Abstract: A method is described of treating a gas stream exhausted from an atomic layer deposition (ALD) process chamber to which two or more gaseous precursors are alternately supplied. Between the process chamber and a vacuum pump used to draw the gas stream from the chamber, the gas stream is conveyed to a gas mixing chamber, to which a reactant is supplied for reacting with one of the gaseous precursors to form solid material. The gas stream is then conveyed to a cyclone separator to separate solid material from the gas stream. By deliberately reacting a non-reacted precursor to form solid material upstream from the pump, reaction within the pump of the non-reacted precursor and a second non-reacted precursor subsequently drawn from the chamber by the pump can be inhibited.

Abstract: A scroll compressor having a scroll wall arrangement with a fixed scroll having fixed scroll walls and an orbiting scroll having orbiting scroll wall, an inlet at a radially outer portion and an outlet at a radially central portion, a first flow path defined by the orbiting and fixed scroll walls and extending from the inlet to the outlet, gas entering through inlet at a pressure and exhausting through outlet at a second pressure higher than the first pressure. Scroll wall arrangement having a second inlet through which gas enters at a third pressure and follows a second fluid path where it is exhausted through the outlet at the second pressure to form two flow paths having respective inlets. The third pressure at which gas enters through inlet is different from the first pressure, and lower than the second pressure.

Abstract: Noise of a noise-producing object may be at least partially cancelled by a system that emits sound at a polarity substantially opposite to a polarity of detected noise and includes a member having elements disposed in the vicinity of a noise-producing object, some of the elements may be configured to emit noise, and some of the elements may be configured to detect noise and where a signal indicative of the detected noise may be received by a controller which sends a signal to cause at least some of the elements to emit sound at a polarity substantially opposite that of the detected noise, and includes an analyzer to determine when detected noise is indicative of one or more conditions of the noise producing object.

Abstract: A load-lock and dry vacuum pump assembly includes a load-lock having a load-lock housing, the load-lock housing includes a mating system having a flange-like cylinder and a cylinder concentrically located relative to said flange-like cylinder; a dry vacuum pump that includes a shaft, a rotor, a first concentric cylinder and a second concentric cylinder extending outwardly from the rotor, and is integrally connected with the mating system, the first and second dry vacuum pump concentric cylinders, the flange-like cylinder, and the cylinder concentrically located relative to said flange being axially arranged with respect to the shaft; and a molecular drag compression stage formed by flanges having helical structures selectively provided on the first and second concentric cylinders, the flange-like cylinder, and the cylinder concentrically located relative to the flange.

Abstract: Apparatus comprising: a chamber having a chamber inlet and a chamber outlet; a first inlet for receiving a first gas stream; a second inlet for receiving a second gas stream; a first outlet for outputting the first gas stream to a first vacuum pump; a second outlet for outputting the second gas stream to a second vacuum pump; a conduit network for connecting the first inlet to the first outlet and for connecting the second inlet to the second outlet such that, for each gas stream, first and second flow paths are defined between its respective inlet and outlet, the first flow path passing through the chamber inlet and the chamber outlet, and the second flow path by-passing the chamber, and means for routing the gas streams through the network such that when one gas stream flows along its first flow path, the other gas stream flows along its second flow path.

Abstract: A method of assembling a scroll pump comprises the following steps carried out sequentially; the step of mounting a first bearing means (20) and drive shaft (14) for rotation relative to a housing (12): the step of fastening a first flange portion (48) of a bellows arrangement (34) relative to the housing (12); the step of fastening an orbiting scroll (26) to a second flange portion (56) of the bellows arrangement (34); and the step of fixing a second scroll (28) relative to the housing (12) for co-operation with the orbiting scroll (26). The second flange portion (56) is fastened to the orbiting scroll (26) with fasteners (60) which extend through a through-bore (61) in the orbiting scroll and engage with the second flange portion.

Abstract: The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.

Abstract: The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.

Abstract: An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair.

Abstract: A multi-stage vacuum pump comprises a first piston in a first cylinder defining a first stage pumping chamber and a second piston in a second cylinder defining a second stage pumping chamber. The pump has a spool valve between the first and second cylinders for controlling flow from the first stage pumping chamber to the second stage pumping chamber. Either the first cylinder and the first piston or the second cylinder and the second piston being stepped so as to define a third stage pumping chamber. The spool valve is arranged to control the flow from the second stage pumping chamber to the third stage pumping chamber.

