Abstract: A charging frame for accommodating a batch of parts to be quenched, e.g., metal workpieces, has a circumferentially closed peripheral wall which surrounds the batch and thereby forms a flow channel which prevents bypass flows. The charging frame is a part of a quenching device.

Abstract: A shelf assembly for firing including plural struts for supporting shelf boards arranged upright in two or more rows in a cross direction and in three or more rows in a longitudinal direction on a longitudinally-long car with tie-beams connecting the struts. A thermal stress relief structure is provided in which the struts arranged upright in the adjacent rows in the longitudinal direction are connected only with tie-beams slanted in a cross direction between the struts, with the thermal stress relief structure preventing warpage or damage of the struts resulting from a bending stress generated in the longitudinal direction at the fixing parts of the struts.

Abstract: This invention relates to a fireproof container with improved circulation of heat and safer use. According to an embodiment of this invention, a fireproof container, to be loaded in an industrial furnace to perform a thermal treatment of a powder or a target, includes a prominent member formed on the outer walls thereof Also, according to another embodiment of this invention, a fireproof container for use in thermal treatments has a hexahedral shape with a space having a predetermined volume in which a powder or a target to be thermally treated is placed, and includes a protrusion block having a predetermined shape formed on at least one of the external front surface, rear surface, left side surface, and right side surface of the fireproof container.

Abstract: Improved workpiece-carrier in the form of a high-temperature-grating 10 assembled from mutually engaging elements consisting of carbon-fiber-reinforced carbon-composite-board-strips comprising comb-shaped elements, having a frame surrounding a horizontal grating as well as at least one workpiece-support (40) which is inert in relation to the supported workpiece and provides a workpiece-support-area (50) at a distance above the grating (3O)7 said work-piece-support (40) being arranged within at least one enclosing cut-out-section of at least one element wherein furthermore said elements comprise at least one element having interlocking cut-out-sections in alternating arrangement, at least one auxiliary element, said workpiece-support (40) is a single-piece part of high temperature ceramic of rod-shaped elongation being arranged parallel to the plane of said grating (30) and being an integral part of the grating by being enclosed beneath the workpiece-support-area (50) by cut-out-sections of a multitude of cros

Abstract: Firing containers for firing an electrode active material include one or more through openings, and protrusions protruding from an outer surface of sidewalls of each of the firing containers. The protrusions allow adjacent firing containers to be spaced apart from each other and guide the adjacent firing containers during alignment.

Abstract: A seal hardening furnace is presented in which seal lines in a liquid crystal display panel are hardened. The seal hardening furnace includes a cassette having a rack bar structure. The rack bar structure has rack bars for supporting the substrate along one direction and rack bar supports at ends of the rack bars that support the rack bars. The rack bars have air discharge openings therein. An air injecting passage is connected to the rack bar supports. An air supply unit supplies air through the air injecting passage and through the discharge openings to support the substrate thereon.

Abstract: A vertical boat for heat treatment includes a plurality of supporting columns, a pair of plate members coupled to both ends of each supporting column. In each of the supporting columns a plurality of supporting parts for horizontally supporting substrates to be treated are formed and an auxiliary supporting member to place each of the substrates to be treated is removably attached to each of the plurality of supporting parts. The auxiliary supporting member is adjusted for each supporting part with respect to the inclination of a surface for placing the substrates to be treated depending on the shape of each supporting part by processing a surface for attaching to the supporting part, or by interposing a spacer between the supporting part and the auxiliary supporting member is provided.

Abstract: A manufacturing method for a semiconductor device including: determining pattern dependency of a radiation factor of an element forming surface of one wafer having a predetermined pattern formed on the wafer; determining a heating surface of the wafer, based on the pattern dependency of the radiation factor; holding the one wafer having the determined heating surface and another wafer having a determined heating surface, spaced at a predetermined distance in such a manner that non-heating surfaces of the one wafer and the another wafer oppose to each other; and heating the each heating surface of the one wafer and the another wafer.

Abstract: A tiered furnace includes a plurality of decks in superimposed disposition for receiving flat or at least partly shaped plates which are made of steel. Each of the decks has at least one heater to thereby provide each deck with at least two heating zones that are operating at different temperatures.

