Abstract: The disclosure describes braze tape coatings and technique to form articles with differing physical properties in different layers or regions of the article. An example method includes forming a braze tape defining at least one layer that includes a first segment and a second segment. A portion of the second segment in the plane is adjacent to a portion of the first segment in a plane of the layer. The method also includes positioning the braze tape on a surface of a substrate, the plane of the layer of the braze tape being parallel to the surface of the substrate. The method also includes heating the braze tape to melt a constituent of at least one of the first coating material and the second coating material to form a densified coating on the surface of the substrate.

Abstract: Disclosed is a mask defect repair apparatus that is capable of performing defect repair with high accuracy without exposure of a mask to air while being moved between the mask defect repair apparatus and an inspection device. The mask defect repair apparatus emits charged particle beams with an amount of irradiation therewith which is corrected by a correction unit while supplying gas to a defect of the mask, thereby forming a deposition film.

Abstract: A method for repairing a damaged area of a stealth composite structure having a stealth function using a scarf patch includes the steps of diagnosing the damaged area; deriving a repair area including the diagnosed damaged area; processing the scarf patch according to the derived repair area; machining a patch hole according to the derived repair area to remove the damaged area; and coupling the scarf patch to the patch hole so that an inner wall of the patch hole and a side surface of the scarf patch face.

Abstract: An additive manufacturing system is disclosed including a material feeding device, a first heat source device and a second heat source device. The material feeding device is configured to feed the material onto a substrate for additive manufacturing. The first heat source device is configured to provide a main heat source for melting or sintering the material. The second heat source device is configured to provide an auxiliary heat source for melting or sintering the material. A type of the heat source provided by the first heat source device is different from a type of the heat source provided by the second heat source device. An additive manufacturing method is also disclosed. The additive manufacturing system and the additive manufacturing method according to the present application can improve the rate of the additive manufacturing, reduce the manufacturing cost, improve the stability of the molten pool and improve the manufacturing accuracy and the product quality.

Abstract: A moisture-cure, hybrid synthetic resin paste may be applied over an aperture formed in a wet surface to cover the aperture and form a waterproof barrier. In some examples, water may be flowing or even gushing through the aperture at the time that the paste is applied. The paste may be applied using a suitable hand tool such as a spatula.

Abstract: A method of forming an aerodynamic component for use in a gas turbine engine using ceramic matrix composites (CMCs) is provided. The method includes executing a full densification of the CMCs once a final shape of the aerodynamic component is achieved, identifying first and second sectors of an exterior surfaces of the aerodynamic component which have a surface roughness of less than a first roughness level and identifying second sectors of the exterior surface of the component which have a surface roughness of greater than a second roughness level, machining the first sectors to increase the surface roughness to greater than the first roughness level and machining the second sectors to decrease the surface roughness to less than the second roughness level.

Abstract: Methods and apparatus for harmonic source enhancement are disclosed herein. An example apparatus includes an interface to receive a media signal. The example apparatus also includes a harmonic source enhancer to determine a magnitude spectrogram of audio corresponding to the media signal; generate a time-frequency mask based on the magnitude spectrogram; and apply the time-frequency mask to the magnitude spectrogram to enhance a harmonic source of the media signal.

Abstract: A method for performing maintenance on an outer surface of at least one wind turbine part, such as a tower (2), a nacelle (3) or a wind turbine blade (5), of an offshore wind turbine (1) is disclosed. An access system (10) is transported to a site of the offshore wind turbine (1), and the access system (10) is transferred to a transition platform (6) at a lower part of the offshore wind turbine (1), while operating the offshore wind turbine (1) in accordance with a normal operating mode. Normal operation of the offshore wind turbine (1) is then stopped, and maintenance is performed on an outer surface of at least one wind turbine part (2, 3, 5) of the offshore wind turbine (1), using the access system (10). When the maintenance has been completed, normal operation of the offshore wind turbine (1) is restarted in accordance with a normal operating mode. Normal operation of the offshore wind turbine (1) is only stopped while the actual maintenance takes place. Thereby the loss in power production is minimised.

Abstract: Disclosed herein are tiles, systems, and methods related to manufacturing bullnose or other non-straight edge tiles. In a method of manufacturing a bullnose tile, the method comprises the steps of providing a tile, wherein the tile is a fired ceramic tile comprising a base and a decoration; cutting or milling the tile to form a bullnose edge; transporting the tile to at least a first printing station; printing at least one print layer of print media on the bullnose edge; transporting the tile to a curing station and curing the print media to provide the bullnose tile.

