Abstract: An electron beam is accurately emitted to a pre-set location on a molten metal pool formed in a hearth or a mold arranged in an electron beam melting furnace.

Abstract: A process for melting at least one mineral material in powder form includes using at least one laser beam (12) for supplying the energy necessary to the melting, and gradually supplying mineral powder to a zone (10) that is impacted by the laser beam(s) so as to obtain the largest surface possible for interaction between the material and the laser beam(s).

Abstract: A dropping model electrostatic levitation furnace which puts a charged sample in levitation state by an electric field generated between electrodes and subjects the sample to heat treatment, in which a drop tube evacuatable in vacuum is connected vertically at the lower side of a furnace body to allow the sample to drop through the drop tube with a beam irradiating optical system having a heating laser beam. This brings experimental results which the influence of an electric field and gravity is eliminated sufficiently by means of a furnace having comparatively simple constitution, and also enables to reduce the cost drastically with high experimental environment.

Abstract: A refining apparatus for scrap silicon using an electron beam which is suitable for recycling of scrap silicon which is formed during the manufacture of silicon products such as silicon wafers includes a vacuum chamber, a crucible installed within the vacuum chamber, a hearth which is installed next to the crucible within the vacuum chamber and which receives granular scrap silicon and which melts granular silicon by irradiation with an electron beam and which supplies molten silicon to the crucible, and a raw material supply apparatus which is installed within the vacuum chamber and which stores a prescribed amount of granular scrap silicon and supplies the stored granular scrap silicon via a chute.

Abstract: An electrostatic levitation furnace wherein main electrodes opposed to each other within a vacuum chamber are arranged at intervals to form interspaces between them. Auxiliary electrodes are arranged to correspond to each of the electrostatic field generating interspaces, and laser irradiators are arranged above the uppermost main electrode and under the lowermost main electrode, and the main electrode positioned midway between the uppermost and lowest one has a through-hole on an optical path of laser beam which a sample can be passed through. When two species of samples are fused together, regardless of whether or not the samples are conductors, the furnace has the function of melting the levitated samples and fusing them together while maintaining each of the temperatures of the samples, and consequently this permits realization of fusion in a state free of external interference.

Abstract: An electrostatic levitation furnace is improved by providing three pairs of electrodes opposed to each other respectively on three axes perpendicularly intercepting each other at a position where the sample is to be levitated in the vacuum chamber, and disposing a plurality of access ports, which are directed to the position of the sample, to the vacuum chamber tree-dimensionally, whereby the accessible direction against the sample is diversified, it becomes possible to improve the degree of freedom in distribution of various apparatuses and easily cope with increase of apparatuses.

Abstract: An electron beam exposure apparatus for exposing a pattern to a wafer by a plurality of electron beams, comprising an electron beam generating section for generating a plurality of electron beams, a deflecting section having a plurality of deflectors for deflecting the plurality of electron beams, and a screening section having a first screen electrode disposed between the plurality of deflectors and extending from a position close to the electron beam generating section from one end of the deflector to a position close to the wafer from one end of the deflector along the direction of radiation of electron beams.

Abstract: A method includes providing an electron gun having a first head with a thermionic electron source and an accelerating electrode, and further includes replacing the first head with a second head having a power rating substantially different than that of the first head, and subsequently operating the electron gun without replacing the accelerating electrode. The electron gun may further include a platform spaced apart from the accelerating electrode and having an adjustably located locating member that engages a reference member on the head to position the head in three dimensions relative to the accelerating electrode. The platform may be adjustably spaced from the accelerating electrode in order vary the distance between the electron source and the accelerating electrode.

Abstract: Apparatus and methods for limiting interaction of electron beams produced by adjacent electron bean guns mounted within a vacuum chamber of a furnace. The apparatus may include one or more barriers that are suspended within the vacuum chamber between adjacent electron beam guns. The methods may include suspending one or more vertically extending barriers with the vacuum chamber between adjacent electron beam guns.

Abstract: A hard carbon film is formed over an inner surface of a guide bush by fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate.

