Abstract: A method for characterising high aspect ratio (“HAR”) structures etched in a substrate includes, for at least one structure, an interferometric measurement step, carried out with a low-coherence interferometer positioned on a top surface of the substrate, for measuring with a measurement beam, at least one depth data relating to a depth of the HAR structure, and a first adjusting step for adjusting a diameter, at the top surface, of the measurement beam according to at least one top critical dimension (“top-CD”) data relating to a width of the HAR structure.

Abstract: A spectrally multiplexed quantum repeater (SMuQR) based on spatially arrayed nodes of frequency-multiplexed multi-qubit registers uses the natural inhomogeneous distribution of optical transition frequencies in solid state defect centers. This distribution enables spectrally selective, individual addressing of large numbers of defect centers within an optical diffraction limited spot along a long cavity or waveguide. The spectral selection relies on frequency shifting an incident optical field at a rate as fast as once per defect center lifetime. The defect centers are resonant at visible frequencies and emit visible single photons which are down-converted to a wavelength compatible with long-distance transmission via conventional optical fiber. The down-converted photons are all at the same telecommunications wavelength, with the different spectral bins mapped to different temporal bins to preserve the multiplexing in the time domain, for distribution to other nodes in the quantum network.

Abstract: An inertial point-source matter-wave atom interferometer gyroscope includes an analyzer that receives fringe images of gyroscope atoms and includes: a first fringe image that includes a first fringe phase, a second fringe image that includes a second fringe phase; and a third fringe image that includes a third fringe phase, wherein the first fringe phase, the second fringe phase, and the third fringe phase are different; a phase mapper of the analyzer that produces a interferometric phase map for the gyroscope atoms from the fringe images of the gyroscope atoms; and a fitter of the analyzer in communication with the phase mapper and that receives the interferometric phase map from the analyzer and determines inertial parameters of the gyroscope atoms from the interferometric phase map, the inertial parameters including an acceleration and a rotation rate of the inertial point-source matter-wave atom interferometer gyroscope relative to the gyroscope atoms.

Abstract: There is provided a method of manufacturing an optical connector, including: preparing a multi-core optical fiber including a glass fiber and a resin coating that covers the glass fiber; inserting the glass fiber exposed from the resin coating into the ferrule such that the glass fiber protrudes from an end surface of a ferrule by a length A; rotating and aligning the multi-core optical fiber with respect to the ferrule; fixing the multi-core optical fiber to the ferrule; and so as to scrap off a tip end of the ferrule by a length. A deviation angle in the circumferential direction between a first initial end surface of the one end of the prepared glass fiber and a cross section of the glass fiber separated from the initial end surface by a length A+B mm is equal to or less than 0.9°.

Abstract: A system includes a first optical unit that emits light to a measurement target object and receives first interference light incident from the measurement target object, a second optical unit that emits the light to a reference object configured to have a constant optical path length with respect to a temperature fluctuation and receives second interference light incident from the reference object, a spectroscope connected to the first optical unit and the second optical unit and receives the first interference light and the second interference light to be incident, and a control unit connected to the spectroscope, and the control unit calculates a fluctuation rate of a measurement optical path length with respect to a reference optical path length under a predetermined temperature environment on the basis of the optical path length of the reference object calculated on the basis of the second interference light incident on the spectroscope under the predetermined temperature environment, and the reference op

Abstract: An inspection system includes a main support die configured to receive a target specimen; an auxiliary support die adjacent to the main support die and configured to receive a reference specimen; a cleaning device configured to remove contaminants from the reference specimen; an objective lens unit configured to direct light to main support die from a light source adjacent to the objective lens unit; a spectroscope between the objective lens unit and the light source; a detector adjacent to the objective lens unit; an imaging device between the objective lens unit and the detector; and a computer system in communication with the detector.

Abstract: The method for processing a substrate includes the substrate preparation step of preparing the substrate, the pattern formation step of forming dummy patterns extending in an X-direction on the substrate, the mask arrangement step of arranging a stencil mask having multiple opening patterns on the substrate, the coating formation step of forming a metal film on the substrate through the multiple opening patterns, and the separation step of separating the dummy patterns from the substrate to obtain a submount. The dummy pattern has protrusion formed such that a side surface of the submount is exposed and formed close to the side surface with a clearance.

Abstract: We disclose an on-chip photonic spectroscopy system capable of dramatically improving the signal-to-noise ratio (SNR), dynamic range, and reconstruction quality of Fourier transform spectrometers. Secondly, we disclose a system of components that makes up a complete on-chip RF spectrum analyzer with low-cost and high-performance.