Abstract: A novel method for strengthening and reinforcing ancient books is provided. Such treatment method comprises: first placing the ancient books to be treated in a closed strengthening and reinforcing device; after sealing, performing dehumidification operation and vacuumizing operation on system in sequence to maintain the system dry; and after the system is stable under negative pressure, turning on a fan set, directly delivering a strengthening and reinforcing powder to the strengthening and reinforcing device via a gas pipe, or atomizing a strengthening and reinforcing solution through a ultrasonic atomizer and then delivering the atomized solution to the strengthening and reinforcing device via the gas pipe, so that the ancient books to be treated absorb the strengthening and reinforcing agent sufficiently and evenly; and meanwhile monitoring pH value and humidity of the ancient books, thereby implementing strengthening and reinforcement of the ancient books.

Abstract: A polyimide film according to the present invention can be effectively used as a substrate for a flexible display device without a deterioration in heat resistance even at a temperature of 350° C. or higher since a coefficient of thermal expansion (A) in the section of 100-350° C., of the polyimide film, and a coefficient of thermal expansion (B) in the section of 350-450° C., of the polyimide film, meet 0<B/A<2.

Abstract: The present invention relates to a wall-flow filter, to a method for the production and the use thereof in order to reduce harmful exhaust gases of an internal combustion engine. The wall-flow filter was produced by applying a powder-gas aerosol to the filter, whereby the powder was deposited in the pores of the wall-flow filter.

Abstract: Surface asperities, such as roughness characteristics, are reduced or otherwise mitigated via the control of surface regions including the asperities in different regimes. In accordance with various embodiments, the height of both high-frequency and low-frequency surface asperities is reduced by controlling characteristics of a surface region under a first regime to flow material from the surface asperities. A second regime is implemented to reduce a height of high-frequency surface asperities in the surface region by controlling characteristics of the surface region under a second regime to flow material that is predominantly from the high-frequency surface asperities, the controlled characteristics in the second regime being different than the controlled characteristics in the first regime. Such aspects may include, for example, controlling melt pools in each regime via energy pulses, to respectively mitigate/reduce the asperities.

Abstract: A water treatment membrane and method of making water treatment membranes includes an interfacially formed polyamide layer residing upon a microporous support film and having a plurality of graphene oxide quantum dots attached to an outer surface of the polyamide layer. The polyamide layer has a permeate flux and a salt rejection performance. The permeate flux is increased by the presence of the graphene oxide quantum dots attached to the outer surface of the polyamide.

Abstract: In the following, a method for synchronizing the motion sequences of at least two robots will be described. In accordance with one embodiment, the method comprises the following: During operation of a robot cell having at least two robots, a path parameter is regularly calculated for each of the at least two robots based on a current position of the respective robot and on a previously specified robot path of the respective robot. The path parameter represents the current position of the robot. Subsequently, a run-ahead limit is calculated for each robot based on the path parameters determined for the respective other robots. Based on the respective calculated run-ahead limit, the path speed of every robot can be adjusted.

Abstract: Systems and methods for application of stress corrosion cracking resistant cold spray coatings include a method of forming a partial coating on a canister having a perimeter wall with a surface. The method may include identifying a compromised region on the surface of the wall of the canister, and impacting a substantially linear flow of particles of a powder against an area in the compromised region of the surface in a manner effective to cause the particles of the powder to bond to the surface of the wall to produce a coating on the area of the compromised region. The method may also include moving the substantially linear flow in a direction substantially parallel to the surface of the wall to cause the particles to impact an additional area of the compromised region to cause the particles to bond to the surface of the additional area.

Abstract: The invention relates to a method for producing a component from ceramic materials in which a plurality of layers are applied to a base body by means of screen printing or template printing, said layers being formed from a ceramic material, in each case in a defined geometry above one another in the form of a paste or suspension in which powdery ceramic material and at least one binder are included. At least one region is formed here within at least one layer having a defined thickness and geometry composed of a further material that can be removed in a thermal treatment and that is likewise applied in the form of a paste or suspension by means of screen printing or template printing. Electrically functional structures composed of an electrically conductive or semiconductive material are applied to and/or formed on and/or in at least of the ceramic layers prior to the application of a further ceramic layer.

