Abstract: Copper plating baths containing a leveling agent that is a reaction product of a compound including a heteroatom chosen from nitrogen, sulfur and a mixture of nitrogen and sulfur, with a polyepoxide compound containing an ether linkage that deposit copper on the surface of an electronic device and in apertures on such substrate are provided. Such plating baths deposit a copper layer on the substrate surface that is substantially planar across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
Abstract: A method of purifying an organometallic compound by heating the organometallic compound in the presence of a trialkyl aluminum compound and a catalyst.
Type:
Grant
Filed:
November 17, 2006
Date of Patent:
January 22, 2008
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Deodatta Vinayak Shenai-Khatkhate, Ronald L. DiCarlo, Jr.
Abstract: Structures including a capacitor dielectric material disposed on the surface of an electrode suitable for use in forming capacitors are disclosed. Methods of forming such structures are also disclosed.
Type:
Grant
Filed:
October 5, 2005
Date of Patent:
March 13, 2007
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
John P. Cahalen, Maria Anna Rzeznik, John E. Schemenaur, Rajan Hariharan
Abstract: Organometallic compounds of Group IIB and IIIA metals that are substantially pure and contain low levels of oxygenated impurities are provided. Also provided are methods of preparing such organometallic compounds.
Abstract: Disclosed are methods of manufacturing electronic devices, particularly integrated circuits. Such methods include the use of low dielectric constant material prepared by using a removable porogen material.
Abstract: A counter electrode for use in an electrochemical cell suitable for analysis of an electroplating composition, the counter electrode comprising a conductor; a sheath disposed about the conductor; an electrolyte disposed within the sheath; and an optionally porous element on the sheath, the porous element providing signal communication between the electrolyte and an analyte.
Type:
Grant
Filed:
June 5, 2003
Date of Patent:
December 5, 2006
Assignee:
Shipley Company, L.L.C.
Inventors:
Robert A. Binstead, Osnat Younes-Metzler, David A. Valeri, Robert D. Mikkola
Abstract: Germanium compounds suitable for use as vapor phase deposition precursors for germanium films are provided. Methods of depositing films containing germanium using such compounds are also provided. Such germanium films are particularly useful in the manufacture of electronic devices.
Abstract: Compounds that function to provide level or uniform metal deposits are provided. These compounds are particularly useful in providing level copper deposits. Copper plating baths and methods of copper plating using these compounds are also provided. These baths and methods are useful for providing a planarized layer of copper on a substrate having small apertures. The compositions and methods provide complete fill of small apertures with reduced void formation.
Type:
Grant
Filed:
June 4, 2003
Date of Patent:
October 31, 2006
Assignee:
Shipley Company, L.L.C.
Inventors:
Deyan Wang, Chunyi Wu, Robert D. Mikkola
Abstract: Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.
Type:
Grant
Filed:
October 22, 2004
Date of Patent:
October 10, 2006
Assignee:
Shipley Company LLC
Inventors:
Charles R. Szmanda, George G. Barclay, Peter Trefonas, III, Wang Yueh
Abstract: A method of manufacturing electronic devices containing one or more layers of materials that are sensitive to the strong chemicals used to remove cross-linked polymeric layers such as photoresists and antireflective coatings is provided. The cross-linked polymeric layers can be easily removed following etching through the use of certain removable layers disposed between the substrate and the cross-linked polymeric layers.
Abstract: Methods of preparing Group IVA and Group VIA organometallic compounds, particularly Group IVA organometallic compounds, are provided. Such manufacturing methods employ an amine and/or phosphine catalyst in a transalkylation step and may be performed in a batch, semi-continuous or continuous manner.
Abstract: Compositions suitable for use as underfill materials in an integrated circuit assembly are provided. Also provided are methods of preparing integrated circuit assemblies containing certain underfill materials as well as electronic devices containing such integrated circuit assemblies.
Abstract: Methods for depositing uniform, pinhole-defect free organic polysilica coatings are provided. These methods allow for the use of these materials as spin-on cap layers in the manufacture of integrated circuits.
Type:
Grant
Filed:
June 3, 2003
Date of Patent:
March 28, 2006
Assignee:
Shipley Company, L.L.C.
