Abstract: An inkjet recording apparatus includes a tank, a recording head, a cover, a monitor, a cover sensor, an operation panel, and a controller. The cover is movable to cover a plurality of injection inlets associated with a plurality of ink chambers and to expose the plurality of injection inlets. The cover sensor outputs signal depending on position of the cover. The controller controls the monitor to display one of inquiry information and notification on the monitor depending on receipt of the signal from the cover sensor.

Abstract: An end-effector assembly includes a master boom, a frame rail coupled thereto, and at least one branch rail movably coupled to the frame rail by a swing branch lock. The swing arm is movably coupled to the at least one branch rail by a swing arm lock. Each of the swing branch lock and the swing arm lock further includes a clamp configured to movably secure the branch rail to the frame rail or the swing arm to the branch rail. A pivot shaft extends through the clamp and is configured to rotationally secure the clamp in place. A swing plate is secured to the pivot shaft and is configured for engagement with a configuration tool. A locking fastener extends through the swing plate and into the pivot shaft and is configured to lock and unlock the clamp in position.

Abstract: A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and determine a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support. An edge ring position module configured to determine a centered position of the edge ring relative to the substrate support based on offsets between the plurality of first positions and the plurality of second positions.

Abstract: An assembly used in a process chamber for depositing a film on a wafer including a pedestal assembly having a pedestal movably mounted to a main frame. A lift pad rests upon the pedestal and moves with the pedestal. A raising mechanism separates the pad from the pedestal, and includes a hard stop fixed to the main frame, a roller attached to the pedestal assembly, a slide moveably attached to the pedestal assembly, a lift pad bracket interconnected to the slide and a pad shaft extending from the lift pad, a lever rotatably attached to lift pad bracket, a ferroseal assembly surrounding the pad shaft, and a yoke assembly offsetting a moment to the ferroseal assembly when the lever rotates. When the pedestal assembly moves upwards, the lever rotates when engaging with the upper hard stop and roller, and separates the pad from the pedestal by a process rotation displacement.

Abstract: An end-effector assembly includes a master boom, a frame rail coupled thereto, and at least one branch rail movably coupled to the frame rail by a swing branch lock. The swing arm is movably coupled to the at least one branch rail by a swing arm lock. Each of the swing branch lock and the swing arm lock further includes a clamp configured to movably secure the branch rail to the frame rail or the swing arm to the branch rail. A pivot shaft extends through the clamp and is configured to rotationally secure the clamp in place. A swing plate is secured to the pivot shaft and is configured for engagement with a configuration tool. A locking fastener extends through the swing plate and into the pivot shaft and is configured to lock and unlock the clamp in position.

Abstract: An end-effector assembly includes a master boom, a frame rail coupled to the master boom, at least one branch rail movably coupled to the frame rail by a branch lock, and a swing arm movably coupled to the at least one branch rail by a swing lock. The swing lock includes a clamp configured to movably secure the swing arm to the branch rail. A pivot shaft extends through the clamp and the swing arm and is configured to rotationally secure the swing arm to the clamp. A swing plate is secured to the pivot shaft and is configured for engagement with a configuration tool. Further, a locking fastener extends through the swing plate and into the pivot shaft. The locking fastener is configured to lock and unlock the swing lock in position along the branch rail.

Abstract: A system for loading and unloading piece-carrying containers (C) in an industrial plant, comprising: a station (2) for loading and unloading said containers; a workstation (3) to which the loaded containers are brought and at which the pieces are taken from said containers; and a turret (6), which can turn about a vertical axis and is designed to exchange with one another a first container in said workstation and a second container in said loading and unloading station, through a predetermined movement of rotation of said turret, said system being characterized in that, in order to carry out said exchange of said first and second containers, said turret is configured for lifting said first and second containers so as to release them and pick them up from said stations.

Abstract: Methods and systems for positioning wafers using a dual side-by-side end effector robot are provided. The methods involve performing place moves using dual side-by-side end effector robots with active wafer position correction. According to various embodiments, the methods may be used for placement into a process module, loadlock or other destination by a dual wafer transfer robot. The methods provide nearly double the throughput of a single wafer transfer schemes by transferring two wafers with the same number of moves.

Abstract: A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.