Abstract: A fan motor according to an embodiment of the present invention may include: an impeller a hub connected to a rotary shaft and at least one blade formed on the outer surface of the hub; a shroud surrounding the outer circumference of the impeller; and a coating layer coated on the inner circumferential surface of the shroud. The coating layer may include: a polymer having strength lower than the strength of the blade; and a plurality of beads mixed with the polymer and having strength higher than the strength of the polymer.

Abstract: A magnesium component of a rotary wing aircraft is provided including a groove including a first sidewall and a second sidewall arranged on opposing sides of a recessed opening. The first sidewall includes a deposit positioned adjacent the recessed opening. The deposit is formed by cold spraying one or more layers or powdered material within an area of the first sidewall from which material was removed.

Abstract: Microencapsulated healing agents that, upon incorporation into a zinc-rich coating or coating system, improve the coating or coating system's ability to maintain its adhesion and corrosion resistance after damage that exposes the underlying substrate. These microencapsulated healing agent formulations are uniquely synergistic with zinc-rich coatings, and/or with zinc particles in a zinc rich coating, improving both adhesion maintenance and corrosion resistance following damage that exposes the substrate.

Abstract: Approaches to patching a leaky hermetically-sealed device include the use of a laminate rework patch that includes an adhesive tape layer, an aluminum sheet layer, and an outer cover layer, and whereby a viscous adhesive is injected or otherwise applied between the patch and the device leak location, over a layer of primer material, to fill the leak and stop the leakage of gas from inside the device. The thickness of the viscous adhesive, and thus the curing time and temperature of the viscous adhesive, can be managed by way of the thickness of the adhesive tape layer.

Abstract: This disclosure provides methods and systems for using coatings to control component dimensions during operations of a mechanical system, such as gas turbine combustion air cooling system. The mechanical system may have a component with a critical dimension defined by at least one surface. Upon detecting a change in the critical dimension, such as from surface erosion, a coating additive is deployed into the mechanical system. The surface is coated with the coating additive to offset at least a portion of the change in the critical dimension.

Abstract: A method for correcting a mask layout includes providing a mask layout including first patterns, each of the first patterns having a size related to a first critical dimension (CD) value, obtaining topography data on a region of a wafer, generating a defocus map using the topography data, and correcting the mask layout on the basis of the defocus map. The generating of the defocus map includes respectively setting second CD values for a plurality of sub-regions of the mask layout. The second CD values may be set based on the topography data. The correcting of the mask layout on the basis of the defocus map comprises correcting the sizes of the first patterns to be related to the second CD values.

Abstract: A device is described where an operator uses a handheld nozzle that deposits new material onto a part. The process can be used to create new parts from a substrate, or to repair parts. The device automatically maps the physical part and matches the physical part against a model of the desired part. As the operator moves the nozzle over the part, the device automatically computes the amount of material necessary to modify the current part to match the model of the desired part. This method can be used for spraying or spray-casting metal, ceramics, and other materials. The described process and device automates this process, and simplifies the operator's involvement. Moreover, because the device can measure the part as the material is being deposited, the resulting part is more likely to more closely resemble the original part both in aesthetics and physical properties.

Abstract: Systems for processing a material by submerging the material in a fluid and directing laser pulses at the fluid and the material for processing the material. An embodiment removes the surface of concrete, brick, or rock or minerals in a relatively gentle, energy-efficient, and controlled manner that also confines the material that is removed.

Abstract: A self-healing polymeric composition includes a polymer matrix and a plurality of functional microcapsules dispersed in the polymer matrix. The functional microcapsules include a core of a flowable material that can form film via coalescence, physical crosslinking and/or polymerization on contact with the substrate, and a polymer shell encapsulating the core. The functionality on the polymer shell is effective in complexing with the corrosion by-products, releasing the core material to repair the failure.

Abstract: An Additive Package is provided to adjust the cure properties of a two-part bonding filler across a temperature range of from 4 and 44 degrees Celsius. A low temperature additive speeds a cure rate between 4 and 15 degrees Celsius and a high temperature additive slows down a cure rate between 25 and 44 degrees Celsius. The amount of Additive Package is varied to account for the desired cure properties. The Additive Package includes a first unsaturated polyester resins with an average degree of unsaturation of 70-100 percent based on total acid and anhydride monomer content. A process for repairing a vehicle body is provided using the Additive Package. A kit for accomplishing repairs in an after-market repair setting is also provided.

