Abstract: There is provided a heat treatment apparatus for performing a predetermined film forming process on a substrate by mounting the substrate on a surface of a rotary table installed in a processing vessel and heating the substrate by a heating part while rotating the rotary table. The heat treatment apparatus includes: a first temperature measuring part of a contact-type configured to measure a temperature of the heating part; a second temperature measuring part of a non-contact type configured to measure a temperature of the substrate mounted on the rotary table in a state where the rotary table is being rotated; and a temperature control part configured to control the heating part based on a first measurement value measured by the first temperature measuring part and a second measurement value measured by the second temperature measuring part.

Abstract: A method of thermally processing work pieces including providing an insulated chamber having a first end, an opposing second end, and a middle portion disposed between the first and second ends, wherein the first end is inclined with respect to middle portion, creating a thermal gradient within an interior of the insulated chamber, and providing a means for gradually moving a workpiece from the first end to the second end within the created thermal gradient.

Abstract: The invention concerns a dental furnace, with a furnace base and with a furnace hood, wherein the furnace hood includes a firing chamber for the accommodation of dental restorations, with a temperature sensor that records the temperature of the dental restoration and which is connected to a control device which controls the dental furnace, and the dental furnace (10) includes a drive unit (18) for the furnace hood (16) and the control device (30) controls the drive unit (18) based on the temperature recorded by the temperature sensor (20), namely opens the furnace hood.

Abstract: Provided is a substrate processing apparatus capable of improving the workability of measuring a temperature-flat zone in a process furnace and the reliability of a temperature-flat length of a heater. The substrate processing apparatus includes a process chamber configured to process a substrate retained in a retainer loaded therein; a temperature measuring device configured to measure an inside temperature of the process chamber; a transfer device configured to transfer the substrate at least to the retainer; and a controller configured to control the transfer device and the temperature measuring device to move the transfer device to a predetermined position before the inside temperature of the process chamber is measured and to obtain the inside temperature by the temperature measuring device while vertically moving the transfer device with the temperature measuring device attached to the transfer device when the inside temperature of the process chamber is measured.

Abstract: The invention relates to a dental furnace, in particular a firing furnace or press furnace, for firing or pressing a dental restoration part which is receivable in the furnace, possibly after pre-heating in a pre-heating furnace, and which is placeable on a base, in particular centrally thereon, wherein the dental furnace comprises a firing chamber whose diameter is larger than, in particular at least twice as large as, the largest dental restoration part to be fired, and which comprises a control device and an operating unit at the or for the dental furnace (10), wherein by means of the operating unit (26) the size and/or the weight and/or the number of the dental restoration part(s) (18) to be fired or pressed is adjustable in units.

Abstract: A heating vaporization system provided with: a container that heats and vaporizes a source to produce source gas; a pipe for leading out the source gas; a sensor flow path that is provided in the pipe; a flow rate detecting part that is provided with a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that regulates the flow rate of the source gas flowing through the pipe located upstream of the flow rate detecting part; and a control part that uses a result of the detection by the flow rate detecting part to control the flow rate regulating part.

Abstract: An erasing apparatus according to an embodiment includes an erasing section configured to erase an image formed on a sheet by heating the sheet that is transported through the erasing section, the erasing section including a heating roller, a press roller in contact with the heating roller. A motor rotates the heating and press rollers. A transportation section transports the sheet. The erasing apparatus further includes a controller that controls the erasing section and the transportation section so that a transportation speed of the sheet transported through the erasing section is a first transportation speed lower than a normal speed if a predetermined period of time from a start of a job has not elapsed.

Abstract: The present invention relates to a device (100) for the heat treatment of substrates and to a method for recording measurement data in said device, where said device (100) comprises at least one heatable chamber (102), a carrier system (108), a sensor assembly (112), and an actuator (111) that is independent of the carrier system (108). The carrier system (108) is designed to carry substrates, whereas the sensor assembly (112) is further configured for coupling to a data recording and/or data storage device (130). The actuator (111) is coupled to the sensor assembly (112) and is configured to position the sensor assembly (112) within the heatable chamber (102).

