Beam Lead Formation Patents (Class 438/461)
  • Patent number: 11795051
    Abstract: A semiconductor device, which comprises: a silicon substrate having a front surface and a back surface; a metal layer located on said front surface; a through silicon via (TSV) extending through said silicon substrate from said back surface to said front surface, wherein said TSV is connected at one end to said metal layer; and a redistribution layer (RDL), wherein said RDL is embedded in said silicon substrate.
    Type: Grant
    Filed: September 25, 2020
    Date of Patent: October 24, 2023
    Assignee: X-FAB SEMICONDUCTOR FOUNDRIES GMBH
    Inventors: Thomas Weidner, Theresa Berthold
  • Patent number: 11600640
    Abstract: A display including a bending region is provided. The display includes a pixel layer including a plurality of pixel and a substrate disposed under the pixel layer and including a first area on which the pixel layer is disposed and a second area extending out of the pixel layer from the first area, at least a partial area of the second area being bendable, wherein the substrate includes: a wiring layer including at least one first wiring electrically connected with at least one pixel of the plurality of pixels and connected from the first area to the second area, and at least one second wiring disposed in the at least partial area and electrically connected with the at least one first wiring in the second area. Further, other embodiments may be possible.
    Type: Grant
    Filed: April 9, 2021
    Date of Patent: March 7, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jungchul An, Suyeon Kim, Sangseol Lee, Kwangtai Kim, Hyungsup Byeon
  • Patent number: 11069637
    Abstract: Provided is a semiconductor device, a manufacturing method, and an electronic device designed to suppress the occurrence of Cu pumping. The semiconductor device includes a Cu electrode pad serving as a bonding surface for bonding a plurality of semiconductor members together and an electrode via, the electrode via being a connection member that connects the Cu electrode pad to a lower-layer metal. The Cu electrode pad is formed in a location displaced from the electrode via.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: July 20, 2021
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Takatoshi Kameshima
  • Patent number: 9892995
    Abstract: A semiconductor device includes a semiconductor substrate. The semiconductor substrate has a first main surface and a second main surface opposite to the first main surface, and includes a first conductive layer formed on the second main surface. A through hole penetrates through the semiconductor substrate from the first main surface to the second main surface, so that the first conductive layer formed on the second main surface is exposed at a bottom portion of the through hole. A seed layer is formed on a side surface of the through hole from the bottom portion of the through hole to the first main surface; a second conductive layer is formed on the seed layer; and a third conductive layer is selectively formed on the second conductive layer.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: February 13, 2018
    Assignee: LAPIS Semiconductor Co., Ltd.
    Inventor: Akihiko Nomura
  • Patent number: 9391263
    Abstract: In one embodiment, a semiconductor device includes a glass substrate, a semiconductor substrate disposed on the glass substrate, and a magnetic sensor disposed within and/or over the semiconductor substrate.
    Type: Grant
    Filed: February 24, 2014
    Date of Patent: July 12, 2016
    Assignee: Infineon Technologies AG
    Inventors: Carsten von Koblinski, Volker Strutz, Manfred Engelhardt
  • Patent number: 9231159
    Abstract: A method of manufacturing a flip-chip nitride semiconductor light emitting element includes steps of providing a nitride semiconductor light emitting element structure; forming an insulating protective layer on the nitride semiconductor light emitting element structure; forming a resist pattern having openings above an n-side electrode connecting surface and a p-side electrode connecting surface; etching the protective layer to expose the n-side electrode connecting surface and the p-side electrode connecting surface using the resist pattern as a mask; forming a first metal layer that becomes an n-side electrode and a p-side electrode, the first metal layer being formed as a continuous layer disposed on the n-side electrode connecting surface, the p-side electrode connecting surface and the resist pattern; forming a second metal layer that becomes metal bumps by electrolytic plating using the first metal layer as an electrode for the electrolytic plating; and removing the resist pattern.
    Type: Grant
    Filed: April 26, 2012
    Date of Patent: January 5, 2016
    Assignee: NICHIA CORPORATION
    Inventors: Akinori Yoneda, Hirofumi Kawaguchi, Kouichiroh Deguchi
  • Patent number: 9001520
    Abstract: Embodiments of the present description relate to the field of fabricating microelectronic structures. The microelectronic structures may include a glass routing structure formed separately from a trace routing structure, wherein the glass routing structure is incorporated with the trace routing substrate, either in a laminated or embedded configuration. Also disclosed are embodiments of a microelectronic package including at least one microelectronic device disposed proximate to the glass routing structure of the microelectronic substrate and coupled with the microelectronic substrate by a plurality of interconnects. Further, disclosed are embodiments of a microelectronic structure including at least one microelectronic device embedded within a microelectronic encapsulant having a glass routing structure attached to the microelectronic encapsulant and a trace routing structure formed on the glass routing structure.
