Abstract: A tray feeder mechanism comprising a plurality of trays within a tray feeder, each tray including a tray handle, and a gripper positioned within a gripping area defined by the tray handles, wherein the gripper is configured to remove a tray from the tray feeder when the tray feeder stops.

Abstract: An autonomous rover including a frame having a first end and a second end longitudinally spaced from the first end and forming a payload bay, the payload bay being sized to support a pickface, a common active registration surface configured to engage the pickface, and a drive section connected to the common active registration surface, the drive section being configured to variably position the common active registration surface relative to at least one storage shelf of an automated storage and retrieval system to effect placement of the pickface on the storage shelf so that pickfaces are substantially continuously arranged along the at least one storage shelf with a predetermined storage spacing between the pickfaces.

Abstract: A multi-level hand apparatus includes a plurality of hands arranged in a vertical direction, and a plurality of clamp members disposed at the plurality of hands, respectively. Each of the clamp members is movable in a forward-rearward direction to clamp and release a workpiece. The apparatus further includes a movable head member extending in the vertical direction. Each clamp member includes a fixed spring receiving member, a movable spring receiving member movable in the forward-rearward direction, and a compression spring member arranged between the fixed spring receiving member and the movable spring receiving member. In each clamp member, the movable spring receiving member, as moving rearward, comes into contact with a front surface of the movable head member in a manner such that the movable spring receiving member is capable of moving in the vertical direction relative to the front surface.

Abstract: A system and a method for an automated guided vehicle (AGV) includes a chassis; a load supporting apparatus disposed on the chassis, the load supporting apparatus including a platform to support a load, a lifting mechanism comprising one or more jacks, the platform coupled to the one or more jacks, the one or more jacks configured to raise or lower the platform, and a rotation mechanism coupled to the platform, the rotation mechanism configured to rotate the platform, wherein the rotation mechanism is configured to rotate the platform in response to the AGV turning.

Abstract: An image acquisition device is an image acquisition device for acquiring an image of samples held on slide glasses and includes a cassette mounting unit in which a cassette is detachably mounted, the cassette holding the slide glasses in a plurality of stages in a predetermined arrangement direction, a distance sensor that measures a distance to the cassette mounted in the cassette mounting unit and outputs a detection signal based on a measurement result, and an information generation unit that generates state information on a mounting state of the cassette mounted in the cassette mounting unit on the basis of the detection signal.

Abstract: A mobile drive unit including a docking head assembly is provided. The docking head assembly is configured with a set of actuator assemblies to lift an holder structure and tilt the holder structure in at least one direction. The direction of tilt and an associated angle may be determined based on a location of a center of gravity of the holder structure relative to the mobile drive unit. The direction of tilt and the associated angle may also be determined based on information describing external forces acting on the holder structure.

Abstract: A mobile drive unit including a docking head assembly is provided. The docking head assembly is configured with two or more actuator assemblies to lift an inventory holder and tilt the inventory holder in two or more directions. The direction of tilt and an associated angle may be determined based on a location of a center of gravity of the inventory holder relative to the mobile drive unit. The direction of tilt and the associated angle may also be determined based on information describing external forces acting on the inventory holder.

Abstract: An alignment device has a carriage, two rails on the carriage that are configured for a workpiece to pass therebetween, and a finger that protrudes a distance from the carriage. The finger is configured to be disposed on a carrier for the workpieces. The workpieces may be solar cells and may pass through the rails on a conveyor belt. The alignment device may move in order to align the workpieces as the workpieces are loaded into a carrier.

Abstract: A robotic device movable in a vertical direction between rails arranged in multiple rows at various levels with respect to ground. The robotic device has a frame, wheels coupled to the frame for moving the frame along the rails, and a movable platform provided on the frame. The platform is configured for moving the frame in a vertical direction between first rails and second rails arranged above the first rails, and for placing onto the robotic device first and second loads arranged at different levels with respect to the ground.

Abstract: An unpowered, self-elevating and self-lowering home appliance assembly cart for supporting and transporting a plurality of home appliance assembly components, such as oven doors, including a base, and a self-leveling and self-lowering door suspension and supporting system having a mast, a rail system moveably coupled to the mast, a plurality of arms extending from the rail system, each pair of arms for supporting a home appliance assembly component, and a self-leveling and self-lowering device that automatically self-levels and self-lowers the pair of arms within a predetermined acceptable ergonomic work zone with respect to a vertical height along the mast based on an unloaded state, a partially loaded state, and a loaded state of the plurality of arms and without power assistance, the predetermined acceptable ergonomic work zone being for loading and unloading the home appliance assembly component from the pair of arms.

