Plural Linear-movement Motors Patents (Class 318/38)
  • Patent number: 10944315
    Abstract: Drive coils in sections of a linear motor track that are normally used to electromagnetically propel movers along the track when such movers are nearby can be used to generate a mid-bus voltage for the section when not being used to propel movers. Such drive coils not being used to propel movers are considered “idle” and available for mid-bus voltage generation. The mid-bus voltage, and a full-bus voltage from which the mid-bus voltage is derived, in turn, can be applied across other drive coils that are near movers with varying polarities and magnitudes to propel movers along the track. Track sensors can be positioned along the track to detect presences or absences of movers with respect to drive coils for determining propulsion of such movers or generation of the mid-bus voltage. Accordingly, power supplies can be used more efficiently by not requiring them to generate mid-bus voltages in addition to full-bus voltages and DC references.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: March 9, 2021
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: Patrick E. Ozimek, Jonathan D. Hoffman
  • Patent number: 10226868
    Abstract: The present disclosure provides a post position adjustment device, a cassette adjustment device and a substrate conveyance system. The post position adjustment device includes: a post-picking-and-placing unit configured to pick a post out from current positioning hole and install the post into a target positioning hole; a movement mechanism configured to move the post-picking-and-placing unit; and a movement control unit configured to control the movement mechanism to move the post-picking-and-placing unit to a source position where the post is currently located, and after the post has been picked out from the current positioning hole by the post-picking-and-placing unit, control the movement mechanism to move the post-picking-and-placing unit to a target position.
    Type: Grant
    Filed: June 7, 2016
    Date of Patent: March 12, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yangkun Jing, Shengguang Sang
  • Patent number: 10186990
    Abstract: A driving apparatus which reduces power consumption as compared to conventional driving apparatuses. A voltage amplitude of first AC voltages is controlled based on a relative angle between a moving direction of a moving body, which is indicated by a driving command for moving the moving body, and a driving direction of a first vibrator, and a voltage amplitude of second AC voltages is controlled based on a relative angle between the moving direction and a driving direction of a second vibrator. Each of the first vibrator and the second vibrator is controlled based on a deviation between the driving command and a detected position of the moving body while the first AC voltages and the second AC voltages are being controlled. The driving direction of the first vibrator and the driving direction of the second vibrator cross each other.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: January 22, 2019
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Jun Sumioka
  • Patent number: 10065806
    Abstract: A plurality of diverters each selectively divert at least one article moving member having a diverting member from a non-diverting path extending longitudinally along said sorter to a diverting rails in a diverting state. At least one of the diverters has a gate having a diverting surface. The gate is selectively rotatable between the diverting state and a non-diverting state about a generally horizontal axis. An actuator moves the gate between the non-diverting state and the diverting state. The actuator is an electrically operated rotary actuator that is rotatable about another generally horizontal axis of rotation.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: September 4, 2018
    Assignee: Dematic Corp.
    Inventors: Jeffrey S. DeVries, Martin J. Stanish, Thomas H. Triesenberg, Randall J. Carlson
  • Patent number: 9958852
    Abstract: A runtime coordination subsystem allows programmers of multi-mover, linear motion systems to provide simple commands to the movers without concern for the presence of other movers on the track. The runtime coordination subsystem manages proper separation distances to prevent collisions and automatically queue movers in contention situations. In addition the runtime coordination subsystem permits a specialized multi-mover command controlling movers in unison with constant separation.
    Type: Grant
    Filed: January 25, 2016
    Date of Patent: May 1, 2018
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: Jatin Bhatt, Bohumir Sladek, Bhanu Gouda, Jesse Dunham
  • Patent number: 9588444
    Abstract: A balance mass system shared by a workpiece stage and a mask stage includes a balance mass and an anti-drift and compensation apparatus (16). The balance mass includes a first part (11) for mounting thereon a workpiece stage system, a second part (20) for mounting thereon a mask stage system, and a third part (14) for interconnecting the first part (11) and the second part (20). The first part (11) of the balance mass is floatingly supported on a base frame (1) of a lithography machine, and the third part (14) of the balance mass is in connection with the base frame (1) via the anti-drift and compensation apparatus (16). The anti-drift and compensation apparatus (16) is disposed in proximity to the center of gravity of the balance mass as a whole.
    Type: Grant
    Filed: September 23, 2013
    Date of Patent: March 7, 2017
    Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
    Inventor: Tianming Wang
  • Publication number: 20150137712
    Abstract: Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.