    Type: Grant
    Filed: September 24, 2012
    Date of Patent: April 7, 2015
    Assignee: Intel Corporation
    Inventors: Qing Ma, Johanna M. Swan, Robert Starkston, John S. Guzek, Robert L. Sankman, Aleksandar Aleksov
  • Patent number: 8969135
    Abstract: A semiconductor device includes a lead frame having a down bond area, a die attach area and a dam formed between the down bond area and the die attach area. A bottom of the dam is attached on a surface of the lead frame. The dam prevents contamination of the down bond area from die attach material, which may occur during a die attach process.
    Type: Grant
    Filed: November 11, 2013
    Date of Patent: March 3, 2015
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Peng Liu, Qingchun He, Zhaobin Qi, Liqiang Xu, Tong Zhao
  • Patent number: 8835283
    Abstract: A fabrication method for producing semiconductor chips with enhanced die strength comprises following steps: forming a semiconductor wafer with enhanced die strength by comprising the substrate, the active layer on the front side of the substrate and the backside metal layer on the backside of the substrate, wherein at least one integrated circuit forms in the active layer; forming a protection layer on a front side of the semiconductor wafer; dicing the semiconductor wafer by at least one laser dicing process and removing the laser dicing residues and removing said protection layer by at least one etching process, whereby plural semiconductor chips with enhanced die strength are produced, and wherein the backside metal layer of said semiconductor chip fully covers the backside of said semiconductor chip after dicing.
    Type: Grant
    Filed: August 20, 2013
    Date of Patent: September 16, 2014
    Assignee: WIN Semiconductors Corp.
    Inventor: Chang-Hwang Hua
  • Patent number: 8828848
    Abstract: A die having a ledge along a sidewall, and a method of forming the die, is provided. A method of packaging the die is also provided. A substrate, such as a processed wafer, is diced by forming a first notch having a first width, and then forming a second notch within the first notch such that the second notch has a second width less than the first width. The second notch extends through the substrate, thereby dicing the substrate. The difference in widths between the first width and the second width results in a ledge along the sidewalls of the dice. The dice may be placed on a substrate, e.g., an interposer, and underfill placed between the dice and the substrate. The ledge prevents or reduces the distance the underfill is drawn up between adjacent dice. A molding compound may be formed over the substrate.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: September 9, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jing-Cheng Lin, Ying-Da Wang, Li-Chung Kuo, Szu Wei Lu
  • Patent number: 8772133
    Abstract: The various aspects comprise methods and devices for processing a wafer. An aspect of this disclosure includes a wafer. The wafer comprises a plurality of die regions; a plurality of kerf regions between the plurality of die regions; and a metallization area on the plurality of die regions.
    Type: Grant
    Filed: June 11, 2012
    Date of Patent: July 8, 2014
    Assignee: Infineon Technologies AG
    Inventors: Manfred Engelhardt, Martin Zgaga, Karl Adolf Mayer, Gudrun Stranzl
  • Patent number: 8766427
    Abstract: An RF-power device includes a semiconductor substrate having a plurality of active regions arranged in an array. Each active region includes one or more RF-power transistors. The active regions are interspersed with inactive regions for reducing mutual heating of the RF-power transistors in separate active regions. The devices also includes at least one impedance matching component located in one of the inactive regions of the substrate.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: July 1, 2014
    Assignee: NXP, B.V.
    Inventor: Marnix Bernard Willemsen
  • Publication number: 20140167251
    Abstract: According to an embodiment, a semiconductor device includes a silicon substrate, an insulation film, and a plurality of chip-side connection terminals. The silicon substrate is internally provided with a first wire layer. The insulation film is stacked on a first surface of surfaces of the silicon substrate, the first surface being approximately parallel to the first wire layer. The chip-side connection terminals are electrically connected to the wire layer. Moreover, the chip-side connection terminals are exposed on a second surface side, the second surface being continuous from the first surface in an approximately perpendicular manner.
    Type: Application
    Filed: September 11, 2013
    Publication date: June 19, 2014
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Yoshihisa IWATA
  • Patent number: 8703598
    Abstract: A manufacturing method of a lead frame substrate includes: applying a photosensitive resist or a dry film to first and second surfaces of a metal plate; pattern-exposing the photosensitive resist or the dry film, and then developing the first surface and the second surface to form on the first surface a first resist pattern for forming a connection post and to form on the second surface a second resist pattern for forming a wiring pattern; etching the first surface partway down the metal plate to form the connection post; filling the first surface with a pre-molding resin to a thickness with which the etched surface is buried; removing the pre-molding resin uniformly in a thickness direction of the pre-molding resin until a bottom surface of the connection post is exposed; and etching the second surface to form a wiring pattern.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: April 22, 2014
    Assignee: Toppan Printing Co., Ltd.