Abstract: A glass cutting line includes a cutting table having a movable cutting head cutting glass work pieces on the table and a conveyor for moving glass work pieces onto and off of the cutting table The line includes a loader adjacent the cutting table having a loader table, a loader table conveyor, and a table loader unit receiving and delivering glass work pieces to the loader table. The loader table conveyor transports the glass work pieces to the cutting table. The line includes a cassette work piece storage and retrieval unit positioned vertically below the loader table when the loader table is positioned to transport the glass work pieces to the cutting table. The cassette work piece storage and retrieval unit receives work pieces from the cutting table and delivers work pieces to the cutting table from any of a plurality of storage locations.

Abstract: The goal of the present invention is to provide an apparatus capable of cooperation with at least one piece of wafer processing equipment. The apparatus is connected to a first equipment via a first opening, to a wafer transport case via a second opening and to a second piece of equipment via a third opening. The apparatus is capable of removing a basket of parallel stacked trays of wafers from a wafer transport case. The apparatus is capable of placing and supporting the wafers in order to move them to the first equipment through the second opening and to the second piece of equipment through the third opening.

Abstract: There is provided a machine tool capable of housing workpieces of different sizes in a same workpiece storage unit without requiring a new workpiece storage unit. In a machine tool including a workpiece storage unit having a plurality of housing spaces housing workpieces and a processing machine processing a workpiece supplied from one of the housing spaces, the workpiece storage unit is structured so that the size of each housing space is changeable.

Abstract: An inner wall surrounding an inner space for vertically circulating a rack, and an outer wall surrounding the inner wall are provided. Then, a rack is disposed in the inner space. A pair of extensions are provided at diagonal positions of the rack. The extensions are attached to an endless drive member in a manner that the extensions protrude toward an outer space between the inner wall and the outer wall through slits of the inner wall, and, a drive mechanism for a drive member is provided in the outer space. Further, a tunnel passing through the outer space to connect the inner space and an area outside of the vertical carousel is provided for transportation of an article into, and out of the tunnel.

Abstract: A system for changing sleeves that can be pushed onto ink transfer roller cores of a printing machine includes at least one magazine, at least one travel device, and a drive. The magazine includes at least one sleeve mounting device that is movable relative to a frame of the magazine. The travel device is connectable to the magazine so that the magazine is movable in the vertical and/or horizontal direction. The drive, which is a component of the travel device, provides a drive force or drive torque to move the sleeve mounting device relative to the frame of the magazine.

Abstract: A multi-level vehicle lift comprising a first platform mounted for movement between a lowered position and a raised position. A second platform is positioned below the first platform and is coupled to the first platform by a lift member such that movement of the first platform above a first raised position causes movement of the second platform. A third platform is positioned below the second platform and coupled to the first platform by a lift member such that movement of the first platform above a second raised position causes movement of the third platform A pit may be positioned below the platforms, and the lower-most platform is in the pit when the first platform is in the lowered position. Preferably, the pit is recessed into a ground surface, and an upper surface of the first platform is substantially flush with the ground surface when in the lowered position.

Abstract: A trailer 10 includes a frame (12) having a central axis (14) spaced between rear wheels. A plurality of storage supports (20) are supported on the trailer frame, with each storage support supporting a plurality of objects thereon. A carousel assembly (24) rotates the plurality of storage supports, and may be raised and lowered. A locking mechanism (180) is provided for engaging the carousel to prevent the carousel from inadvertently moving to the lowered position. A tire support mechanism (210) includes an elongate restraint engaging an upright tire when a ratchet mechanism renders a flexible member taut.

Abstract: A method for processing portable objects and a machine for processing portable objects including a device (1) for transferring portable objects (C), incorporating an integrated circuit and processing means consisting of at least two processing lifts (2, 2?) separated by a space of a size of a portable object (C), translatory moved perpendicularly to the plane of the main surface of the portable objects (C) and sequentially on a guiding support (25) by driving and positioning means, each lift (2, 2?) being formed with a parallelepipedal plate (22) provided with at least two processing devices, both lifts having determined different roles. The method consists of successively placing each portable object to be processed in contact with a processing station of the first lift and of the second lift.

