Abstract: Methods for manufacturing substrates with difficult to polish features using reverse mask etching and chemical mechanical planarization techniques.

Abstract: Alpha-amino acid containing chemical mechanical polishing compositions and slurries that are useful for polishing substrates including multiple layers of metals, or metals and dielectrics.

Abstract: Superior aromatic alkylation and transalkylation performance is obtained with a novel catalytic composition comprising a hydrogen form mordenite incorporated with alumina. The superior performance is a direct result of the catalyst composition having a surface area of at least 580 m.sup.2 /g. A novel method of preparing a catalyst having a surface area of at least 580 m.sup.2 /g is characterized by contacting a formed catalytic composite with an acidic aqueous solution.

Abstract: A novel hydrofluoric acid-catalyzed motor fuel alkylation process and catalyst is disclosed which incorporates from 0.5 to 5 vol. % of a cationic or anionic surfactant component in an HF containing acid alkylation catalyst to enable the process to be operated at an olefin-to-acid volumetric feed ratio greater than 1.0 while producing a motor alkylate product with a good octane number.

Abstract: A novel catalytic composite comprising a platinum group metal component; a modifier metal component selected from the group consisting of a tin component, germanium component, rhenium component and mixtures thereof; an optional alkali or alkaline earth metal component or mixtures thereof, an optional halogen component, and an optional catalytic modifier component on a refractory oxide support having a nominal diameter of at least about 850 microns. The distribution of the platinum group metal component is such that the platinum group component is surface-impregnated where substantially all of the platinum group metal component is located at most within a 400 micron exterior layer of the support. The effective amount of the modifier metal component is uniformly dispersed throughout the refractory oxide support.

Abstract: A method is described for the regeneration of a hydrocarbon conversion catalyst that has become deactivated by carbonaceous material deposition where the catalyst comprises a nonacid zeolite and a Group VIII metal component. The method comprises the steps of (1) removing a substantial portion of the carbonaceous material from the catalyst by combustion with an oxygen-containing gas in the presence of a halogen, and (2) reducing the catalyst in the presence of hydrogen.

Abstract: A process for catalytic dehydrocyclodimerization and regeneration of the catalyst. C.sub.2 to C.sub.5 aliphatic hydrocarbons are reacted to produce aromatics, using a catalyst of a composition especially adapted to minimize deposition of coke on the catalyst. The catalyst is comprised of alumina which contains phosphorus, gallium, and a crystalline aluminosilicate having a silica to alumina ratio of at least 12. The use of this catalyst has resulted in a five-fold reduction in the rate of coke deposition, compared to a conventional dehydrocyclodimerization catalyst. However, the activity of this catalyst once it becomes deactivated is only recovered by burning the coke accumulated upon the deactivated catalyst at catalyst regeneration conditions in the presence of an oxygen-containing gas.

Abstract: A novel hydrofluoric acid-catalyzed motor fuel alkylation process and catalyst is disclosed which incorporates from 0.5 to 5 vol. % of a cationic or anionic surfactant component in an HF containing acid alkylation catalyst to enable the process to be operated at an olefin-to-acid volumetric feed ratio greater than 1.0 while producing a motor alkylate product with a good octane number.

Abstract: A novel process is disclosed for the steam dehydrogenation of dehydrogenatable hydrocarbons in the vapor phase in conjunction with oxidative reheating of the intermediate products. The process utilizes a single catalyst to perform both the selective oxidation and steam dehydrogenation functions. The particular catalyst employed comprises a Group VIII noble metal component, a Group IA and/or a Group IIA component and may contain among other modifiers a Group IIIA or IVA metal, and a halogen component. The catalytic components are supported on an inorganic substrate such as alumina.

Abstract: A novel catalytic composite comprising a platinum group metal component; a modifier metal component selected from the group consisting of a tin component, germanium component, rhenium component and mixtures thereof; an optional alkali or alkaline earth metal component or mixtures thereof, an optional halogen component, and an optional catalytic modifier component on a refractory oxide support having a nominal diameter of at least about 850 microns. The distribution of the platinum group metal component is such that the platinum group component is surface-impregnated where substantially all of the platinum group metal component is located at most within a 400 micron exterior layer of the support. The effective amount of the modifier metal component is uniformly dispersed throughout the refractory oxide support.

Abstract: A novel liquid acid catalyzed alkylation process is disclosed which incorporates a fixed bed of contact material to improve the alkylation reaction zone efficiency. The fixed bed of contact material also allows the process to be efficiently operated at lower acid to olefin mole/mole feed ratios than normally used.

Abstract: A hydrocarbon conversion process is disclosed which extends the useful life of a regenerable zeolite-containing hydrocarbon conversion catalyst. In one aspect of this process, a hydrocarbon feed containing fluorides is passed through a fluoride removal system which reduces the fluoride concentration of the feed to below 100 ppb. The hydrocarbon feed containing less than 100 ppb fluorine is then converted over a regenerable zeolite-containing hydrocarbon conversion catalyst. The zeolite-containing hydrocarbon conversion catalyst is regenerated with an oxygen-containing gas stream as necessary to burn off carbonaceous deposits on the catalyst so as to return the zeolite catalyst to a high level of activity.

Abstract: Superior isomerization performance is obtained in an isomerization process employing a catalytic composition comprising a Group VIII noble metal and a hydrogen form mordenite incorporated with alumina. The superior isomerization performance is achieved using a catalyst composition having a surface area of at least 580 m.sup.2 /g. A novel method of preparing an isomerization catalyst having a surface area of at least 580 m.sup.2 /g is characterized by contacting a formed catalytic composite with an acidic aqueous solution prior to addition of the Group VIII noble metal. The isomerization process is particularly useful in the isomerization of a dimethylnaphthalene containing feedstock into a product that contains a higher concentration of the 2,6-dimethylnaphthalene isomer than did the feedstock.

Abstract: An alkylation-transalkylation process for the production of a monoalkylated aromatic compound is disclosed which maximizes the production of desirable monoalkylaromatic compounds, while limiting transalkylation catalyst deactivation. The process entails the combination of an alkylation reaction zone, a first separation zone, a second separation zone, and a transalkylation reaction zone wherein the alkylation catalyst and transalkylation catalyst are dissimilar and where the alkylation catalyst is comprised of phosphoric acid material and the transalkylation catalyst is comprised of a crystalline aluminosilicate material. The transalkylation catalyst deactivation is reduced by transalkylating only dialkylated aromatic compounds.