Abstract: In a physical vapor deposition method of thermochemical treatment of metals, the substance of a target which constitutes a first electrode of a treatment furnace is evaporated by ion bombardment optionally assisted by an electrical arc discharge. The particles evaporated in this manner are deposited onto a substrate at the potential of a second electrode which is different from that of the first electrode. The substrate is heated during this deposition to a treatment temperature exceeding 600.degree. C. and preferably between 800.degree. C. and 1 200.degree. C. The target and its ancillary members in the furnace are continuously cooled by a flow of cooling fluid so that when the treatment temperature is reached the material of the target remains solid and the evaporation occurring at the surface of the target is effected by sublimation. The result is to improve the regularity of the deposit, its adherence to the substrate and the treatment time.

Abstract: In a physical vapor deposition method of thermochemical treatment of metals, the substance of a target which constitutes a first electrode of a treatment furnace is evaporated by ion bombardment optionally assisted by an electrical arc discharge. The particles evaporated in this manner are deposited onto a substrate at the potential of a second electrode which is different from that of the first electrode. The substrate is heated during this deposition to a treatment temperature exceeding 600.degree. C. and preferably between 800.degree. C. and 1,200.degree. C. The target and its ancillary members in the furnace are continuously cooled by a flow of cooling fluid so that when the treatment temperature is reached the material of the target remains solid and the evaporation occurring at the surface of the target is effected by sublimation. The result is to improve the regularity of the deposit, its adherence to the substrate and the treatment time.

Abstract: A method and apparatus for forming a stream of molten material. The apparatus includes a melt container having a bottom wall in which is formed an aperture. A funnel is adapted and constructed to receive molten material from the aperture in the container, and includes a plurality of fluid-cooled metallic segments. The funnel segments define an inner funnel contour that decreases in cross-sectional area from the inlet end to the outlet end of the funnel. An electrically conductive coil surrounds the funnel, and has a shape corresponding to the outer shape of said funnel. A source of medium-frequency current in selective electrical connection with the coil. The method begins with the step of providing a predetermined quantity of molten material in a melt container. A metallic funnel is provided in fluid communication with the melt container, and includes a plurality of fluid-cooled funnel segments. The method also includes the step of providing an electrically conductive coil surrounding the funnel.

Abstract: Method for recognition of noble metals otherwise not recognizable in base material clusters includes using an electron beam furnace in which base material clusters are vaporized by means of an electron beam gun, and the vaporized materials are condensed as free atoms or are alloyed with other components of the base materials, and are able to be recovered by conventional recovery techniques once they are recognized. The base material includes the products of smelting processes, pellets of compacted raw material, like anode-mud or waste material, and the base materials are remelted utilizing the heat from electron beam guns for the remelting.

Abstract: An effusion source, for the generation of molecular beams, adapted to be positioned at an angle to the horizontal, within a vacuum chamber, of an MBE system including heating structures around the source to create uniform temperatures across the source in planes substantially parallel to the horizontal to cause uniform temperatures in planes substantially parallel to the horizontal in materials placed within the source and intended for MBE applications. A number of heating embodiments are described.

Abstract: A thermal decomposition cell for producing a molecular beam from a material gas, includes: a crucible maintained at a given temperature necessary for thermal decomposition of the material gas which is effused in the crucible in a given direction; and a thermal decomposition baffle provided in the crucible and heated to a given temperature necessary for thermal decomposition of the material gas for producing the molecular beam by thermal-decomposing of the material gas such that the material gas is baffled in substantially all directions, the thermal decomposition baffle being made of a given metal to cause the thermal decomposition of the material gas. The thermal decomposition baffle may comprise a fiber or a cloth made of the metal loaded in the crucible.

Abstract: A grounded metallic shield which comprises an electrode enclosing the filament leads and emitters of an e-Gun in a high vacuum chamber of the type used in melting and casting metals and other materials and evaporation sources. The shield is spaced from the filament leads and emitters a distance in the order of the electron mean free path for the pressure uses within the high vacuum chamber. The structure and method of use thereof suppresses or eliminates arc-downs or glow discharges.

Abstract: Apparatus for recognition of metals in base materials includes an electron beam furnace in which base materials are vaporized by means of an electron beam gun and the vaporized materials are condensed as free atoms or are alloyed with other components of the base materials, and are able to be recovered by conventional recovery techniques once they are recognized. The base material includes the products of smelting processes, pellets of compacted raw material like anode-mud or waste material, and the base materials are remelted utilizing the heat from electron beam guns for the remelting.

