Abstract: This disclosure provides methods and systems that adaptively adjust the gain of the drive signal to a slow-scan mirror to compensate and stabilize the mirror to achieve desired performance metrics. Non-ideal characteristics of the slow-scan mirror, including the mirror and related assembly, exhibit behaviors that impact the overall gain of the device, which changes over time and operating environment. To compensate for these non-ideal characteristics, the drive signal to the slow-scan mirror may need to be adjusted to achieve the desired beam deflection angle. An adaptive inner loop gain control structure may be employed to dynamically adjust the gain of the inner-control loop to achieve a target gain such that the overall gain variations from the slow scan mirror and other components are scan mirror such that compensated and stabilized. The parameters, logic and blocks of the inner loop gain control may be implemented in hardware, software, or combinations thereof.

Abstract: A distance measuring device for measuring the distance to an object is provided, including a light-emitting module, a driving assembly disposed in the light-emitting module, and a light-receiving module. The light-emitting module has a housing, a light source disposed in the housing, a light grating element, and an optical path adjuster. The light source emits a measuring light through the optical path adjuster and the light grating element. The driving assembly can drive the optical path adjuster or the light grating element to move relative to the housing. The light-receiving module receives the measuring light which is reflected by the object to obtain distance information of the object.

Abstract: A coupling method of an optical module is provided. A circuit board with a light emitting element emitting an output light and an output lens are provided. The light emitting element is covered by the output lens. The output lens is connected to an output meter. The output lens and the circuit board are moved relatively. An intensity of the output light is measured by the output meter. An output qualified region is defined based on a region where the output lens is located when the intensity of the output light is greater than an output requirement. The aforementioned steps are repeated for a predetermined number of times. The output lens and the circuit board are moved relatively in an intersection area of the output qualified regions. The output lens is fixed on the circuit board when the intensity of the output light is greater than the output requirement.

Abstract: A projection device configured to provide multiple projection modes is provided. The projection device includes a housing module and a projection module. The housing module includes a display screen and multiple protective walls. The display screen includes a display curved surface. The projection module includes an optomechanical assembly and a light guide assembly. In a first projection mode, the optomechanical assembly projects an image light beam to the light guide assembly along a first axis. The light guide assembly projects the image light beam to the display curved surface along a second axis, where the first axis and the second axis are not parallel to each other. In a second projection mode, the light guide assembly is moved out of a transmission path of the image light beam, so that the image light beam is directly projected out of the projection device.

Abstract: According to an electrochromic element of the present disclosure, when maximum and minimum optical densities in a coloring region face when an inter-electrode distance is constant are ?ODmax and ?ODmin, respectively, the electrodes distance d?=d+?d (d: an inter-electrode distance when the inter-electrode distance of a pair of electrodes is constant, ?d: an inter-electrode distance correction amount) at a position providing ?ODmin, and when an optimal inter-electrode distance correction amount ?d0 calculated when an optical density difference between ?ODmax and ?ODmin is completely eliminated at the position providing ?ODmin is defined as equation: ?d0 (?OD)=d×(?ODmax/?ODmin?1), ?d at a position providing ?ODmin is smaller than or equal to the maximum value ?d0, MAX of ?d0 (0<?OD<D) at 0<?OD<D and larger than or equal to ?d0 (?OD=D) at ?OD=D.

Abstract: A light path adjustment mechanism includes a support, a carrier, an optical plate member, a permanent magnet and an electromagnet. The carrier is disposed in the support and connected to the support by a first elastic member and a second elastic member, the first elastic member and the second elastic member are configured to twist substantially about a first axial direction, and the optical plate member is disposed on the carrier. An attractive force or a repulsive force generated between the permanent magnet and the electromagnet acts in a direction substantially perpendicular to the first axial direction, and one end of the carrier is provided with the permanent magnet or the electromagnet.