Abstract: A trailer (10) or container (11) includes a frame (12) having a central axis (14) spaced between rear wheels. A plurality of storage supports (20) are supported on the trailer frame, with each storage support supporting a plurality of objects thereon. A carriage assembly (24) rotates the plurality of storage supports. A powered drive (110) rotates the carriage assembly. A powered restrictor (120) limits rotational movement of a respective carriage support during transit. Flexible members 142 and 144 interconnect the drive member and driven members each mounted with respect to a storage support. The container may be transported on a motorized vehicle. A preferred tire support mechanism is provided for use when transporting tires.

Abstract: An apparatus for transporting inventory items includes a housing, a drive module, a docking module, an elevating shaft, and a rotation module. The drive module is capable of propelling the apparatus in at least a first direction. The docking head is capable of coupling to or supporting an inventory holder. The rotation module is capable of inducing rotation in the housing relative to the elevating shaft. The elevating shaft connects to the docking head and is capable of raising the docking head when the housing is rotated relative to the elevating shaft.

Abstract: An apparatus for automatically depositing, preserving and retrieving biological material test tubes is described, comprising a refrigerated storage (1) with movable horizontal shelves (37) and a conveyor interface (4), adapted to automatically transport biological material test tubes, a device (3) adapted to handle the test tubes between the interface (4) and the containers (5) of a sorted plurality of test tubes, said containers (5) having toothed guides (20) and being able to be placed on the lanes (11) of a bench (6), a handling device (7) of the containers (5) between the bench (6) and an access area (38) of the storage (1), slidingly mounted to the bench (6) and comprising motorized toothed means (18) adapted to couple with said toothed guides (20) of the containers (5) for horizontally moving the latter between the access area (38) of the storage (1) and the bench (6), and a control unit (9) adapted to coordinate said devices (3, 7) during the loading/unloading operations by means of locating means (43,

Abstract: This reaction vessel support is of the type comprising at least one supporting plate (46, 48) designed to take one or more reaction vessels, and mounted rotatably about an axis of rotation (R). In one aspect of the invention, the support comprises at least one control member (94, 96) comprising releasable means (100) of coupling to a movable actuating element (40) of an actuator (10), in such a way as to enable the control member (94, 96) to be moved by the actuator (10), with the control member (94, 96) and the supporting plate (46, 48) being connected together in such a way that a movement of the control member (94, 96) by the actuator (10) is able to bring about a rotation of the supporting plate (46, 84) about the axis of rotation (R) in at least one direction of rotation. Of particular application to supports for microassay plates comprising wells laid out in a matrix arrangement.

Abstract: A vertical lift including a support, a carriage that is mounted for vertical movement relative to the support, a drive system including an actuator that is coupled directly to the carriage, and a synchronizer that is coupled between the carriage and the support

Abstract: A rack mover, attachable to a rack, includes a wheeled jack for lifting the rack off the support surface and a jack-mounting assembly. The jack-mounting assembly includes a first member to which the jack is coupled and a second member including hooked projections extending a length through respective openings in the first member. The hooked projections are configured to engage the rack. A biasing member of the jack-mounting assembly biases the second member in a first direction relative to the first member such that the hooked projections extend a first length through the respective openings. A tightening assembly of the jack-mounting assembly is engaged with the second member and configured to move the second member relative to the first member in a direction substantially opposite the first direction to reduce the length of extension of the hooked projections through the respective openings to a second length less than the first length.

Abstract: A trailer 10 includes a frame 12 having a central axis 14 spaced between rear wheels. A plurality of storage units 20 are supported on the trailer frame, with each storage unit supporting a plurality of objects thereon. Each storage support has a support axis 22 substantially parallel to the frame central axis. A carriage assembly 24 rotates the plurality of storage supports, and a lift mechanism 30 raises and lowers the carriage assembly.

Abstract: A stocker apparatus includes a first tray stock section (70) for storing a plurality of empty trays (11a), a second tray stock section (80) for storing the plurality of empty trays (11a) loaded with products, tray supporting means (130) provided in the first tray stock section (70) and the second tray stock section (80) for mounting the trays (11) thereon, and lifting and lowering means for lifting and lowering the tray supporting means (130). The stocker apparatus further includes carrier means (140) for carrying the loaded tray to the second tray stock section (80). The stocker apparatus further includes an outer wall constituting member covering the first tray stock section (70) and the second tray stock portion (80) for shielding the first tray stock section (70) and the second tray stock section (80) from an external atmosphere.

