Abstract: A polishing slurry prepared by dispersing in a dispersion medium, abrasive grains comprised of a material having a solubility in the dispersion medium at 25° C., of 0.001 g/100 g or higher is used to effectively remove any abrasive grains standing adherent to the surfaces of objects to be polished or the interiors of polishing apparatus after polishing.

Abstract: Methods and apparatus for chemical mechanical planarization of an article such as a semiconductor wafer use polishing slurries including a carbon dioxide solvent or a carbon dioxide-philic composition. A carbon dioxide cleaning solvent step and apparatus may also be employed.

Abstract: The present invention relates to a coated cutting tool insert useful for grooving or severing steel components such as steel or stainless steel tubes and bars. The insert is characterized by WC—Co-based cemented carbide substrate having a highly W-alloyed Co-binder phase and a relatively thin coating including an inner layer of TiCxNyOz with columnar grains followed by a layer of fine grained &kgr;—Al2O3 and a top layer of TiN.

Abstract: A coated article for tribological applications, for example a cutting tool for machining titanium and its alloys. The densified substrate of the article is a cemented carbide, nitride, or carbonitride, or ceramic and may include cubic carbides. A composite coating is codeposited on the substrate to provide a wear surface including no cubic carbides to a depth at least sufficient to avoid exposure of cubic carbides to a workpiece during machining. The coating is a pore-free, dense, hard phase/cobalt composite applied by CVD or PVD, the hard phase including tungsten carbide, nitride, or carbonitride. The cutting tool thus possesses good shape retention at high machining speeds and provides wear-resistance and chemical inertness.

Abstract: There is provided a coated cutting insert particularly useful for finishing operations in milling of grey cast iron. The insert has a fine-grained WC-Co cemented carbide body and a coating of multiple layers of TiC.sub.x N.sub.y deposited at conditions aiming to minimize the decarburization of the cutting edge without any negative effects on the substrate. There is also disclosed a method of applying a TiC.sub.x N.sub.y layer by CVD technique on a cemented carbide cutting insert without eta phase formation and without etching of the binder phase.

Abstract: In order to improve the wear resistancy--including adherence behaviour, ductility and shearing strength--at a diamond coated multiphase body, an element enrichment is applied in controlled manner in the interphase of base body and diamond layer.