Abstract: A carrier transport system transports a plurality of carriers by a transport conveyor into a heating furnace, advances a comb-shaped carrier stopper having a plurality of protrusions toward the carriers, moves the carriers by the transport conveyor in a transport direction to engage cutout grooves, provided respectively for the carriers, with the protrusions of the carrier stopper to thereby position the carriers at a time. The carrier transport system advances the carrier stopper toward the carriers to insert distal ends of the protrusions of the carrier stopper into insertion holes, and then determines, on the basis of a moved distance X of the carrier stopper, whether the carriers are properly positioned.

Abstract: A lifting apparatus for a vertical vacuum furnace is disclosed. The apparatus includes first and second support modules arranged in spaced parallel alignment and first and second reversible lifting mechanisms mounted on respective ones of the first and second support modules. The apparatus also includes first and second motive means coupled to the first and second reversible lifting mechanisms for driving the reversible lifting mechanisms. First and second trolleys are operatively connected to the first and second reversible lifting mechanisms and adapted for engaging with a payload. The apparatus further includes a control system connected to the first and second motive means for controlling the operation of the first and second reversible lifting mechanisms whereby the first and second trolleys can be raised or lowered. A vertical vacuum furnace assembly including the lifting apparatus is also disclosed as well as a support module and a bottom head assembly for the lifting apparatus.

Abstract: A temperature measurement apparatus for measuring a temperature profile of a substrate mounted on a rotating table, including a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; a temperature map generating unit that specifies the address of the temperature measurement area based on the number of the temperature measurement areas measured by the radiation temperature measurement unit for each of the scanning operations in the radius direction of the rotating table, and the rotating speed of the rotating table, and stores the temperature in correspondence with the corresponding address in a storing unit; and a temperature data display processing unit that displays a temperature profile of the rotating table.

Abstract: The invention relates to a dental furnace (1) comprising a hood-shaped combustion chamber (3) with a heating element (12) that is placed therein and an opening (13), and a closing plate (4) which is arranged so as to be movable relative to the combustion chamber (3) and is used for accommodating a material (5) that is to be baked, particularly a tooth replacement object. Said dental furnace (1) further comprises a sensor (31) for determining the combustion chamber temperature. In order to optimize the drying time and closing time, a measuring instrument (7b) is provided for recording the actual value of the position of the closing plate relative to the combustion chamber (3) while an arithmetic unit (51) is provided for determining the deviation from the comparison between the determined actual value and a defined required value so as to derive a control variable for triggering the relative position between the closing plate (4) and the combustion chamber (5).

Abstract: A method of performing a thermal process using a bake plate of a track lithography tool. The bake plate includes a plurality of heater zones. The method includes providing a first drive signal to a first electrode in electrical communication with a process surface of the bake plate. The first electrode is associated with a first heater zone of the plurality of heater zones and each of the plurality of heater zones is adapted to receive a control voltage. The method also includes moving a semiconductor substrate toward the process surface of the bake plate, receiving a first response signal from the first electrode, processing the first response signal to determine a first capacitance value associated with a first gap between the first electrode and a first portion of the semiconductor substrate, and providing a measurement signal related to the first capacitance value.

Abstract: A programmable control unit with sensors capable of measuring heat treatment parameters. The programmable control unit is used to input workpiece heat treatment data, measure the true exposure data, compare the corresponding values, and generate the appropriate control signals that may be used to adjust the heat treatment parameters to optimize the heat treatment process.

Abstract: Apparatus (700) for sintering a glass base material (2) which is a base material for an optical fiber. The sintering apparatus (700) includes: a control unit which varies a condition for sintering the glass base material; and a furnace (12) which sinters the glass base material by heating the glass base material in an atmosphere of dehydration gas and inert gas. The control unit includes a drive source (3) which supplies the glass base material to the furnace at various speeds. The control unit includes a temperature control unit which controls the temperature of a heating source provided in the furnace.

Abstract: Method of controlling the conveying speed of a grate cooler as a function of the state of the bed of material to be cooled in the initial region of the cooler while taking into account the flow resistance of said bed of material. According to the invention, the conveying speed, in addition to being controlled as a function of the flow resistance, is also controlled as a function of the height of the bed of material to be cooled.