Abstract: With a warehouse lift arrangement with two warehouse lifts (1, 2) arranged one behind the other stored-goods carriers (20) can be transferred by a number of vertical conveyors (12, 13, 15) from one warehouse lift to another by means of two pairs of transfer units (16, 17; 18, 19) spaced from one another and arranged one above the other.

Abstract: A slide photograph data creation system includes a digital camera for making high-magnification photographs of samples, a sample transporter for holding and transporting samples, a controller for controlling the camera and the sample transporter so as to provide overlapping photographs, a pasting information generator for recognizing the margin by which the photographs overlap and for generating pasting-together information, and a photograph file generator for storing in a single file a plurality of high-magnification photographs and the pasting-together information. The system facilitates the examination and photography of large numbers of samples, and enables discrimination of the three-dimensional structure of a sample. Since the photographic data is managed with a database, virtual slide photographs and their attributes information can be browsed over a network or the Internet.

Abstract: A multiple loader, also adapted to operate as a magazine for storing vertically arranged panels, comprises, at a front head portion thereof, a step-by-step pushing device including a carriage driven by pneumatic cylinders causing the carriage to slide with a rectilinear reciprocating horizontal movement, to provide a pushing action on a first of a series of separating elements, arranged at a top sliding platform.

Abstract: A changing station for sleeves of a printing machine has a conveyable magazine with at least one take-up device for the sleeves. The magazine is both vertically and horizontally conveyable alongside the printing machine. The horizontal movement can be provided by a rail, and the vertical movement can be provided by a crane or hoist.

Abstract: A substrate protection and transport system and method for transitioning a substrate from atmospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes that support a substrate. The cassette can include a base portion and top portion, and can include a seal. Each cassette has at least one vent and at least one filter. The system further includes a box having a base and lid. The box holds one or more cassette-substrate arrangements. A storage rack having shelves for holding the box-cassette-substrate arrangement is also provided. Further, an entry-exit module having a loadlock is provided for transitioning the cassette-substrate arrangement from atmospheric pressure to vacuum. The entry-exit module can include a shuttle and/or elevator for transporting the cassette-substrate arrangement.

Abstract: An apparatus for transporting printing sleeves is provided. The transport apparatus includes a housing with a bottom wall, a plurality of side walls, and at least one cover. A plurality of reception devices are mounted in the housing. Each reception device receives a printing sleeve in a vertically oriented transport position with a longitudinal mid-axes of the respective printing sleeve extending vertically. Each reception device is movable out of the housing into an outside position when the at least one cover of the housing is open. Each reception device is pivotable in the outside position such that the corresponding printing sleeve can be moved out of the vertical transport position into a horizontal extraction or insertion position.

Abstract: A method and apparatus to aid the loading and unloading of flexographic plates to and from an imager. The apparatus includes a magazine containing a plurality of compartments each for holding a single flexographic plate, the compartments arranged vertically, and movable in a vertical direction, a lifting mechanism to lift and lower the compartments; and a control system to control the lifting and lowering by the lifting mechanism. The control system is such that a particular compartment is moved from its rest vertical position at a rest horizontal position to a loading vertical position and a loading horizontal position at which the particular compartment is at a height for loading onto the imager. The loading is automatic and in the case that the plate includes a protective sheet thereon, the loading includes removing the protective sheet from the plate.

Abstract: A substrate protection and transport system and method for transitioning a substrate from atomospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes. Each cassette has at least one vent and at least one filter. The system further includes an end effector coupled to a robotic arm to enable the substrate to be positioned within one of the cassettes, thereby forming a cassette-substrate arrangement. The system further includes a box having a base and a lid. The box holds one or more of the cassette-substrate arrangements. In this way, a box-cassette-substrate arrangement is provided. An out of vacuum storage rack having shelves for holding the box-cassette-substrate arrangement is also provided. Still further, an entry-exit module having a loadlock is provided for transitioning the cassette-substrate arrangement from atmospheric pressure to vacuum.