Abstract: The present invention is to provide a wavelength cross-connect device that reduces device costs. A wavelength cross-connect device 10B performs relaying for changing, using WSSs, routes of optical signals transmitted from M routes 1h to Mh, in which K optical fibers 1f to Kf are grouped for each of the routes, on an input side to output the optical signals to respective optical fibers 1f to Kf of M routes 1h to Mh on an output side. Input ports of each of the optical couplers 25a to 26d are connected to output ports of each of first WSSs 21a to 22k.

Abstract: A micro-electro-mechanical system (MEMS) device may include a mirror structure suspended from a first hinge and a second hinge that are arranged to enable the mirror structure to be tilted about a tilt axis. The mirror structure may include a first actuator and a second actuator located on opposite sides of the tilt axis. The MEMS device may include a fixed electrode coupled to first actuator to cause the mirror structure to tilt about the tilt axis in a first direction based on a fixed voltage applied to the fixed electrode. The MEMS device includes a driving electrode coupled to the second actuator to cause the mirror structure to tilt about the tilt axis in a second direction opposite from the first direction based on a driving voltage applied to the driving electrode.

Abstract: A system includes a spatial light modulator (SLM) configured to project an image. The system also includes a controller coupled to the SLM. The controller is configured to receive the image and determine a brightness level of the image. The controller is also configured to enforce a brightness limit on the image responsive to the brightness level, to produce a reduced image. The controller is configured to instruct a display to display the reduced image.

Abstract: In an embodiment, an electronic display includes an active area including a plurality of pixels arranged in columns and a plurality of source drivers driving image data to columns of pixels. The electronic display also includes a first plurality of switches selectively coupling respective source drivers of the plurality of source drivers to one or more columns. Selective coupling enables the respective source drivers to, at different times, drive the image data to: a single column; and multiple columns. In another embodiment, an electronic display includes a display panel configured to operate using a reference voltage received via a resistive path having a routing resistance, a reference voltage source outputting the reference voltage, and a feedback circuit sensing an electrical parameter of the resistive path and producing a compensation voltage that, when added to the reference voltage, causes the reference voltage to remain substantially constant at the display panel.

Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, one or more proximal-side electrostatic cavities are defined between the VCSEL device and the membrane device and used to displace the mirror to decrease a size of an optical cavity.

Abstract: A MEMS micro-mirror device includes a middle substrate, a movable structure, at least one stopper coupled with the movable structure, at least one flexure, an upper cap, and a lower cap. The movable structure includes a micro-mirror plate having a reflective surface. The flexure connects the stopper and the middle substrate. The upper cap, bonded with the middle substrate, has a first opening for allowing the movable structure's movement and has at least one first recess facing a first side of the flexure and a first side of the stopper. The lower cap, bonded with the middle substrate, has a second opening for allowing space for the movement and has at least one second recess facing a second side of the flexure and a second side of the stopper.

Abstract: According to one implementation a mount pad is provided that includes a plurality of arcuate flexure members disposed between and connected to top and bottom plates. According to some implementations a majority or all of the arcuate flexure members have a semi-circular cross-section and are arranged to form a plurality of radially spaced-apart concentric rings. Concave surfaces of the arcuate flexure members face radially inward toward a center of the concentric rings. Circumferential adjacent arcuate flexure members in each of the concentric rings are circumferentially spaced apart from one another so that a gap exists between them. According to some implementations the mount pad further includes a coupling unit prolonging from one of the top and bottom plates, the coupling unit facilitating a connection of the mount pad to a support structure. According to some implementations the mount pad is a monolithic structure.

Abstract: Provided is a novel actuator that can easily achieve movement with multiple degrees of freedom. An actuator includes a flexible electrode, a first base electrode disposed to face the flexible electrode on the Y-axis and provided with a first insulating layer on an opposite face, a second base electrode disposed to face the flexible electrode on the X-axis and provided with a second insulating layer on an opposite face, and a first output member and a second output member adapted to be displaced according to deformation of the flexible electrode. A first space is formed between the first insulating layer and the flexible electrode, in which the flexible electrode deforms toward the first insulating layer by an applied voltage. A second space is formed between the second insulating layer and the flexible electrode, in which the flexible electrode deforms toward the second insulating layer by an applied voltage.