Abstract: An apparatus for inserting a preformed electrical bar conductor into a twisting device of the conductor, the apparatus comprising: a supply device that arranges the preformed bar conductor into a supply direction (X-X), the preformed bar conductor having two rectilinear arms that are parallel to each other and connected to each other by a curved portion; a transfer device that draws the conductor from the supply device into a grip position in which the conductor is arranged along the supply direction (X-X) and rotates it 90 degrees into an insertion position in which the conductor is arranged along an insertion direction (Y-Y), perpendicular to the supply direction (X-X) and parallel to a pocket on the twisting device; and an insertion device that inserts the conductor into the twisting device, the insertion device equipped with thrust means that move the conductor along the insertion direction (Y-Y) until the conductor is at least partially inserted in the pocket.

Abstract: Disclosed is a substrate positioning apparatus capable of accurately performing positioning of a center of a circular-shape substrate with respect to a rotating shaft. The substrate positioning apparatus includes: a substrate disposing part; a first positioning mechanism including a first reference part contacting a side of the substrate; a second positioning mechanism including a second reference part contacting the side of the substrate; a first driver configured to drive the first positioning mechanism; a controller configured to control the drive of the first positioning mechanism. In particular, the second reference part contacts the substrate at a contact part and includes an elastic part that applies force in a moving direction of the first driver to the contact part and a detector that detects position information of the second positioning mechanism.

Abstract: The invention relates to a method and a device for aligning substrates (2) in an XY-plane. A polygonal, flat substrate (2), the substrate plane of which is parallel to the XY-plane or lies in the XY-plane, is aligned with respect to reference coordinates and a reference angular position in the XY-plane. A corner (12) of the substrate (2) is detected using image detecting means (9). In addition, the position coordinates of the substrate (2) are determined. Using evaluating means (10), the angular position of the corner (12) of the substrate (2) in the XY-plane is determined, and the position differences between the reference coordinates and the position coordinates as well as the angle difference between the reference angular position and the angular position of the substrate corner (12) are calculated. The substrate (2) is moved and/or rotated in the XY-plane according to the determined position difference or the angle difference.

Abstract: A transfer unit of a test handler includes a base frame, a floating assembly, and an arm part. The base frame includes an inserted portion having a penetration hole. The inserted portion including an upper inserted portion disposed near an upper surface of the inserted portion, a lower portion disposed near a lower portion of the inserted portion and a middle inserted portion disposed between the upper inserted portion and the lower inserted portion. The floating assembly is inserted in the penetration hole of the base frame. The floating assembly includes a floating part, an elastic element, and a coupling element. The floating assembly moves back and forth, to left and right sides, and up and down, or flows within a predetermined angle range in the penetration hole.

Abstract: Embodiments of the invention relate to a system for storing and/or transporting platforms of pipette tips. The system includes packaging in which a stacked tower of platforms may be transported. Embodiments of the present invention further include a loader for transferring platforms from the packaging to a rack for holding pipette tip platforms. The loader transfers the platforms by accessing the uppermost platform in the stack.

Abstract: A device for the preferably automated supply of structural components to an assembly zone for producing a fuselage portion of an aircraft by multi-shell construction is provided and can include at least one side shell support for introducing at least one side shell, and at least two positioning towers for moving and aligning at least one side shell inside device. The device enables side shells to be quickly and precisely supplied to an assembly zone for production of an entire fuselage portion. It is possible to dispense completely with the hitherto required manual and therefore time-consuming “hovering” of side shells and other large structural components, such as upper shells, lower shells, floor frames and other technical equipment systems necessary for the production of a fuselage portion, this process being prone to problems and difficult to control.

Abstract: Disclosed are a substrate alignment apparatus precisely and automatically aligning a mask on a substrate by sequentially moving the substrate and the mask horizontally on a susceptor being driven up and down, a substrate processing apparatus including the same, and a substrate alignment method. The substrate alignment apparatus includes a position fixing unit protruding from an upper surface of the susceptor driven up and down in a chamber so as to form a reference line for alignment of the substrate and the mask, a horizontal transfer unit connected at outer surfaces of two sidewalls of the chamber and extended into the chamber to align the substrate and the mask according to the up and down movement of the susceptor until the substrate and the mask are stopped by the position fixing unit from horizontally moving, and a control unit adapted to control the susceptor and the horizontal transfer unit.