Abstract: A method and apparatus to aid the loading and unloading of flexographic plates to and from an imager. The apparatus includes a magazine containing a plurality of compartments each for holding a single flexographic plate, the compartments arranged vertically, and movable in a vertical direction, a lifting mechanism to lift and lower the compartments; and a control system to control the lifting and lowering by the lifting mechanism. The control system is such that a particular compartment is moved from its rest vertical position at a rest horizontal position to a loading vertical position and a loading horizontal position at which the particular compartment is at a height for loading onto the imager.

Abstract: A vibration-dampening base for a ball-type lead screw of a load port transfer system is disclosed. A load port transfer system includes a vertical arm drive motor assembly, a ball-type lead screw, and a vibration-dampening base connecting the vertical arm drive motor assembly to the ball-type lead screw. The vibration-dampening case can include a cross member into which the ball-type lead screw is disposed, one or more pillar members supporting the cross member, and one or more support stands. Each support stand supports a corresponding one of the one or more pillar members.

Abstract: A changing station for sleeves of printing machines with a lifting platform, disposed on the side of the printing machine, and with a wagon, in which a vertically adjustable shelf with carrying mandrels for receiving sleeves is received, whereby the shelf can be coupled to the lifting platform for joint lifting and lowering while the wagon remains on the ground.

Abstract: A slide loading mechanism utilizes compressed air as the transport medium to move the slides from a magazine to the stage of a microscope. The stage is provided with a carriage moving horizontally along a direct path between the stage and the magazine. A conveyor coupled to the carriage includes a tongue suitable for positioning under the slide of interest in the magazine when the carriage is at one end of its travel path, so that the slide may be picked up for translation to the stage of the microscope. When the carriage is moved to the opposite end of its travel path, the tongue is completely removed from the magazine, which may be freely moved vertically by an elevator to align another slide for processing.

Abstract: An aligning apparatus for a semiconductor device test handler is provided which reduces semiconductor device loading and unloading time. An exchange unit of the handler includes a pair of aligners which operate independently to continuously transfer devices to a test site of the handler for test, and then away from the handler upon completion of the test. Both horizontal and vertical movement of each of the aligners facilitates the loading and unloading of semiconductor devices. This aligning apparatus provides for simplified design and operation of the aligners, and improves loading and unloading speed, thereby enhancing test efficiency.

Abstract: An apparatus for transporting and an apparatus for conveying microplates between two locations are provided. The transport includes a pair of rails, a microplate transport carriage for moving along the rails, a rotary platter for loading and unloading microplates on the carriage, a controller for generating signals for controlling the position of the carriage on the rails and the rotation of the platter on the carriage, and a servo for moving the carriage or rotating the platter in response to a control signal. The transport moves microplates along the rails in accord with any of several methods for performing different tasks. The conveyor includes an extendable support frame, a pair of oppositely disposed tensioning elements arranged within the frame, a conveyor belt which wound around the elements and extends as the support frame is extended, and a motor for driving the conveyor belt.

Abstract: A device for temporarily storing manufactured articles, particularly mattresses, comprising a framework with a mattress insertion and a removal side adapted to guide vertically a plurality of superimposed horizontal frames for temporarily accommodating mattresses to be stored, the framework including: elements for actuating the frames between a lowered stacked position and a raised, spaced, position, a mattress receiving surface, above the upper stack frame, a mattress transferring-removal device synchronized with the actuation elements so that for storage each frame is raised until the mattress accommodated thereon is at a height, from the receiving surface, greater than the mattress height, and selective expulsion elements for removing the mattress accommodated on the frames.

Abstract: A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncharge the buffer apparatus by means of a guided vehicle, an overhead vehicle, or a human. A buffer system includes a buffer apparatus and a processing system load port to transfer carriers from the buffer apparatus to a processing system load port. An arrayed buffer system includes a plurality of buffer systems where each buffer system interacts with an individual set of load ports or a pair of buffer systems interacts with a shared set of load ports. A combination of arrayed buffer systems includes a plurality of adjacent arrayed buffer systems capable of sharing a single, environmental front-end mechanism maintenance space and capable of being serviced from the front.

Abstract: Through a loading and unloading station for load carriers of vehicle bodies, vehicles or the like, it is possible to unload vehicle bodies from a railway car in a continuous cycle and supply them to a production facility, wherein in one cycle simultaneously the load carriers receiving the vehicle bodies are returned to an empty railway car.

