Abstract: A dryer is provided, in which foreign substances contained in air circulating through an inside of a drum is filtered by a filter unit, and the foreign substances attached to the filter unit are separated by air flowing in a direction opposite to a flow direction of the circulating air. The separated foreign substances are collected in a separate lint case.

Abstract: The present invention relates to a laundry dryer having an improved structure, which can remove wrinkles of laundry during a drying cycle after washing. A dryer includes a cabinet in which various parts are installed; a drum rotatably mounted in the cabinet, the drum holding laundry therein; a heater that heats air to supply hot air to the drum; a steam generator that generates steam to supply the steam to the drum; a water container that has an outlet to supply water to the steam generator; a water supply path provided between the steam generator and the water container; and a contact prevention part that prevents the remaining water of the water container or the water supply path from contacting with the various parts provided in the cabinet, wherein the remaining water is the water remaining in the water container or the water supply path when the water container is detached from the water supply path.

Abstract: An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash back onto the substrate. The splash guard is moveable between a process position in which the upper annular edge of the splash guard extends above the chuck and a substrate on the chuck, and a load/unload position in which the splash guard is tilted so that one side of the upper annular edge is below an upper edge of the chuck. The movement of the splash guard facilitates loading and unloading of a substrate.

Abstract: An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying assembly includes a substrate drying assembly support arm, an outlet for applying liquid to an upper surface of the substrate, and an outlet for applying a drying vapor to the upper surface of the substrate. The substrate drying assembly is configured to position the liquid applying outlet and to position the vapor applying outlet above a portion of the substrate. The controller causes the substrate drying assembly to be retracted over the upper surface of the substrate at a faster rate near a center of the substrate than near a periphery of the substrate.