    Inventors: Susumu Maniwa, Takehito Tsukamoto, Junko Toda
  • Patent number: 8673745
    Abstract: A method of cutting an object which can accurately cut the object is provided. An object to be processed 1 such as a silicon wafer is irradiated with laser light L while a light-converging point P is positioned therewithin, so as to form a modified region 7 due to multiphoton absorption within the object 1, and cause the modified region 7 to form a starting point region for cutting 8 shifted from the center line CL of the thickness of the object 1 toward the front face 3 of the object 1 along a line along which the object should be cut. Subsequently, the object 1 is pressed from the rear face 21 side thereof. This can generate a fracture from the starting point region for cutting 8 acting as a start point, thereby accurately cutting the object 1 along the line along which the object should be cut.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: March 18, 2014
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Fumitsugu Fukuyo, Kenshi Fukumitsu
  • Patent number: 8603351
    Abstract: An object to be processed is reliably cut along a line to cut. An object to be processed is irradiated with laser light while locating a converging point at the object, so as to form a modified region in the object along a line to cut. The object formed with the modified region is subjected to an etching process utilizing an etching liquid exhibiting a higher etching rate for the modified region than for an unmodified region, so as to etch the modified region. This can etch the object selectively and rapidly along the line to cut by utilizing a higher etching rate in the modified region.
    Type: Grant
    Filed: May 23, 2008
    Date of Patent: December 10, 2013
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Takeshi Sakamoto, Hideki Shimoi, Naoki Uchiyama
  • Patent number: 8603861
    Abstract: Embodiments of the present disclosure provide an apparatus including a semiconductor die having a plurality of integrated circuit devices, a pad structure electrically coupled to at least one integrated circuit device of the plurality of integrated circuit devices via an interconnect layer, an electrically insulative layer disposed on the interconnect layer, a first shielding structure disposed in the electrically insulative layer and electrically coupled to the pad structure, an under-ball metallization (UBM) structure electrically coupled to the first shielding structure, and a solder bump electrically coupled to the UBM structure, the solder bump comprising a solder bump material capable of emitting alpha particles, wherein the first shielding structure is positioned between the solder bump and the plurality of integrated circuit devices to shield the plurality of integrated circuit devices from the alpha particles. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: February 4, 2013
    Date of Patent: December 10, 2013
    Assignee: Marvell World Trade Ltd.
    Inventors: Nelson Tam, Albert Wu, Chien-Chuan Wei
  • Patent number: 8575006
    Abstract: This invention discloses a process for packaging semiconductor device with external leads. The process includes comprises Step 1: providing a lead frame comprising a plurality of lead frame units connected by a plurality of metal beams, each lead frame unit comprising a die pad and a plurality of leads located on opposite sides of the die pad; adhering a semiconductor chip onto each of the die pad, and providing a plurality of metal connections for electrically connecting each chip to its corresponding leads; Step 2 providing a plastic molding material to enclose the plurality of the lead frame units, the metal beams, the chips, and at least portions of the metal connections; Step 3 removing a portion of the plastic molding material above the metal beams to expose the metal beams and portions of the leads in connection with the metal beams; and Step 4 separating each lead frame unit, forming a plurality of individual semiconductor plastic package components with external leads.
    Type: Grant
    Filed: November 30, 2009
    Date of Patent: November 5, 2013
    Assignee: Alpha and Omega Semiconducotr Incorporated
    Inventors: Yan Xun Xue, Jun Lu
  • Patent number: 8551865
    Abstract: A method of cutting an object which can accurately cut the object is provided. An object to be processed 1 such as a silicon wafer is irradiated with laser light L while a light-converging point P is positioned therewithin, so as to form a modified region 7 due to multiphoton absorption within the object 1, and cause the modified region 7 to form a starting point region for cutting 8 shifted from the center line CL of the thickness of the object 1 toward the front face 3 of the object 1 along a line along which the object should be cut. Subsequently, the object 1 is pressed from the rear face 21 side thereof. This can generate a fracture from the starting point region for cutting 8 acting as a start point, thereby accurately cutting the object 1 along the line along which the object should be cut.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: October 8, 2013
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Fumitsugu Fukuyo, Kenshi Fukumitsu
  • Patent number: 8543324
    Abstract: Watercraft automation and aquatic data utilization for aquatic efforts are utilized for fishing and network communication. In one aspect, an anchor point is obtained and a water craft position maintenance routine is actuated to control the watercraft to maintain association with the anchor point. In another aspect, prior aquatic effort data is obtained in association with an anchor point. In yet another, aspect, current aquatic effort data is generated in association with an anchor point. In still another aspect, current aquatic effort data and prior aquatic effort data are utilized for prediction generation. In yet another aspect, current aquatic effort data and prior aquatic effort data are utilized to obtain another anchor point for a watercraft.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: September 24, 2013
    Inventors: Ted V. Grace, Ryan T. Grace
  • Patent number: 8518801
    Abstract: A substrate dividing method which can thin and divide a substrate while preventing chipping and cracking from occurring. This substrate dividing method comprises the steps of irradiating a semiconductor substrate 1 having a front face 3 formed with functional devices 19 with laser light while positioning a light-converging point within the substrate, so as to form a modified region including a molten processed region due to multiphoton absorption within the semiconductor substrate 1, and causing the modified region including the molten processed region to form a starting point region for cutting; and grinding a rear face 21 of the semiconductor substrate 1 after the step of forming the starting point region for cutting such that the semiconductor substrate 1 attains a predetermined thickness.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: August 27, 2013
