Abstract: In an inertial sensor, a first movable body configured to swing around a first rotation axisrotation axis along a first direction has an opening; the opening includes a second movable body configured to swing around a second rotation axisrotation axis along a second direction, a second support beam supporting the second movable body as the second rotation axisrotation axis, a third movable body configured to swing around a third rotation axisrotation axis along the second direction, and a third support beam supporting the third movable body as the third rotation axisrotation axis; and a protrusion is provided at a surface facing the second movable body and the third movable body, or at the second movable body and the third movable body, the protrusion protruding toward the second movable body and the third movable body or the surface.

Abstract: Provided is a gravity gradient measurement apparatus and measuring method, wherein a turntable rotates horizontally around an earth-vertical axis, a vacuum layer is arranged on the turntable defining a first chamber, a first three-axis accelerometer and a second three-axis accelerometer are located in the first chamber, the first three-axis accelerometer and the second three-axis accelerometer are arranged symmetrically on an x axis with respect to an origin of coordinates. Both the first three-axis accelerometer and the second three-axis accelerometer have a distance of R from the origin of coordinates. The first three-axis accelerometer and the second three-axis accelerometer are arranged symmetrically on an z axis with respect to the origin of coordinates, and the first three-axis accelerometer and the second three-axis accelerometer are spaced at a distance of h on the z axis. The measurement module uses measurements of the accelerometers to determine gravity gradients on the coordinate axes.

Abstract: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.

Abstract: A MEMS microphone includes a base structure and a piezoelectric resonator body having a first end and a second end. The first end is fixedly supported by the base structure and the second end is free such that the piezoelectric resonator is cantilevered from the base structure. The MEMS microphone further includes a first electrode operably connected to the piezoelectric resonator body and a second electrode operably connected to the piezoelectric resonator body. A controller includes at least one circuit operably connected to the first and second electrodes and configured to drive the piezoelectric resonator body at a shear resonance frequency of the piezoelectric resonator body and to detect a difference in the shear resonance frequency from a baseline resonance frequency resulting from a sound pressure.

Abstract: A multiple coil spring MEMS resonator includes a center anchor and a resonator body including two or more coil springs extending in a spiral pattern from the center anchor to an outer closed ring. Each pair of coil springs originates from opposing points on the center anchor and extends in the spiral pattern to opposing points on the outer ring. The number of coil springs, the length and the width of the coil springs and the weight of the outer ring are selected to realize a desired resonant frequency.

Abstract: Various embodiments of the invention allow to cancel demodulation phase error. In certain embodiments, cancellation is accomplished by determining the phase delay of a drive front end signal that is in phase with an undesired signal and digitally adjusting the demodulation signal with a calibrated signal. The phase delay may be adaptively compensated during regular circuit operation, only at predetermined times, or during a factory calibration.

Abstract: A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.

Abstract: A microelectromechanical gyroscope includes a body and a driving mass, which is movable with respect to the body according to a driving axis and is capacitively coupled to the body. The gyroscope moreover includes a driving device, which forms a microelectromechanical control loop with the body and the driving mass and is configured for supplying to the driving mass driving signals having a common-mode component and respective differential components so as to maintaining the driving mass in oscillation according to the driving axis. The driving device is provided with an actuation stage configured for inverting in a controlled way the sign of the differential components of the driving signals.

Abstract: An apparatus and/or method that corrects for tuning errors in vibrating structure gyroscopes that are configured to be driven along a plurality of axes without the need for dedicated torque elements. The correction is accomplished by introducing a phase offset in the drive signal of one or more of the drive elements relative to other drive elements to minimize or reduce the quadrature signal. The tuning may be accomplished as a one time “set and forget” adjustment, as a manual adjustment performed at the discretion of the user, or as a closed loop active correction system. The technique improves the tuning of the resonator assembly, rather than merely compensating for the mistuning. Accordingly, for various embodiments of the invention, the destructive interference between the plurality of drive axes is reduced. Conservation of vibrational energy present in the resonator is thus enhanced, with less vibrational energy transferred to the support structure.

Abstract: A personal mobile device housing contains a display screen, a wireless telephony communications transceiver, and a battery charger interface. A temperature sensor and a gyro sensor whose zero turn rate output contains an offset are also included. A lookup table has gyro zero turn rate offset correction values associated with different temperature values. A programmed processor accesses the lookup table to correct the output of the gyro sensor for zero turn rate offset. It is automatically determined, during in-the-field use, when the device is in a motionless state, and the output of the temperature and gyro sensors are read. The read gyro output is written to the lookup table as part of a pair of associated temperature and zero turn rate offset correction values. Other embodiments are also described and claimed.