Abstract: An apparatus (4) for inserting preformed electrical bar conductors (8) into an associable twisting device (12), comprising a supply device (28) of conductors (8), which are bent in a manner so as to have two substantially-rectilinear arms (16), parallel to each other, connected to each other by a curved portion (20), said electrical bar conductors (8) being arranged according to a supply direction (X-X). The apparatus (4) also comprises a transfer device (32) which draws a conductor (8) from the supply device (28) and rotates it 90 degrees into an insertion position in which it is arranged according to an insertion direction (Y-Y), perpendicular to said supply direction (X-X) and parallel to pockets (24) of an associable twisting device (12) of the conductors (8).

Abstract: According to an aspect of an embodiment, there is provided a part-delivery apparatus which transports a part to a designated part-delivery position by drawing the part onto a head by suction pressure at a designated part-suction position, and which releases the part at the part-delivery position by stopping application of the suction pressure. The apparatus includes: a compliance mechanism for allowing movement of the head in a horizontal plane; an upper-side positioning unit for positioning the head in the part-suction position by responding to an upward movement of the head; and a lower-side positioning unit for positioning the head in the part-delivery position by responding to the downward movement of the head.

Abstract: An article transport facility includes an article transporting mobile body; an article support for storing an article, the article support being configured to be moved between an article transfer position and an article storage position; an operating device provided on the mobile body for shifting the article support between the article storage position and article transfer position; an operated element supported to be movable in a direction of access between a proximate position adjacent the mobile body standing still in an article transfer location and a remote position away from the mobile body standing still in the article transfer location, the operated element being operable, in the proximate position, to place the article support in the article storage position, and in the remote position, to place the article support in the article transfer position; and a guide device for guiding the operating device in a fore and aft direction to a proper operative position relative to the operated element when the

Abstract: A system for fluid processing substrate surfaces arrayed in a fluid having a process section with a frame having a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces; and a substrate holder assembly having a number of substrate holders and configured for transporting substrates as a unit. The substrate holder assembly and each of the substrate holders are configured for removable coupling to the process section frame, each substrate holder configured to hold at least one of the substrates. The process section frame has alignment features disposed so that, on coupling of the substrate holder assembly with the process section frame, the alignment features interface with each substrate holder of the substrate holder assembly and locate each substrate holder in repeatable alignment, at corresponding coupling of each substrate holder and the process section frame, with respect to a predetermined feature of the process section.

Abstract: An loading/unloading device having at least two loading arms is provided. One loading surface is used for receiving a load to be sterilized and transferring the load to a sterilizing device. One unloading surface is used for receiving a sterilized load from a sterilizing device and for transporting the sterilized load away from the sterilizing device. The loading/unloading device is able to be laterally moved such that the loading surface or the unloading surface at least may be aligned to the opening of the sterilizing device.

Abstract: An apparatus and a method for handling a container product, in particular a container or a preform for producing a container, where the product is provided with an orientation mark and adapted to be rotated to a predetermined rotary angle position relative to a holder by an orienting means. To do so in a structurally simple and reliable manner, the orienting means are arranged at a transfer site between a holder of a first conveying unit and a holder of a second conveying unit, at which the holders move relative to one another in an accompanying movement, and the rotary movement of the product to the predetermined rotary angle position is derived from the relative movement of the holders.

Abstract: A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

Abstract: Embodiments of the present invention generally relate to an apparatus and method for accurately aligning a plurality of substrates arranged in a planar array for batch processing. In one embodiment, the substrate alignment apparatus includes an array of oversized, recessed pockets for receiving the plurality of substrates. The substrate alignment apparatus may pick up the plurality of substrates from a location in which each substrate is not accurately positioned. Each pocket is configured at an angle from horizontal such that each substrate slides to a predefined corner of the pocket resulting in accurate alignment of each substrate. A vibration, tilting, directional brushes, or gas cushion may be provided to the substrate alignment apparatus to aid in low friction alignment of each substrate within its respective pocket. In one embodiment, the substrate alignment apparatus is an end effector for use on a transfer robot for use in a cluster-type processing system.