    Type: Application
    Filed: November 19, 2014
    Publication date: May 21, 2015
    Inventors: Kamal Youcef-Toumi, Iman Soltani Bozchalooi, Andrew Careaga Houck
  • Patent number: 8952645
    Abstract: In the case of speed-regulated high-power drives and with simultaneously high demands on accuracy or dynamics, the object of the invention is to reduce a very high level of complexity of the power electronics (high clock frequency), the motor (high precision) and mechanical transmission (low-play transmission elements). For this purpose, the invention proposes a drive device for rotational and/or t translational movements. The drive has a plurality of drives for the joint, mechanically coupled driving of a working machine or for moving a mass. It also has a control device. At least one drive is intended to provide the power (as a power drive). At least one further drive is provided and mechanically coupled as a servo-drive for controlling or regulating the accuracy and/or dynamics of the overall drive. The control device controls and regulates the at least two mechanically coupled drives.
    Type: Grant
    Filed: December 27, 2007
    Date of Patent: February 10, 2015
    Assignee: Lenze Automation GmbH
    Inventor: Carsten Fraeger
  • Patent number: 8896241
    Abstract: A controlled motion system having a plurality of movers controlled as they travel along both smart and simple sections of a track. The controlled motion system comprises a control system for controlling the speed of a mover as it travels along a simple section, and permits the pitch or distance between movers to increase or decrease as they travel along a simple section. In a preferred embodiment the controlled motion system includes at least one coupling feature having a driving feature on a simple section for engaging and operably driving a driven feature on each mover such that positive control of each mover is maintained throughout its transition from a smart section to a simple section.
    Type: Grant
    Filed: November 16, 2012
    Date of Patent: November 25, 2014
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: Glen C. Wernersbach, Keith G. Jacobs
  • Patent number: 8823292
    Abstract: An electric compressor, wherein an inverter device, which controls the operation of an electric motor by commands from an external control unit, is provided with a drive IC which computes drive signals of the electric motor based on the same, a switching circuit which converts the drive signals to rotation control signals of the electric motor, and an output signal control IC which cuts off input of the drive signals to the switching circuit at the time of an abnormality and wherein, furthermore, the drive IC is provided with a comparator which compares drive signals which are input to the switching circuit and computed values of the drive signals at a control unit inside the drive IC and, when the drive signals and the computed values do not match, the comparator makes the output signal control IC cut off input of the drive signals to the switching circuit.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: September 2, 2014
    Assignee: DENSO CORPORATION
    Inventors: Tomoyuki Sumi, Hiroshi Amano
  • Patent number: 8796959
    Abstract: A linear motor system includes a discontinuous linear motor and motor control device. The discontinuous linear motor includes a mover and a plurality of individual motors spaced from each other along a movement path of the mover. Each of the individual motors functions as an armature on a primary side of one independent linear motor. A sensor, arranged to act as a linear scale, is disposed for each individual motor and detects a position of the mover. The motor control device includes a plurality of individual motor control units and a multiple unit controller to comprehensively control the individual motor control units. The individual motor control units control the individual motors disposed in curved path sections, and each of the individual motor control units includes a curved-line correspondence corrector to correct a detection value obtained from the sensor according to a relationship between a curved line of the path and a position of the sensor.
    Type: Grant
    Filed: April 22, 2013
    Date of Patent: August 5, 2014
    Assignee: Murata Machinery, Ltd.
    Inventor: Tomoki Sato
  • Patent number: 8680793
    Abstract: A machine has a rotor and includes a converter-controlled drive and a working machine, wherein the drive and the working machine are connected such that a torque is transmitted. A frequency converter is electrically connected to the drive. The frequency converter is embodied such that in a Campbell diagram intersection points are based on the natural torsional frequency of the rotor and V-shaped symmetrical straight lines of the inter-harmonic exciter frequency for output frequencies. The output frequencies are grouped into a plurality of concentration ranges based upon a rotational speed of the machine, wherein each concentration range comprises output frequencies which are close to one another and which respectively have a common output point on the abscissa of the Campbell diagram. Each concentration range defines a blocking range, wherein the machine has an operating rotational speed range which lies outside the blocking ranges.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: March 25, 2014
    Assignee: Siemens Aktiengesellschaft
    Inventors: Volker Hütten, Norbert Wagner
  • Patent number: 8577585
    Abstract: A transportation system for use in transporting commodities is described herein. The transportation system includes a transportation network that includes a plurality of predefined paths of travel extending between a plurality of locations, and a plurality of transport vehicles. Each transport vehicle of the plurality of transport vehicles is configured to independently travel along the transportation network. A plurality of motor assemblies is oriented along the transportation network. Each motor assembly of the plurality of motor assemblies is oriented with respect to a predefined segment of the transportation network, and configured to move the transport vehicle along the predefined segment. A control system is operatively coupled to each motor assembly to selectively operate each motor assembly to independently convey each transport vehicle of the plurality of transport vehicles along the transportation network.
