant
    Filed: July 3, 2008
    Date of Patent: January 24, 2012
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Dieter Winkler, Thomas Jasinski, Udo Weigel
  • Patent number: 8080927
    Abstract: A device for protecting against lightning and overvoltages includes two electrodes closing off, in a gas tight manner, both end faces of a cylinder made of insulating material, and defining a discharge chamber in the interior of the chamber thus formed. At least one step is provided in the chamber in the contact area of at least one of the electrodes and the cylinder such that the chamber extends outwards past the internal wall of the cylinder.
    Type: Grant
    Filed: December 21, 2009
    Date of Patent: December 20, 2011
    Assignee: EPCOS AG
    Inventors: Juergen Boy, Gero Zimmermann, Thomas Westebbe
  • Patent number: 8048329
    Abstract: A method for minimizing microwave leakage into processing chamber of a microwave plasma system is provided. The method includes securing plasma traps to a plasma tube assembly, which is a cylindrical structure positioned upstream from the processing chamber and has a plasma-sustaining region. The plasma traps are electrically conductive disks surrounding the cylindrical structure and are positioned upstream from the processing chamber. The plasma traps include at least two electrically conductive disks. Each electrically conductive disk includes corrugated outer surfaces with plurality of corrugated peaks. The corrugated outer surface of the first electrically conductive disk is facing a corrugated outer surface of the second electrically conductive disk in a space-apart relationship to form an interstitial region between the electrically conductive disks.
    Type: Grant
    Filed: July 16, 2009
    Date of Patent: November 1, 2011
    Assignee: Lam Research Corporation
    Inventors: Mohammad Kamarehi, Ing-Yann Albert Wang
  • Patent number: 8040030
    Abstract: The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.
    Type: Grant
    Filed: May 8, 2007
    Date of Patent: October 18, 2011
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Jeroen Jonkers, Dominik Marcel Vaudrevange
  • Patent number: 7910896
    Abstract: A micro discharge device (MDD) ionizer and a method for fabricating the MDD ionizer are disclosed. The MDD ionizer includes a dielectric barrier having a first open end connected to an electrically conductive capillary tube and a second open end connected to a sample collection capillary tube. A circular high voltage electrode can be positioned around the dielectric barrier in close linear proximity to the conductive capillary tube and sealed by a non-conductive epoxy. A plasma discharge can be formed in a flow path through the dielectric barrier when an AC potential is applied between the high voltage electrode and the electrically conductive capillary tube utilizing an electronic controller. Such a plasma discharge in the flow path of the sample achieves soft ionization of gaseous sample molecules. The high pressure region generally occurs in the plasma region (where the ionization occurs). The ions thus are drawn (i.e.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: March 22, 2011
    Assignee: Honeywell International Inc.
    Inventors: Terry M. Marta, Fouad Nusseibeh, Adam Dewey McBrady, Michael Rhodes
  • Patent number: 7900525
    Abstract: A pre-assembled, disposable cathode handler assembly facilitates automated or manual loading of a cathode with analyte for spectrometric analysis and is intended for a single use application. This cathode handler assembly is comprised of several parts which work cooperatively together to stabilize a separate cathode and direct an analyte into the cathode. A stopper and channeling unit are disposed in supporting interconnection with the cathode so as to maintain it in a stable orientation for loading. The channeling unit may be used in combination with a liner which also interacts with the cathode to guide the analyte into an interior chamber therein, and further contains an analyte cap holder. A stopper prevents the introduced analyte from escaping the cathode and a housing is connected exteriorly of the cathode and supporting components to further stabilize the cathode during the loading procedure. A loading base may be integrated to assist in manual loading of a cathode.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: March 8, 2011
    Inventor: Darden Gwaltney Hood
  • Patent number: 7884546
    Abstract: An electrodeless discharge lamp apparatus is provided which is increased in heat dissipation, making it possible to adapt to an increase in output of the apparatus. The electrodeless discharge lamp apparatus comprises a bulb containing a discharge gas and a coupler accommodated in a cavity formed in the bulb for generating a high frequency electromagnetic field. The coupler has: an induction coil; a core inserted into the coil; a heat conductor for conducting heat generated from the coil and the core; and a bobbin made of resin which accommodates the core and the heat conductor therein, and which has the coil wound therearound. The bobbin is designed to be separated in a radial direction of the coil, so that it is possible to separately mold the respective parts of the bobbin.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: February 8, 2011
    Assignees: Panasonic Electric Works Co., Ltd., Ikeda Electric Co., Ltd.
    Inventors: Hiroshi Ogasawara, Hiroshi Miyasaki, Hidenori Kakehashi, Keisuke Harada, Yoshinobu Shibata
  • Publication number: 20100264825
    Abstract: An ion source for generating a particle beam includes a plasma chamber and an electrode, which extends up to the plasma chamber. A gas that is to be ionized is introduced into the ion source via a gas line, which extends over the entire length of the electrode in parallel with the electrode such that the gas flows out of the gas line in immediate proximity to an entry to the plasma chamber.
    Type: Application
    Filed: April 12, 2010
    Publication date: October 21, 2010
    Inventor: THOMAS UHL
  • Patent number: 7768185
    Abstract: The present invention discloses a new type of electrodeless light sources, which can be achieved by radiating microwave on an inorganic carbide with electrical conductivity. The inorganic carbide can be carbon nanotubes (CNTs), or graphite-related fiber materials with well-order crystalline structure. The inorganic carbides of the present invention also emit high-brightness white light source in low vacuum condition (less than 10 torr) and induce plasma gas discharge emission in the presence of a trace of inert gas molecules such as nitrogen and argon. The electrodeless light source of the present invention not only emits high-brightness light emissions but also performs low thermal-radiation conversion.