Abstract: A support ring for supporting a monocrystalline silicon semiconductor wafer during a thermal treatment of the semiconductor wafer has outer and inner lateral surfaces and a curved surface extending from the outer lateral surface to the inner lateral surface, this curved surface serving for the placement of the semiconductor wafer. The curved surface has a radius of curvature of not less than 6000 mm and not more than 9000 mm for 300 mm diameter wafers, or a radius of curvature of not less than 9000 mm and not more than 14,000 mm for 450 mm diameter wafers. Use of the support ring during thermal treatment reduces slip and improves wafer nanotopography.

Abstract: A variable modular support system for use in a kiln, as well as a method of constructing such a support system in a kiln, comprises plurality of refractory blocks each having an upper surface and a lower surface and at least one transverse recess in either the upper or lower surface, the plurality of refractory blocks comprising a first base refractory block and a second base refractory block spaced from the first refractory block by a variable and selectable distance. Connecting rods extend from the recess of the first base refractory block or a refractory block stacked thereon to the recess of the second base refractory block or a refractory block stacked thereon, the connecting rods forming a rack or shelf located between the first base refractory block and the second base refractory block.

Abstract: The present invention relates to a device for supporting, stacking, and transporting kiln run, in particular for firing ceramic products, comprising an assembly of supports and support beams, like carrier beams and cross beams, on which, in particular one or several supports for placing the kiln run are provided. Thus, for supporting at least one support beam, at least one loose bearing is provided, comprising a support body, moveably disposed, substantially in the direction of the support beam.

Abstract: Disclosed are devices and methods for supporting glass sheets during a thermal treatment process, such as heat treating, to maintain the physical geometry of the glass sheets. The device can comprise means for separating adjacent glass sheets to prevent them from touching. The separating means can comprise a separation comb having projections and channels configured for receiving the glass sheets, separating rods configured to be positioned between the glass sheets, or a combination of separation combs and separating rods.

Abstract: Disclosed is an annealing frame, especially for conveying molded aluminum parts during a heat treatment process. The invention is characterized in that said annealing frame comprises at least one annealing frame element (1) that is provided with at least one annealing basket (13) which can be placed therein and can be adapted to the annealing material. Annealing material having the most different shapes can be accommodated in a non-tipping and slip-proof manner in said annealing basket (13) while being conveyed during the thermal treatment process.

Abstract: A support for structural components that are subjected to a thermal treatment process. The support includes a frame having limbs and extending therefrom a grid of intersecting strands. In order to prevent the support from warping even when subjected to strong thermal loads or variations in temperature, the frame is produced from a temperature-resistant material and the strands are produced from carbon fibers or ceramic fibers that form the grid, extending from the limbs of the frame.

Abstract: The present invention relates to a device for supporting, stacking and transporting kiln run, in particular, when firing ceramic products, comprising an assembly from supports and support beams, in particular carrier beams, cross beams, large plates or similar, on which, in particular, one or several supports for placing kiln run are provided. The device comprises at least one substantially rectangular sleeve, in particular disposed on a kiln cart. In this sleeve a substantially rectangular support of the support assembly is disposed, wherein the sleeve has at least one adjustment means, which is supported in the sleeve, and which can be pressed against the support, wherein the sleeve additionally comprises at least one pressure means, formed from at least one elastic element, which is preloaded through the impact of the adjustment devices, so that it builds up reversal forces against the support.

Abstract: A furnace furniture system comprises multiple shelves supported by a multiplicity of legs, each shelf having multiple openings therethrough. Each leg comprises: (i) at least one modular body having a bottom recess and a top protrusion, the top protrusion adapted to extend through an opening in the shelf and the first protrusion is also adapted to fit within the bottom recess of another leg body; (ii) at least one cap/foot component having a top protrusion that is similar to the leg body top protrusion; and, (iii) means to secure a cap/foot component to an adjacent cap/foot component or leg body; wherein at least one leg comprises a cap/foot component secured to either a first protrusion or a second protrusion extending through an opening in the first shelf and wherein at least one leg comprises a cap/foot component secured to either a first protrusion or a second protrusion extending through an opening in the second shelf.

Abstract: Hardening fixture for simultaneous hardening of a multitude of sawblades, comprising a bottom plate against which the lower ends of the sawblades are supported, vertical pillars and side plates with lateral openings, where guiding strips and distance elements keep the sawblades parallel close to each other without compressive force, where the structural parts are made from graphite with a surface coating not containing carbon.