Abstract: A system and method for accurately positioning workpieces to permit uninterrupted coordinate measurements using a CMM is disclosed. The system comprises at least one movable platform adapted for moving on a stationary platform, fixtures for affixing workpieces to the movable platform, and locator stops and locators for affixing the movable platform in a predetermined measurement area on the stationary platform. An air jet injected into the bottom of the movable platform facilitates conveying the platform to the measurement area. The method comprises mounting one or more workpieces in a predetermined position on the movable platform fixture and positioning the movable platform against locator stops on the stationary platform. A second workpiece may be mounted on the fixtures of a second movable platform while the CMM measurements are in progress. This procedure may be repeated for successive workpieces and enables a near assembly line process for measuring workpiece coordinates.

Abstract: A transfer device according to the present invention includes a carrying-in area (A1) into which a carriage is carried, a positioning mechanism including left and right rocking arms (60) arranged to engage with and disengage from a carriage in order to lift the carriage while holding it from both left and right sides and position the carriage to a predetermined height position in the carrying-in area, and a transfer mechanism (110) that transfers an object between the carriage positioned by the positioning mechanism and a transfer area.

Abstract: A method and apparatus for positioning a substrate in a substrate processing chamber. The method includes placing the substrate on a substrate transfer blade, moving the substrate transfer blade to a first position located in a transfer chamber, and capturing at least one image that includes at least a portion of the substrate transfer blade and at least a portion of the substrate. The method also includes processing the image to determine a position of a predetermined portion of the substrate transfer blade and a position of predetermined portion of the substrate. The method further includes determining an offset between the position of the predetermined portion of the substrate transfer blade and the position of the predetermined portion of the substrate, and moving the substrate transfer blade to a second position located in the substrate processing chamber, wherein the second position is adjusted to account for the offset.

Abstract: The invention concerns a transport support for transport of at least one object along the transport path through at least one processing station, and can include transport of at least one printable object along the transport path for printing of a printable object, in which the transport support includes a device by means of which the object can be aligned in the desired position relative to the transport support. The invention also concerns a method for alignment, including centering, of at least one object of a transport support, by means of which at least one object is transported along a transport path to/through at least one processing station, in which the object can be aligned by a device provided in the transport support into a desired position relative to transport support.

Abstract: The invention relates to a separating device (1) with a manipulating device (5) and with at least one carrier support (2) with at least one stacking shaft (3) for workpieces (4) disposed on it, in particular metal plates made ready for a bending operation on a bending press, and with a gripping mechanism (14) for removing the workpiece (4) from the stacking shaft (3) and transporting the workpiece (4) from a pick-up position into a transfer position. The manipulating device (5) and the carrier support (2) are positioned relative to one another by means of positioning means (65), and at least one fixed positioning space (27) for the carrier support (2) is provided in a reference position of the stacking shaft (3) with respect to the manipulating device (5).

Abstract: The invention relates to a device for the preferably automated supply of structural components to an assembly zone for producing a fuselage portion of an aircraft by multi-shell construction, comprising: a) at least one side shell support for introducing at least one side shell, b) at least two positioning towers for moving and aligning at least one side shell inside the device. The device according to the invention enables side shells to be quickly and precisely supplied to an assembly zone for production of an entire fuselage portion. It is possible to dispense completely with the hitherto required manual and therefore time-consuming “hovering” of side shells and other large structural components, such as upper shells, lower shells, floor frames and other technical equipment systems necessary for the production of a fuselage portion, this process being prone to problems and difficult to control.

Abstract: A cutting machine having a workpiece changer possessing a receiving element for the workpieces and/or workpiece palettes, said receiving element pivots about a vertical axis and is linearly shiftable in a plane normal to such axis. A tool spindle moves on two parallel side walls which are divided by a transverse wall or by door which can opened or shut between a front machining area and a rear supply area. The radius of the receiving element extends at least partly into a supply area and the tool spindle is movable over the front machining area. Accordingly a person minding or controlling the functioning cutting machine is not hampered by workpiece changing.