Abstract: A Mach-Zehnder interferometer (MZI) is provided to receive a coherent input photon in an initial pointer state for producing a continuously variable “faux qubit” in a magic state. The MZI apparatus includes first and second ports, first and second beam-splitters, first and second mirrors, and a modular interaction operator. The emitter produces an input coherent photon in an initial pointer state along an emission direction. The first and second ports are respectively disposed parallel and perpendicular to the emission direction. The first and second beam-splitters are disposed respectively collinearly with the emission direction and between the first and second ports parallel to and offset from the emission direction. The first and second mirrors are disposed respectively offset from and collinearly with the emission direction.

Abstract: A system for generating clock signals for a photonic quantum computing system includes a pump photon source configured to generate a plurality of pump photon pulses at a first repetition rate, a waveguide optically coupled to the pump photon source, and a photon-pair source optically coupled to the first waveguide. The system also includes a photodetector optically coupled to the photon-pair source and configured to generate a plurality of electrical pulses in response to detection of at least a portion of the plurality of pump photon pulses at the first repetition rate and a clock generator coupled to the photodetector and configured to convert the plurality of electrical pulses into a plurality of clock signals at the first repetition rate.

Abstract: A scanning device applied to an optical coherence tomography system integrates a scanning lens group required by the coherence tomography system into a fundus imaging system, so that the coherence tomography system and the fundus imaging system can share the scanning lens group for focusing. The above-mentioned scanning device can shorten a response time of focusing and reduce the volume of the system. An optical coherence tomography system including the above-mentioned scanning device is also disclosed.

Abstract: The present description relates to a system for microscopic analysis of a sample that includes a microscopic analysis path and a sighting path. The microscopic analysis path notably includes an illumination path that illuminates the sample through a microscope objective of given nominal numerical aperture in a given field of view and a detection path including the microscope objective, and that detects in the field of view and according to a detection pattern, a light beam emitted by the sample in response to the illumination of the sample. The sighting path includes the microscope objective, a device for full field illumination of the sample, a two-dimensional detector, one or more imaging elements forming, with the microscope objective, a full field imaging device that forms a surface reflection sighting image of the sample of a given effective field encompassing the field of view.

Abstract: An optical module with a reduced size but improved imaging includes a light source, a first lens, at least two first reflectors, at least two second reflectors, and a diffracting optical element. The first reflectors and the second reflectors are both inside the first lens and alternately arranged along an optical path of emitted light, which changes and lengthens its transmission path for face recognition focusing or similar purposes. An electronic device using the optical module is also provided.

Abstract: A method for refining poses includes receiving a plurality of poses and performing volumetric reconstruction for the plurality of poses to produce a global geometry. The method also includes refining each pose of the plurality of poses with respect to the global geometry to produce a plurality of refined poses.

Abstract: Optical wavefront shaping has been the standard technique to control light through scattering media. Implicit in this dominance is the assumption that knowledge of the optical phase is a necessity for optical control through scattering media. In this paper, we challenge this assumption by reporting on an intensity-only approach for light control through (or reflected from) a disordered scattering medium—optical-channel-based intensity streaming (OCIS). Instead of actively tuning the interference between the optical paths via wavefront shaping, OCIS can control light and transmit information through or from scattering media with linear intensity operation, which not only simplifies and speeds up the system but also enables new applications. We experimentally created focus patterns through scattering media in a sub-millisecond timescale with a phase-manipulation-free setup. We also demonstrate that, unlike wavefront shaping, OCIS can readily generate distinct energy null points through scattering media.

Abstract: A device includes an electronic display, a cover through which the electronic display projects an image, and an array of SMI sensors. The array of SMI sensors is positioned on a same side of the cover as the electronic display. Each SMI sensor is configured to emit electromagnetic radiation toward a respective portion of: an interior surface of the cover, or a surface of a component of the device attached to the cover; and generate a respective SMI output including information indicative of vibration of the respective portion of the cover or the component. The device also includes circuitry configured to characterize a vibratory waveform impinging on the device. The vibratory waveform is characterized using at least two of the SMI outputs.