Abstract: Systems and methods in accordance with embodiments of the invention implement multi-directional environmental sensors. In one embodiment, a multi-directional environmental sensor includes: an inner conductive element that is substantially symmetrical about three orthogonal planes; an outer conductive element that is substantially symmetrical about three orthogonal planes; and a device that measures the electrical characteristics of the multi-directional environmental sensor, the device having a first terminal and a second terminal; where the inner conductive element is substantially enclosed within the outer conductive element; where the inner conductive element is electrically coupled to the first terminal of the device; and where the outer conductive element is electrically coupled to the second terminal of the device.

Abstract: An electronic device includes a capacitive component with variable capacitance coupled to a control stage that controls the capacitance based on a reference signal, with a reference frequency, and an excitation signal, that is a multiple of the reference frequency. The capacitive component includes a variable capacitive network having a plurality of switched capacitors, each being switchable between a first configuration, where it is connected between connection terminals of the capacitive component, and a second configuration, where it is connected at most to one of the connection terminals. The control stage includes a logic module, coupled to the variable capacitive network for switching periodically each capacitor between the first configuration and the second configuration. A sign circuit, coupled to the capacitive component supplies a control signal having edges concordant with the excitation signal in one half-period of each cycle of the reference signal and discordant edges in the other half-period.

Abstract: An innovative configuration of Miniaturized Smart Self-calibration EPD for mortar applications, as the azimuth/heading and elevation measurement device. This innovative EPD configuration uses only two FOGs or DTG and accelerometers and it is self-contained. This leads to a new EPD implementation that produces a small and light device with lower cost and adequate accuracy for the small dismounted mortar applications.

Abstract: The invention relates to a method of soldering a conducting body to a substrate using an alloy chosen from either a tin-silver alloy or a tin-silver-copper alloy. The method comprises metallization of the substrate by depositing a tie layer on the substrate, depositing a diffusion barrier layer, or depositing a wetting layer comprising gold. The tie layer having any one of the chemical components chosen from chromium, titanium or titanium alloy. The diffusion barrier layer comprising a material chosen from platinum or palladium.

Abstract: A method of determining at least one rotation parameter of a wind turbine rotor rotating with a rotation speed and a phase is provided. The method comprises the steps of: measuring an effective centrifugal force acting in a first pre-determined direction, which is defined in a co-ordinate system rotating synchronously with the rotor, on at least one reference object located in or at the rotor, establishing a first angular frequency representing the rotation speed of the rotor on the basis of variations in the measured effective centrifugal force due to gravitational force, establishing a second angular frequency representing the rotation speed of the rotor by use of at least one yaw rate gyro, and establishing the value of the rotation speed as the rotational parameter by correcting the second angular frequency by comparing it to the first angular frequency.

Abstract: The present invention relates to an inertial measurement device secured to a structure of a vehicle for which it is desired to measure speeds and/or accelerations, the device comprising at least one piece of moving equipment in rotation about a stationary axis of rotation Y relative to the structure, said moving equipment including at least two measurement means having respective sensitivity axes X? and Z? that are mutually orthogonal and that lie in a plane perpendicular to the stationary axis of rotation Y, a motor for driving the moving equipment in rotation, means for determining the angular position of the moving equipment, means for responding to the angular position of the moving equipment to determine the projection of the measurements taken in the rotary frame of reference axes X? and Z? by the said at least two measurement means onto a vehicle frame of reference X and Z.

Abstract: An arrangement for measuring a rate of rotation using a vibration sensor, being excited and measured by means of capacitive drive elements, and the rotation of said sensor in an axis, excited by a rotation in another axis by means of the Coriolis force, being measured by means of capacitive measuring elements. Excitation voltages can be supplied to the fixed electrodes of the drive elements, the frequency of said voltages corresponding to the resonance frequency or the subharmonic of the resonance frequency of the vibration sensor. An alternating voltage having a first measuring frequency which is higher than the excitation frequency can be supplied to capacitive elements for measuring the excited vibration.

Abstract: A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.

Abstract: A method and system for Self-calibrated Azimuth and Attitude Accuracy Enhancing are disclosed, wherein SAAAEMS approach is based on fully auto-calibration self-contained INS principles, not depending on magnetometers for azimuth/heading determination, and thus the system outputs and performance are not affected by the environmental magnetic fields. In order to reduce the system size and cost, this new innovative methods and algorithms are used for SAAAEMS system configuration and integration. Compared to a conventional INS for gyrocompassing, AGNC's approach uses a smaller number of high accuracy sensors: SAAAEMS uses only one 2-axis high accuracy gyro (for example, one DTG) instead of 3-axis; the third axis gyro is a MEMS gyro. It uses only 2 high accuracy accelerometers instead of 3, since the two accelerometers are used only for gyrocompassing not for navigation. These two changes to the conventional INS system configuration remarkably reduce the whole system size and cost.