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Yoshimaro Fujii, Fumitsugu Fukuyo, Kenshi Fukumitsu, Naoki Uchiyama
  • Patent number: 8518800
    Abstract: A substrate dividing method which can thin and divide a substrate while preventing chipping and cracking from occurring. This substrate dividing method comprises the steps of irradiating a semiconductor substrate 1 having a front face 3 formed with functional devices 19 with laser light while positioning a light-converging point within the substrate, so as to form a modified region including a molten processed region due to multiphoton absorption within the semiconductor substrate 1, and causing the modified region including the molten processed region to form a starting point region for cutting; and grinding a rear face 21 of the semiconductor substrate 1 after the step of forming the starting point region for cutting such that the semiconductor substrate 1 attains a predetermined thickness.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: August 27, 2013
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Yoshimaro Fujii, Fumitsugu Fukuyo, Kenshi Fukumitsu, Naoki Uchiyama
  • Patent number: 8513822
    Abstract: A thin overlay structure for use in imaging based metrology is disclosed. The thin overlay structure may include a first structure and second structure, the first and second structures designed to have a common center of symmetry, both structures being invariant to a 180 degree rotation about the common center of symmetry, wherein a mark region defining the extent of the structures is characterized by a first direction and a second direction orthogonal to the first direction, a length of the mark region along the first direction being greater than a length of the mark region along the second direction.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: August 20, 2013
    Assignee: KLA-Tencor Corporation
    Inventor: Mark Ghinovker
  • Patent number: 8513095
    Abstract: A method for manufacturing solar strips. The method includes providing a photovoltaic material including a back side region, a front side surface, and a plurality of photovoltaic strip regions separated by a plurality of scribe regions. A first portion of the photovoltaic material is supported while a second portion of the photovoltaic material including at least one of the photovoltaic strips is left unsupported. The method includes applying a predetermined force along a portion of the photovoltaic strip that remains unsupported to cause the photovoltaic strip to be separated from the supported photovoltaic material.
    Type: Grant
    Filed: August 28, 2008
    Date of Patent: August 20, 2013
    Assignee: Solaria Corporation
    Inventors: Alelie Funcell, Rick Briere, Douglas R. Battaglia, Jr.
  • Patent number: 8515660
    Abstract: Watercraft automation and aquatic data utilization for aquatic efforts are utilized for fishing and network communication. In one aspect, an anchor point is obtained and a water craft position maintenance routine is actuated to control the watercraft to maintain association with the anchor point. In another aspect, prior aquatic effort data is obtained in association with an anchor point. In yet another, aspect, current aquatic effort data is generated in association with an anchor point. In still another aspect, current aquatic effort data and prior aquatic effort data are utilized for prediction generation. In yet another aspect, current aquatic effort data and prior aquatic effort data are utilized to obtain another anchor point for a watercraft.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: August 20, 2013
    Inventors: Ted V. Grace, Ryan T. Grace
  • Patent number: 8515661
    Abstract: Watercraft automation and aquatic data utilization for aquatic efforts are utilized for fishing and network communication. In one aspect, an anchor point is obtained and a water craft position maintenance routine is actuated to control the watercraft to maintain association with the anchor point. In another aspect, prior aquatic effort data is obtained in association with an anchor point. In yet another, aspect, current aquatic effort data is generated in association with an anchor point. In still another aspect, current aquatic effort data and prior aquatic effort data are utilized for prediction generation. In yet another aspect, current aquatic effort data and prior aquatic effort data are utilized to obtain another anchor point for a watercraft.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: August 20, 2013
    Inventors: Ted V. Grace, Ryan T. Grace
  • Patent number: 8510028
    Abstract: Watercraft automation and aquatic data utilization for aquatic efforts are utilized for fishing and network communication. In one aspect, an anchor point is obtained and a water craft position maintenance routine is actuated to control the watercraft to maintain association with the anchor point. In another aspect, prior aquatic effort data is obtained in association with an anchor point. In yet another, aspect, current aquatic effort data is generated in association with an anchor point. In still another aspect, current aquatic effort data and prior aquatic effort data are utilized for prediction generation. In yet another aspect, current aquatic effort data and prior aquatic effort data are utilized to obtain another anchor point for a watercraft.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: August 13, 2013
    Inventors: Ted V. Grace, Ryan T. Grace
  • Patent number: 8502352
    Abstract: A semiconductor device is made by disposing a plurality of semiconductor die on a carrier and creating a gap between each of the semiconductor die. A first insulating material is deposited in the gap. A portion of the first insulating material is removed. A conductive layer is formed over the semiconductor die. A conductive lining is conformally formed on the remaining portion of the first insulating material to form conductive via within the gap. The conductive vias can be tapered or vertical. The conductive via is electrically connected to a contact pad on the semiconductor die. A second insulating material is deposited in the gap over the conductive lining. A portion of the conductive via may extend outside the first and second insulating materials. The semiconductor die are singulated through the gap. The semiconductor die can be stacked and interconnected through the conductive vias.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: August 6, 2013
    Assignee: STATS ChipPAC, Ltd.