Abstract: A method for providing control data for manufacturing at least one three-dimensional object by means of a layer-wise solidification of a building material in an additive manufacturing apparatus is provided. The method includes at least the following steps: a) determining the locations corresponding to the cross section of the at least one object, b) determining at least two different regions to be solidified in said at least one layer, wherein said at least two regions are chosen from the group of: sandwiched region, down-facing region and up-facing region, c) defining a scanning sequence for the beam so as to solidify the building material at least at the locations corresponding to said portion of the cross section of the object, wherein at an interface between a first and a second region differing from each other a scan line of the beam is continuous and at least one beam parameter value is changed.

Abstract: An image projection device for displaying an image onto a remote surface. The image projection device employs a scanner to project image beams of visible light and tracer beams of light onto a remote surface to form a display of the image. The device also employs a light detector to sense at least the reflections of light from the tracer beam pulses incident on the remote surface. The device employs the sensed tracer beam light pulses to predict the trajectory of subsequent image beam light pulses and tracer beam light pulses that form a display of the image on the remote surface in a pseudo random pattern. The trajectory of the projected image beam light pulses can be predicted so that the image is displayed from a point of view that can be selected by, or automatically adjusted for, a viewer of the displayed image.

Abstract: A visual display assembly useful as an authentication or anti-counterfeiting element. The assembly includes a substrate and, on a surface of the substrate, an array of micro mirrors receiving ambient light. Each mirror includes a reflective surface to reflect the ambient light to display an image that appears to float in a plane, which is spaced a distance apart from the surface of the substrate. The image includes a plurality of pixels, and the array of micro mirrors includes for each of the pixels a set of the micro mirrors each having a reflective surface oriented to reflect the ambient light toward a point on the plane corresponding to one of the pixels. Each of the sets of the micro mirrors includes a plurality of the micro mirrors, and the reflected ambient light each set of micro mirrors intersects to illuminate or write a pixel of an image.

Abstract: An optical module includes a mirror unit having a movable mirror portion, a magnet portion configured to generate a magnetic field acting on the movable mirror portion, and a package accommodating the magnet portion. The magnet portion has a Halbach structure including a first magnet applied with a force in a first direction, and a second magnet applied with a force in a second direction. The package has a bottom walls portion, a side wall portion, and a restriction portion configured to restrict movement of the second magnet in the second direction. The movable mirror portion is disposed in a space formed by the restriction portion.

Abstract: A near eye optical display includes a waveguide comprising a first surface and a second surface, an input coupler, a fold grating, and an output grating. The input coupler is configured to receive collimated light from a display source and to cause the light to travel within the waveguide via total internal reflection between the first surface and the second surface to the fold grating; the fold grating is configured to provide pupil expansion in a first direction and to direct the light to the output grating via total internal reflection between the first surface and the second surface; and the output grating is configured to provide pupil expansion in a second direction different than the first direction and to cause the light to exit the waveguide from the first surface or the second surface.

Abstract: The present invention relates to a near-to-eye display device display device in the form of a head-worn display. The present invention more particularly relates to a near-to-eye display device (10) comprising at least one point light source (11), at least one spatial light modulator (18) and at least one reflector mounted on the near-to-eye display device (10).

Abstract: A light path shifting device is provided with a glass plate which incident light enters, a first frame for holding the glass plate, a second frame for supporting the first frame in the state of being swingable around a first oscillation axis, a base member for supporting the second frame in the state of being swingable around a second oscillation axis crossing the first oscillation axis, a first actuator for oscillating the first frame, and a second actuator for oscillating the second frame, and is capable of shifting the light path of the incident light in a first direction and a second direction crossing the first direction by oscillating the first frame and the second frame to thereby change an incident angle of the incident light to the glass plate.