Abstract: An apparatus and method to position a wafer onto a wafer holder and to maintain a uniform wafer temperature is disclosed. The wafer holder or susceptor comprises a recess or pocket whose surface is concave and includes a grid containing a plurality of grid grooves separating protrusions. The concavity and grid grooves define an enclosed flow volume between a supported wafer and the susceptor surface, as well as an escape area, or total cross-sectional area of the grid grooves opening out from under the periphery of the wafer. These are chosen to reduce the wafer slide and curl during wafer drop-off and wafer stick during wafer pick-up, while improving thermal uniformity and reducing particle problems. In another embodiment, centering locators in the form of thin, radially placed protrusions are provided around the edge of the susceptor pocket to reduce further the possibility of contact between the wafer and the outer edge of the susceptor.

Abstract: An apparatus and method to position a wafer onto a wafer holder and to maintain a uniform wafer temperature is disclosed. The wafer holder or susceptor comprises a recess or pocket whose surface is concave and includes a grid containing a plurality of grid grooves separating protrusions. The concavity and grid grooves define an enclosed flow volume between a supported wafer and the susceptor surface, as well as an escape area, or total cross-sectional area of the grid grooves opening out from under the periphery of the wafer. These are chosen to reduce the wafer slide and curl during wafer drop-off and wafer stick during wafer pick-up, while improving thermal uniformity and reducing particle problems. In another embodiment, centering locators in the form of thin, radially placed protrusions are provided around the edge of the susceptor pocket to reduce further the possibility of contact between the wafer and the outer edge of the susceptor.

Abstract: A setter for burning, which has no influence on the burning behavior of ceramic electronic parts to be situated thereon, is provided. A honeycomb structure is formed in which a plurality of ventilation cells that is formed by each partition wall having a thickness of 0.05 to 1.0 mm in a thick direction of the setter for burning from a side of a front surface of an electronic part placement surface of the setter for burning and that is each partitioned in a pitch of 0.5 to 5.0 mm passes through. A supporting member is provided in a side of a rear surface of the electronic part placement surface. Therefore, the setter for burning can be situated in a floating state.

Abstract: Hardening fixture for simultaneous hardening of a multitude of sawblades, comprising a bottom plate (13) against which the lower ends (12) of the sawblades are supported, vertical pillars (14) and side plates (15) with lateral openings, where guiding strips (16, 17) and distance elements (19) keep the sawblades parallel close to each other without compressive force, where the structural pans are made from graphite with a surface coating not containing carbon.

Abstract: An apparatus and method to position a wafer onto a wafer holder and to maintain a uniform wafer temperature is disclosed. The wafer holder or susceptor comprises a recess or pocket whose surface is concave and includes a grid containing a plurality of grid grooves separating protrusions. The concavity and grid grooves define an enclosed flow volume between a supported wafer and the susceptor surface, as well as an escape area, or total cross-sectional area of the grid grooves opening out from under the periphery of the wafer. These are chosen to reduce the wafer slide and curl during wafer drop-off and wafer stick during wafer pick-up, while improving thermal uniformity and reducing particle problems. In another embodiment, centering locators in the form of thin, radially placed protrusions are provided around the edge of the susceptor pocket to reduce further the possibility of contact between the wafer and the outer edge of the susceptor.

Abstract: An annealing basket made of steel, receiving mass-produced aluminium parts (20) for the degreasing and softening thereof, comprising a bottom and side by a frame. At least one side wall (16) is joined to the walls that protrude from said bottom and are defined frame (12) by means of at least one aluminium element (26) that can be plastically deformed when heated to an annealing temperature as a result of the pressure that is exerted on the side walls (16) and occurs in the annealing basket (10) due to thermal expansion of said aluminium parts (20), whereby the side wall (16) moves outwards to a certain degree under the effect of the increase in the volume of said basket in at least one area that is adjacent to the frame.

Abstract: A container (10) for holding parts during a heat treating process. The container includes a bottom plate (14), end walls (20 and 22), sidewalls (30 and 32) and dividers (40, 42 and 44) which are connected together using a tab and slot construction to form an egg crate structure. The construction of the container reduces the effects of the heat treating process on the container. The guide cradle (58) in the compartment (12) of the container supports the cylinder head in the compartment and reduces the movement of the cylinder head during the heat treating process. The positioners (60) on the top portion (58A) of the guide cradle guides the cylinder head into the guide cradle and into the compartment. The bottom portion (58B) of the guide cradle supports the cylinder head above the bottom plate.