    Inventors: Reza A. Pagaila, Linda Pei Ee Chua, Byung Tai Do
  • Patent number: 8501541
    Abstract: A semiconductor device is made by disposing a plurality of semiconductor die on a carrier and creating a gap between each of the semiconductor die. A first insulating material is deposited in the gap. A portion of the first insulating material is removed. A conductive layer is formed over the semiconductor die. A conductive lining is conformally formed on the remaining portion of the first insulating material to form conductive via within the gap. The conductive vias can be tapered or vertical. The conductive via is electrically connected to a contact pad on the semiconductor die. A second insulating material is deposited in the gap over the conductive lining. A portion of the conductive via may extend outside the first and second insulating materials. The semiconductor die are singulated through the gap. The semiconductor die can be stacked and interconnected through the conductive vias.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: August 6, 2013
    Assignee: STATS ChipPAC, Ltd.
    Inventors: Reza A. Pagaila, Linda Pei Ee Chua, Byung Tai Do
  • Patent number: 8461021
    Abstract: The present disclosure provides a method of fabricating a semiconductor device, the method including providing a substrate having a seal ring region and a circuit region, forming a first seal ring structure over the seal ring region, forming a second seal ring structure over the seal ring region and adjacent to the first seal ring structure, and forming a first passivation layer disposed over the first and second seal ring structures. A semiconductor device fabricated by such a method is also provided.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: June 11, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Dun-Nian Yaung, Jen-Cheng Liu, Jen-Shyan Lin, Wen-De Wang, Shu-Ting Tsai
  • Patent number: 8450187
    Abstract: Multiphoton absorption is generated, so as to form a part which is intended to be cut 9 due to a molten processed region 13 within a silicon wafer 11, and then an adhesive sheet 20 bonded to the silicon wafer 11 is expanded. This cuts the silicon wafer 11 along the part which is intended to be cut 9 with a high precision into semiconductor chips 25. Here, opposing cut sections 25a, 25a of neighboring semiconductor chips 25, 25 are separated from each other from their close contact state, whereby a die-bonding resin layer 23 is also cut along the part which is intended to be cut 9. Therefore, the silicon wafer 11 and die-bonding resin layer 23 can be cut much more efficiently than in the case where the silicon wafer 11 and die-bonding resin layer 23 are cut with a blade without cutting a base 21.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: May 28, 2013
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Fumitsugu Fukuyo, Kenshi Fukumitsu, Naoki Uchiyama, Ryuji Sugiura
  • Patent number: 8435867
    Abstract: Foreign matter formed over (or adhered to) a surface of a lead is reliably removed. A laser beam is applied to a residual resin (sealing body) which is formed in (or adhered to) a region surrounded by a sealing body (a first sealing body), a lead exposed (projected) from the sealing body, and a dam bar. The foreign matter formed over (or adhered to) the surface of the lead can be reliably removed by washing the surface of the lead after the removal of the residual resin. Thus, in a subsequent plating step, the reliability (wettability, adhesion with the lead) of a plating film to be formed over the surface of the lead can be improved.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: May 7, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Atsushi Fujishima, Haruhiko Harada
  • Patent number: 8426249
    Abstract: The present invention provides a chip part manufacturing method comprising a separating process capable of suppressing deformation of chip parts, and also provides chip parts. It comprises a step of forming a plurality of frame-like void portions (32) in one main surface of substrate (30) and insulating resin layer (20) having a spiral void portion (40) disposed in the region thereof, a step of forming metal layer (36) in frame-like void portion (32) and spiral void portion (40) and on insulating resin layer (20), a step of polishing metal layer (36) at least up to the upper surface of insulating resin layer and forming coil section (18) in spiral void portion (40), and a step of forming a metal layer for connecting chip parts to frame-like void portion (32), wherein the metal layer is melted and removed by using an etching agent to separate a plurality of chip parts connected to each other by a frame-like connection.