Abstract: A tactile wafer lifting apparatus includes a pedestal and a vertical drive connected to the pedestal. The vertical drive is defined to provide controlled upward and downward movement of the pedestal. The tactile wafer lifting apparatus also includes a wafer support member disposed over the pedestal. A tactile switch is disposed between the wafer support member and the pedestal such that sufficient downward force on the wafer support member causes activation of the tactile switch. The tactile switch is connected to the vertical drive so as to interrupt upward movement of the pedestal and wafer support member disposed thereover upon activation of the tactile switch.

Abstract: A device and method to feed metal bars associated with a work machine including at least a drawing member for the metal bars. The device includes loading members to load one or more metal bars to the work machine, and one or more containing members in which the metal bars are disposed in respective bundles. The device also includes deflector members disposed downstream of the containing members and upstream of the drawing member, and movable laterally in independent manner with respect to the containing members, so as to be able to condition the position of at least a head portion of each of the metal bars picked up, relative to their lying position in the containing members, so as to displace them sideways one by one, or in groups, with respect to a nominal axis (X) in which the metal bars lie stationary in the respective containing member.

Abstract: A plate handling system for a sampling device with a drawtube that includes a vertical actuation system that adjusts the vertical distance between the drawtube and a sample tray, a horizontal linkage system that positions a sample tray in a horizontal plane, and a drive system that drives the rotational motion of the horizontal linkage system. The horizontal linkage system includes a base arm that rotates about a base joint, and a sample arm that rotates about a sample arm joint on the base arm.

Abstract: A testing device to test a plate for electronic circuits, comprising transport members able to transport the plate along an axis of feed (Y), at least from an entrance station to a testing station defining a testing plane (P?), and testing members, disposed in correspondence with the testing station. The testing device also comprises an alignment station defining an alignment plane (P), disposed upstream of the testing station, and alignment members, disposed in correspondence with the alignment station, able to dispose the plate in an aligned position, in which the plate is disposed symmetrical both with respect to the axis of feed (Y) and also with respect to a first axis (X) substantially transverse and co-planar to the axis of feed (Y).

Abstract: A robotic is provided which comprises a hub (203); (b) a first lower arm (209) comprising first (213) and second (215) lower arm segments and having a first set of upper arms (229, 231) attached thereto; and (c) a first adjusting means (241) for adjusting the height of the first lower arm segment with respect to the second lower arm segment.

Abstract: Plural wok pairs composed of a plurality of works are stored in work storing means. A movable sensor 45 fitted to a conveyance robot 5 detects the position of one of the work pairs in the work storing means, and the work gripping means 25 takes out a plurality of works at one time from the work storing means. One of the plurality of works is held temporally by temporal work holding means 6 or 7 while the other work is conveyed to a jig Y. In the course of conveyance, a fixed sensor 63 detects the relative positional relationship between the work and the work gripping means 25. If the relative positional relationship deviates from the regular positional relationship, the movement of a robot arm 31 is corrected.

Abstract: An alignment device to align a plate for electronic circuits comprises transport members able to transport the plate along a transport axis, at least from an entrance position to an alignment position defining an alignment plane. The device also comprises mobile members provided with: first movement members able to move the mobile members in a first direction directed along a first axis substantially perpendicular to the alignment plane so as to associate the mobile members with the plate; second movement members able to rotate the plate, associated with the mobile members, around the first axis; and at least third movement members able to move the plate, associated with the mobile members, in a second direction, directed along a second axis substantially transverse to the first axis and substantially co-planar with the transport axis.

Abstract: To enable division for transportation and secure proper treatment on a substrate to be treated, the present invention provides a stage apparatus (11) including a substrate holding plane which holds a substrate to be treated, a pair of guide frames (13X1), (13X2) oppositely disposed with the substrate holding plane sandwiched therebetween, and a gantry (13Y) which is movably held on upper surfaces of the pair of guide frames (13X1), (13X2). The stage apparatus (11) is composed of a first structure V1 which includes one guide frame (13X1), a second structure V2 which includes the other guide frame (13X2), and a third structure V3 which includes the gantry (13Y). Thus, even if the stage apparatus is large, since it can be divided into the structures V1 to V3, the stage apparatus can be transported by land. In addition, since there are no joints on a moving path of the gantry (13Y), the stage apparatus can properly treat the substrate without causing deterioration of moving accuracy.