Abstract: A transfer print structure comprises a destination substrate having a substrate surface and one or more substrate conductors disposed on or in the destination substrate. One or more interconnect structures are disposed on and protrude from the destination substrate in a direction orthogonal to the substrate surface. Each interconnect structure comprises one or more notches, each notch having an opening on an edge of the interconnect structure and extending at least partially through the interconnect structure in a direction parallel to the substrate surface from the edge and a notch conductor disposed at least partially in the notch and electrically connected to one of the substrate conductors. In some embodiments, an electronic component comprising connection posts is transfer printed into electrical contact with a corresponding notch conductor by laterally moving the electronic component over the substrate surface to electrically contact the connection post to the notch conductor.

Abstract: In a member inspection device and a member repairing method, an irradiation device irradiates a surface of a member to be inspected with light, an image pickup device picks up an image of a surface portion irradiated with the light, a failure detection device detects a failure area on the basis of a photographed image picked up by the image pickup device, and a determining device classifies the shape of the failure area detected by the failure detection device.

Abstract: A mirror (10, 20, 30, 40), more particularly for a microlithographic projection exposure apparatus, has an optical effective surface (10a, 20a, 30a, 40a), a mirror substrate (11, 21, 31, 41) and a reflection layer stack (14, 24, 34, 44) for reflecting electromagnetic radiation impinging on the optical effective surface (10a, 20a, 30a, 40a), wherein a layer (13, 23, 33, 43) composed of a group III nitride is arranged between the mirror substrate (11, 21, 31, 41) and the reflection layer stack (14, 24, 34, 44), wherein the group III nitride is selected from the group containing gallium nitride (GaN), aluminum nitride (AlN) and aluminum gallium nitride (AlGaN).

Abstract: Curable adhesive compositions comprising vi. a curable epoxy resin vii. an amine curing agent, viii. a polymeric toughening agent, ix. a filler and x. a phosphoric acid ester according to the formula as an adhesion promoter, wherein R represents an aliphatic or aromatic residue that contains one or more carboxylic acid ester units and/or one or more urethane units and that further contains at least one ether group and n represents an integer of 1 or 2, methods of making them, bonded articles and methods for bonding.

Abstract: The present invention relates to an article whose surface has been at least partly sealed and to methods of its sealing, the sealing layer comprising a reactive melt layer and a coating layer. The invention provides a method of sealing at least part of the surface of an article, comprising the steps of: (a) applying a reactive melt layer based on polyurethane to at least one part of the surface of the article; (b) smoothing the reactive melt layer; and (c) applying a coating material to form a coating layer on the reactive melt layer, the coating layer being applied before the full curing of the reactive melt layer.

Abstract: A tire dressing is provided with a fine polymer-based reflective particles formed form of a blend of anisotropic particles of varying color that introduce an added reflective surface not present in ordinary tire dressings. The use of the fine polymer-based reflective particles enhance gloss, shine, and light reflectivity to the applied surface. The enhanced reflective surface effect is more noticeable during vehicle motion and the tire is rotating, as light is reflected from different reflective particles due to the changing angle of the particles caused by the rotation of the tire. The effects are more subtle than the typical effect of glitter due to the small particle size and the utilization of a mixtures of several types of polymer reflective particles that range from dark to bright and vary in color, and the presence of the high refractive index liquid silicone fluid that results in a brilliant radiant shine.

Abstract: Methods, apparatuses, systems and software for ion beam milling or machining are disclosed. The apparatus includes a specimen holder, a table, one or more ion sources, rotatable ion optics, and an imaging device. The specimen holder is configured to hold a specimen in a stationary position during milling or machining. The table is configured to change the stationary position of the specimen holder in any of three orthogonal linear directions and an angular direction. The rotatable ion optics are configured to emit an ion beam towards a predetermined location on the specimen from any of the one or more ion sources at any angle around an axis that is orthogonal to a horizontal surface of the table when the angular direction of the table is 0°. The imaging device is configured to generate an image of the specimen including the predetermined location, thereby enabling real-time monitoring of the milling or machining process.