Abstract: A portable assembly allows semiconductor wafer boats to be transported safely from one semiconductor processing device to another semiconductor processing device at low cost using a small amount of the fabrication area without the need for complicated automated systems. The portable assembly includes two hollow bodies, of which one body may be elevated electromechanically to the height of a cantilever oven opening. The elevation may be conducted manually or automatically. The upper body of the assembly contains a rotating drum which further includes four segmented cylinders, which store and queue the wafer boats. The lower body contains a safety shoe locking apparatus which allows the elevator mechanism to be activated only when the assembly is docked in the appropriate location. The assembly also contains storage areas for wafers in progress. The assembly is moved manually on a set of wheels and may be rotated about its axis.

Abstract: An apparatus for random access storage and retrieval of a plurality of microplates is provided. The apparatus includes a plurality of microplate racks arranged in a stack. Each of the racks is mechanically engaged with a plurality of support columns and each of the columns has a plurality of locking devices corresponding to the plurality of racks. The apparatus also includes a lift, coupled to the support columns, for moving the stack or a portion thereof, and a controller, coupled to the lift and the locking devices. The controller is responsive to a signal to access a desired rack or microplate to cause actuation of one or more of the locking devices corresponding to the rack adjacent to the desired rack or microplate, followed by actuation of the lift, thereby moving a portion of the stack a sufficient distance to allow access to the desired rack or microplate.

Abstract: Installed in a rotary press which is provided with an upper work floor T and a lower work floor U to accommodate multi-layered printing sections, there are included upper turning bodies B installed at a high level on an upper story W, opposing each other at an interval larger than the width of a press plate P; lower turning bodies C installed at a low level on a lower story X, opposing the upper turning bodies B vertically and opposing each other at the same interval as the upper turning bodies B; endless flexible bodies D looped over the upper and lower turning bodies B and C; a drive unit E for rotating the turning bodies so as to run the endless flexible bodies D all at once; and a press plate holding F unit which has a plurality of press plate holders and which is disposed between the left and right endless flexible bodies D with its left and right sides connected to the rear or front segments of the respective endless flexible bodies D stretched between the upper turning bodies B and the lower turning bo

Abstract: A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable reticle cassette is comprised of an inner chamber and an outer chamber. The system further includes an end effector coupled to a robotic arm. The end effector engages one of the plurality of reticles to enable the reticle to be positioned within the removable reticle cassette and thereafter transported. The system further includes a seal, coupled to the end effector and the robotic arm. To transport the reticle, the reticle is first loaded onto the end effector. Next, the end effector is used to create an arrangement wherein the reticle is loaded into the removable reticle cassette. Importantly, the reticle and removable reticle cassette do not come into contact with one another.

Abstract: A transporting apparatus has two storage means with plate form body supporting members in a plurality of stages in vertical direction. Each plate form body supporting member is constructed with a plurality of string like members having widths to pass through clearance between adjacent transporting rotary bodies for vertical movement therethrough and arranged on the same plane for simply being lifted up and down for loading and unloading the plate form body. The storage mean scan be arranged within an installation region of the transporting passage portion. Also, necessary length of the transporting passage portion is merely two or three times of the plate form body. The storage means can be installed in a relay transporting passage portion arranged between two transporting lines arranged in parallel relationship to facilitate installation with simple and compact construction.

Abstract: An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection among a plurality of the inventive apparatuses, and enables independent loading of the factory load port and the tool load port. An inventive wafer handling method which divides a lot of wafers into sublots and distributes the sublots among tools configured to perform the same process is also provided.

Abstract: An apparatus for random access storage and retrieval of a plurality of microplates is provided. The apparatus includes a plurality of microplate racks arranged in a stack. Each of the racks is mechanically engaged with a plurality of support columns and each of the columns has a plurality of locking devices corresponding to the plurality of racks. The apparatus also includes a lift, coupled to the support columns, for moving the stack or a portion thereof, and a controller, coupled to the lift and the locking devices. The controller is responsive to a signal to access a desired rack or microplate to cause actuation of one or more of the locking devices corresponding to the rack adjacent to the desired rack or microplate, followed by actuation of the lift, thereby moving a portion of the stack a sufficient distance to allow access to the desired rack or microplate.