Abstract: A laser machining device includes a laser machining head and a control unit. The laser machining head applies laser for machining an object to be machined, and includes a first laser light source for first laser, a second laser light source for second laser having a different pulse width different from the first laser, a condensing optical system provided between the object and the laser light sources to condense at least the lasers on the object, a switch mechanism provided between the condensing optical system and the laser light sources so that the switch mechanism is movable to a position that at least one of the lasers enters the condensing optical system, and an irradiation angle change mechanism provided between the condensing optical system and the switch mechanism to change an irradiation angle of the first laser. The control unit controls the laser machining head.

Abstract: A detector for use in liquid chromatography is provided. The detector includes a light delivery system comprising a light source that emits one or more spectral lines of light of a light spectrum. The detector has an entrance slit configured to receive the one or more spectral lines of light and a wavelength selection module comprising a digital micro-mirror device. The digital micro-mirror device is configured to redirect the one or more spectral lines of light to a flow cell. The flow cell is optically connected to the wavelength selection module.

Abstract: Various embodiments relate to a resonator system that can be used to monitor proteins, cells, or small molecules in a container. A resonant sensor, embedded in or on the container, can have an inductive element and a capacitive element, where the container and resonant sensor are structured such that, when a concentration of the proteins, cells, or small molecules in the container changes, dielectric permittivity and conductivity of the proteins, cells, or small molecules contributes to capacitance of the resonant sensor to affect a resonant frequency shift of the resonant sensor. Interrogating the resonant sensor can be conducted wirelessly along with wirelessly transmitting data collected from the interrogation. Additional apparatus, systems, and methods are disclosed.

Abstract: Disclosed are platforms for communicating among one or more otherwise independent systems involved in controlling functions of buildings or other sites having switchable optical devices deployed therein. Such independent systems include a window control system and one or more other independent systems such as systems that control residential home products (e.g., thermostats, smoke alarms, etc.), HVAC systems, security systems, lighting control systems, and the like. Together the systems control and/or monitor multiple features and/or products, including switchable windows and other infrastructure of a site, which may be a commercial, residential, or public site.

Abstract: A light path adjustment mechanism includes a support, a carrier, an optical plate member and a raised structure. The carrier is disposed in the support and connected to the support by a first connection bar and a second connection bar. The optical plate member is disposed on the carrier, and the raised structure is provided on a periphery of the carrier and integrally formed as one piece with the carrier.

Abstract: A light detection and ranging (LIDAR) device scans through a scanning zone while emitting light pulses and receives reflected signals corresponding to the light pulses. The LIDAR device scans the emitted light pulses through the scanning zone by reflecting the light pulses from an array of oscillating mirrors. The mirrors are operated by a set of electromagnets arranged to apply torque on the mirrors, and an orientation feedback system senses the orientations of the mirrors. Driving parameters for each mirror are determined based on information from the orientation feedback system. The driving parameters can be used to drive the mirrors in phase at an operating frequency despite variations in moments of inertia and resonant frequencies among the mirrors.

Abstract: An optical system for a lithography machine includes: a main mirror element and a manipulator device for positioning and/or orienting said main mirror element. The optical system also includes an optically active surface for reflecting radiation. The optical system further includes an actuator matrix positioned between the main mirror element and the optically active surface. The actuator matrix is configured to deform the optically active surface to influence the reflective properties of the optically active surface. A gap is present between the actuator matrix and a front side of the main mirror element so that the actuator matrix is spaced apart from the main mirror element.

Abstract: An automobile charging system includes: a photovoltaic battery panel installed at a bottom of a vehicle; a camera module; a first actuating device connected with the camera module; a light source; a second actuating device connected with the light source; and a controller being connected with the camera module, the first actuating device, the light source and the second actuating device. The controller is configured to control the first actuating device to rotate, and through the first actuating device control the camera module to capture a preset pattern disposed at the bottom of the vehicle. After the camera module has captured the preset pattern disposed at the bottom of the vehicle, the controller is configured to control the second actuating device to rotate accordingly so that the light source projects light to the photovoltaic battery panel and thereby charge the photovoltaic battery panel.