Abstract: A travelling thermocouple dynamically profiles the actual temperature of a substrate passing through a vertical oven without entangling the thermocouple wires. Media components, such as microprocessor chips in a semiconductor wafer, are supported on a tray or plate on a driven conveyor. A thermocouple formed of two metal wires of extended length are connected at one end to the media component and at the other end to a stationary readout device and function as the temperature gauge for all trays of components passing through the oven. A C-shaped clamp or hook secured to the thermocouple wires resiliently engages a chain drive driven independently of the conveyor drive but in correlation therewith by a computer controller and pulls the wires through the oven keeping pace with the media component to which it is attached.

Abstract: A thermal analysis device with a sample transporting machine which automatically carries out pretreatment of a sample to quickly heat or cool it. The configuration includes an electric furnace, a temperature controller, a temperature program setter, a sample placing/removing program setter, and a sample transporter, wherein the said sample placing/removing program setter commands the said sample transporter to place the said sample in or remove it from the said electric furnace in synchronization with a synchronization signal from the said temperature program setter and in accordance with a preset sample placing/removing program and, hence, the said sample placing and removing operations (i.e. to place a sample in the electric furnace or, conversely to remove a sample from the electric furnace) are carried out in the electric furnace which is performing a heating operation or a cooling operation in accordance with a temperature program output by the said temperature program setter.

Abstract: An apparatus and process for positioning and for simultaneously oscillating a plurality of heater probes within a plurality of heat exchanger tubes mounted in a tubesheet of a nuclear steam generator is disclosed herein. The apparatus generally comprises a frame, a plurality of probe drivers mounted onto the frame, wherein each driver includes a pneumatically operated, bladder-type gripper for selectively gripping and ungripping the push-cable of one of the heater probes, as well as an oscillating mechanism powered by a variable voltage d.c. motor. A controller connected between the d.c. motor and a power source separately controls the frequency and the amplitude of the cycle that the oscillating mechanism moves the gripper in, and further controls the alignment between the midpoint of the oscillatory cycle and a selected point along the longitudinal axis of the tube.

Abstract: The invention relates to the control of a tunnel furnace partitioned into a plurality of zones for heat treatment of, e.g., ceramic or glass workpieces. As usual the temperatures of the respective zones are controllable individually. Furthermore, in each of selected zones the temperature of that zone is varied from a first level to a second level during the stay of each workpiece in that zone and returned to the first level in a predetermined time after letting the workpiece out of that zone, and the length of stay of each workpiece in that zone is controlled such that another workpiece can be introduced into that zone while the preceding workpiece stays in the next zone and such that a number of workpieces can be heat treated in succession under the same time-temperature conditions.

Abstract: A semiconductor wafer processing furnace includes an elongated processing chamber enclosing a first zone and a second zone extending along a first reference axis, and a wafer support assembly having a support member and associated translation elements for selectively translating the support member between the zones, along the first reference axis, in response to an applied position signal. Temperature elements control the first and second zones to have selected first and second temperatures, respectively. A controller applies the position signal to the translation elements, in response to an applied control signal representative of a desired temperature of the region surrounding the support member. Responsive to the position signal, the translation elements position the support member along the reference axis such that the temperature of the region surrounding the support member substantially matches the desired temperature.

Abstract: A self-aligning fixture for use in a high temperature top-loading furnance includes multiple stacked trays to optimize load placement and capacity and to minimize fixture heat absorption. The fixture is manipulated by a handling tool to insert, position, and withdraw the fixture without obscuring the chamber and includes self-aligning blackbody radiators insertable by a handling tool into the optical path of an optical pyrometer and onto a selected tray for temperature monitoring of the load therein. A calibration blackbody radiator allows independent pyrometer verification of an inserted thermocouple.

Abstract: To enable the operation of a cement manufacturing installation to be controlled by taking into account changes in essential operating parameters as soon as they appear, the quantity of the total theoretical heat (QT) required to convert the raw material to clinker is calculated by applying correcting coefficients to the quantity of a predetermined total nominal heat (QTO) corresponding to nominal values imposed by parameters (K1, K2, . . . Kn) characteristic of the raw material, of the fuel, of the clinker and of the operation of the installation, the correcting coefficients taking into account differences between the nominal values and measured values of said parameters. The quantity of the theoretical heat (QF) to be supplied to the kiln is calculated by deducting the quantity of heat (QP) supplied to the precalcination chamber from the quantity of total theoretical heat (QT).