Abstract: The invention is to provide a ring body and supporting structure of a vibratile gyroscope. The ring body is a thin sheet ring body having a height. The supporting structure is provided for supporting the ring body. The supporting structure is located on two opposing edges of the ring body. The supporting structures provide axial and radial supporting forces to restrain the ring body, providing better sensitivity and capability to resist environmental vibration and noise. Additionally, a reinforcing structure surrounding the ring body is arranged at an interior surface of the ring body to raise the rigidity of the ring body and maintain an elliptical resonance mode. If the reinforcing structure si arranged as high as the ring body, then it is possible to arrange electrodes at both inner and outer sides of the ring body to raise the effective area of driving and/or sensing electrodes.

Abstract: A microelectromechanical gyroscope having a microstructure with a first mass, which can oscillate according to a first axis, and a second mass constrained to the first mass so as to oscillate according to a second axis in response to a rotation of the microstructure, and a driving device coupled to the microstructure to maintain the first mass in oscillation at a resonance frequency, the driving device provided with a low-pass filter having a passband such that the resonance frequency is in the passband and a disturbance frequency associated with disturbance signals due to coupling between the first mass and the second mass is not in the passband.

Abstract: Microelectromechanical system (MEMS) devices and methods with controlled die bonding areas. An example device includes a MEMS die having a glass layer and a protective package. The glass layer includes a side facing the protective package with at least one mesa protruding from a recessed portion of the glass layer. The at least one mesa is attached to the protective package. An example method includes creating at least one mesa on a glass layer of a MEMS die and attaching the at least one mesa to a protective package.

Abstract: A micro-electrical mechanical oscillator has a resonant frequency of oscillation that is varied by application of heat. The resonant frequency is varied at a frequency different from the resonant frequency of the oscillator to amplify oscillations. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated by a laser to provide a time varying shift of the resonant frequency (or equivalently the stiffness) of the disc. Feedback from movement of the disc is used to modulate the intensity of the laser, and thus the stiffness of the disc to provide parametric amplification of sensed vibrations, using heating as a pump. Various other shapes of micro-electrical mechanical oscillators are used in other embodiment, including an array of such oscillators on a substrate, each having different resonant frequencies.

Abstract: A method and apparatus for calibrating a gyro-sensor, by which a gyro-sensor can be calibrated using data which is obtained by measuring an angular velocity and a gyro output value of a moving body equipped with the gyro-sensor. The method includes measuring an angular velocity of a moving body and an average output value of the gyro-sensor when the moving body, equipped with the gyro-sensor, rotates, obtaining data about a characteristic equation of the gyro sensor using the measured angular velocity and the average output value and storing the data, and calibrating the gyro-sensor using the stored data about the characteristic equation.

Abstract: A navigation device is disclosed including a processor arranged to receive position information from a positioning device. The processor is also arranged to receive movement information from a movement detector and determine whether said device is standing still using said movement information. In at least one embodiment, if a standstill of the device is determined, the processor calculates an average position over time using information on consecutive positions received from the positioning system during a time period in which the device is standing still. The average position is used for navigation purposes, such as giving instructions to the user. By averaging during a standstill, a more accurate position can be determined which can be used to give better instructions.

Abstract: Piezoelectric accelerometers and gyroscopes having cantilevered transducers are described.

Abstract: A micromechanical rotation-rate sensor includes a substrate, an anchoring device provided on the substrate, as well as a first spiral spring device and a second spiral spring device, the two spiral spring devices being provided next to one another in mirror symmetry along their greatest extension, and the two spiral spring devices together form one spiral spring apparatus. The sensor further includes a centrifugal mass connected to the anchoring device via the first spiral spring device connected to the centrifugal mass so that the centrifugal mass is elastically deflectable from its neutral position, about a rotational axis situated perpendicularly to a substrate surface, so that the centrifugal mass is capable of rotary oscillation. In addition, the first spiral spring device includes a bend at its anchoring region with the anchoring device.

Abstract: A process for forming a microelectromechanical system (MEMS) device by a deep reactive ion etching (DRIE) process during which a substrate overlying a cavity is etched to form trenches that breach the cavity to delineate suspended structures. A first general feature of the process is to define suspended structures with a DRIE process, such that the dimensions desired for the suspended structures are obtained. A second general feature is the proper location of specialized features, such as stiction bumps, vulnerable to erosion caused by the DRIE process. Yet another general feature is to control the environment surrounding suspended structures delineated by DRIE in order to obtain their desired dimensions. A significant problem identified and solved by the invention is the propensity for the DRIE process to etch certain suspended features at different rates.