Abstract: By providing an overhead buffer system between an automatic transport system and a load port assembly of a process tool, the efficiency of the respective load ports may be significantly enhanced, for instance, by reducing the idle time of empty carriers, thereby providing the potential for covering a wider range of operational scenarios compared to conventional strategies. For instance, for the same number of load ports, the overhead buffer system may provide a continuous operation, even if small lot sizes are used. The buffer system may comprise a dedicated transport mechanism for directly serving the load ports and respective buffer places, while respective transfer places may provide direct interaction with the automated transport system.

Abstract: A media processing device enables quick, easy, problem-free removal of processed media while maintaining high media quality. The media processing device, such as a disc publisher 1, has a tray 70 with a stacker unit 71 for storing media M, and a tray holding unit that supports the tray 70 movably between a removal position and a storage position. Overlapping channels and lands are formed on the top of the tray 70 and on the ceiling part of the tray holding unit facing the top of the tray 70.

Abstract: A transfer and dispensing apparatus is disclosed for the conveying and separation of packaging material, cushions or pillows when needed by the operator. When a packer working over a conveyor receives a box that requires void fill, an operating switch such as a foot pedal is depressed to dispense pillows from the apparatus and into the box in a connected strip. When the operating switch is released, the apparatus stops dispensing pillows, separates the continuous strip of pillows along a transverse perforation in the strip, and ejects the end of the separated segment. The packer can then complete packing the box by placing the severed end of the pillows into the box, advance to the next box, and repeat the process. The transfer and dispensing apparatus may be positioned in any convenient location including adjacent to, above or attached to the inflation device.

Abstract: A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.

Abstract: A stack fastening device includes a base, on an upper surface of which a stack is loaded, a compression plate, which has a flat configuration and is placed over the stack to press the stack, and a plurality of vertical beams, which are installed on the base to extend vertically so that the upper end portion of the beams projects out through the edge of the compression plate, A thread is formed in an upper end portion of each vertical beam, nuts are threadedly coupled to the thread such that the nuts can be tightened against upper and lower surfaces of the compression plate, and engagement grooves are defined in the upper surface of the compression plate so that a head of a hydraulic cylinder can be coupled to the compression plate.

Abstract: An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.

Abstract: A robot arm is configured to insert and remove an object from a conditioned environment using a carrier connected to the robot arm. The robot arm is positioned in a conditionable vessel, a wall of which vessel may deform when the interior is conditioned. Since the trajectory of the robot arm needs to be accurate, the robot arm is flexibly coupled to the vessel wall such that an orientation of the robot arm is independent from an orientation of the vessel wall. Further, a docking system is disclosed for use in a device including a robot arm having a carrier connected thereto.

Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Abstract: The present invention relates to a substrate-transporting device, including a base, a substrate carrier unit and a shaft unit mounted between the base and the substrate carrier unit. The shaft unit has a supporting shaft and a shaft base to support and control rotation of the substrate carrier unit. The substrate carrier unit includes a bottom carrier seat connected to the supporting shaft, a plurality of first supporting components mounted on a surface of the bottom carrier seat, a top carrier seat having a plurality of vacuum suction nozzles and a plurality of second supporting components, and at least a retractable component sandwiched between the top carrier seat and the bottom carrier seat. The top carrier seat is used to affix and detect the substrate. The retractable component is capable of adjusting the distance between the top carrier seat and the bottom carrier seat.

Abstract: A loading dock apparatus remote control is provided. Some embodiments of the invention include a zone specific remote control for loading dock apparatus. Some optional embodiments include a selector switch to select which apparatus the single set of controls will control. Other optional embodiments automatically select the apparatus to be controlled by the single set of controls. A method of operating loading dock apparatus using a remote control is also provided.

Abstract: Novel methods and apparatus are disclosed for handling carriers for soft contact lenses in a lens manufacturing system. In accordance with a first aspect of the invention, article handling devices are located beneath a pre-cure station and a curing station of the system to move lens carriers within those stations. Pursuant to a second aspect of the invention, in a preferred embodiment multiple sets of assemblies are provided for moving a multitude of lens carriers into, through, and out from the pre-cure station and the curing station. In accordance with a third aspect of the invention, the curing station is provided with an intelligent buffer.