Abstract: Apparatus for analyzing the density of particulate material flowing from a kiln. The apparatus includes a sampling probe actuatable to divert a sample flow of material from material falling from a kiln. This sample flow on cascading through the apparatus is processed by screening to obtain a flow of sized material having a particle size within a predetermined range. The sized material is collected in a container which collects a measured volume of material. The material in this container is electronically weighed and recorded.

Abstract: To optimize the operation of an installation for the manufacture of clinker, which installation comprises a rotary tubular kiln having an open discharge end for the clinker produced in the kiln, a cooler for the clinker connected to the discharge end, a hood covering the open discharge end and the cooler, hot clinker falling from the open discharge end into the cooler in a downward direction and cooling air passing in the cooler through the hot clinker and heated by the hot clinker, and a burner mounted in the hood and extending into the open discharge end of the rotary tubular kiln, the calorific energy radiated by the falling hot clinker is measured across the atmosphere of the hood to establish a control value, the measured control value is compared with a predetermined reference value for the radiated calorific energy, and at least one operating parameter of the installation is controlled in response to the difference between the control and reference values.

Abstract: The invention concerns a temperature distribution controlling sample holding adaptor for setting up gradient heat treatment conditions in heat treatment ovens, which has a sample holder for realizing temperature distribution and setting and adjustment units associated therewith, and which enables the production of the free prescribed or desired temperature range by means of heating up, maintaining the heat and cooling down. The adaptor mechanism may be combined with any known heat treatment apparatus which was not manufactured originally for gradient heat treatment purposes and by means of processors or micro-processors which may be connected thereto for controlling adjustment, controlling and recording instruments the apparatus may be operated without supervision even for more complicated treatments.

Abstract: A method for annealing semiconductor samples, especially following ion-implantation of semiconductor samples is disclosed. A furnace on a set of rails is passed over the semiconductor sample which is supported on a stationary wire basket made of low thermal mass, fine tungsten wire. The furnace temperature may be about 5.degree. above the desired anneal temperature of the semiconductor sample such that the sample temperature rises to within a few degrees of the furnace temperature within seconds. Utilizing the moveable furnace insures uniform heating without elaborate temperature control or expensive beam generating equipment.The apparatus and process of the present invention are utilized for rapid annealing of ion-implanted indium phosphide semiconductors within 10 to 30 seconds and at temperatures of approximately 700.degree. C., thereby eliminating undesired and damaging movement of impurities within the ion-implanted InP.

Abstract: An infrared tunnel oven includes one or more oven tiers each having a horizontal cooking tunnel with entrance and exit at opposite ends, the tier(s) being supported by a base. Each tunnel is divided along its length into multiple heating zones. The roof and hearth surfaces of each tunnel are heated by electrical heating panels for direct IR emission from the roof and hearth for direct absorption by food products conveyed through the tunnel by a continuous speed-controllable conveyor. Microprocessor-controlled circuitry monitors, by a thermocouple arrangement, the temperature of the roof and hearth in each zone, controlling the electric heating panels to maintain preselected roof and hearth temperatures in each such zone. The microprocessor also controls the conveyor speed for conveying of products along the length of the tunnel within a preselected cooking time. User selection of temperatures in the different zones and cooking time, as well as other functions, is provided by keypad entry.

Abstract: An analyzer is provided for use in determining the volatile matter content of coal and coke. The analyzer automatically adjusts a position of a crucible containing a coal or coke sample relative to a furnace depending upon the temperature of the crucible. The crucible is supported and the temperature of the crucible and sample is sensed by means of a thermocouple arranged as a sling for contacting the crucible. The sensed temperature is compared with a predetermined and desired temperature. A comparison difference triggers a vertical movement of the crucible and sample, within the temperature profile of the furnace, using a servomotor until the crucible is positioned such that the sensed temperature and desired temperature correspond.