Abstract: System and method for measuring force-dependent gyroscopic sensitivity. A force-effect model of the effects of acceleration on the output of a gyro triad is determined. Rotation sequences are then devised to permit excitation and observation of force-effect model parameters in order to provide calibration information for these parameters. A state diagram containing the gyro triad force-effect model parameters is derived from the force-effect model, where moving from one position in the state diagram to another position indicates the gyro triad error which would occur in rotating the gyro triad according to a corresponding motion. Searching for all possible closed loop paths achievable through the state diagram, by a multiple-axes rate table with a specified number of rotations, to separate gyro triad error calibration from the accelerometer calibration.

Abstract: A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is subject to substantially zero stress when the gyroscope is rotationally stationary. Actuator conductors are similarly applied to a resonating element at a location bounded by areas of the resonating element subject to substantially uniform levels of stress when the gyroscope is rotationally stationary. A method for improving the voltage response of a piezoelectric resonating element is also disclosed.

Abstract: An apparatus for determining an instrument boresight azimuth heading. A typical apparatus comprises a gyro having a first input and a first output and a rocking angle generator having a second output, wherein the second output is communicatively coupled to the first input of the gyro, producing a demodulated signal at the first output. A signal multiplier is communicatively coupled to the second output and the demodulated signal for multiplying the second output and the demodulated signal and producing a multiplied signal and a filter communicatively coupled to the multiplied signal for producing a filtered output.

Abstract: A micromechanical yaw rate sensor having: a substrate having an anchoring device provided on the substrate; and an annular flywheel that is connected, via a flexural spring system, with the anchoring device in such a way that the area of connection with the anchoring device is located essentially in the center of the ring, so that the annular flywheel is able to be displaced, elastically from its rest position, about an axis of rotation situated perpendicular to the substrate surface, and about at least one axis of rotation situated parallel to the substrate surface. The anchoring device has two bases that are situated opposite one another and are connected fixedly with the substrate, connected with one another via a bridge. A V-shaped flexural spring of the flexural spring system is attached to each of the opposite sides of the bridge in such a way that the apex is situated on the bridge and the limbs are spread towards the flywheel with an opening angle.

Abstract: Resonator which can be produced by micromachining and has a mass part (DF1, DF2, V1, V2) which is fixed by means of a resilient suspension (FA) to an anchoring point (AN) in such a way that it can perform rotary oscillations in its plane, in which, in the rest position of the mass part, the resilient suspension is aligned only along an axis (SAX) of symmetry with regard to which the mass part is of mirror-symmetrical design.

Abstract: A micromachined single-crystalline silicon micro-gyroscope comprising oxide/polysilicon/metal triple layer for electrical isolation is disclosed. The isolation method includes forming the triple layer composed of an insulation layer formed over an exposed surface of the silicon microstructure, a conductive layer formed over the entire insulation layer, and a metal layer formed over a top portion of the microstructure; and partially etching the conductive layer to form electrical isolation between parts of the microstructure. The method does not require a separate photolithography process for isolation, and can be effectively applied to microstructures having high aspect ratios and narrow trenches. Also disclosed are micro-gyroscope comprising a new type of spring which has a node with a hole in the middle of spring to reduce the release etch time for spring.

Abstract: A motion sensor (10) includes a micromachined sensing structure and a number of capacitive electrodes (20) disposed about a periphery thereof. The sensing structure includes a ring (14) supported above a substrate (12) so as to have an axis of rotation normal to the substrate (12), and a number of springs (16) attached to a post (18) positioned at the center of the ring (14). Certain diametrically opposed ones of the capacitive electrodes (20) are configured as drive electrodes (20a), and other diametrically opposed ones of the capacitive electrodes (20), positioned 90 degrees relative to the corresponding drive electrodes (20a) are configured as sense electrodes (20b). Signals produced at the opposed sense electrodes (20b) are conditioned and coupled to a common input of an amplifier circuit (64,70).

Abstract: A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is subject to substantially zero stress when the gyroscope is rotationally stationary. Actuator conductors are similarly applied to a resonating element at a location bounded by areas of the resonating element subject to substantially uniform levels of stress when the gyroscope is rotationally stationary. A method for improving the voltage response of a piezoelectric resonating element is also disclosed.

Abstract: A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is subject to substantially zero stress when the gyroscope is rotationally stationary. Actuator conductors are similarly applied to a resonating element at a location bounded by areas of the resonating element subject to substantially uniform levels of stress when the gyroscope is rotationally stationary. A method for improving the voltage response of a piezoelectric resonating element is also disclosed.