Abstract: Products which are to be traversed vertically by a flow of hot gases, such as ceramic supports of honeycomb structure, are supported in an oven by novel structure during baking. The novel structure is a thin horizontal plate of porous ceramic foam. But because this plate of porous ceramic foam is fragile, it is specially supported by a plurality of parallel horizontal bars. These horizontal bars can be of either or both of two types: in one type, the bars are received in grooves on the underside of the porous ceramic foam plate and project below the lower surface of the plate. In another form, the bars pass through bores in the ceramic plate. When both types of bars are used, the bars of one type are perpendicular to the bars of the other type. In all cases, the bars rest on support structure of the oven, so that the plate of porous ceramic foam does not touch this support structure.

Abstract: A carrier substrate for carrying objects subjected to elevated temperatures comprises at least a grid part and a border part. The grid part includes grid elements having end portions provided with holes. The end portions partly extend outside the border part via sleeves in the border part. The grid elements and the border part are interconnected solely by interengaging connection portions comprising the first end portions and metal wires extending through the holes.

Abstract: A heat treat fixture is provided for supporting thin sheet-like work pieces, such as metal gasket layers, during heat treatment to achieve uniform hardness and properties of the work piece while preventing warpage. The fixture has porous, planar support walls that engage the opposite sides of the work piece. The walls include a coarse porous exoskeleton of expanded metal and an inner liner of wire mesh panels that are considerably finer than the coarse exoskeleton. The porous walls permit liquid heating and cooling media during heat treatment to flow freely through the walls for intimate contact with the work piece to achieve rapid uniform heating and cooling. The work piece is supported by the porous walls against movement out of its plane while being permitted to expand and contract within its plane to minimize warpage.

Abstract: A container (10) for holding parts during a heat treating process. The container includes a bottom plate (14), end walls (20 and 22), sidewalls (30 and 32) and dividers (40, 42 and 44) which are connected together using a tab and slot construction to form an egg crate structure. The construction of the container reduces the effects of the heat treating process on the container. The guide cradle (58) in the compartment (12) of the container supports the cylinder head in the compartment and reduces the movement of the cylinder head during the heat treating process. The positioners (60) on the top portion (58A) of the guide cradle guides the cylinder head into the guide cradle and into the compartment. The bottom portion (58B) of the guide cradle supports the cylinder head above the bottom plate.

Abstract: A method of treating a surface of a stacked aluminum alloy ingot during a heating process. Spacer blocks are positioned adjacent aluminum alloy ingots to form a stack, wherein the spacer block has a support surface contacting a contact surface of the aluminum alloy ingot, and at least one of the support surface and the contact surface include a fluorine containing material. The stack is heated to at least a temperature at which the fluorine containing material decomposes or vaporizes such that a layer of a fluorinated oxide compound is formed at the interfaces between the ingots and the spacer blocks.

Abstract: A firing setter, which is useful for a heat treatment or firing step upon production of ceramic-based electronic device components or production of metal-based components obtained by injection molding, is provided with plural trough-holes and has an alumina content of at least 70 wt. %. Each of the through-holes is linear with substantially the same inner diameter along a length thereof and has an inner diameter of from 0.3 to 1 mm. A process for producing the firing setter is also disclosed.

Abstract: A flexible, relatively lightweight workpiece support tray includes a plurality of spacers juxtaposed between a plurality of lateral I-beams, the I-beams being held together through a plurality of rods. Each of the lateral I-beams has a recess for receiving a tab on each side of the spacers. Each end of the rods is provided with a split ring welded thereon to removably retain the assembly together. A pair of shoes is located on the bottom intended side of the tray, and a puller/pusher bar is attached to each end of the shoe for engaging the drive mechanism of the furnace. The invention uses articulating attachments, including includes a slide connector and T-connector spot welded into place, for joining one tray to another to obtain a floating feature.

Abstract: A device used to transfer and support articles during a high temperature heat treatment. The device is used to move articles into a heat treat furnace, hold the articles at an elevated temperature in a controlled atmosphere during the high temperature treatment and remove the articles from the furnace at the conclusion of the high temperature treatment, with no need to transfer the articles from the device. The device is comprised of a plurality of high temperature rollers, each roller including a roller bearing. A nonmetallic support surface capable of supporting the load of components undergoing the heat treatment is attached to the rollers. The device is designed to be nonreactive with either the furnace atmosphere or with the parts loaded onto it. The device also includes means to accommodate a temperature monitoring device such as a thermocouple to accurately monitor the temperature of the device during the thermal cycle.