Abstract: The temperature of an open textile web is monitored by a sensing unit including an infrared pyrometer. The pyrometer is disposed at a viewing angle between about 5.degree.-25.degree. with respect to the horizontal. A housing mounts the pyrometer, a fan, a filter bag connection, and an exhaust tube. The exhaust tube extends through the wall of a textile-treating oven, with an air flow through the tube preventing pyrometer contamination.

Abstract: Fuser apparatus for fixing toner images to copy substrates by passing the substrates between two pressure engaged fuser members one of which is heated. A control for effecting movement of the members at two different speeds is provided such that the members are moved at the higher speed when a small number of copies are made and at the higher speed and then at the lower speed when a large number of copies are being made. The control includes a temperature sensor for sensing the temperature of the heated member which is used to generate a signal when the temperature of the member falls to a predetermined value, the signal being employed for changing the speed of the members from the higher speed to the lower speed.

Abstract: The growth of a solid obtained by cooling a liquid solution is observed and controlled by measuring the variation in volume of the solid-liquid system at the time of solidification. The method is applicable to the control of oriented crystallization from an initial crystal seed or epitaxial growth on a substrate having a suitable crystal orientation. The rate of crystallization can be controlled by means of a furnace provided with means for producing regulated thermal gradients, temperature-measuring means, a chamber filled with an inert liquid, an open-topped container filled with the liquid to be solidified and immersed in the inert liquid, the container being suspended from one arm of the beam of an electrobalance.

Abstract: A heat wrap control for a preheater in a paperboard corrugator adjusts the amount of wrap of a moving web about a heated drum as a linear function of web speed to effect uniform heat transfer to the web.

Abstract: An apparatus for imparting combined centro-symmetric and noncentro-symmetric rotation to semiconductor bodies comprises a liquid-cooled sun gear, a stationary liquid-cooled ring gear coaxial with and radially spaced outwardly from the sun gear, and at least one planet gear disposed between and driven in engagement with the sun and ring gears. Means are provided for supporting a semiconductor body on each of the planet gears while minimizing the conduction of heat from the semiconductor body to the planet gear. Means are also provided for guiding a semiconductor body onto the supporting means and centering the semiconductor body on the planet gear. Thermal distortion of the apparatus is minimized when heated to extreme temperatures making the apparatus ideally suited for processing the semiconductor bodies with heat as in processing by temperature gradient zone melting.

Abstract: An elongated article is heated in a heating zone positioned adjacent a conveying zone for conveying the elongated article by actuating the heating zone and controlling the temperature of the heating zone to a first temperature, then actuating the conveying zone after passage of a first period of time followed by controlling the temperature of the heating zone to a second temperature after the passage of a second period of time.

Abstract: In a heat-fixing device for fixing a member to be fixed as it is conveyed on a conveyance path provided with a heat source, there is provided suction means having a suction port adjacent to the conveyance path. The suction means is operable to draw the member to be fixed as it is conveyed.

Abstract: A method and apparatus for connecting a rotary drum drive, particularly a rotary drum drive of a rotary furnace or kiln, after disconnection for a short time, and before standstill of the oscillating drum, features detecting the movement of the oscillating drum and connecting the drive motor at a turning point of the oscillation or upon agreement with the direction of movement and the driving direction.

Abstract: A method of preventing a raw mix disposed on a pallet of a moving grate type sintering machine from being unevenly sintered in the transverse direction extending across the width of the sinter and an apparatus for carrying out the method are disclosed. The raw mix is fed on moving pallets which form the bed. The temperature distribution of waste gas soon after it has passed through the bed in a direction perpendicular to the bed is measured at the sinter exit side of the sintering machine. The temperature thus measured is utilized to adjust the amount of raw mix to be delivered from a surge hopper upon the pallet and adjust the density of the packed layer and hence correct the gas-permeability of the bed and the sintering effect upon the bed in its transverse direction. Thus, the sintering bed is prevented from being unevenly sintered by the sintering machine.

Abstract: The amount of wrap between a web and a heated drum is varied as a function of web speed by adjusting the position of idler rollers in response to a reference speed signal.