Abstract: A refurbished headlight or the like, with restored translucency, transparency, and luster and high durability, is provided as the aged headlight or the like of polycarbonate resin. Furthermore, a new headlight or the like, with a polycarbonate resin lens which is not degraded by aging over a long period of time, is provided. A headlamp, on which a membrane of clear urethane binder resin is provided after a surface layer of reinforced plastic or the like remaining on a lens surface and degraded parts of a lens body are removed by grinding, is provided. When a yellow tinge remains on the lens body, the headlamp, on which the membrane of urethane binder resin is provided by applying a purple-black mixed urethane coating mixed with a purple-black mixing pigment, is provided. Moreover, a new headlamp that has a membrane of clear urethane binder resin on a lens surface is provided.

Abstract: Disclosed is a process for producing a run-in coating (20, 24, 32, 44) on a component of a turbomachine, in particular of a gas turbine. The run-in coating is applied and produced on the component of the turbomachine by a kinetic cold gas compacting process (K3). The invention also encompasses a run-in coating for a static or rotating component of a turbomachine and a static or rotating component of a turbomachine, in particular of a gas turbine, having at least one run-in coating.

Abstract: A bank repair method for repairing a defect portion of a bank in a process of manufacturing an organic electroluminescence (EL) display device including a substrate, banks formed over the substrate, and light-emitting layers formed in concave spaces defined by the banks. The bank repair method includes: examining whether or not a bank having a defect portion is present; and when a bank having a defect portion is present, repairing the bank by applying a repair material containing a gas adsorbent to the defect portion and curing the repair material; and after curing the repair material, baking the repair material by irradiating the repair material with infrared laser light.

Abstract: A computer device for generating a computer model of a non-nominal component includes a memory device and a communication interface device coupled to the memory device and includes a processor. The processor is programmed to generate a nominal outer surface and a nominal inner surface; generate a tool having a first tool position; move the tool to a second tool position within the nominal component, the second tool position based on a simulated local geometric deviation of a parameter; segment the tool into a first portion and a second portion at the nominal inner surface component; return the first portion to the first tool position out of the nominal component; segment the first portion at the nominal outer surface into a hole portion; and simulate a non-nominal cooling hole represented by the hole portion to facilitate computer modeling of the non-nominal component.

Abstract: A concrete protective agent including an alkali metal-containing silicate and an alkaline electrolyzed water. A concrete protective agent including an alkali metal-containing silicate and silicon dioxide. Examples of the alkali metal-containing silicate include sodium silicate, potassium silicate and lithium silicate. By supplying the concrete protective agent to a concrete structure, the repair of the concrete structure can be performed. A concrete repairing agent having a significant repairing effect as compared with conventional concrete repairing agents.

Abstract: Photovoltaic devices such as solar cells, hybrid solar cell-batteries, and other such devices may include an active layer disposed between two electrodes. The active layer may have perovskite material and other material such as mesoporous material, interfacial layers, thin-coat interfacial layers, and combinations thereof. The perovskite material may be photoactive. The perovskite material may be disposed between two or more other materials in the photovoltaic device. Inclusion of these materials in various arrangements within an active layer of a photovoltaic device may improve device performance. Other materials may be included to further improve device performance, such as, for example: additional perovskites, and additional interfacial layers.

Abstract: The invention concerns two-component polyurethane compositions of a polyol component and a polyisocyanate component, the polyol component including at least one reaction product of castor oil and ketone resins with an OH number of 110 to 200 mg KOH/g, and at least one aliphatic triol, and the polyisocyanate component including at least one aromatic polyisocyanate, the ratio in weight percent of being between 4 and 50 and the ratio of all NCO groups of the aromatic polyisocyanates to all the OH groups totaling (A1+A2)=1.15:1-85:1, the aliphatic triol being-1,2,3-propane triol and/or-1,1,1-trimethylol propane and/or polyether polyols based on 1,1,1-trimethylol propane with a molecular weight of 170-500 g/mol and an OH-number of 400-1100 mg KOH/g, and the total of all the OH groups of (A1+A2) being ?90% of the total of all the OH groups of the two-component polyurethane composition.

Abstract: A modifying agent of an alkaline electrolyzed water. A substance being supplied to a concrete structure in order to produce calcium silicate for repairing concrete and including an alkali metal silicate is defined as a concrete protective agent. The modifying agent is supplied to the concrete structure in advance of the supply of the concrete protective agent. The alkali metal silicate and the calcium ion included in the concrete protective agent contribute to the production of the calcium silicate. A method for repairing a concrete structure includes supplying the concrete protective agent to the concrete structure and supplying a modifying agent for a concrete structure including an alkaline electrolyzed water to the concrete structure, the step supplying a modifying agent being performed before the step of supplying the concrete protective agent to promote production of the calcium silicate in step of supplying the concrete protective agent.