Abstract: The invention relates to a support for a wagon superstructure for holding molded blanks of ceramic material which are to be fired, comprising a planar hollow-section grid structure, which is formed from interconnected webs and is made from a silicon carbide material with a multiplicity of openings and a plurality of bearing pieces which can be fitted into appropriate openings corresponding to desired support positions for a specific molded-blank shape and can be fixed in position.

Abstract: The invention concerns a resistance-heated vaporizer boat for vaporizing metal. According to the invention, a reduced temperature is generated in the edge region, i.e., along the longitudinal edge of the vaporizer boat, such that there is only a very slight wetting tendency along this longitudinal edge. Consequently, the melt can be localized such that it cannot overflow over the longitudinal edges of the vaporizer boat, without a cavity necessarily having to be provided in the vaporization surface of the vaporizer boat. As a result, optimum wetting and constantly targeted vaporization of the metal upwards towards the area to be vapor-deposited are attained.

Abstract: An heat-treating ring boat (20) for semiconductor wafers (W) has a top plate (21), a bottom plate (22), six columns (23-28), and 63 ring trays (31). The trays (31) are mounted in grooves (20a) of the columns (23-28). To fix the trays (31), a fixing rod (33) is detachably mounted between the top plate (21) and bottom plate (22). A through hole (21a) and a recessed portion (22a) to mount the fixing rod (33) therein are formed in the top plate (21) and bottom plate (22). Notches (34) to engage with the fixing rod (33) are formed in the trays (31). A notch (32) to engage with the fixing rod (33) is formed in the column (23). A projection (41) is formed on each tray (31) to abut against the side surface of the column (24).

Abstract: A support for firing articles for a dental laboratory as described, in which a tensioning plate (14) is provided between two carrier plates (10, 12), the carrier plates (10, 12) and the tensioning plate (14) exhibiting a corresponding pattern of boreholes (16). In these boreholes (16) carrier pins (32) are introduced, which by displacement of the tensioning plate (14) with respect to the carrier plates (10, 12) are clamped in place and fixed in their position.

Abstract: This invention involves a transport system for moving work products through a furnace or kiln. The structure is simple in construction and moves easily along two grooves or channels provided at both sides of the product supporting structure. The supporting structure is a plurality of cross bars resting on a carrier or carriers on each side thereof. The structure resists warping and rapid deterioration generally occuring in prior art structures. It importantly allows uniform heating of the product because of the open atmosphere provided therein.

Abstract: A tray for heat treatment furnace including a tray base which comprises a plate and a lattice part being fixed on the plate, said lattice part having a plurality of cylindrical reinforcements formed at cross portions thereof; a fixing device having a plurality of paired barrels being connected to each other by a plurality of connecting members, each of said paired barrels being provided with a plurality of cutting grooves on an upper surface thereof, one of the connecting members having a pair of coupling jaws for engagement with a portion of the lattice part; a plurality of spacers each being engageable with one of a respective said plurality of cutting grooves.

Abstract: A holding container which is made of a polyether ether ketone resin and is suitable for use in holding one or more substrates upon fabrication of the corresponding number of thin-film semiconductor substrates useful in driving a planar display, for example, a liquid crystal display.

Abstract: A holding plate holding a number of chip components coated with electrode paste is carried into a furnace body. The furnace body includes a rotator which is intermittently rotated about a shaft. The rotator is provided with a plurality of radial blades, each of which is provided with a pair of inward holding grooves for holding both side portions of the holding plate. The holding plate is carried to an inlet portion and outlet portion by a conveyor and the plate is inserted into the holding grooves by an introduction arm. The furnace is provided with heaters and fans to dry the electrode paste during rotation of the rotator.