    Type: Grant
    Filed: January 3, 2012
    Date of Patent: November 5, 2013
    Assignee: The Boeing Company
    Inventors: Robert J. Atmur, Deborah Ann Beron-Rawdon
  • Patent number: 8446112
    Abstract: The instant invention provides a magnetically controlled reciprocating engine having a unique electromagnet control system. The engine is constructed and arranged to operate from a stored power source such as batteries to provide extended run times by controlling the power supplied to the electromagnets in a manner that controls heat generation within the electromagnetic coils, thereby increasing coil life. The control system is also capable of controlling engine speed and/or torque outputs to make the engine versatile for a wide variety of uses. The system is constructed and arranged to be utilized on new or pre-existing engines of various configurations and may be utilized in other industries or devices that benefit from the use of electromagnets.
    Type: Grant
    Filed: April 24, 2012
    Date of Patent: May 21, 2013
    Assignee: Magnetic Miles, LLC
    Inventors: Stephen Miles, Michael Cristoforo
  • Patent number: 8324848
    Abstract: A system for maintaining thermal stability of a motion stage driven by a motor comprises a motion current generator operative to produce a motion current to drive the motion stage to move and a thermal current generator operative to produce a thermal current to dissipate heat in the motion stage for controlling a temperature of the motion stage without producing corresponding movement of the motion stage. A summation controller is operative to combine the motion current with the thermal current, and to produce a combined current output to the motor.
    Type: Grant
    Filed: February 5, 2009
    Date of Patent: December 4, 2012
    Assignee: ASM Assembly Automation Ltd
    Inventors: Gary Peter Widdowson, Wai Chuen Gan, Cheuk Wah Tang, Chor Fai Wong
  • Patent number: 8305019
    Abstract: When output voltage V1 of an electric power converter reaches a prescribed voltage V1*ref, a difference between V1 and V1*ref is integrated to correct a commanded torque to ?o* (?*=?o*+??).
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: November 6, 2012
    Assignee: Hitachi Car Engineering Co., Ltd.
    Inventors: Kazuaki Tobari, Shigehisa Aoyagi, Kentaro Oi
  • Patent number: 8253355
    Abstract: A control apparatus for multiplexing a single distributed control amplifier to control multiple axes of motion in a multi-axis machine. In one example, the control apparatus comprises a distributed control motor amplifier, a first motor constructed and arranged to provide movement along a first axis of motion, a second motor constructed and arranged to provide movement along a second axis of motion, a first relay having a switch coupled to the distributed control motor amplifier, a first contact coupled to the first motor, a second contact coupled to the second motor, and an input for receiving an actuation signal, wherein the relay is configured to be manipulated between a first state in which the switch is electrically connected to the first contact a second state in which the switch is electrically connected to the second contact, in response to the actuation signal.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: August 28, 2012
    Assignee: Illinois Tool Works Inc.
    Inventors: Patsy Anthony Mattero, John G. Klauser
  • Patent number: 8188690
    Abstract: The instant invention provides a magnetically controlled reciprocating engine having a unique electromagnet control system. The engine is constructed and arranged to operate from a stored power source such as batteries to provide extended run times by controlling the power supplied to the electromagnets in a manner that controls heat generation within the electromagnetic coils, thereby increasing coil life. The control system is also capable of controlling engine speed and/or torque outputs to make the engine versatile for a wide variety of uses. The system is constructed and arranged to be utilized on new or pre-existing engines of various configurations and may be utilized in other industries or devices that benefit from the use of electromagnets.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: May 29, 2012
    Assignee: Magnetic Miles, LLC
    Inventors: Stephen Miles, Michael Cristoforo
  • Patent number: 8154234
    Abstract: A protective device enables reliably cutting a drive region off the power supply of a guided vehicle. The drive region is connectible to the power supply via at least one drive region switch and it comprises stator sections that are strung together. The sections are connectible to a drive region supply line by way of a stator section switch. The protective device has a control unit for opening at least one switch in the event of a malfunction. The object is to provide a protective device that is inexpensive and that allows a flexible allocation of the power supply to the drive regions. For this purpose, the control is adapted to open all stator section switches and the one or more drive regions switches in the event of a malfunction.
    Type: Grant
    Filed: May 31, 2006
    Date of Patent: April 10, 2012
    Assignee: Siemens Aktiengesellschaft
    Inventors: Markus Engel, Jürgen Lieske
  • Patent number: 8129928
    Abstract: Provided is a power branching system for driving a plurality of motors by use of a single servo driver, the power branching system capable of protecting each of the motors. The power branching system of the present invention has power lines 15 branched at some midpoint to connect the plural motors 5 and the servo driver 12; a plurality of current sensors 21 provided at branched power lines 15b for detecting currents supplied to the respective motors 5; and controlling means 22 for receiving current data detected by the plural current sensors 21, determining whether or not the detected currents are balanced and generating an alarm signal when the currents are unbalanced.