Abstract: An illustrative example MEMS device includes a base and a plurality of mirror surfaces supported on the base. The plurality of mirror surfaces are respectively in a fixed position relative to the base. The plurality of mirror surfaces are at respective angles relative to a reference surface. The respective angles of at least some of the mirror surfaces are different from the respective angles of at least some others of the mirror surfaces.

Abstract: A method for controlling operation of a MEMS mirror includes steps for: generating activation pulses for operating the MEMS mirror and generating a window activation signal for current detection, with the window activation signal overlapping with an end of an activation pulse. The method also includes detecting current through a stator or a rotor of the MEMS mirror during the window activation signal and terminating a current activation pulse and the window activation signal in response to detecting a change in the direction of the current through the stator or the rotor of the MEMS mirror during the window activation signal.

Abstract: A silicon-based edge coupler for coupling a fiber with a waveguide includes a cantilever member being partially suspended with its anchored end coupled to a silicon photonics die in a first part of a silicon substrate and a free end terminated near an edge region separating a second part of the silicon substrate from the first part. The edge coupler further includes a mechanical stopper formed at the edge region with a gap distance ahead of the free end of the cantilever member. Additionally, a V-groove is formed in the second part of the silicon substrate characterized by a top opening and a bottom plane symmetrically connected by two sloped side walls along a fixed Si-crystallography angle. The V-groove is configured to support a fiber with an end facet being pushed against the mechanical stopper and a core center being aligned with the free end of the cantilever member.

Abstract: An optical scanning device includes a light source component, a scanning component, an electrostatic driver, a controller, and a current sensor. The light source component emits light. The scanning component scans the light. The driver drives the scanning component. The controller controls emission of the light from the light source component. The current sensor senses current generated by a capacity change of the driver. The controller further controls the emission of the light from the light source component based on the sensed current sensed by the current sensor.

Abstract: One embodiment provides a method, including: determining a light profile of light falling onto a solar module, wherein the light profile identifies (i) a position of the light with respect to the solar module and (ii) the intensity of the light with respect to solar panels within the solar module; identifying at least one solar panel within the solar module having partial light coverage; and changing the light profile by shaping the reflection of the light onto the solar module created by a flexible curved reflector in proximity to the solar module, thereby increasing the amount of light falling onto said at least one solar panel within the solar module; the changing the light profile comprising modifying the geometry of the flexible curved reflector by activating at least one actuator to move at least a portion of the flexible curved reflector.

Abstract: A laser diode assembly, comprising a plurality of laser diodes each configured to emit respective ones of a plurality of laser beams along parallel and nonoverlapping optical axes and a first beam offset plate (BOP) configured to receive a first of the laser beams on a first input surface, the first laser beam having a first input optical axis, the first BOP configured to transmit a first output laser beam that has a first vertical offset from the first input optical axis.

Abstract: High resolution printing systems that utilize high power laser diode bars and digital mirror devices (DMD) require side-by-side stacking of illumination modules to stitching of the image from each module to form a longer total image width. An inline illumination optical system having a refractive prism and Total Internal Reflection (TIR) prism pair with an air gap along with a light guide transporting light beams at a compound angle to the prism pair eliminates the need for any axial rotation of the laser and light guide, and enables side-by-side module stacking. The illumination optical system includes an illumination module having a light source, the light guide, a DMD array and a Refractive TIR (RTIR) prism. The system also includes a DMD housing containing the DMD array and having a width within which the illumination module is confined to allow side-by-side stacking.

Abstract: An infrared automobile charging system includes: a photovoltaic battery panel installed at a bottom of a vehicle; a camera module; a first actuating device connected with the camera module; an infrared light source; a second actuating device connected with the infrared light source; and a controller being connected with the camera module, the first actuating device, the infrared light source and the second actuating device. The controller is configured to control the first actuating device to rotate, and through the first actuating device control the camera module to capture a preset pattern disposed at the bottom of the vehicle. After the camera module has captured the preset pattern disposed at the bottom of the vehicle, the controller is configured to control the second actuating device to rotate accordingly so that the infrared light source projects infrared light to the photovoltaic battery panel and thereby charge the photovoltaic battery panel.