    Type: Grant
    Filed: June 15, 2010
    Date of Patent: April 23, 2013
    Assignee: Panasonic Corporation
    Inventors: Mitio Ohba, Nobuya Matsutani, Koji Shimoyama, Yuichi Takahashi, Shinichi Morimoto
  • Patent number: 8389380
    Abstract: A method for making a semiconductor on insulator (SeOI) type substrate that includes an integrated ground plane under the insulating layer wherein the substrate is intended to be used in making electronic components. This method includes implanting atoms or ions of a metal in at least one portion of a semiconducting receiver substrate, carrying out a heat treatment of the receiver substrate in order to obtain an integrated ground plane on or in at least one portion of that receiver substrate, transferring an active layer stemming from a semiconducting donor substrate onto the receiver substrate, with an insulating layer being inserted in between the donor and receiver substrates to obtain the substrate with an integrated ground plane.
    Type: Grant
    Filed: October 10, 2008
    Date of Patent: March 5, 2013
    Assignee: Soitec
    Inventor: Xavier Hebras
  • Patent number: 8383436
    Abstract: By performing plasma etching on the second surface of a semiconductor wafer on the first surface of which an insulating film is placed in dividing regions and on the second surface of which a mask for defining the dividing regions are placed, the second surface being located opposite from the first surface, the insulating film is exposed from an etching bottom portion by removing portions that correspond to the dividing regions. Subsequently, by continuously performing the plasma etching in the state in which the exposed insulating film is surface charged with electric charge due to ions in the plasma, corner portions put in contact with the insulating film are removed in the device-formation-regions. Consequently, individualized semiconductor chips having a high transverse rupture strength are manufactured.
    Type: Grant
    Filed: January 23, 2006
    Date of Patent: February 26, 2013
    Assignee: Panasonic Corporation
    Inventor: Kiyoshi Arita
  • Patent number: 8361883
    Abstract: A laser processing method which can highly accurately cut objects to be processed having various laminate structures is provided. An object to be processed comprising a substrate and a laminate part disposed on the front face of the substrate is irradiated with laser light L while a light-converging point P is positioned at least within the substrate, so as to form a modified region due to multiphoton absorption at least within the substrate, and cause the modified region to form a starting point region for cutting. When the object is cut along the starting point region for cutting, the object 1 can be cut with a high accuracy.
    Type: Grant
    Filed: March 12, 2003
    Date of Patent: January 29, 2013
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Fumitsugu Fukuyo, Kenshi Fukumitsu
  • Patent number: 8338917
    Abstract: The present disclosure provides a method of fabricating a semiconductor device, the method including providing a substrate having a seal ring region and a circuit region, forming a first seal ring structure over the seal ring region, forming a second seal ring structure over the seal ring region and adjacent to the first seal ring structure, and forming a first passivation layer disposed over the first and second seal ring structures. A semiconductor device fabricated by such a method is also provided.
    Type: Grant
    Filed: November 2, 2010
    Date of Patent: December 25, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Dun-Nian Yaung, Jen-Cheng Liu, Jeng-Shyan Lin, Wen-De Wang, Shu-Ting Tsai
  • Patent number: 8324714
    Abstract: A semiconductor device includes a semiconductor substrate having a main surface in which a semiconductor element region where a plurality of functional elements are formed is formed; a multilevel wiring layer disposed on the main surface of the semiconductor substrate; a first organic insulating material layer disposed on the multilevel wiring layer; a groove that penetrates the multilevel wiring layer on a scribe region that surrounds the semiconductor element region; and an organic insulating material that is spaced from the first organic insulating material layer and disposed in the groove.
    Type: Grant
    Filed: November 30, 2010
    Date of Patent: December 4, 2012
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Jun Tsukakoshi, Yoshitaka Aiba
  • Patent number: 8314013
    Abstract: A substrate dividing method which can thin and divide a substrate while preventing chipping and cracking from occurring. This substrate dividing method comprises the steps of irradiating a semiconductor substrate 1 having a front face 3 formed with functional devices 19 with laser light while positioning a light-converging point within the substrate, so as to form a modified region including a molten processed region due to multiphoton absorption within the semiconductor substrate 1, and causing the modified region including the molten processed region to form a starting point region for cutting; and grinding a rear face 21 of the semiconductor substrate 1 after the step of forming the starting point region for cutting such that the semiconductor substrate 1 attains a predetermined thickness.