Abstract: A method of producing finely divided particles or powder, vapor or fine droplets comprises the steps of heating and melting the starting raw material in a vessel having opposed reflecting surfaces, and ejecting the melted raw material from the vessel as heated finely divided particles or powder, vapor or fine droplets, by introducing a carrier gas into the vessel.

Abstract: In the representative embodiment described in the specification, an electron beam furnace has an evacuation system which maintains the interior of the furnace at a pressure in the range from about 50 microns Hg to 300 microns Hg. The relatively high pressure reduces degassing time from a cold start, suppresses volatilization of constituents of metal being refined, and causes volatilized metal to condense in powder form on a condensing screen. A vibrator assists in removing the powder from the condensing screen. The electron beam gun has a series of compartments which are individually evacuated to maintain the pressure in the compartment containing the cathode at a level less than about 1 micron Hg.

Abstract: The present invention provides a water cooled crucible adapted to be received in a crucible support element of an electron beam evaporation system. The crucible comprises a base wall and a sidewall upstanding from the base wall to form a rim and pocket located between the rim and the base wall for containing molten material to be evaporated. The support element has an inner surface surrounding the sidewall of the crucible to define an annular passage for circulating cooling water in a direction taken from the rim to the base wall of the crucible. The sidewall includes a thickened region positioned to conduct heat generated at the top surface of the molten material and having a thickness such that the outer surface contacts the inner surface of the support element. The thickened region has a plurality of circumferentially spaced, preferably spiral grooves defined at the outer surface of the thickened region.

Abstract: A method of reducing contamination caused by high intensity heating of metals is taught. Splatter, vapor droplets and particulate matter is collected to avoid return to the melt. An electric field is established in the heating zone to attract the vapor droplets and particles to charged plates.

Abstract: A method of reducing "fall back" contamination caused by high intensity heating of metals is taught. Splatter, vapor droplets and particulate matter resulting from the high intensity heating is repelled to avoid return to the melt. An electric field is established above the heating zone to repel the vapor droplets and particles from at least one charged electrode disposed above the surface where high intensity heat is applied to a metal surface.

Abstract: A clear optical path is provided in a furnace in which high intensity top surface heating is carried out. The path extends through a viewport to the interior of the furnace chamber. The path extends to a clear metal mirror surface and from the mirror surfaced to other portions of the furnace chamber which are not viewable directly through the viewport.

Abstract: A system is described for maintaining a sample material in a molten state and away from the walls of a container in a microgravity environment, as in a space vehicle. A plurality of sources of electromagnetic radiation, such as an infrared wavelength, are spaced about the object, with the total net electromagnetic radiation applied to the object being sufficient to maintain it in a molten state, and with the vector sum of the applied radiation being in a direction to maintain the sample close to a predetermined location away from the walls of a container surrounding the sample. For a processing system in a space vehicle that orbits the Earth, the net radiation vector is opposite the velocity of the orbiting vehicle.

Abstract: An apparatus for melting metals in a vacuum chamber has a weir box (1), electron beam generators disposed above the weir box, and a crucible for the withdrawal of the melt flowing out of the weir box. A weir or sill is disposed in the trough athwart the length thereof, and it divides the trough into two basins and is situated underneath the one electron-beam source. The melt flowing from the one basin into the other runs in a thin film over the top of the weir or notch while the titanium nitrite in the melt is dissolved.

Abstract: In the particular embodiment of an electron beam furnace arrangement described in the specification, an electron beam gun unit is supported on rails for motion between two hearth and casting units, each having a lid to seal the unit when the electron beam gun unit is not in place. Sealing covers are also provided for the molds associated with the casting units. A common pump, preheating and hearth cooling unit communicates with each of the hearth and casting units so that, when one of the hearth and casting units is in use, the other unit can be cleaned and maintained and then outgassed and preheated in preparation for transfer of the electron beam gun unit from the other hearth and casting unit.