Abstract: An iterative Fourier transform unit of a modulation pattern calculation apparatus performs a Fourier transform on a waveform function including an intensity spectrum function and a phase spectrum function, performs a replacement of a temporal intensity waveform function based on a desired waveform after the Fourier transform, and then performs an inverse Fourier transform. The iterative Fourier transform unit performs the replacement using a result of multiplying a function representing the desired waveform by a coefficient. The coefficient has a value with which a difference between the function after the multiplication of the coefficient and the temporal intensity waveform function after the Fourier transform is smaller than a difference before the multiplication, and a ratio of the difference is smaller when an intensity is higher at each time of the function before the multiplication.

Abstract: A method for fabricating an image sensor array having a first group of photodiodes for detecting light at visible wavelengths a second group of photodiodes for detecting light at infrared or near-infrared wavelengths, the method including growing a germanium-silicon layer on a semiconductor donor wafer; defining pixels of the image sensor array on the germanium-silicon layer; defining a first interconnect layer on the germanium-silicon layer, wherein the interconnect layer includes a plurality of interconnects coupled to the first group of photodiodes and the second group of photodiodes; defining integrated circuitry for controlling the pixels of the image sensor array on a semiconductor carrier wafer; defining a second interconnect layer on the semiconductor carrier wafer, wherein the second interconnect layer includes a plurality of interconnects coupled to the integrated circuitry; and bonding the first interconnect layer with the second interconnect layer.

Abstract: Disclosed herein are platforms, systems, and methods including a cell culture system that includes a cell culture container comprising a cell culture, the cell culture receiving input cells, a cell imaging subsystem configured to acquire images of the cell culture, a computing subsystem configured to perform a cell culture process on the cell culture according to the images acquired by the cell imaging subsystem, and a cell editing subsystem configured to edit the cell culture to produce output cell products according to the cell culture process.

Abstract: A method for providing a detection-signal for objects to be detected—at least a first and second light-beam including different frequencies being generated with a first optical non-linear 3-wave-process from a light-beam of a light-source including an output-frequency, and the first light-beam including a reference-frequency being detected, and the second light-beam including an object-frequency being emitted and received after reflection on an object, and the light-beam including the output-frequency and the second light-beam including the object-frequency being superposed, and a reference-beam including a reference-frequency being generated with a second optical non-linear 3-wave-process from the two superposed light-beams including the output-frequency and including the object-frequency, and a detection-signal being generated so that the object-distance is determinable due to the aforementioned superposition based on the time-difference between the detection of the first light-beam including the reference-

Abstract: An emitter of electromagnetic radiation is configured for modes of operation providing fields of illumination of different widths, and a photodetector is configured for time-of-flight and proximity measurements by detecting electromagnetic radiation that is emitted by the emitter and reflected to the photodetector. The emitter is operated by a driver, which is configured for an alternation between the modes of operation. A time-of-flight measurement is performed when the field of illumination is narrow, and a proximity or ambient light measurement is performed when the field of illumination is wide.

Abstract: A portable electronic device is operable in a particulate matter concentration mode where the portable electronic device uses a self-mixing interferometry sensor to emit a beam of coherent light from an optical resonant cavity, receive a reflection or backscatter of the beam into the optical resonant cavity, produce a self-mixing signal resulting from a reflection or backscatter of the beam of coherent light, and determine a particle velocity and/or particulate matter concentration using the self-mixing signal. The portable electronic device is also operable in an absolute distance mode where the portable electronic device determines whether or not an absolute distance determined using the self-mixing signal is outside or within a particulate sensing volume associated with the beam of coherent light. If not, the portable electronic device may determine a contamination and/or obstruction is present that may result in inaccurate particle velocity and/or particulate matter concentration determination.

Abstract: A method for validating the placement of pieces in an assembly task by scanning a coherent light source, such as a laser, over a surface and characterizing the detected interference speckle pattern to discriminate the position of the placed piece from the surface on which the piece is placed. This discrimination is possible even if the characteristic features of the piece and background are smaller than the resolution of the scanning system. In addition, characteristics of the piece, such as the orientation of fibers in the material, may be sensed by classification of the associated speckle response.

Abstract: A passive photonics reservoir computing system comprises an optical waveguide based structure comprising a plurality of discrete nodes and a plurality of passive waveguide interconnections between the nodes for propagating the at least one photonic signal between the nodes, in which each discrete node is adapted for passively relaying the at least one photonic wave over the passive waveguide interconnections connected thereto, wherein the optical waveguide based structure comprises at least one multimode Y-junction configured for connecting three waveguides using a taper section wherein the taper section is not perfectly adiabatic. A training scheme uses a passive photonics computing system.