    Type: Grant
    Filed: December 28, 2005
    Date of Patent: August 3, 2010
    Inventors: Kuan-Jiuh Lin, Jun-Wei Su
  • Publication number: 20100123381
    Abstract: A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.
    Type: Application
    Filed: March 26, 2009
    Publication date: May 20, 2010
    Applicant: Industrial Technology Research Institute
    Inventors: FU-CHING TUNG, Tean-Mu Shen, Jung-Chen Ho, Pei-Shan Wu, Chia-Ming Chen, Kuan-Chou Chen, Jung-Chen Chien, Muh-Wang Liang
  • Patent number: 7709790
    Abstract: A method and apparatus of combining an ion volume, a lens stack, and an ion optic that similarly cooperates with a detached multipole ion guide is herein incorporated into a single sub-assembly that can be removed from a mass spectrometer instrument without venting. Such an arrangement allows an operator to clean all parts of the ion path that get contaminated in normal operation, reassemble and reinsert in a timely manner and then pump down to an acceptable vacuum without having to vent the system.
    Type: Grant
    Filed: April 1, 2008
    Date of Patent: May 4, 2010
    Assignee: Thermo Finnigan LLC
    Inventors: George B. Guckenberger, Joseph B. Wieck, Edward B. McCauley, Scott T. Quarmby
  • Publication number: 20100059689
    Abstract: Provided is an ionization emitter which can reduce a dead volume without deteriorating separating capacity. An ionization emitter (2) is provided with a tip (1) composed of a columnar or conical porous self-standing structure, and a channel for supplying a solution sample into the tip (1) from the base end side of the tip (1). The channel is formed by filling a pipe line with a packing, and the tip (1) is exposed from the pipe line of the channel. The packing and the porous self-standing structure constituting the tip (1) have an integrated structure composed of a same porous body formed at the same time.
    Type: Application
    Filed: January 7, 2008
    Publication date: March 11, 2010
    Inventors: Shigeyoshi Horiike, Hiroaki Nakanishi
  • Publication number: 20100018185
    Abstract: The invention relates to a field effect emitter for a field emission thruster or colloid thrusters, that comprises first and second revolution parts (110, 120) defining an inner tank (160) for supplying a conductive liquid metal or ionic liquid, and a circular slot (170) for communication between the inner tank (160) and an outlet opening (171). The first part (110) includes a polished outer face (111) and an inner face (112) made by precision-machining and having conical portions with a predetermined single slope of between 5 and 8°. The second part (120) includes an inner face (121) and an outer face (122) made by precision-machining and having conical portions with a predetermined single slope of between 5 and 8°.
    Type: Application
    Filed: February 21, 2008
    Publication date: January 28, 2010
    Applicant: SNECMA
    Inventor: Dominique Valentian
  • Publication number: 20090206721
    Abstract: The present invention provides a glow discharge cell comprising an electrically conductive cylindrical vessel having a first end and a second end, and at least one inlet and one outlet; a hollow electrode aligned with a longitudinal axis of the cylindrical vessel and extending at least from the first end to the second end of the cylindrical vessel, wherein the hollow electrode has an inlet and an outlet; a first insulator that seals the first end of the cylindrical vessel around the hollow electrode and maintains a substantially equidistant gap between the cylindrical vessel and the hollow electrode; a second insulator that seals the second end of the cylindrical vessel around the hollow electrode and maintains the substantially equidistant gap between the cylindrical vessel and the hollow electrode; a non-conductive granular material disposed within the gap, wherein the non-conductive granular material (a) allows an electrically conductive fluid to flow between the cylindrical vessel and the hollow electrode
    Type: Application
    Filed: February 13, 2009
    Publication date: August 20, 2009
    Applicant: Foret Plasma Labs, LLC
    Inventor: Todd Foret
  • Patent number: 7564190
    Abstract: A light source device comprises a waveguide, an electrodeless lamp, a probe, and conversing means. The waveguide is formed to contain a medium enabling a microwave to resonate and has a surface and an aperture cavity with an aperture opened at a predetermined position of the surface. The electrodeless lamp is loaded in the aperture cavity in a state where part of the electrodeless lamp is protruded from the surface of the waveguide so that the part of the electrode lamp emits light in response to applying the microwave to the electrodeless lamp. The probe supplies a high-frequency signal to the waveguide so that the high-frequency signal is converted to the microwave in the waveguide. The converging means is disposed on the surface of the waveguide to face the aperture cavity and utilizes all the light emitted from the part of the electrodeless lamp to converge the light.
    Type: Grant
    Filed: June 8, 2007
    Date of Patent: July 21, 2009
    Assignee: Victor Company of Japan, Ltd.
    Inventor: Ryusaku Takahashi
  • Patent number: 7492098
    Abstract: An electrodeless discharge lamp comprising: an airtight container bulb made of a transparent material and enclosing a discharge gas; and a coupler (coil assembly body), contained in a cavity formed in the bulb, for generating a high frequency electromagnetic field by conducting a high frequency current in a coil to excite the discharge gas so as to emit light, wherein the coupler comprises: a pipe-shaped cylinder formed of a thermal conductor for heat release; a skeleton-shaped bobbin mounted on an outer surface of the cylinder along an axial direction of the cylinder; a core made of a soft magnetic material provided at an opening formed by the skeleton of the bobbin and being in substantial surface contact with the cylinder; and a coil wound around a surface of the skeleton-shaped bobbin and the core.
    Type: Grant
    Filed: October 24, 2003
    Date of Patent: February 17, 2009
    Assignee: Panasonic Electric Works Co., Ltd.
    Inventors: Hidenori Kakehashi, Shohei Yamamoto, Koji Hiramatsu, Shinji Hizuma, Keisuke Harada, Yoshinobu Shibata