Abstract: A method of preparing a fuel composition includes placing coal having a heat content between about 3,000 BTU/lb and about 9,000 BTU/lb and a moisture content between about 20 wt % and about 60 wt % in a vessel. The coal is exposed to heat and a pressure less than atmospheric pressure within the vessel, thereby reducing the coal, such that an average primary particle size of the coal is less than 1 millimeter. A binder is introduced to the vessel, such that the coal combines with the binder to yield a mixture. The mixture is shaped to yield a fuel composition.

Abstract: A method of processing coal includes placing coal having a heat content between about 3,000 BTU/lb and about 9,000 BTU/lb and a moisture content between about 20 wt % and about 60 wt % in a vessel. The coal is heated by conduction. A pressure in the vessel is reduced to below atmospheric pressure, thereby reducing the coal, such that an average primary particle size of the coal is less than 1 millimeter. The reduced coal is shaped to yield a fuel composition.

Abstract: A wood heating system comprises an electric power source, a first electrode assembly, a second electrode assembly, and a control system. The first electrode assembly is connected to the electric power source and is adapted to make electrical contact with a first end of a wood length to apply electric power to the wood length. The first electrode assembly comprises at least two electrode segments. The second electrode assembly is adapted to make electrical contact with a second end of the wood length. The control system is adapted to selectively connect/disconnect electric power flow between the electric power source and at least one electrode segment of the first electrode assembly.

Abstract: A two-stage particulate separator, comprising: a primary cyclone; a plurality of secondary cyclones circumferentially spaced around the primary cyclone; each of the cyclones having an inlet at an upper end thereof and an outlet at a lower end thereof, the inlets of the secondary cyclones are in communication with the primary cyclone; and an airlock coupled to the outlet of each of the cyclones.

Abstract: A method for producing a fruit or vegetable product, wherein the method consists essentially of (a) infusing a whole or sliced fruit or vegetable with an infusible molecule to between 10 and 55° Brix; (b) pre-drying the whole or sliced fruit or vegetable at a temperature between 80° C. and 120° C. to produce a pre-dried fruit or vegetable; (c) exposing the pre-dried fruit or vegetable to freezing temperatures and to vacuum to a temperature between ?1° C. and ?40° C. and a pressure between 7.5 mmHg and 0.53 mmHg, thereby partially subliming the fruit or vegetable; (d) puffing the fruit or vegetable under vacuum between 0.1 mmHg and 600 mmHg at a temperature between 40° C. and 110° C.; (e) cooling the fruit or vegetable under vacuum to a temperature between 0° C. and 40° C., to thereby produce the fruit or vegetable product.

Abstract: The present invention relates to a reliable, efficient, and low cost ventilation system for storage covers that improves the distribution of air flow and improves aeration of the particulate material and the method of installing the same.

Abstract: A drying method includes a step of heating an object to be dried provided in a drying chamber to a predetermined temperature, a step of maintaining the predetermined temperature, a step of increasing an air pressure inside the drying chamber to a predetermined air pressure that is higher than an atmospheric pressure, and a step of decreasing the air pressure inside the drying chamber to be lower than the predetermined air pressure.

Abstract: In an embodiment, the gas storage device includes a cylinder with opposing ends. An endcap is present at each end. The cylinder and the endcaps form an enclosure. Each endcap includes a connector. A diaphragm is located in the enclosure. The diaphragm includes an annular sidewall. The device includes an inner chamber defined by an inner surface of the sidewall, and a storage space between an interior surface of the cylinder and an outer surface of the sidewall. A metal hydride composition is located in the storage space.

Abstract: An isolator includes: a chamber including a working chamber in which a work is performed by a worker, and a storage chamber provided under the working chamber in communication with an opening formed in a bottom plate of the working chamber, the chamber being configured to isolate the working chamber and the storage chamber from an exterior while in a state where airtightness is maintained; and a lifting device configured to support, in the storage chamber, an experimental device to be used in the working chamber, the lifting device being capable of lifting and lowering the experimental device from the storage chamber to the working chamber and from the working chamber to the storage chamber.

Abstract: A tape attaching apparatus includes: a chamber having an airtight space formed therein; a rubber sheet that partitions the airtight space into first and second airtight spaces and has an upper sheet on which a wafer is placed; a tape frame that holds a tape above the rubber sheet; and first and second supply/exhaust tubes that switch pressurization and depressurization of the first and second airtight spaces. In pressurizing the second airtight space and expanding the rubber sheet to lift the wafer to be attached to the tape, after bringing the first and second airtight spaces into a vacuum state, the wafer is attached to the tape while an amount of pressurization of the second airtight space is controlled to change an expansion rate of the rubber sheet from a low speed to a high speed stepwisely.