Abstract: A high-speed device, for inspecting a large area of an object, which includes: a terahertz wave generation portion configured to generate a terahertz wave; a ring beam forming portion configured to form a ring beam by using the terahertz wave incident from the terahertz wave generation portion; a rotary mirror configured to reflect the ring beam formed by the ring beam forming portion while rotating to allow the ring beam to be incident on an inspection target object; and a detector configured to detect a ring beam generated from the inspection target object.

Abstract: An apparatus includes a light source to provide a plurality of input optical modes in a squeezed state. The apparatus also includes a network of interconnected reconfigurable beam splitters (RBSs) configured to perform a unitary transformation of the plurality of input optical modes to generate a plurality of output optical modes. An array of photon counting detectors is in optical communication with the network of interconnected RBSs and configured to measure the number of photons in each mode of the plurality of the output optical modes after the unitary transformation. The apparatus also includes a controller operatively coupled to the light source and the network of interconnected RBSs. The controller is configured to control at least one of the squeezing factor of the squeezed state of light, the angle of the unitary transformation, or the phase of the unitary transformation.

Abstract: An object detection training method can include receiving a training sample set in a current iteration of an object detection training process over an object detection neural network. The training sample set can include first samples of a first class and second samples of a second class. A first center loss value of each of the first and second samples can be determined. The first center loss value can be a distance between a feature vector of the respective sample and a center feature vector of the first or second class which the respective sample belongs to. A second center loss value of the training sample set can be determined according to the first center loss values of the first and second samples. A first target loss value of the current iteration can be determined according to the second center loss value of the training sample set.

Abstract: A first light source outputs measurement light having a wavelength in infrared range. A second light source outputs guide light having a wavelength in visible range. A fiber coupler includes a first port into which the measurement light is input, a second port into which the guide light is input, and a third port outputting combined light formed by combining the measurement light and the guide light with each other. A measurement unit emits the combined light to a measurement object and receives return light reflected therefrom. A processing unit obtains information relating to a distance, a speed, or an oscillation of the measurement object, based on an interference signal of the return light and the reference light. The fiber coupler is formed by a single mode fiber that has a cutoff wavelength that is shorter than that of the measurement light and longer than that of the guide light.

Abstract: Systems for confocal Raman spectroscopy of points of interest or regions of interest with concurrent imaging are disclosed. The imaging may be used for real time selection of points of interest or regions of interest for Raman spectroscopy and to monitor for unwanted motions of a sample while Raman spectra are acquired. Disclosed embodiments apply Reflectance confocal microscopy (RCM) in a confocal Raman spectroscopy system. A single laser may be used as a light source for both RCM and micro-Raman spectroscopy. A Faraday optical isolator may be applied to extract RCM signals for imaging Systems as described herein have example application for ex vivo sample and in vivo skin measurement.

Abstract: The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length.

Abstract: Methods and devices are described for performing an all-phase measurement of an ultra-fast laser pulse having a spectral range of greater than one octave. The ultra-fast laser pulse may be split into a first beam comprising a fundamental light with a wavelength ?0 and a second beam comprising a light with a wavelength 2?0. The light with the wavelength 2?0 may be frequency doubled to a light with a wavelength ?0 to generate an interference with the fundamental light. Fourier transform may be performed on an interference spectrum of the interference, and a relative envelope delay (RED) between the fundamental light and the frequency doubled light and a carrier envelope phase (CEP) may be acquired based on a result of the Fourier transform.

Abstract: The invention relates to the technical field of mechanical vibration measurement, and discloses a device for accurately measuring mechanical vibration by photon counter. The device comprises a laser, an optical isolator, an adjustable attenuator, an optical fiber coupler, a single-photon counter and an FPGA post-processing module, wherein the laser enters the optical fiber coupler after passing through the optical isolator and the adjustable attenuator, and then enters into a measured object. The transmitted signal of the object to be measured returns to the optical fiber coupler and is output to the single-photon counter; the mechanical vibration of the measured object is analysed and obtained by the FPGA post-processing module connecting with the output terminal of the single-photon counter.

Abstract: A data processing device of the present invention includes: a data communication device configured to communicate with a laser radar device to acquire a value of line-of-sight wind-speed, a laser emission angle, attitude information, position information, and a time; a storage device configured to store the value of line-of-sight wind-speed and the time; a central processing unit configured to run a data selector to select a value of line-of-sight wind-speed stored in the storage device and being present within a set time period from a time about the value of line-of-sight wind-speed which is newly acquired by the data communication device, and configured to run a wind vector calculator to calculate a wind vector using the newly acquired value of line-of-sight wind-speed and using the selected value of line-of-sight wind-speed; and a memory configured to preserve the data selector and the wind vector calculator.