Abstract: The present invention is an apparatus and method for controlling pressure, pumping a vacuum and providing abatement for a plurality of vacuum processing chambers. The system may be used in semiconductor manufacture. Multiple vacuum processing chambers are exhausted by turbo pumps into a common abatement chamber, which is maintained at sub-atmospheric pressure by a backing pump. Pressure in the processing chambers is independently controlled. The internal volume of the abatement device provides a buffer that reduces the effect of pressure changes in one processing chamber affecting pressure in the other chambers.

Abstract: A seal assembly for the protection of a static seal device for use in a vacuum pump. The seal assembly comprising at least two components which are sealingly connected together, an o-ring seal, which is engaged between the two components to prevent transfer of fluid to and from the pump between these two components and a fluid channel. The fluid channel being in the plane of the o-ring and located between the o-ring seal and a process gas flow path. The fluid channel provides a path for a barrier gas to be routed when the apparatus is in use. The channel being connectable to an external source of barrier fluid and having an outlet in fluid communication with the pump swept volume.

Abstract: In a pumping arrangement for a chamber, a regenerative pumping mechanism comprises a rotor and a stator having an annular channel within which rotor blades rotate to urge fluid along the channel. The channel has a stripper, a channel inlet positioned adjacent one end of the stripper and through which fluid from the chamber enters the channel, and a channel outlet positioned adjacent the other end of the stripper and through which pressurised fluid leaves the channel. The stator further comprises a fluid bypass in the form of a bore having an inlet and an outlet on either side of the stripper. A valve allows fluid entering the channel to selectively diverted through the bore to the channel outlet. This can allow the performance of the pump to be varied without changing the speed of rotation of the rotor, and thus allow the pressure in the chamber to be accurately controlled.

Abstract: A regenerative fluid pump (10) comprises a rotor having rotor blades for compressing fluid on two fluid flow paths, the first of which extends between a first pump inlet (12a) and a first pump outlet (14a), and a second of which extends between second pump inlet (12b) and a second pump outlet (14b). The pump comprises a stator comprising a plurality of concentric channels (16), each of which comprises: a pumping channel portion (18) along which said rotor blades move for compressing said fluid between an inlet and an outlet of the pumping channel; and a stripper channel portion (20) (shown in broken lines) which allows movement of said rotor blades from said outlet to said inlet of the pumping channel portion. Each concentric channel (16) comprises two pumping channel portions (18) and two stripper channel portions (20).

Abstract: A thermal conductivity type pressure gauge comprises a gauge head (2) being rotatably mountable in a vessel whose environmental pressure is to be measured and an elongate electrical filament (6) mounted in the gauge head, the gauge head (2) having an inlet where through the electrical filament is exposed to the environmental pressure within the vessel and the filament (6) having directional component lengths in two orthogonal axes, one of the orthogonal axes X—X being parallel to the axis of rotation of the gauge head (2).

Abstract: In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. To provide a back up to the fluorine generator, high purity fluorine is also provided in a transportable gas storage vessel, for example, a multi-cylinder pack at a relatively low pressure, typically less than 35 psig. The transportable storage vessel is selectively connected to the fixed storage tank as required to enable the amount of fluorine within the storage tank to be maintained at a desired level.

Abstract: The present invention relates to vacuum pumps and a method for creating and maintaining a high vacuum. A vacuum pump includes a regenerative section and a turbo-molecular section. A common first rotor carries forward-rotating elements of both the regenerative section and the turbo-molecular section. Additionally, a second rotor carries counter-rotating elements of the turbo-molecular section. A first drive rotates the first rotor in a forward rotational direction while a second drive rotates the second rotor in a counter-rotational direction. The drives may be controlled to drive the common first rotor on start-up, and to later drive the second rotor.

Abstract: The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.

Abstract: Apparatus for producing liquid or solid xenon comprises a duct 12 having an inlet 14 for receiving gaseous xenon and an outlet 16 for outputting gaseous xenon at a reduced temperature to a nozzle located in a vacuum chamber 60. A housing 18 extends about the duct and contains a halocarbon coolant in thermal contact with the duct, and a second duct 24 in thermal contact with the halocarbon coolant for conveying a flow of liquid nitrogen through the housing 18 to control the temperature of the halocarbon. In view of the difference in the pressure of the xenon gas output from the duct and the pressure in the chamber, the thus-cooled gas is caused to liquefy or solidify in the vicinity of the nozzle.

Abstract: A method for removing a metallic layer from the surface of a ceramic substrate, the method including the steps of immersing the metallic coated ceramic substrate in a solution of up to 31% hydrochloric acid for a sufficient time to at least substantially dissolve or remove the metallic layer therefrom, removing the ceramic substrate from the acid solution, rinsing the ceramic substrate in a rinse solution, and annealing the ceramic substrate at a predetermined temperature for a sufficient time to at least reduce damage or defects in the surface of the ceramic substrate.