    Type: Grant
    Filed: April 19, 2010
    Date of Patent: November 20, 2012
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Yoshimaro Fujii, Fumitsugu Fukuyo, Kenshi Fukumitsu, Naoki Uchiyama
  • Patent number: 8307521
    Abstract: A method for manufacturing an acceleration sensing unit includes: providing an element support substrate in which a plurality of element supporting members is arranged so as to form a plane, each of the element supporting members being coupled to the other element supporting member through a supporting part and having a fixed part and a movable part that is supported by the fixed part through a beam, the beam having a flexibility with which the movable part is displaced along an acceleration detection axis direction when an acceleration is applied to the movable part; providing an stress sensing element substrate in which a plurality of stress sensing elements is arranged so as to form a plane, each of the stress sensing elements being coupled to the other stress sensing element through an element supporting part and having a stress sensing part and fixed ends that are formed so as to have a single body with the stress sensing part at both ends of the stress sensing part; disposing the stress sensing element
    Type: Grant
    Filed: April 27, 2011
    Date of Patent: November 13, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Yoshikuni Saito
  • Patent number: 8304325
    Abstract: A substrate dividing method which can thin and divide a substrate while preventing chipping and cracking from occurring. This substrate dividing method comprises the steps of irradiating a semiconductor substrate 1 having a front face 3 formed with functional devices 19 with laser light while positioning a light-converging point within the substrate, so as to form a modified region including a molten processed region due to multiphoton absorption within the semiconductor substrate 1, and causing the modified region including the molten processed region to form a starting point region for cutting; and grinding a rear face 21 of the semiconductor substrate 1 after the step of forming the starting point region for cutting such that the semiconductor substrate 1 attains a predetermined thickness.
    Type: Grant
    Filed: November 29, 2007
    Date of Patent: November 6, 2012
    Assignee: Hamamatsu-Photonics K.K.
    Inventors: Yoshimaro Fujii, Fumitsugu Fukuyo, Kenshi Fukumitsu, Naoki Uchiyama
  • Patent number: 8298919
    Abstract: A method to prevent contamination of the principal surface side in a process of grinding the back surface side of a semiconductor wafer. At an intersection of a scribe region of a semiconductor wafer whose back surface side is to be ground, a plurality of insulating layers is laminated over the principal surface in the same manner as an insulating layer constituting a wiring layer laminated over a device region. Moreover, in the same layer as an uppermost wiring disposed at the uppermost layer among a plurality of the wiring layers formed for a device region, a metal pattern is formed. Furthermore, a second insulating layer covering the uppermost wiring is also formed over the metal pattern so as to cover the same.
    Type: Grant
    Filed: December 27, 2010
    Date of Patent: October 30, 2012
    Assignee: Renesas Electronics Corporation
    Inventors: Shoetsu Kogawa, Satoru Nakayama, Seigo Kamata, Shigemitsu Seito
  • Patent number: 8278186
    Abstract: The present invention relates to a wafer cleaning and a wafer bonding method using the same that can improve a yield of cleaning process and bonding property in bonding the cleaned wafer by cleaning the wafer using atmospheric pressure plasma and cleaning solution. The wafer cleaning method includes the steps of providing a process chamber with a wafer whose bonding surface faces upward, cleaning and surface-treating the bonding surface of the wafer by supplying atmospheric pressure plasma and a cleaning solution to the bonding surface of the wafer, and withdrawing out the wafer from the process chamber.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: October 2, 2012
    Assignee: Ltrin Co., Ltd.
    Inventors: Yong Won Cha, Dong Chul Kim
  • Patent number: 8268704
    Abstract: A substrate dividing method which can thin and divide a substrate while preventing chipping and cracking from occurring. This substrate dividing method comprises the steps of irradiating a semiconductor substrate 1 having a front face 3 formed with functional devices 19 with laser light while positioning a light-converging point within the substrate, so as to form a modified region including a molten processed region due to multiphoton absorption within the semiconductor substrate 1, and causing the modified region including the molten processed region to form a starting point region for cutting; and grinding a rear face 21 of the semiconductor substrate 1 after the step of forming the starting point region for cutting such that the semiconductor substrate 1 attains a predetermined thickness.
    Type: Grant
    Filed: March 6, 2003
    Date of Patent: September 18, 2012
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Yoshimaro Fujii, Fumitsugu Fukuyo, Kenshi Fukumitsu, Naoki Uchiyama
  • Patent number: 8263479
    Abstract: Multiphoton absorption is generated, so as to form a part which is intended to be cut 9 due to a molten processed region 13 within a silicon wafer 11, and then an adhesive sheet 20 bonded to the silicon wafer 11 is expanded. This cuts the silicon wafer 11 along the part which is intended to be cut 9 with a high precision into semiconductor chips 25. Here, opposing cut sections 25a, 25a of neighboring semiconductor chips 25, 25 are separated from each other from their close contact state, whereby a die-bonding resin layer 23 is also cut along the part which is intended to be cut 9. Therefore, the silicon wafer 11 and die-bonding resin layer 23 can be cut much more efficiently than in the case where the silicon wafer 11 and die-bonding resin layer 23 are cut with a blade without cutting a base 21.