Abstract: Provided are an imaging apparatus capable of acquiring an image having a small transmission wavelength shift at a plurality of wavelengths and an image processing apparatus capable of measuring a subject on the basis of an image which has a small transmission wavelength shift and which is acquired at a plurality of wavelengths. High image height rays imaged at a position of which an image height is high is incident at a large angle with respect to the optical axis. Therefore, the transmission wavelength shift increases. However, in the imaging apparatus according to the first aspect, the first optical system causes the high image height rays to be incident into the first optical filter and the second optical filter in a state where the upper ray and the lower ray are parallel.

Abstract: The purpose of the present invention is to provide a device for optical frequency domain reflectometry and a method thereof that can measure a reflectance distribution with less spatial resolution degradation due to a phase noise, without using a wideband receiving system even when a long-distance measurement is performed.

Abstract: An improved technique for acoustic sensing involves, in one embodiment, launching into a medium, a plurality of groups of pulse-modulated electromagnetic-waves. The frequency of electromagnetic waves in a pulse within a group differs from the frequency of the electromagnetic waves in another pulse within the group. The energy scattered by the medium is detected and, in one embodiment, the beat signal may be used to determine a characteristic of the environment of the medium. For example, if the medium is a buried optical fiber into which light pulses have been launched in accordance with the invention, the presence of acoustic waves within the region of the buried fiber can be detected.

Abstract: A method for analyzing the wavefront effect of an optical system includes: illuminating a measurement mask (110, 310) with illumination light, producing an interferogram in a specified plane using a diffraction grating (150) from a wavefront from the illuminated measurement mask and traveling through the optical system; and capturing the interferogram with a detector (170). Different angular distributions of the illumination light incident on the measurement mask are produced via a mirror arrangement of independently settable mirror elements. A plurality of interferograms are captured in a plurality of measurement steps, wherein these measurement steps differ respectively in angular distribution of the illumination light that is incident on the measurement mask.

Abstract: An improved technique for acoustic sensing involves, in one embodiment, launching into a medium, a plurality of groups of pulse-modulated electromagnetic-waves. The frequency of electromagnetic waves in a pulse within a group differs from the frequency of the electromagnetic waves in another pulse within the group. The energy scattered by the medium is detected and, in one embodiment, may be used to determine a characteristic of the environment of the medium. For example, if the medium is a buried optical fiber into which light pulses have been launched in accordance with the invention, the presence of acoustic waves within the region of the buried fiber can be detected.

Abstract: A method comprising forming a linear temporal non-stationary amplitude filter by interacting a high intensity ultrashort laser pump pulse with a photo-excitable material, focusing an ultrashort broadband laser probe pulse over the photo-excited material, acquiring a two-dimensional spectrogram and retrieving amplitudes and phases of both temporal probe pulse and linear non-stationary amplitude filter from the two-dimensional spectrogram.

Abstract: A method of communicating through the earth which includes the steps of using a digital pulse train to generate a sweep pulse train which controls the frequency of a magnetic field at a first location, and at a second location, detecting the magnetic field and producing a signal at a frequency dependent on the frequency of the sweep pulse train, and extracting a replica of the digital pulse train from the signal.

Abstract: Systems and methods are provided for filtering coherent infrared light from a thermal background for protection of infrared (IR) imaging arrays and detection systems. A Michelson interferometer is used for coherent light filtering. In an implementation, a system includes a fixed mirror, a beam splitter, and a moving mirror which can be controlled translationally, as well as tip/tilt. The Michelson interferometer may be used as an imaging system. For imaging applications, a system may comprise a tunable array of micro-electromechanical systems (MEMS) mirrors. A mid-wave IR interferometer with electronic feedback and MEMS mirror array is provided.

Abstract: A system for registering multiple point clouds captured by an aircraft is disclosed. The system includes a speckle generator, at least one three-dimensional (3D) scanner, and a processor coupled thereto. In operation, the speckle generator projects a laser speckle pattern onto a surface (e.g., a featureless surface). The at least one 3D scanner scans the featureless surface to generate a plurality of point clouds of the featureless surface and to image at least a portion of the laser speckle pattern. The processor, which is communicatively coupled with the at least one 3D scanner, registers the plurality of point clouds to generate a complete 3D model of the featureless surface based at least in part on the laser speckle pattern.