    Type: Grant
    Filed: August 1, 2007
    Date of Patent: March 6, 2012
    Assignee: THK Co., Ltd.
    Inventors: Kazuo Shoda, Yuki Nomura, Toshiyuki Aso
  • Patent number: 8018194
    Abstract: When application software running on a PC is in the state of being terminated, a switch unit is turned OFF with the control of a CPU and individual motors, and in this state, a light source is not supplied with a motor/lamp-use power source. In this state, however, the CPU and individual I/Fs are supplied with a logic-use power source. Therefore, the switch unit is turned ON when the application software is started, and an initialization process for an individual electrically driven unit is no longer required.
    Type: Grant
    Filed: March 10, 2009
    Date of Patent: September 13, 2011
    Assignee: Olympus Corporation
    Inventor: Hiroshi Watanabe
  • Publication number: 20110060490
    Abstract: A plurality of moving vehicles each including a secondary element of a linear motor, and a plurality of primary elements of a linear motor arranged at a pitch not more than the length of the secondary element along the travel route of the moving vehicles are provided. Sensors arranged to detect positions of the moving vehicles are provided at the pitch not more than the secondary element. Further, a controller arranged to control the primary elements based on position signals from the sensors is provided.
    Type: Application
    Filed: September 3, 2010
    Publication date: March 10, 2011
    Applicant: MURATA MACHINERY, LTD.
    Inventor: Tomoki SATO
  • Patent number: 7868565
    Abstract: A method of selectively utilizing a set of linear actuator motors for an application includes providing a plurality of linear actuator motors numbered from 1 to N including a box shaped housing with respective lengths between a first end-plate and a second end-plate and respective hollow shafts. Each hollow shaft includes an extended portion out of either the first end-plate or the second end-plate and configured to receive a nut including a tube part integrally connected with a flat-end part. The nut is configured to be able to mate in a common manner to any of the plurality of linear actuator motors. The method further includes testing any of the plurality of linear actuator motors including the nut for the application, wherein the nut is detached from one linear actuator motor to reattach with another linear actuator motor.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: January 11, 2011
    Assignees: Minebea Co., Ltd., Minebea Motor Manufacturing Corporation
    Inventors: Yoshio Sato, Takeshi Yoshizawa
  • Patent number: 7679226
    Abstract: The aim of the invention is the equipping of a synchronous linear motor with a non-permanently-magnetic secondary part with a simple positional measuring system. Said aim is achieved, whereby the tooth structure of the toothed rack-shaped non-permanently-magnetic secondary part (S) varies with position in the direction of movement (B). Furthermore, the synchronous linear motor can be provided with absolute and incremental positional measuring systems, such that the coarse resolution of the absolute measuring system can be supplemented by the fine resolution of the incremental system.
    Type: Grant
    Filed: April 12, 2006
    Date of Patent: March 16, 2010
    Assignee: Siemens Aktiengesellschaft
    Inventors: Zeljko Jajtic, Markus Knorr, Johannes Wollenberg
  • Publication number: 20090315504
    Abstract: A method of selectively utilizing a set of linear actuator motors for an application includes providing a plurality of linear actuator motors numbered from 1 to N including a box shaped housing with respective lengths between a first end-plate and a second end-plate and respective hollow shafts. Each hollow shaft includes an extended portion out of either the first end-plate or the second end-plate and configured to receive a nut including a tube part integrally connected with a flat-end part. The nut is configured to be able to mate in a common manner to any of the plurality of linear actuator motors. The method further includes testing any of the plurality of linear actuator motors including the nut for the application, wherein the nut is detached from one linear actuator motor to reattach with another linear actuator motor.
    Type: Application
    Filed: June 20, 2008
    Publication date: December 24, 2009
    Applicants: Minebea Co., Ltd., Minebea Motor Manufacturing Corporation
    Inventors: YOSHIO SATO, TAKESHI YOSHIZAWA
  • Patent number: 7583037
    Abstract: The present invention is a mobile storage unit including an electric motor operably connected to wheels movably supporting the unit, and a motor brake operably connected to the electric motor. A shaft is rotatably mounted to the unit and supports the wheels on which the unit moves, and is engaged with an electric motor. The electric motor operates to rotate the shaft and the wheels to move the unit in the desired direction. Upon deactivation of the motor, the motor brake, which is also engaged with the shaft, operates to prevent any further rotation of the shaft to maintain the mobile storage unit in a specified location regardless of deflection of the surface on which the storage unit is positioned.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: September 1, 2009
    Assignee: Spacesaver Corporation
    Inventors: Brian P. Bourke, Steven M. Lehmann, Brian R. Nemec
  • Patent number: 7557525
    Abstract: A control system and method for ensuring proper closure of a dual swing gate. The control system employs position sensors for monitoring the position of each gate arm. A “differential position” is maintained between the arms during closing to ensure proper sequencing. The control system regulates the speed of the master arm and the slave arm to ensure that the differential position is maintained throughout the closure process.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: July 7, 2009
    Assignee: GTO, Inc.