Inventors:
Dana A. Gronbeck, Michael K. Gallagher, Jeffrey M. Calvert, Gregory P. Prokopowicz, Timothy G. Adams
Abstract: Porous thermoset dielectric materials having low dielectric constants useful in electronic component manufacture are provided along with methods of preparing the porous thermoset dielectric materials. Also provided are methods of forming integrated circuits containing such porous thermoset dielectric material.
Type:
Grant
Filed:
March 26, 2002
Date of Patent:
February 14, 2006
Assignee:
Shipley Company, L.L.C.
Inventors:
Yujian You, Nikoi Annan, Michael K. Gallagher, Robert H. Gore
Abstract: Electrically resistive material including platinum and from about 5 and about 70 molar percent of iridium, ruthenium or mixtures thereof, calculated based on platinum as 100%, are disclosed.
Type:
Grant
Filed:
June 21, 2004
Date of Patent:
February 7, 2006
Assignee:
Shipley Company, L.L.C.
Inventors:
Craig S. Allen, John Schemenaur, David D. Senk, Marc Langlois, Xiaodong Hu, Jan Tzyy-Jiuan Hwang, Jud Ready, Trifon Tomov
Abstract: An object of the present invention is to provide an electroless displacement gold plating solution, an additive for use in preparing the plating solution, and a metal composite material obtained by treatment with the plating solution. The electroless displacement gold plating solution contains a water-soluble gold compound, a complexing agent, and a water-soluble silver compound, and optionally a water-soluble thallium compound, a water-soluble lead compound, a water-soluble copper compound or a water-soluble nickel compound, or any combination thereof. The plating solution has good stability and, even not only immediately after the preparation but also after a lapse of a certain time period from the preparation, can be used for production of a metal composite material exhibiting an even plated appearance and also having a thick gold coating film.
Abstract: A method for electrolytic copper plating using an electrolytic copper plating solution including a compound containing a structure of āXāSāYā, wherein X and Y are independently chosen from hydrogen atom, carbon atom, sulfur atom, nitrogen atom, and oxygen atom, and X and Y may be the same only when they are a carbon atom, and by contacting the electrolytic copper plating solution with ozone is disclosed.
Abstract: Methods of preparing porous optical materials are provided. These methods allow for the selection of the desired pore size and level of porosity in the porous optical material. Such methods utilize a preformed polymeric porogen.
Type:
Grant
Filed:
May 24, 2002
Date of Patent:
November 22, 2005
Assignee:
Shipley Company, L.L.C.
Inventors:
Garo Khanarian, Yujian You, Robert H. Gore, Angelo A. Lamola
Abstract: Disclosed are methods of preparing monoalkyl Group VA metal dihalide compounds in high yield and high purity by the reaction of a Group VA metal trihalide with an organo lithium reagent or a compound of the formula RnM1X3?n, where R is an alkyl, M1 is a Group IIIA metal, X is a halogen and n is an integer fro 1 to 3. Such monoalkyl Group VA metal dihalide compounds are substantially free of oxygenated impurities, ethereal solvents and metallic impurities. Monoalkyl Group VA metal dihydride compounds can be easily produced in high yield and high purity by reducing such monoalkyl Group VA metal dihalide compounds.
Type:
Grant
Filed:
January 17, 2003
Date of Patent:
October 18, 2005
Assignee:
Shipley Company, L.L.C.
Inventors:
Deodatta Vinayak Shenai-Khatkhate, Michael Brendan Power, Artashes Amamchyan, Ronald L. DiCarlo, Jr.
Abstract: A method of preparing Group VA organometal compounds in high yield and high purity by the reaction of a Grignard reagent with a Group VA metal halide in certain ethereal solvents is provided. A method of preparing Group VA organometal hydrides is also provided.
Type:
Grant
Filed:
May 7, 2004
Date of Patent:
September 6, 2005
Assignee:
Rohm and Haas Electronic Materials, LLC
Inventors:
Deodatta Vinayak Shenai-Khatkhate, Artashes Amamchyan, Michael Brendan Power, Ronald L. DiCarol, Jr., James Edward Felton