    Type: Grant
    Filed: September 11, 2003
    Date of Patent: September 11, 2012
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Fumitsugu Fukuyo, Kenshi Fukumitsu, Naoki Uchiyama, Ryuji Sugiura
  • Patent number: 8258014
    Abstract: According to an embodiment of a method of manufacturing a power transistor module, the method includes mechanically fastening a first terminal, a second terminal and at least two different DC bias terminals to an electrically conductive flange; connecting the flange to a source of a power transistor device; electrically connecting the first terminal to a gate of the power transistor device; electrically connecting the second terminal to a drain of the power transistor device; mechanically fastening a bus bar to the flange which extends between and connects the DC bias terminals; and electrically connecting the bus bar to the drain via one or more RF grounded connections.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: September 4, 2012
    Assignee: Infineon Technologies AG
    Inventors: Cynthia Blair, Donald Fowlkes
  • Patent number: 8247773
    Abstract: An identification mark constituted of irregularities is formed on the surface of a wafer, which is sealed with a resin layer and a dicing tape may be adhered to the backside. Multiple infrared units irradiate infrared rays towards the surface of the wafer from the backside thereof, wherein they transmit through the wafer and are then reflected at the interface between the resin layer and the surface of the wafer, thus producing reflected rays. An image pickup device picks up an image of the interface including the identification mark based on reflected rays. Optical axes of the infrared units extend to cross the surface of the wafer in different directions; hence, the image pickup device receives only a part of reflected rays, which are reflected at the interface in a prescribed direction. A polarizer can be arranged in proximity to the infrared unit or the image pickup device.
    Type: Grant
    Filed: June 24, 2008
    Date of Patent: August 21, 2012
    Assignee: Yamaha Corporation
    Inventors: Masaharu Sasaki, Masayoshi Omura
  • Patent number: 8236613
    Abstract: A method for wafer level chip scale package comprises providing a wafer with semiconductor chips formed thereon, forming a groove alongside each chip, providing a wafer size clip array with a plurality of clip contact areas each extending to a down set connecting bar, connecting the plurality of clip contact areas to a plurality of the electrodes disposed on a top surface of the chips with down set connecting bars disposed inside the grooves, encapsulating top of wafer in molding compound, thinning the bottom portion of the wafer and dicing the thin wafer into single chip packages. The chip has source and gate electrodes on a top surface connected to a first and second clip contact areas extending to a first a second down set connecting bars respectively, with the bottom surfaces of the down set connecting bars substantially coplanar to a drain electrode located at the chip bottom surface.
    Type: Grant
    Filed: May 24, 2010
    Date of Patent: August 7, 2012
    Assignee: Alpha & Omega Semiconductor Inc.
    Inventor: Yuping Gong
  • Patent number: 8193072
    Abstract: Formulations and processes for forming wafer coat layers are disclosed. In one embodiment, an organic surface protectant is incorporated into a wafer coat formulation deposited onto a semiconductor wafer prior to the laser scribe operation. Upon removal of the wafer coat layer, the organic surface protectant remains on the bumps and thereby prevents oxidation of the bumps between die prep and chip and attach. In an alternative embodiment, an ultraviolet light absorber is added to the wafer coat formulation to enhance the wafer coat layer's energy absorption and thereby improve the laser's ability to ablate the wafer coat layer. In an alternative embodiment, a conformal wafer coat layer is deposited on the wafer and die bumps, thereby reducing wafer coat layer thickness variations that can impact the laser scribing ability.
    Type: Grant
    Filed: November 2, 2010
    Date of Patent: June 5, 2012
    Assignee: Intel Corporation
    Inventors: Eric J. Li, Daoqiang Lu, Christopher L. Rumer, Paul A. Koning, Darcy E. Fleming, Gudbjorg H. Oskarsdottir, Tiffany Byrne
  • Patent number: 8173522
    Abstract: A process and an apparatus are described for the treatment of wafers, in particular for the thinning of wafers. A wafer with a carrier layer and an interlayer arranged between the carrier layer and the wafer is also described, in which the interlayer is a plasmapolymeric layer that adheres to the wafer and adheres more strongly to the carrier layer than to the wafer.
    Type: Grant
    Filed: January 26, 2009
    Date of Patent: May 8, 2012
    Assignee: Thin Materials AG
    Inventors: Andreas Jakob, Klaus-D Vissing, Volkmar Stenzel