    Inventors: Hung Nguyen, Mayer Robert
  • Patent number: 7554277
    Abstract: A circuit device is disclosed which is used to increase useable motor voltage in a long stator drive. Further, suitable methods for operating a magnetically levitated vehicle provided with the circuit device are also disclosed. In one embodiment of the present invention, the stator section of the long stator drive is connected to the energy supply line on two connection points by way of a first and a second switch. A third switch is located between both connection points arranged on the energy supply line. Both of the stator section connections are connected to the ground potential by way of a fourth and a fifth switch. In one embodiment, in order to accelerate the magnetically levitated vehicle, the first and the second switches are closed and all other switches are opened. The stator section is cross-flown in a direct manner by current in the energy supply line.
    Type: Grant
    Filed: October 27, 2005
    Date of Patent: June 30, 2009
    Assignee: Siemens Aktiengesellschaft
    Inventors: Reinhard Hoffmann, Jörg Lehmpfuhl, Volker Schmitt, Wolfgang Spaeth
  • Patent number: 7504794
    Abstract: A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined interval. A support mechanism formed of ball bearings, ball stoppers at the movable side, steel balls, ball stoppers at the fixed side, and ball bearings allows the movable stage to move in directions of the X-axis, Y-axis and turning. A linear actuator 19 is driven to move the movable stage in the directions of X-axis, Y-axis, and turning.
    Type: Grant
    Filed: November 29, 2006
    Date of Patent: March 17, 2009
    Assignee: Chiba Precision Co., Ltd.
    Inventors: Hideaki Sato, Kennosuke Kondo
  • Publication number: 20080309260
    Abstract: A shaft type linear motor including a stator in which plural hollow cylindrical coils are disposed so that the center through holes thereof are arranged linearly so as to form a shaft insertion hole; a driving shaft including permanent magnets, the same magnetic poles, the north or south magnetic poles, being disposed in the axial direction so as to be opposed to each other, and movably inserted into the stator; sensor units disposed in the axial direction of the stator so as to have a predetermined clearance therebetween and equipped with plural magnetic pole detection sensors that detect the magnetic field intensities of the permanent magnets and output magnetic field intensity signals; and a detection section for receiving the magnetic field intensity signals output from the magnetic pole detection sensors and for detecting the position of the driving shaft on the basis of the plural magnetic field intensity signals.
    Type: Application
    Filed: July 6, 2005
    Publication date: December 18, 2008
    Inventors: Kazunori Kanai, Hidehiro Saho, Noboru Yamasaki, Chikara Takata, Seiichi Matsuo, Yoshikazu Higuchi
  • Patent number: 7429845
    Abstract: A stage assembly (220) that moves a work piece (200) a movement step (257) includes a first stage (238), a first mover assembly (242), a second stage (240), and a second mover assembly (244). The first mover assembly (242) moves the first stage (238) with a first acceleration profile (366) during the movement step (257) and the second mover assembly (244) moves the second stage (240) with a second acceleration profile (368) during the movement step (257) that is different than the first acceleration profile. For example, the second mover assembly (244) moves the second stage (240) during the movement step (257) with a higher maximum acceleration than the first mover assembly (242) moves the first stage (238) during the movement step (257). Further, the second mover assembly (244) moves the second stage (240) during the movement step (257) with a higher average acceleration than the first mover assembly (242) moves the first stage (238) during the movement step (257).
    Type: Grant
    Filed: April 16, 2005
    Date of Patent: September 30, 2008
    Assignee: Nikon Corporation
    Inventor: Michael Binnard
  • Patent number: 7304448
    Abstract: A developing apparatus is capable of moving a stage for supporting a substance to be developed from a detachable position to a developing area below a developing unit, and two-dimensional movement. The present developing apparatus includes a developing device, a first moving device movable in a direction of axis of ordinate and a second moving device movable in a direction of axis of abscissa, and a stage posture control device to control an inclined posture of the stage in order to hold a relative distance between the developing device and a developing area surface of the substance placed on the stage constant.
    Type: Grant
    Filed: January 21, 2003
    Date of Patent: December 4, 2007
    Assignee: Nisca Corporation
    Inventor: Kazuhito Dobashi
  • Patent number: 7282874
    Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.
    Type: Grant
    Filed: January 27, 2006
    Date of Patent: October 16, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yugo Shibata, Atsushi Kimura
  • Patent number: 7262575
    Abstract: Methods and apparatus for precise positioning of an object using linear actuators based on linear stepper motors operating in microstepping or full step mode, a control algorithm based on compensation table, and a calibration apparatus for obtaining the compensation table.