Abstract: The present invention relates to a device, use of the device and a method for high contrast imaging, particularly suitable for imaging of moving object of interest such as gas expanding from a gas jet or physical or chemical or biological processes in material. The device for high-contrast imaging comprises a beam splitter for splitting a beam into a probe beam and a reference-beam, wherein the probe beam is directed to an object; a self-imaging system for receiving the probe beam from the object and imaging the object on itself while in a preferred embodiment, the system preserves a reflected probe beam divergence. The beam interacts with the object at least twice; and the reflected probe beam is further directed to the splitter after the last interaction; and detection means receiving the probe beam from the splitter.

Abstract: A system for imaging may include an illumination system that includes a light source to generate a light beam; and a spatial encoding pattern generator comprising one or a plurality of optical elements to encode the imaging beam so as to concurrently illuminate an object by a plurality of different spatial encoding patterns, wherein each encoding pattern of said different encoding patterns is characterized by a distinct wavelength of the imaging pattern. The system may also include an imaging sensor for receiving the encoded imaging beam transmitted through the object or reflected off the object; and a processor for decoding image data from the imaging and reconstructing an image of the object.

Abstract: There is provided system and a separation substrate device for use with an NLM separator in separating and/or detecting at least one target analyte in a sample, the substrate comprising a micromagnet array of a plurality of micromagnets, the micromagnet array comprising a first capture region, a second focusing region, and, a third detection region, the focusing region comprising a converging and/or diverging micromagnet array region. Also provided is a method for separating and detecting at least one target analyte in a sample.

Abstract: A circuit and method for mitigating multi-path interference in direct detection optical systems is provided. Samples of an optical signal having a pulse amplitude modulated (PAM) E-field are processed by generating a PAM level for each sample. For each sample, the sample is subtracted from the respective PAM level to generate a corresponding error sample. The error samples are lowpass filtered to produce estimates of multi-path interference (MPI). For each sample, one of the estimates of MPI is combined with the sample to produce an interference-mitigated sample.

Abstract: An optical analysis method and assembly for analysing an ultrashort laser pulse, the assembly includes a single-shot optical autocorrelator, having a polarity separator for angular separation of an incident laser radiation beam with fundamental frequency (?) into two laser radiation beams with the fundamental frequency and linear polarities which are orthogonal to one another, the two beams forming angle therebetween so that the beams at least partially overlap at the output of the separator, a type-II nonlinear crystal receives the at least partially overlapping beams and generates, at the output of the crystal, a single laser radiation beam with harmonic frequency (2?). A spectral filtering device selectively allows the passage of the single laser radiation beam while blocking the laser radiation beams with fundamental frequency. The non-linear crystal, spectral filtering device, and detection system detect an intensimetric single-shot autocorrelation trace of the order of two at the harmonic frequency.

Abstract: A method and system are disclosed for use in imaging a sample. The method comprises illuminating a sample through a scattering medium, or illuminating a sub-surface region of the sample through a scattering surface region of the sample, with a plurality of spatial patterns of incident electromagnetic radiation, wherein each spatial pattern of incident electromagnetic radiation interacts with the sample, or the sub-surface region of the sample, to generate electromagnetic radiation in the sample or the sub-surface region of the sample.

Abstract: A method of measuring a volume of a micro projection includes: measuring a three-dimensional shape of the micro projection using white-light interferometry; comparing a height at which a first peak of an envelope of an interference light intensity is detected with a height of a reference plane, and extracting a projection top portion of the micro projection; detecting a height of the extracted projection top portion; detecting a diameter based on a lateral dimension and a longitudinal dimension of a circumscribed quadrangle in an area that constitutes the projection top portion and a region having a height different from the height of the reference plane, the region including or being in contact with the projection top portion; and calculating the volume of the micro projection based on the height of the projection top portion and the diameter.

Abstract: An optical apparatus has an OCT imaging apparatus with a first light source for low coherence light of wavelengths above a threshold wavelength and a signal detector that obtains an interference signal between low coherence light from the sample and low coherence light reflected from a reference. A surface contour imaging apparatus has a second light source that emits one or more wavelengths of surface illumination below the threshold wavelength, a camera to acquire images from illumination reflected from the sample and a probe that has a raster scanner wherein the low coherence light and the surface illumination share the same path from the raster scanner to the sample. A processor coordinates activation of the light sources, actuation of the scanner, and acquisition of data and the camera and follows instructions to display, store, or transfer images from the acquired data.