Abstract: Disclosed is a solvent-borne or UV-curable fugitive ink composition for application to a substrate that is to be provided with indicia. The ink composition comprises at least one halochromic compound and at least one filler compound and is capable of preventing indicia formed with a heat sensitive erasable ink on an area of the substrate carrying the fugitive ink composition and thereafter subjected to a thermal treatment from becoming invisible to an unaided eye.

Abstract: During a calculation technique, a modification to a reflective photo-mask is calculated. In particular, using information specifying a defect associated with a recessed area on a top surface of the reflective photo-mask, the modification to the reflective photo-mask is calculated. For example, the calculation may involve an inverse optical calculation in which a difference between a pattern associated with the reflective photo-mask at an image plane in a photo-lithographic process and a reference pattern at the image plane in the photo-lithographic process is used to calculate the modification at an object plane in the photo-lithographic process. Note that the modification includes a negative feature in which one or more pairs of layers in a multilayer stack in the reflective photo-mask are removed using a subtractive fabrication process. Moreover, the modification is proximate to the recessed area.

Abstract: A method for synthesizing alkali metal silicate which can be easily microparticulated, a method for synthesizing, with the use of the alkali metal silicate, alkali transition metal silicate, and alkali metal silicate and alkali transition metal silicate which are synthesized by the synthesis methods are disclosed. The alkali metal silicate is synthesized by the following steps: forming a basic solution including an alkali metal salt; mixing the basic solution including the alkali metal salt with silicon particles to form a basic solution including the alkali metal silicate; and adding the basic solution including the alkali metal silicate to a poor solvent for the alkali metal silicate to precipitate the alkali metal silicate. Further, the alkali metal silicate is mixed with a microparticulated compound including a transition metal to form a mixture, and the mixture is subjected to heat treatment, whereby the alkali transition metal silicate is generated.

Abstract: A process for producing a repair coating on at least one metallic surface that is coated with at least one corrosion protection coating A applied with at least one composition selected from the group of pretreatment compositions, of organic compositions and of silicon compound(s) containing compositions, whereby the at least one corrosion protecting coating A has been at least partially removed in the area Z, whereby a thin corrosion protecting coating B containing at least one silicon compound is applied with a solution or dispersion containing at least one silane, at least one silanol, at least one siloxane, at least one polysiloxane or any mixture of these (=“siloxane composition”) on at least a part of the area Z.

Abstract: A process for producing a repair coating on at least one metallic surface that is coated with at least one corrosion protecting coating A applied with at least one composition selected from the group of pretreatment compositions, of organic compositions and of silicon compound(s) containing compositions, whereby the at least one corrosion protecting coating A has been at least partially removed in the area Z, whereby a thin corrosion protecting coating B containing at least one silicon compound is applied with a solution or dispersion containing a silane, a silanol, a siloxane, or a polysiloxane on at least a part of the area Z. A further corrosion protecting coating C may be applied.

Abstract: The invention relates to coating material compositions comprising an isocyanate group-containing component, a hydroxyl group-containing component, a zinc-imidazole-carboxylate complex and a monomeric aromatic carboxylic acid, and also to the use of a zinc-imidazole-carboxylate complex in the presence of a monomeric aromatic carboxylic acid as a catalyst system for the urethane reaction in coating material compositions.

Abstract: Provided is a decoration sheet with high weather resistance and hair line, and a manufacturing method thereof. The decoration sheet with weather resistance and hair line, which is attached to a surface of an object so as to protect the object from external environment, includes a PVC layer of which a lower surface is attached to the object; a hair line printing layer formed with a lower surface contacted with an upper surface of the PVC and an upper surface on which the hair line is formed, and formed of a mixture of aluminum and acryl; and an acrylic layer formed with a lower surface contacted with an upper surface of the hair line printing layer and an upper surface exposed to the external environment.

Abstract: A plasma etching method forms a tapered recess portion in a wide-gap semiconductor substrate. The method includes forming on the substrate K an etching film having an etching speed higher than that of the substrate K, and forming a mask M having an opening on the high-speed etching film. The substrate K with the etching film and the mask is then placed on a platen and heated to a temperature equal to or higher than 200 ° C., a plasma is generated from an etching gas supplied into a processing chamber, and a bias potential is applied to the platen to etch substrate.