    Type: Grant
    Filed: November 21, 2005
    Date of Patent: August 28, 2007
    Assignee: Bio-Rad Laboratories, Inc.
    Inventors: Nenad Kircanski, Amir Sadri, Milija Timotijevic, Zhiliang Xu, Manja Kircanski, Neven Nikolic
  • Patent number: 7245092
    Abstract: An alignment stage apparatus including a vacuum chamber, a linear motor including a plurality of coils to drive a stage, a coil selector which selectively energizes the plurality of coils, and a storage box arranged to store the coil selector. The interior of the storage box is connected to the outside of the vacuum chamber. The linear motor and the storage box are arranged in the vacuum chamber.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: July 17, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Shinji Ohishi
  • Patent number: 7233119
    Abstract: The invention relates to a method and to a circuit arrangement used to regulate synchronous linear motors, especially linear drive mechanisms in film drawing systems. The force (Fclip) between the stationary primary part and the moved secondary part is determined in a sensorless manner from the voltages and currents calculated and measured in a frequency converter in a functional block, in such a manner that the integral is calculated from the active power during a time period (tclip) between two pulses (new—clip) produced by an overriding control and said integral is divided by the active length (1zone) of the primary part. Alternatively, the force (Fclip) can also be determined by summation of the voltages in the f-axis in order to reduce the drop in voltage in relation to the resistance (Rstr) of the branch in the primary part. Voltages and currents are transformed on the primary part by a co-ordinate system related to the secondary part.
    Type: Grant
    Filed: August 26, 2004
    Date of Patent: June 19, 2007
    Assignee: Bruckner Maschinenbau GmbH
    Inventors: Bernd Sieber, Günter Oedl
  • Patent number: 7202615
    Abstract: An apparatus for effecting non-contact linear door displacement comprising a tubular motor formed of a stator (1) formed from a plurality of magnets (21) arranged along a linear axis (15), and at least one thrust block (3) each formed of at least one electrically conductive coil encircling the stator (1) at a distance sufficient to facilitate electro-mechanical interaction between the plurality of coils and the stator (1), at least one door (5) attached to at least one of the plurality of thrust blocks (3) via a hanger (9) and the at least one door (5) capable of a movement in the direction of the linear axis (15), a rolling component (11) to enable movement of the hanger (9) in the direction of the linear axis (15), and a control mechanism (70) for sensing the position of each of the at least one door (5) and issuing an electrical control signal to each of the plurality of thrust blocks (3) so as to affect the movement of the at least one door (5).
    Type: Grant
    Filed: May 20, 2005
    Date of Patent: April 10, 2007
    Assignee: Otis Elevator Company
    Inventors: Nigel Bruce Morris, Christophe Durand, Levent Gosterisli, Thomas He, Pascal Rebillard, Vlad Zaharia
  • Patent number: 7173387
    Abstract: The invention relates to an arrangement for operating a magnetically levitated vehicle by means of an arrangement having at least one long-stator linear motor. The linear motors are sub-divided, longitudinally of a track, into individual motor regions (A) in each of which only one vehicle (7) is able to travel at a time. To make possible different frequencies of service for the vehicles (7), i.e. different intervals between the vehicles (7), the region boundaries (B) between at least two motor regions (A1, A2) which follow one another in the direction of travel are arranged to be variable.
    Type: Grant
    Filed: November 7, 2005
    Date of Patent: February 6, 2007
    Assignee: Transrapid International GmbH & Co. KG
    Inventor: Rolf Fischperer
  • Patent number: 7135827
    Abstract: A digitally controlled, integrated Sawyer motor forcer consists of a rigid mechanical housing containing one or more linear motor segments, integrated control electronics, cooling means, and optional feedback sensors. The integrated control electronics include digital processing circuits, an external host communication interface, power conditioning and supply circuits, forcer phase amplifiers, input/output circuits and optional feedback sensor circuits. The integrated controller also provides control, amplifier, input/output, and sensor circuits for additional external motor axes that may be attached to the forcer as needed for specialized machines. The forcer may be operated in an open-loop mode without feedback sensors, or in a closed-loop servo mode using integrated feedback sensors of various types. Cooling means are included in the forcer to reduce the temperature rise caused by power dissipation in the forcer coils and the integrated electronic elements.
    Type: Grant
    Filed: April 13, 2005
    Date of Patent: November 14, 2006
    Inventor: Clark E. Lampson
  • Patent number: 6943508
    Abstract: An apparatus for effecting non-contact linear door displacement comprising a tubular motor formed of a stator (1) formed from a plurality of magnets (21) arranged along a linear axis (15), and at least one thrust block (3) each formed of at least one electrically conductive coil encircling the stator (1) at a distance sufficient to facilitate electro-mechanical interaction between the plurality of coils and the stator (1), at least one door (5) attached to at least one of the plurality of thrust blocks (3) via a hanger (9) and the at least one door (5) capable of a movement in the direction of the linear axis (15), a rolling component (11) to enable movement of the hanger (9) in the direction of the linear axis (15), and a control mechanism (70) for sensing the position of each of the at least one door (5) and issuing an electrical control signal to each of the plurality of thrust blocks (3) so as to affect the movement of the at least one door (5).
    Type: Grant
    Filed: September 23, 2002
    Date of Patent: September 13, 2005
    Assignee: Otis Elevator Company
    Inventors: Nigel Bruce Morris, Christophe Durand, Levent Gosterisli, Thomas He, Pascal Rebillard, Vlad Zaharia
  • Patent number: 6856106
    Abstract: An apparatus has a first H-bridge having a first motor contact on a shared first side and a second motor contact on a second side. The apparatus also has a half H-bridge having a third motor contact on a third side, wherein the shared first side of the first H-bridge and the third side of the half H-bridge may be operated as a second H-bridge. Another apparatus has a first H-bridge having a first motor contact on a shared first side and a second motor contact on a second side. The other apparatus also has a switch coupled to a third motor contact, wherein the shared first side of the first H-bridge and the switch may be operated as a partial H-bridge. A method of operating an alternate H-bridge and a method of flexibly using an H-bridge circuit on an ASIC are also provided.
    Type: Grant
    Filed: October 31, 2002
    Date of Patent: February 15, 2005
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Paul D. Bliley, William S. Eaton
  • Patent number: 6779447
    Abstract: A device for registering the position of a rotor part in a transport system also having a static part in addition to the rotor part includes a dimensional standard forming part of the rotor part, and a plurality of transmitters provided on the static part; and a printing unit and a printing machine including the position registering device.
    Type: Grant
    Filed: January 14, 2002
    Date of Patent: August 24, 2004
    Assignee: Heidelberger Druckmaschinen AG
    Inventors: Hendrik Frank, Stefan Maier
  • Patent number: 6770890
    Abstract: Stage devices are disclosed that achieve high positioning and movement accuracy while producing substantially reduced outwardly extending stray magnetic fields. The stage devices are especially suitable for use in a charged-particle-beam (CPB) microlithography system because they cause substantially reduced beam perturbations. A stage device comprises multiple linear motors and a slider arranged relative to each other such that the intersection point of drive forces applied by the linear motors to move the slider coincides with the center of gravity of the slider. Each linear motor includes a respective yoke in which permanent magnets are disposed such that pairs of opposing magnets face one another across a gap, each pair of opposing magnets has similarly oriented respective poles, and the orientation is alternatingly reversed in each subsequent pair of opposing magnets in the yoke.
    Type: Grant
    Filed: December 12, 2002
    Date of Patent: August 3, 2004
    Assignee: Nikon Corporation
    Inventor: Keiichi Tanaka
  • Patent number: 6727666
    Abstract: An XY table used in a semiconductor manufacturing apparatus including lower (X table) fixed to an X movable element and an upper table (Y table) fixed to a Y movable element, in which the upper table (Y table) is supported movably in a Y direction and immovably in an X direction on the lower table (X table), the X movable element is immovable in the Y direction with respect to the X motor main body, the Y movable element is movable in the X direction with respect to the Y motor main body. Furthermore, the Y motor main body is provided with a permanent magnet that covers an entire region of movement of a magnetic action component (coils) of the Y movable element in the X direction.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: April 27, 2004
    Assignee: Kabushiki Kaisha Shinkawa
    Inventors: Ryuichi Kyomasu, Hiroto Urabayashi, Minoru Torihata, Kuniyuki Takahashi, Toshimichi Miyahara
  • Patent number: 6710353
    Abstract: An actuator comprises a magnet yoke (10a, 10b) and a carrier member (2) movable relative to the magnet yoke. The magnet yoke (10a, 10b) has at least one permanent magnet (14) and the carrier member (20) is positioned in the magnetic field produced by this magnet. The carrier member (20) has an auxiliary magnetic member (28) that produces a relative bias force between the carrier member (20) and the magnet yoke (10a, 10b). The bias force will be used to compensate for a weight applied to the device and acts as a bearing with a very large compliance. The carrier member (2) also comprises a coil (26). Passing current through the coil (26) produces a Lorentz force for further control of the actuator; alternatively, the device provides a velocity transducer by sensing the EMF generated in the coil by relative motion of the carrier member (20) and magnet yoke (10a, 10b).
    Type: Grant
    Filed: November 8, 1999
    Date of Patent: March 23, 2004
    Assignee: ASML Netherlands B.V.
    Inventor: Erik R. Loopstra
  • Patent number: 6583597
    Abstract: Stage apparatus are disclosed for holding an object (e.g., substrate or reticle, for example) in a microlithography system, especially a system for performing microlithography in a vacuum environment. The stage apparatus provides movement of a stage (intended to hold the object) in X and Y directions of a guide plane. The stage is mounted to an arm member having at least first and second ends situated symmetrically relative to the stage. The ends include linear-motor movers that interact with corresponding stators, and include gas bearings on surfaces that slide relative to other surfaces as the stage is moved within the guide plane. The linear-motor movers can be one- or two-dimensional movers and desirably allow &thgr;-direction motion of the stage. Other configurations include guide members and sliders that undergo sliding motion relative to the guide members via non-contacting gas bearings.
    Type: Grant
    Filed: July 6, 2001
    Date of Patent: June 24, 2003
    Assignee: Nikon Corporation
    Inventors: Keiichi Tanaka, Yukiharu Okubo, Hiroaki Narushima, Yukio Kakizaki, Yasushi Yoda
  • Patent number: 6548970
    Abstract: An individual section glassware forming machine that includes at least one blow mold for forming articles of glassware, a sweepout station for transferring glassware to a machine conveyor, and a take-out mechanism for transferring glassware from the blow mold to the sweepout station. The take-out mechanism comprises first and second electromagnetic stators mounted in fixed position above the blow mold and the sweepout station. A first electromagnetic armature is mounted for linear motion along a horizontal axis adjacent to the first stator. A second electromagnetic armature is mounted to the first armature for linear motion along a vertical axis adjacent to the second stator. Take-out tongs are carried by the second armature for engaging and transferring glassware from the blow mold to the sweepout station.
    Type: Grant
    Filed: October 26, 2001
    Date of Patent: April 15, 2003
    Assignee: Owens-Brockway Glass Container Inc.
    Inventors: D. Wayne Leidy, Frank J. DiFrank, Robert L. Mulgrave
  • Patent number: 6518718
    Abstract: Three-phase/d-q converters convert an output voltage V outputted from a power converter and a coil current flowing through a propulsion coil to a voltage and a current in a dq rotary coordinate system, respectively. A speed electromotive force observer estimates speed electromotive force based on these voltage and current, and a vehicle angular speed &ohgr;, and a speed electromotive force phase generator calculates a speed electromotive force phase &thgr;e based on the estimated speed electromotive force Zd, Zq. A phase synchronization controller constituted as a secondary PI control system stabilizes the speed electromotive force phase &thgr;e and outputs it as a phase reference &thgr;*. Accordingly, it is possible in a system of an LSM vehicle to obtain the stable phase reference &thgr;* with a minimum deviation even when the vehicle is running at low speed.
    Type: Grant
    Filed: March 23, 2001
    Date of Patent: February 11, 2003
    Assignees: Central Japan Railway Company, Railway Technical Research Institute
    Inventors: Syunsaku Koga, Junichi Kitano
  • Patent number: 6411049
    Abstract: A method and an apparatus for operating a magnetically levitated magnet vehicle (5) are described, with a synchronous long stator linear motor, which comprises a plurality of winding sections (3.1 3.5) arranged one after the other in the direction of travel (x) and connected one after the other to a track cable (9) in accordance with the progress of the magnet vehicle (5). In accordance with the invention, on passing a changeover point (22.1-22.4), at least the two winding sections (e.g. 3.2, 3.3) adjoining the changeover point are connected electrically in series (FIG. 3c).
    Type: Grant
    Filed: May 4, 2000
    Date of Patent: June 25, 2002
    Assignee: Transrapid International GmbH & Co. KG
    Inventor: Rolf Fischperer
  • Patent number: 6310455
    Abstract: An electric motor, gearbox, position phase angle sensor and motor phase angle sensor are integrated in a common housing to reduce the size of a positioning and actuating system. The housing also includes electronics for detecting and processing the signals from the phase angle sensors. The rotor shaft of the electric motor is designed to be hollow, and the drive shaft is mounted coaxially. The output shaft passing coaxially through the gearbox, and the end of the shaft which protrudes from the gear box is provided with a coupling. The drive shaft passes coaxially through the rotor of the electric motor and carries a position phase angle sensor at the end of the electric motor opposite the gear box. The motor phase angle sensor on the rotor shaft coaxially encloses the position phase angle sensor. The scanning detectors of both sensors are arranged on a common circuit board, which also carries the electronics for detecting and processing the signals of these sensors.
    Type: Grant
    Filed: April 19, 2000
    Date of Patent: October 30, 2001
    Assignee: Max Stegmann GmbH Antriebstechnik-Elektronik
    Inventors: Josef Siraky, Siegfried Held