Abstract: Discussed is a manufacturing method of a micro mirror array including forming a mirror surface on a polymer film, bonding a plurality of polymer films, each having the mirror surface formed thereon, cutting the bonded polymer films to manufacture a primary micro mirror array, forming an additional mirror surface on the manufactured primary micro mirror array, bonding a plurality of primary micro mirror arrays, each having the additional mirror surface formed thereon, and cutting the bonded primary micro mirror arrays. The micro mirror array is used to form a high-quality floating image.

Abstract: Embodiments of the present disclosure generally relate to methods and apparatus for processing one or more substrates, and more specifically to improved spatial light modulators for digital lithography systems and digital lithography methods using improved spatial light modulators. The spatial light modulator is configured such that there is a 180-degree phase shift between adjacent spatial light modulator pixels. The spatial light modulator is useful for pixel blending by forming a plurality of partially overlapping images, at least one of the plurality of partially overlapping images having at least two pixels formed by a first pair of adjacent spatial light modulator pixels having a 180-degree phase shift therebetween. The spatial light modulator results in improved resolution, depth of focus, and pixel blending.

Abstract: A head mounted display (HMD) device and an image projection method are provided. The head mounted display device includes an optical waveguide device, an image device, an optical conversion layer and a processor. The optical waveguide device receives an image light beam and projects a projection image through a surface. The image device is used to provide the image light beam. The optical conversion layer is disposed overlapping the edge of the surface of the optical waveguide device. The optical conversion layer deflects a portion of the projection image to generate an adjusted projection image according to a command signal, so that the adjusted projection image is transmitted to a projection target. The processor generates the command signal according to a position of the projection target.

Abstract: This invention describes ophthalmic devices with media inserts that have photonic elements upon or within them. In some embodiments passive ophthalmic devices of various kinds may be formed. Methods and devices for active ophthalmic devices based on photonic based projection systems may also be formed.

Abstract: An optical device includes a window glass plate with which a window of a lid section is provided and which is connected to the lid section via a solder layer so that an internal space of the optical device is hermetically sealed. The solder layer has a void which is isolated from an external space and an internal space of the optical device.

Abstract: A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

Abstract: Multi-characteristic detection is achieved by altering the light incidence angle of a single Integrated Computational Element (“ICE”) used in an optical computing device.

Abstract: The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°.

Abstract: A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Abstract: In one embodiment, a method of controlling a micro-electro-mechanical-system (MEMS) photonic switch includes applying a voltage to an electrode of an initial mirror of a first mirror array of the MEMS photonic switch and illuminating a control beam. The method also includes reflecting the control beam off the initial mirror to form a control beam spot on a second mirror array of the MEMS photonic switch and detecting an initial location of the control beam spot to produce an initial optical response. Additionally, the method includes adjusting the voltage in accordance with the initial optical response while the control beam spot has a nonzero velocity.

Abstract: Certain embodiments of the invention may include systems, methods, and apparatus for enhancing a field of view of a camera in a vehicle. According to an example embodiment of the invention, a method is provided for executing computer executable instructions by one or more processors for enhancing a field of view associated with a camera in a vehicle. The method includes capturing image information from one or more objects or one or more occupants in the vehicle; processing the image information; receiving trigger information associated with one or more of the image information, the one or more objects, or the one or more occupants associated with the vehicle; configuring one or more reflective surfaces, based at least in part on the received trigger information, wherein configuring comprises positioning the one or more reflective surfaces with respect to the camera field of view; and adjusting the position of the one or more reflective surfaces based at least on the processing of the image information.

Abstract: A mobile device for projecting images on a surface and for maintaining a position of the image on the surface. The device including an image rendering module to scan the surface and to modify the image based on data obtained about a three dimensional nature of the surface. The device further including an optical image stabilization to adjust an alignment of the projector based on orientation data of the device, an electronic image stabilization module to shift the image within a projection area based on the orientation data and an image-tracking module to shift the image within the projection area based on changes in a relative positions of the image and a target.

Abstract: An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis.