Magnetic Force Microscopy [mfm] Or Apparatus Therefor, E.g., Mfm Probes (epo) Patents (Class 850/46)
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Patent number: 11482401Abstract: The present disclosure provides an ion implantation method and an ion implanter for realizing the ion implantation method. The above-mentioned ion implantation method comprises: providing a spot-shaped ion beam current implanted into the wafer; controlling the wafer to move back and forth in a first direction; controlling the spot-shaped ion beam current to scan back and forth in a second direction perpendicular to the first direction; and adjusting the scanning width of the spot-shaped ion beam current in the second direction according to the width of the portion of the wafer currently scanned by the spot-shaped ion beam current in the second direction.Type: GrantFiled: May 13, 2020Date of Patent: October 25, 2022Assignee: Shanghai Huali Integrated Circuit Mfg. Co. LtdInventors: Chaorong Lai, Leihong Pei
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Patent number: 9009861Abstract: Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.Type: GrantFiled: June 24, 2011Date of Patent: April 14, 2015Assignee: Korea Research Institute of Standards and ScienceInventors: Byong Chon Park, Ju Youb Lee, Woon Song, Jin Ho Choi, Sang Jung Ahn, Joon Lyou, Won Young Song, Jae Wan Hong, Seung Hun Baek
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Patent number: 8975893Abstract: In a method for optimization of a flow coding with switching of an additional bipolar dephasing gradient pair, used in a magnetic resonance (MR) phase contrast angiography, the strength of the flow coding is selected depending on the flow velocity in the vessels that should be depicted. MR signals of an examination region are acquired with continuously running overview measurements, with an operator-selected flow coding strength. After the selected flow coding strength is adopted automatically for the next measurement of the continuously running overview measurements, and two partial measurements with different flow codings are implemented for each selected strength and a phase difference image from the two partial measurements is calculated and depicted in real time, and the selected flow coding strength is automatically adopted for the MR phase contrast angiography.Type: GrantFiled: April 20, 2012Date of Patent: March 10, 2015Assignee: Siemens AktiengesellschaftInventors: Andreas Greiser, Peter Speier
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Patent number: 8726410Abstract: An atomic force microscope (AFM) system capable of imaging multiple physical properties of a sample material at the nanoscale level. The system provides an apparatus and method for imaging physical properties using an electromagnetic coil placed under the sample. Excitation of the coil creates currents in the sample, which may be used to image a topography of the sample, a physical property of the sample, or both.Type: GrantFiled: July 29, 2011Date of Patent: May 13, 2014Assignee: The United States of America as represented by the Secretary of the Air ForceInventors: Shamachary Sathish, Vijayaraghava Nalladega, Kumar V Jata, Mark P Blodgett
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Patent number: 8713710Abstract: To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.Type: GrantFiled: October 12, 2012Date of Patent: April 29, 2014Assignee: Hitachi High-Technologies CorporationInventors: Kaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Tsuneo Nakagomi, Shinji Honma, Teruaki Tokutomi, Toshihiko Nakata, Takehiro Tatizaki
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Publication number: 20140090117Abstract: The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan.Type: ApplicationFiled: August 15, 2013Publication date: March 27, 2014Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Teruaki TOKUTOMI, Tsuneo NAKAGOMI, Akira TOBITA, Norimitsu MATSUSITA
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Patent number: 8631510Abstract: An object of the present invention is to provide a magnetic sensor simply configured so as to magnetically measure not only conductive materials but also nonconductive materials over a wide temperature range and which offers high performance and high reliability, as well as a scanning microscope that uses the magnetic sensor. A scanning microscope according to the present invention includes a magnetic sensor with a magnetic sensing element provided at a free end of a cantilever-like flexible member and a strain gauge installed on the flexible member, driving means for driving the flexible member or a measurement sample, and control means for controlling driving provided by the driving means based on an output signal from the strain gauge.Type: GrantFiled: December 8, 2011Date of Patent: January 14, 2014Assignee: Empire Technology Development LLCInventor: Adarsh Sandhu
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Patent number: 8621658Abstract: A magnetic-field-observation device and method for measuring magnetic force near a magnetic material specimen's surface with high resolution and detecting the polarity of the magnetic pole of specimen's surface.Type: GrantFiled: September 5, 2011Date of Patent: December 31, 2013Assignee: Akita UniversityInventors: Hitoshi Saito, Satoru Yoshimura
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Patent number: 8490211Abstract: Methods for referencing related magnetic head microscopy scans to reduce processing requirements for high resolution imaging are provided. One such method includes performing a low resolution pole tip recession scan of a pole tip area of a magnetic head, performing a high resolution writer pole recession scan of a writer pole area of the magnetic head, preparing a portion of the low resolution scan for alignment, performing a rough leveling of the high resolution scan, aligning the portion of the low resolution scan and the high resolution scan using pattern recognition and a database of features, subtracting the high resolution scan from the aligned portion of the low resolution scan, and leveling the high resolution scan based on a result of the subtraction.Type: GrantFiled: June 28, 2012Date of Patent: July 16, 2013Assignee: Western Digital Technologies, Inc.Inventor: Sean P. Leary
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Publication number: 20130174302Abstract: A magnetic-field-observation device and method for measuring magnetic force near a magnetic material specimen's surface with high resolution and detecting the polarity of the magnetic pole of specimen's surface.Type: ApplicationFiled: September 5, 2011Publication date: July 4, 2013Applicant: AKITA UNIVERSITYInventors: Hitoshi Saito, Satoru Yoshimura
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Publication number: 20120207002Abstract: A magneto-optical device (MOD) with optically induced magnetization for use in magnetic field sensors as a magnetic element pinning a magnetization in a preferred direction of a ferromagnetic layer as well as a magnetic memory cell for magneto-optical recording. The MOD comprises the Mg—Mg—Co ferrite film deposited on a magnesium oxide (MgO) substrate. The ferrite film is illuminated at room temperature with a circularly polarized light (CPL) in a static magnetic H-field (about of 3 kOe) normal to the illuminated ferrite film surface. At certain (“writing”) combinations of H, sigma (CPL helicity), the long-lived optically induced magnetization with a unidirectional anisotropy, stable to a conventional demagnetization occurs. For readout of information, conventional magnetoresistive sensors and MFM can be used. To erase information, the ferrite film should be illuminated with two field-light combinations, other than “writing”, or annealed at temperature higher than 530 degrees C.Type: ApplicationFiled: March 28, 2012Publication date: August 16, 2012Inventors: Esfir Z. Katsnelson, Mark M. Chervinsky
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Patent number: 8185968Abstract: A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.Type: GrantFiled: February 10, 2011Date of Patent: May 22, 2012Assignee: Hitachi High-Technologies CorporationInventors: Tsuneo Nakagomi, Norimitsu Matsusita
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Publication number: 20120079636Abstract: An object of the present invention is to provide a magnetic sensor simply configured so as to magnetically measure not only conductive materials but also nonconductive materials over a wide temperature range and which offers high performance and high reliability, as well as a scanning microscope that uses the magnetic sensor. A scanning microscope according to the present invention includes a magnetic sensor with a magnetic sensing element provided at a free end of a cantilever-like flexible member and a strain gauge installed on the flexible member, driving means for driving the flexible member or a measurement sample, and control means for controlling driving provided by the driving means based on an output signal from the strain gauge.Type: ApplicationFiled: December 8, 2011Publication date: March 29, 2012Inventor: Adarsh Sandhu
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Patent number: 8104093Abstract: A magnetic sensor simply is configured so as to magnetically measure not only conductive materials but also nonconductive materials over a wide temperature range and which offers high performance and high reliability, as well as a scanning microscope that uses the magnetic sensor. A scanning microscope according to the present invention includes a magnetic sensor with a magnetic sensing element provided at a free end of a cantilever-like flexible member and a strain gauge installed on the flexible member, driving means for driving the flexible member or a measurement sample, and control means for controlling driving provided by the driving means based on an output signal from the strain gauge.Type: GrantFiled: March 28, 2008Date of Patent: January 24, 2012Assignee: Empire Technology Development LLCInventor: Adarsh Sandhu
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Patent number: 8077938Abstract: A computer implemented method for diffusion tensor visualization includes receiving diffusion weighted image slice data, segmenting a diffusion tensor field from the diffusion weighted image slice data to determine a three-dimensional triangular mesh, and determining a fractional anisotropy field and a principle diffusion direction field of the diffusion tensor field. The method includes determining a streamline through each surface point on a segmented surface of the diffusion tensor field according to the principle diffusion direction field, determining an oriented texture intensity for the surface points from corresponding streamlines, determining a surface color for the surface points by combining the oriented texture intensity, a color determined from the principle diffusion direction field, and a value of fractional anisotropy field at the surface points, and visualizing the surface points by rendering the surface points having the corresponding surface colors.Type: GrantFiled: February 3, 2006Date of Patent: December 13, 2011Assignee: Siemens Medical Solutions USA, Inc.Inventor: Tim McGraw
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Publication number: 20110225684Abstract: A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.Type: ApplicationFiled: February 10, 2011Publication date: September 15, 2011Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: TSUNEO NAKAGOMI, NORIMITSU MATSUSITA
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Publication number: 20110035849Abstract: An elongate probe (50) for use in probe microscopy comprises a module (51) provided between a probe tip (53) and a driver (52). In use the driver (52) applies oscillations to the module (51) which are transmitted by the module to the tip (53). With the probe tip (53) positioned close to the surface of a sample, any phase variance in the oscillation of the tip with respect to the driving oscillation is representative of an interaction between the tip and the sample surface. The elongate arrangement of the probe (50) is particularly beneficial when used to probe samples which require a liquid environment.Type: ApplicationFiled: March 12, 2009Publication date: February 10, 2011Inventors: Martin F. Finlan, Shelley J. Wilkins
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Patent number: 7841016Abstract: The invention is directed to a spin-polarized electron injector using a semiconductor tip, in which tip the injected electrons are photocreated by a circularly polarized light excitation incident on the rear of the tip. This tip is supported by a transparent lever or cantilever and undergoes a surface treatment for the purpose of removing the surface oxide layer, to prevent said layer from reforming and to improve the proportion of injected electrons.Type: GrantFiled: May 23, 2006Date of Patent: November 23, 2010Assignee: Ecole PolytechniqueInventors: Daniel Paget, Jacques Peretti, Alistair Rowe, Georges Lampel, Bruno Gerard, Shailendra Bansropun
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Publication number: 20100219819Abstract: Above the sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image with use of a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a minute distance d, and a difference between them is divided by the minute distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained with high accuracy. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field.Type: ApplicationFiled: March 28, 2008Publication date: September 2, 2010Inventors: Kenjiro Kimura, Kei Kobayashi, Hirofumi Yamada, Kazumi Matsushige, Takashi Horiuchi, Nobuo Satoh, Akifumi Nakai
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Publication number: 20100154088Abstract: A magnetic sensor simply is configured so as to magnetically measure not only conductive materials but also nonconductive materials over a wide temperature range and which offers high performance and high reliability, as well as a scanning microscope that uses the magnetic sensor. A scanning microscope according to the present invention includes a magnetic sensor with a magnetic sensing element provided at a free end of a cantilever-like flexible member and a strain gauge installed on the flexible member, driving means for driving the flexible member or a measurement sample, and control means for controlling driving provided by the driving means based on an output signal from the strain gauge.Type: ApplicationFiled: March 28, 2008Publication date: June 17, 2010Inventor: Adarsh Sandhu
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Patent number: 7709791Abstract: Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.Type: GrantFiled: October 15, 2007Date of Patent: May 4, 2010Assignee: Park Systems Corp.Inventors: Hyeong Chan Jo, Hong Jae Lim, Seung Jun Shin, Joon Hui Kim, Yong Seok Kim, Sang-il Park
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Publication number: 20090235397Abstract: There is provided a contact type measuring instrument in which the contact force of a probe is adjusted by a force created by compressed air and an attraction force between a permanent magnet and a magnetic body. This measuring instrument gives a pulling-in force or a pushing-out force to the probe by controlling a fluid pressure in a probe body. Also, between the permanent magnet attached to the tip end of a movable part of a micrometer attached to the probe body and a plate-shaped member attached to the end part on the side opposite to a contact of the probe, an attraction force according to a distance between the permanent magnet and the plate-shaped member is created.Type: ApplicationFiled: December 16, 2008Publication date: September 17, 2009Applicant: FANUC LTDInventors: Yonpyo HON, Kenzo EBIHARA, Akira YAMAMOTO, Masayuki HAMURA
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Publication number: 20090078869Abstract: Below 50-nm-diameter extremely narrow electrically-conductive fiber is used instead of the electron beam biprism used in the conventional interference electron microscope method. A phenomenon is utilized where a focus-shifted shadow of this fiber is shifted from a straight line by a distance which is proportional to a differentiation of phase change amount of an electron beam due to a sample with respect to a direction perpendicular to the fiber. The phase change amount is quantified by calibrating this shift amount through its comparison with a shift amount caused by another sample in terms of which the corresponding phase change amount has been quantitatively evaluated in advance. The differentiation amount of the quantified phase change in the electron beam due to the sample is visualized, or eventually, is integrated thereby being transformed into absolute phase change amount to be visualized.Type: ApplicationFiled: October 6, 2006Publication date: March 26, 2009Inventors: Takao Matsumoto, Masanari Koguchi