Abstract: Installation for the hot-metallizing of small items of steel or cast iron, comprising a continuous annealing furnace (1) with a furnace chamber (2) having regulatable temperature zones, a feeding device (3) for conveyor boxes (4) to accommodate the metal parts to be metallized, conveying devices (6, 9) for transporting the conveyor boxes (4) through the annealing furnace (1) and back to a discharge device (10), a vacuum inlet gate (5), and a vacuum outlet gate (7) which are under a protective gas atmosphere. A device (11) is arranged within the vacuum outlet gate (7) for emptying the conveyor boxes (4) into circulating dip baskets (13) of a metallizing plant (12) connected to the continuous annealing furnace (1), comprising a ceramic-lined, inductively heated metal bath (14). Lifting units lower the dip baskets (13) from a circulating position (13a) into a dipping and filling position (13c) into the metal bath (14) and lift the baskets (13 ) into a position (13e) above the metal bath (14).

Abstract: An improved method and apparatus for removal of petroleum hydrocarbons from contaminated soil. The apparatus of the invention includes a shallow container, preferably with vertical sides, which has in its bottom wall a multiplicity of elongated recessed chambers with an open mesh entry area at the upper side, and a gas discharge orifice at one end of each chamber. A rack containing burners is adapted for positioning over the material to be treated within the container. The invented method includes charging materials to be treated into a container, heating the material while creating a partial pressure within the chamber, establishing a vacuum to pull the gasses downwardly through the soil and atmospheric air downwardly with the gasses, then either collecting or discharging the removed gasses, after which the soil is removed from the treatment chamber.

Abstract: A side lifting boat and a tool assembly is disclosed. The tool is detachably engageable to selectively lift a boat. Both boat and tool are anti-rotationally engageable by the tool's upper and lower projections at its forward end fitting into a correspondingly shaped space defined between the outer (non-wafer-carrying) surface on the side of the boat. The boat's corresponding space permits the lifting tool to be moved into the space and into position between two fulcrum points that stabilize the boat/tool assembly from anything other than a small relative angular rotation.

Abstract: A device for heat treatment of shafts or like members in a vertical position comprises a unitary construction tray. This includes an upper deck formed with support holes, optionally on a plurality of alternate levels. These holes support and center a lower end of the shafts or like members. Horizontal ribs join the holes. A lower deck of the tray also comprises holes and ribs, and pillars join the ribs of the upper and lower decks in such a way as to leave large gaps for fluid to circulate through.

Abstract: A wafer hanger has a rod member and a supporting member. The rod member is inserted into respective notches formed in semiconductor wafers, and then placed on the supporting member. The wafer hanger holding the wafers is put into a furnace for heat treatment of the wafers. Since the wafers are hung from the rod member, plastic deformation due to the gravity of the wafers is not caused in the wafers.

Abstract: A rectangular sagger structure particularly suited for firing cylindrical articles loaded in parallel touching rows. A scalloped fixture extends inwardly from one of the side walls with the scalloped notches so spaced that the articles placed in the notches constituting a first row of articles form pockets for the second row of articles to nest between adjacent first row articles.

Abstract: A self-aligning fixture for use in a high temperature top-loading furnance includes multiple stacked trays to optimize load placement and capacity and to minimize fixture heat absorption. The fixture is manipulated by a handling tool to insert, position, and withdraw the fixture without obscuring the chamber and includes self-aligning blackbody radiators insertable by a handling tool into the optical path of an optical pyrometer and onto a selected tray for temperature monitoring of the load therein. A calibration blackbody radiator allows independent pyrometer verification of an inserted thermocouple.

Abstract: A silicon-on-insulator substrate having a very low threading dislocation density is made by implanting oxygen ions into a silicon substrate while heating the substrate to form a layer of silicon dioxide buried in the silicon substrate and annealing the implanted substrate at high temperature in a novel furnace incorporating a polysilicon tube to constrain the annealing temperature to be uniform over the entire substrate. The silicon-on-insulator substrate is particularly useful for the manufacture of semiconductor devices formed in thin silicon films.

Abstract: An improved method and apparatus for removal of .Iadd.contaminants such as .Iaddend.petroleum hydrocarbons from contaminated soil. The apparatus of the invention includes a shallow container, preferably with vertical sides, which has in its bottom wall a multiplicity of elongated recessed chambers with an open mesh entry area at the upper side, and a gas discharge orifice at one end of each chamber. A rack containing burners is adapted for positioning over the material to be treated within the container. The invented method includes charging materials to be treated into a container, heating the material while creating a partial pressure within the chamber, establishing a vacuum to pull the gasses downwardly through the soil and atmospheric air downwardly with the gasses, then either collecting or discharging the removed gasses, after which the soil is removed from the treatment chamber.