Abstract: The electron bombardment furnace (B) consists of two confinement grid sections (26,28) which may be moved and separated from each other. Inside the bombardment furnace, a tungsten element (14) is enclosed. The material specimen (18) is located within the tungsten element and grounded by means of grounded support wires (20,22) connected to the respective sections of the furnace. The material specimen (18) is supported on the ground wires and heated by electron bombardment until melt occurs. The furnace sections are separated in opposite directions causing the ground wires to pull from the surfaces of the specimen, leaving the specimen freely suspended in the process chamber without the action of external forces. The specimen remains in its melt condition in the processing chamber where it can be undercooled without external forces acting on the specimen, which would cause dynamic nucleation.

Abstract: Evaporator crucible for vacuum depositing systems, having a crucible bottom with at least one bottom opening for the introduction of material in rod form for evaporation. At a distance from the bottom opening there is provided at least one metal crucible rim which preferably is provided with a coolant passage. To solve the problem of reducing the heat losses, the crucible rim is provided internally on at least a part of its depth with a lagging comprising ceramic material. This lagging preferably comprises individual ceramic building blocks which are preferably compressed from magnesium oxide.

Abstract: For use in placing a semiconductor substrate in molecular beam epitaxy apparatus, a holder comprises a heat conductor member opposite to a substrate. The substrate is received in a space formed in a supporting member and is in engagement with a flange portion radially inwardly projected from a peripheral surface of the space. The heat conductor member is heated by a heater in the molecular beam epitaxy apparatus. This results in effective conduction of heat to the substrate. The substrate is easily put in the beam epitaxy apparatus and removed therefrom. The heat conductor member may be of pyrolytic graphite or sintered graphite.

Abstract: A vaporizer crucible for vacuum vapor-deposition apparatus, comprises a metallic body 1 having a recess 2 for accommodating vaporizing material and connected in a thermally-conductive manner to a cooling duct 7 which surrounds the recess 2 at least partially. For effectively preventing reduction in heat transfer in the event of the formation of vapor bubbles in the cooling medium at least one guide device 22 for imparting a swirling motion to the cooling medium flowing in the cooling duct 7 is provided in said duct. The guide device 22 preferably takes the form of a spiral element matching the path of the cooling duct.

Abstract: A method of evaporating an evaporative substance under vacuum comprises bombarding the evaporative substance with electrons from a low voltage arc discharge established between a cathode and an anode which is located in an evaporation chamber and simultaneously supplying additional power for evaporation to the evaporative substance by means of an electron gun which produces an electron energy in excess of one keV. A device for carrying out the invention comprises an evacuable bowl, an evaporation chamber with a receptacle therein for a substance to be evaporated and means for establishing a low voltage arc discharge between a cathode and an anode located in the evaporation chamber, a further provision of an electron gun for bombarding the substance with electrons which has an electron energy more than one kilovolt.

Abstract: The invention relates to a method for burning fine-grain material, particularly for the manufacture of cement clinker from cement raw meal. The material is thermally treated in a multistage burning process with a pre-heating stage, a calcining stage with a high-degree of calcination, a sintering stage in a very short rotary kiln and a cooling stage. Fuel is introduced both into the sintering stage in the short rotary kiln as well as into the calcinating stage. Hot exhaust air from the cooling stage is supplied both to the sintering stage as well as to the calcining stage as furnace air. The invention also relates to an apparatus for the manufacture of mineral products of the burning process such as cement clinker.

Abstract: A microwave melter in which a material charged in a crucible is heated and melted by irradiation of microwaves, the melter including a melting furnace having an upper furnace body fixedly mounted on a support structure and a lower furnace body detachably connectable with the upper furnace body, a waveguide for guiding microwaves from a microwave generator toward the furnace, a crucible received rotatably and in a suspended state in the lower furnace body, and a feed pipe for feeding untreated material to the crucible.

Abstract: A grounded metallic shield which comprises an electrode enclosing the filament leads and emitters of an e-Gun in a high vacuum chamber of the type used in melting and casting metals and other materials and evaporation sources. The shield is spaced from the filament leads and emitters a distance in the order of the electron mean free path for the pressure uses within the high vacuum chamber. The structure and method of use thereof suppresses or eliminates arc-downs or glow discharges.