Abstract: According to one embodiment, a supercritical drying method for a semiconductor substrate comprises introducing a semiconductor substrate, a surface of the semiconductor substrate being wet with a water-soluble organic solvent, to the inside of a chamber, hermetically sealing the chamber and increasing a temperature inside the chamber to not lower than a critical temperature of the water-soluble organic solvent, thereby bringing the water-soluble organic solvent into a supercritical state, decreasing a pressure inside the chamber and changing the water-soluble organic solvent in the supercritical state to a gas, thereby discharging the water-soluble organic solvent from the chamber, starting a supply of an inert gas into the chamber as the pressure inside the chamber decreases to atmospheric pressure, and cooling the semiconductor substrate in a state where the inert gas exists inside the chamber.

Abstract: Disclosed is a process of stabilizing spent filter material that comprises mixing the filter media with a city media to produce a composition having a moisture content that is sufficiently low to retard microbial growth. The composition comprises spent filter media and a dry material, and preferably comprises diatomaceous earth. Soil is treated by adding the composition as a top dressing, soil amendment, or the like.

Abstract: Examples are provided of controlling sheet media dryers. A controller operates a fan at plural duty cycles and correlates a resulting air pressure to each to define empirical data pairs. A parabolic curve fit to the empirical data is used to derive additional data pairs, and a lookup table is defined using the empirical and derived data pairs. The controller uses the lookup table to operate the fan during normal operations of a sheet media dryer.

Abstract: Methods and systems are disclosed for drying a material or, more generally, flash evaporating a target substance having a vapor pressure threshold. The methods and systems include a conveyor conduit that receives-material and within which a pressure is established that is greater than the vapor pressure threshold of the target substance. The material moves through the conveyor and is expelled into a pressure drop zone created by one or more venturi nozzles. The pressure in the pressure drop zone is far less than the vapor pressure threshold of the target substance. As the material encounters the pressure drop zone, the targeted substance in the material experiences a rapid and extreme pressure drop and simultaneously a rapid temperature increase. This causes the target substance in the material to flash evaporate virtually immediately. The resulting vapor is separated from the remaining material and the now dry material is collected for further processing or use.

Abstract: A washing machine is disclosed. A washing machine includes a cabinet configured to define an exterior appearance thereof; a tub installed in the cabinet to hold wash water therein; a drum rotatably installed in the tub to accommodate laundry therein; at least one venting portion provided in an upper portion of the tub to communicate with an outside of the tub; and a ventilation part (300) provided in a lower portion of the tub to communicate with an inside of the tub. The above configuration enables convection current of internal air of the tub generated via the venting portion and the ventilation part (300).

Abstract: A control method of a dryer is disclosed. A control method of a dryer including a heat pump having a inverter compressor includes determining a driving condition of the dryer; and adjusting at least one of an electric power supplied to the inverter compressor and a driving velocity of the compressor based on the driving condition.

Abstract: An evacuation method which can reduce evacuation time without causing moisture-related problems. In a vacuum processing apparatus including a vacuum processing chamber, during the evacuation for the vacuum processing chamber, the pressure in the vacuum processing chamber is maintained at a pressure lower than or equal to the atmospheric pressure but higher than or equal to 6.7×102 Pa (5 Torr).

Abstract: Disclosed is a process of stabilizing spent filter material that comprises mixing the filter media with a dry media to produce a composition having a moisture content that is sufficiently low to retard microbial growth. The composition comprises spent filter media and a dry material, and preferably comprises diatomaceous earth. Soil is treated by adding the composition as a top dressing, soil amendment, or the like.

Abstract: A method for drying a wet material, which comprises a liquid Fd to be distilled, uses a gas-tight container system resistant to excess and/or negative pressure and a drying container, a condenser and a vapor chamber connecting the drying container and condenser. The temperature adjustable drying container contains the wet material. The liquid Fd is turned to vapor in the temperature adjustable vapor chamber. The condenser condenses the vapor to give the condensation product. The pressure in the vapor chamber is monitored and controlled so that drying and distillation are always carried out in a range close to the saturation vapor pressure of the liquid Fd to be distilled. The pressure and the temperature in the vapor chamber are continuously determined. If the pressure goes above the upper limit of the range, the pressure is reduced in such a manner that especially foreign gas is removed.

Abstract: According to one embodiment, a supercritical drying apparatus comprises a chamber being hermetically sealable and configured to store a semiconductor substrate, a heater configured to heat an inner side of the chamber, a supply unit configured to supply carbon dioxide to the chamber, a discharge unit configured to discharge carbon dioxide from the chamber, and a rotation unit configured to rotate the chamber by an angle equal to or greater than 90 degrees and equal to or smaller than 180 degrees with respect to the horizontal direction.

Abstract: By a method and a device for preventing corrosion on and in the region of a gas inlet nozzle during nitric acid condensation, contact of the condensing gas with the nozzle and with the surroundings of the nozzle are supposed to be minimized. This is achieved in that the gas inlet nozzle has a sleeve on the inside in the transition region to the interior of the condenser, by which sleeve a gas inlet orifice in the form of an annular gap is formed, whereby the annular space is provided with at least one feed opening for secondary air, so that an enveloping flow of secondary air is produced around the entering NO gas.

Abstract: A substrate processing method which can reduce the number of particles to be left on each substrate is provided. In the substrate processing method, substrates W to be processed are dried, by using a fluid heated by a heating apparatus having one or more heating mechanisms. The substrate processing method comprises a first step of supplying a mixed fluid containing a gas and a processing liquid and heated by the heating apparatus, into a processing chamber in which the substrates to be processed are placed, and a second step of supplying the heated gas into the processing chamber. The output of at least one of the heating mechanisms is kept at a preset constant value for a period of time during which a predetermined time passes after the start of the first step. In the second step, the output of the heating mechanism is determined under a feed back control.

Abstract: A method and apparatus for drying floors and carpets using a fan for generating a pressurized air stream within a vertical cylindrical shroud that is spaced two to five inches away from the floor on a set of legs such that an opening is formed between the shroud and the floor. The air stream is directed along the cylindrical shroud vertically toward the floor. At least a peripheral portion of the air stream is exhausted from the shroud in a substantially laminar flow at an angle that is inclined from the vertical and is exhausted radially into ambient air as a substantially laminar air stream.

Abstract: A process and system is provided for briquetting particulate matter such as moisture-containing bituminous and sub-bituminous coal. This process includes partially drying the particulate matter and feeding, the partially dried particulate matter to a briquetting apparatus under conditions such that water vapor is released from the particulate matter during feeding. The particulate matter is passed through briquette forming rollers to form briquettes. The released water vapor substantially displaces or prevents the ingress of a large proportion of other gaseous components from the atmosphere surrounding and/or intermixed with the particulate matter. The particulate matter that is fed to the briquetting apparatus is surrounded by and intermixed with a gaseous component containing 70 to 100% by volume of water vapor at the point where it enters the briquette-forming part of the briquetting apparatus.

Abstract: An apparatus for drying microtitration filter tray cavities and filters configured therein using a flow of gas, the cavities each comprising an upper and a lower aperture and the microtitration filter tray being mounted on a chamber designed for the vacuum filtration of microtitration filter trays in a manner that a vacuum can be applied to the lower apertures of the cavities receiving the filters, and includes a heat exchanger which can be mounted on and later removed from the microtitration filter tray and can be heated and comprises at least one inlet aperture and at least one outlet aperture between which a flow of gas may move through the heat exchanger, the heat exchanger being designed to heat the gas flow and to guide it onto the upper cavity apertures, the gas flow being generated by a vacuum pump communicating with the vacuum chamber.

Abstract: A method for the treatment of wood or wood products, in which method moist wood or wood products (1) are first dried by pressing and further by heating so that a desired degree of dryness is reached. In the first stage, the wood or wood products (1) arranged between treating elements (2) are pressed between the treating elements (2) so that liquid is removed from the wood being treated. In the method, as a result of the combined effect of the pressure, the liquid and/or gaseous substance released into the chamber space from the wood material being treated and possibly also air circulation arranged in the treatment chamber, a change of temperature in the treatment chamber from a lower temperature (T1) to a higher temperature (T2) is achieved without supplying additional heat into the chamber.

Abstract: An evacuation method which can reduce evacuation time without causing moisture-related problems. In a vacuum processing apparatus including a vacuum processing chamber, during the evacuation for the vacuum processing chamber, the pressure in the vacuum processing chamber is maintained at a pressure lower than or equal to the atmospheric pressure but higher than or equal to 6.7×102 Pa (5 Torr).

Abstract: An apparatus capable of performing consecutively, independently and/or simultaneously the processes of quick freezing and/or freeze drying of produce. The apparatus is characterized by a central vacuum system operating over one or more independent vacuum chambers (10,11,12,13,14); said vacuum system being composed of at least two vacuum subsystems (40,50), connected to the chambers by means of independent manifolds (400,500). One vacuum subsystem (40) evacuates air from any of the chambers from atmospheric pressure to a pressure slightly above that of the triple point of water, and the other vacuum subsystem (50) further quickly evacuates any of the chambers from said pressure slightly above the triple point of water to the pressure corresponding to the thermodynamic equilibrium of ice and water vapor at a desired freezing temperature, in a desired freezing time.

Abstract: A method of conditioning an organic substrate is described The method involves heating the substrate using RF energy under desired pressure conditions in a constrained environment At a desired time point, the pressure is rapidly reduced causing any water present in the substrate to rapidly boil and convert to steam.

Abstract: A lithographic mask is placed in a chamber which is then sealed. The gas pressure in the chamber is reduced to dislodge contaminant particles on the mask surface.

Abstract: Object for the invention is a method for treatment and drying of wood, in which at the first phase wood is warmed up over to the temperature close of the boiling point of water, and wood is compressed with a variable pressure between moisture permeable pressing elements, the temperature of the wood is increased so quickly, that the moisture existing in the wood does not have time to evaporate essentially before the temperature of the wood has increased around the boiling point of water. According to the invention when the surface layers of the timber have reached the temperature close the boiling point of the water the pressure is increased, and at the pressing phase the temperature of wood is kept at the temperature range close the boiling point of the water under that higher pressure.

Abstract: A multichamber timber drying kiln in which different conditions are maintained in each chamber and methods of drying timber using such a kiln. In one aspect timber is rapidly heated within a first chamber (2; 202; 207) and then transferred to a further chamber (3; 203; 208) for further drying. Timber may be transferred from the first chamber (2; 202; 207) when the moisture content of the timber approaches the fibre saturation point A preheating chamber (1; 201; 206) may be provided to preheat the timber before passing to the first chamber (2; 202; 207). A conditioning chamber (4; 204; 209) may be provided after the further chamber (3; 203; 208) to condition the timber. Energy transfer means (49-53; 54-58) may be provided to transfer energy between chambers.

Abstract: Surface cleaning, chemical treatment and drying of semiconductor substrates is carried out using foam as a medium instead of a condensed phase liquid medium. In cleaning and chemical treatment, by introducing a foam into an overflow vessel the foam is caused to pass over the substrate in moving contact therewith. Drying of the substrate is carried out, using a water solution of carbon dioxide in a pressurizable vessel. By releasing the pressure in the vessel, a layer of foam is established on the surface of the solution. The solution is discharged from the vessel, causing the foam layer to pass over the substrate in moving contact therewith. The carbon dioxide reduces the surface tension of the water, thereby enabling the foam layer to be produced and also assisting in the elimination of water from the surface of the substrate. In both cases, the use of foam reduces materials requirements and also reduces the quantity of particles deposited onto the substrate in the treatment process.

Abstract: In a substrate processing apparatus for use in performing a reduced-pressure pull up drying method, a liquid drainage pipe (46) for draining a drainage liquid containing an organic solvent from a processing chamber (26) including therein a processing bath (10) for rinsing a substrate (W) with water is provided with a buffer tank (50) inserted therein for separation between the drainage liquid and an organic solvent vapor. A vapor discharge pipe (62) is connected in communication with an interior space of the buffer tank, and is provided with pressure regulating valves (64a, 64b) inserted therein for regulating pressure in the processing chamber at a fixed pressure higher than atmospheric pressure.

Abstract: The invention relates to a method for performing a function or an operation involving a material and/or a device, in particular a non-gaseous material such as a biological material or an electronic material subjected to an operation as a scientific investigation, a medical test or a handling during production, under a gaseous atmosphere in an inner chamber. The invention provides a new principle for avoiding contamination by gaseous materials, airborne particles and other contamination to an inner space, such as a workbench or working chamber, from an adjacent surrounding space such as the ambient atmosphere, or emigration of materials such as hazardous medical material, toxic substances or other pollution to the adjacent surrounding space from the inner space. A workbench is obtained fulfilling all the strictest requirements to a clean working chamber.

Abstract: A delivery system and method for vaporizing and delivery of vaporized solid and liquid precursor materials at sub-atmospheric pressures between a heatable vaporization vessel and a processing tool. The system includes a pressure regulator internally positioned within the vaporization vessel and in fluid communication with a downstream mass flow controller to maintain a consistent flow of vaporized source material. The system further comprises introducing a carrier/diluent gas for diluting the vaporized source material before entry into the processing tool. A venturi is positioned directly upstream of the processing tool and provides for mixing of the carrier gas with the vaporized source material while providing the negative pressure required to open the gas pressure regulator within the vaporization vessel.

Abstract: An object of the present invention is to provide a pressure-heat drying method which allows a catalytic substance and the like to be deposited uniformly onto a workpiece to be dried in a dramatically short time as compared to a prior art method, and also an apparatus therefor.

Abstract: A method and an apparatus are disclosed for detecting an occurrence of a liquid dry condition in a container containing a liquefied compressed gas while the gaseous phase of the liquefied compressed gas is being removed from the container over time. The apparatus includes a first sensor, a second sensor, and a computer, preferably a programmed logic controller (PLC). The first sensor senses temperature (T) inside the container and provides a signal indicative thereof. The second sensor senses pressure (P) inside the container and provides a signal indicative thereof. The computer receives signals from the first and second sensors, and determines the rates of change in the pressure (dP/dt) and the temperature (dT/dt) inside the container over time.

Abstract: A method for performing multiple cleaning and vacuum drying operations in enclosed vessels uses cleaning and vacuum drying apparatus, low-dissolved-air cleaning solution, and drain-to-vacuum process to produce vacuum in a cleaning vessel, so that influence of air pressure on the operations is minimized. The method utilizes physical features that boiling points of general liquids lower with reduced pressure, that liquid saturated vapor pressure reduces with lowered temperature, and that two vacuum vessels of different working temperatures would have a pressure differential between their saturated vapor pressures, and uses heat control units and heat egress units to regulate temperature and pressure in the vacuumized cleaning vessel, so that wet clean, dry clean, vacuum heat drying, and vacuum freeze drying can be performed on the same apparatus, and low-pressure gas used in the dry clean and cleaning solution and waste solution can be recovered to achieve environment protection and energy saving.

Abstract: A system is disclosed for speeding workpiece thoughput in low pressure, high temperature semiconductor processing reactor. The system includes apparatus for loading a workpiece into a chamber at atmospheric pressure, bringing the chamber down to an intermediate pressure, and heating the wafer while under the intermediate pressure. The chamber is then pumped down to the operating pressure. The preferred embodiments involve single wafer plasma ashers, where a wafer is loaded onto lift pins at a position above a wafer chuck, the pressure is rapidly pumped down to about 40 Torr by rapidly opening and closing an isolation valve, and the wafer is simultaneously lowered to the heated chuck. Alternatively, the wafer can be pre-processed to remove an implanted photoresist crust at a first temperature and the chamber then backfilled to about 40 Torr for further heating to close to the chuck temperature.

Abstract: A container which is to be autoclaved has a shiftable plunger that defines a compartment filled with a fluid. The container is confined in a pressurizable chamber and heated so as to change a pressure in the compartment of the container. The pressure in the compartment of the container is monitored and an output corresponding thereto is generated. Pressure in the chamber around the container is continuously varied so as to be generally equal to the instantaneous monitored pressure in the compartment of the container. In this manner the plunger is not moved by thermal expansion or contraction of the fluid.

Abstract: A calender, a system, and a method of regulating the humidity in a calender. The calender includes a housing having at least two side pieces and a roll stack located at least partially between the side pieces, wherein a space is formed by the roll stack and the web between the side pieces, and a fan positioned to blow dry air into the space. The system is for regulating the humidity in a calender, the calender being used to treat a moisture-containing material web and including a housing having at least two side walls and a roll stack, the calender defining a space bounded at least by the roll stack, the web, and the at least two side walls, and includes a device for reducing the humidity of the space, wherein the humidity level in the space is reduced to a level which is below a saturation point. The method includes reducing the humidity of the space, wherein the humidity level in the space is reduced to a level which is below a saturation point.

Abstract: A method for cleaning a semiconductor structure using vapor phase condensation with a thermally vaporized cleaning agent, a hydrocarbon vaporized by pressure variation, or a combination of the two. In the thermally vaporized cleaning agent process, a semiconductor structure is lowered into a vapor blanket in a thermal gradient cleaning chamber at atmospheric pressure formed by heating a liquid cleaning agent below the vapor blanket and cooling the liquid cleaning agent above the vapor blanket causing it to condense and return to the bottom of the thermal gradient cleaning chamber. The semiconductor structure is then raised above the vapor blanket and the cleaning agent condenses on all of the surfaces of the semiconductor structure removing contaminants and is returned to the bottom of the chamber by gravity.

Abstract: The invention relates to a lyophilization method which comprises the following steps: reducing the pressure in the drying chamber until the onset of a visible crystallization of the solvent at a temperature in the drying chamber which is above the solidification point of the preparation; reducing the temperature in the drying chamber to a temperature which is below the solidification point of the preparation or is identical to it, until completion of the crystallization of the solvent, resulting in a frozen solvent; and sublimation of the frozen solvent by means of reduced pressure.

Abstract: A method and an apparatus for transporting substrates in all organic light emitting diode (OLED) process is disclosed, which has a transferring chamber provided for transporting substrates between processing modules and the atmosphere condition therein is able to be adjusted to be the same as the processing module by an atmosphere conditioner unit. According to the present invention, the substrates are not contaminated by moisture and the process operation and the factory layout are more flexible. Moreover, the OLED yield is improved.

Abstract: A method and an apparatus are disclosed for detecting an occurrence of a liquid dry condition in a container containing a liquefied compressed gas while the gaseous phase of the liquefied compressed gas is being removed from the container over time. The apparatus includes a first sensor, a second sensor, and a computer, preferably a programmed logic controller (PLC). The first sensor senses temperature (T) inside the container and provides a signal indicative thereof. The second sensor senses pressure (P) inside the container and provides a signal indicative thereof. The computer receives signals from the first and second sensors, and determines the rates of change in the pressure (dP/dt) and the temperature (dT/dt) inside the container over time.

Abstract: Disclosed is a method of drying timbers loaded in a drying chamber, which comprises the steps of heating the drying chamber by a heating system up to a temperature of 80 to 100° C., subjecting the timbers to vacuum blowing by connecting the inside of the drying chamber with a vacuum chamber (receiver) evacuated by a rotary pump until the inside pressure of the drying chamber drops to 1 to 10 mmHg, disconnecting the inside of the drying chamber from the vacuum chamber, connecting the drying chamber with the atmosphere. When the inside of the drying chamber is connected with the vacuum chamber, the moisture content of the timbers is sharply reduced, so that their temperature sharply drops. Thereafter, when it is disconnected from the vacuum chamber, and connected with the atmosphere, the inside temperature of the drying chamber is again increased. Meanwhile, the heating system is worked during the whole process.

Abstract: Disclosed is a method for controlling a heat treatment in the process of fabricating a high purity silica glass via a sol-gel process using a low temperature heater having an inhalation line and an exhaust line. Accordingly, the method includes the steps of (a) identifying whether or not the diameter of the exhaust line is varied; (b) controlling the mass flow of the process gas according to the changed diameter of the exhaust line in step (a); (c) measuring an exhaust gas velocity discharged through the exhaust line; (d) comparing the exhaust gas velocity measured in the step (c) with the exhaust gas velocity after the scale of the exhaust line is varied; and, (e) repeating steps (b)-(d) if the comparison result in step (d) is different.

Abstract: Device and process for dewatering a fibrous material web by expelling water via gas pressure. The dewatering device includes at least four rolls arranged to radially limit at least one pressure chamber and sealing units arranged to axially limit the at least one pressure chamber. Adjustment devices are arranged to at least partially individually axially adjust positions of the at least four rolls and the sealing units. A pressure gas is introducible into and the fibrous material web is guidable through the at least one pressure chamber.

Abstract: A method of removing water from the surface of a silicon wafer or other substrate subjected to wet processing which includes a step of water rinsing. In this method a silicon wafer whose surface includes liquid water is disposed in an atmosphere saturated with water vapor. The water vapor is removed from the surface of the silicon wafer by a stream of water-saturated gas. Upon removal of liquid water from the surface of the silicon wafer the water vapor in the water vapor saturated atmosphere is removed by evaporation.