Abstract: A lithographic projection apparatus with a chuck in which a dielectric element of the electrostatic chuck has a specific resistivity of at least 1016 ?cm so that once the potential difference between electrodes of the chuck is removed the force on the article to be clamped reduces below a predetermined minimum level quickly. The dielectric element also has a coefficient of thermal expansion of less than 0.02×10?6K?1. A method of manufacturing a chuck includes joining a first glass ceramic element with a second glass element with an electrode therebetween in which a current is passed through the second glass element.
Type:
Grant
Filed:
April 29, 2003
Date of Patent:
March 8, 2005
Assignee:
ASML Netherlands B.V.
Inventors:
Jan Van Elp, Peter Giesen, Jacob Jan Van der Velde
Abstract: Information recording area of an optical disk is divided radially into a plurality of recording areas with a boundary area interposed therebetween. The boundary area is formed as either a high-reflection area that presents a higher reflection light level than the divided recording areas or a low-reflection area that presents a lower reflection light level than the divided recording areas. When an instruction is given to move an optical head from a current point to the target point over the optical disk, a seek operation is performed up to the start point of one of the divided recording areas that contains the target point, while detecting, on the basis of a variation in the reflection light level, the boundary area located between another one of the divided recording areas that contains the current point and the divided recording area containing the target point.
Abstract: A process for forming high-precision analog transistors with a low threshold voltage roll-up and digital transistors with a high threshold voltage roll-up is disclosed. The process selectively implants the polysilicon layer that forms the gates of the analog transistors so that the doping concentration of the analog gates is greater than the doping concentration of the digital gates.
Abstract: Internet service in a digital mobile communication network by means of short message service. The short message service center is connected to the Internet network and uses the HTML, HTTP, and TCP/IP Internet network protocols. Short messages are transferred between the service center and mobile stations. The user submits to the service center a short message containing an identifier of a WWW servicer via the Internet network, receives the WWW page and stores it. The relevant part, which maybe identified by a predetermined criterion, common to all subscribers, or based on a criterion received from the mobile station, such as a keyword, is separated from the WWW page and sent to the mobile station in a short message. The mobile station processes the received message and displays it to the user.
Type:
Grant
Filed:
January 15, 1999
Date of Patent:
November 20, 2001
Assignee:
Nokia Telecommunications Oy
Inventors:
Sakari Kotola, Teemu Tarnanen, Patrik Gustafsson
Abstract: An assay result reader, for use in conjunction with an assay device comprising a porous liquid-permeable carrier in the form of a strip or sheet through the thickness of which electromagnetic radiation is transmissible, the carrier including a detection zone in which an assay result is revealed by specific binding of a detectable material directly or indirectly to a binding agent immobilized in the detection zone, detection of the detectable material being effected by determining the extent to which electromagnetic radiation transmitted through the thickness of said carrier is attenuated by the presence of the detectable material bound in the detection zone.
Type:
Grant
Filed:
May 14, 1998
Date of Patent:
May 22, 2001
Assignee:
Unipath Limited
Inventors:
Michael Catt, Paul Henry Mundill, Michael Evans Prior