Patents Represented by Attorney S. Matthew Cairns
  • Patent number: 7374652
    Abstract: Copper plating baths containing a leveling agent that is a reaction product of a compound including a heteroatom chosen from nitrogen, sulfur and a mixture of nitrogen and sulfur, with a polyepoxide compound containing an ether linkage that deposit copper on the surface of an electronic device and in apertures on such substrate are provided. Such plating baths deposit a copper layer on the substrate surface that is substantially planar across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
    Type: Grant
    Filed: July 7, 2006
    Date of Patent: May 20, 2008
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Shinjiro Hayashi, Hideki Tsuchida, Masaru Kusaka, Koichi Yomogida
  • Patent number: 7321048
    Abstract: A method of purifying an organometallic compound by heating the organometallic compound in the presence of a trialkyl aluminum compound and a catalyst.
    Type: Grant
    Filed: November 17, 2006
    Date of Patent: January 22, 2008
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Deodatta Vinayak Shenai-Khatkhate, Ronald L. DiCarlo, Jr.
  • Patent number: 7190016
    Abstract: Structures including a capacitor dielectric material disposed on the surface of an electrode suitable for use in forming capacitors are disclosed. Methods of forming such structures are also disclosed.
    Type: Grant
    Filed: October 5, 2005
    Date of Patent: March 13, 2007
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: John P. Cahalen, Maria Anna Rzeznik, John E. Schemenaur, Rajan Hariharan
  • Patent number: 7166734
    Abstract: Organometallic compounds of Group IIB and IIIA metals that are substantially pure and contain low levels of oxygenated impurities are provided. Also provided are methods of preparing such organometallic compounds.
    Type: Grant
    Filed: September 2, 2005
    Date of Patent: January 23, 2007
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Deodatta Vinayak Shenai-Khatkhate, Artashes Amamchyan
  • Patent number: 7163780
    Abstract: Disclosed are methods of manufacturing electronic devices, particularly integrated circuits. Such methods include the use of low dielectric constant material prepared by using a removable porogen material.
    Type: Grant
    Filed: March 22, 2003
    Date of Patent: January 16, 2007
    Assignee: Shipley Company, L.L.C.
    Inventors: Michael K. Gallagher, Yujian You
  • Patent number: 7144488
    Abstract: A counter electrode for use in an electrochemical cell suitable for analysis of an electroplating composition, the counter electrode comprising a conductor; a sheath disposed about the conductor; an electrolyte disposed within the sheath; and an optionally porous element on the sheath, the porous element providing signal communication between the electrolyte and an analyte.
    Type: Grant
    Filed: June 5, 2003
    Date of Patent: December 5, 2006
    Assignee: Shipley Company, L.L.C.
    Inventors: Robert A. Binstead, Osnat Younes-Metzler, David A. Valeri, Robert D. Mikkola
  • Patent number: 7141488
    Abstract: Germanium compounds suitable for use as vapor phase deposition precursors for germanium films are provided. Methods of depositing films containing germanium using such compounds are also provided. Such germanium films are particularly useful in the manufacture of electronic devices.
    Type: Grant
    Filed: April 2, 2004
    Date of Patent: November 28, 2006
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Egbert Woelk, Deodatta Vinayak Shenai-Khatkhate
  • Patent number: 7128822
    Abstract: Compounds that function to provide level or uniform metal deposits are provided. These compounds are particularly useful in providing level copper deposits. Copper plating baths and methods of copper plating using these compounds are also provided. These baths and methods are useful for providing a planarized layer of copper on a substrate having small apertures. The compositions and methods provide complete fill of small apertures with reduced void formation.
    Type: Grant
    Filed: June 4, 2003
    Date of Patent: October 31, 2006
    Assignee: Shipley Company, L.L.C.
    Inventors: Deyan Wang, Chunyi Wu, Robert D. Mikkola
  • Patent number: 7118847
    Abstract: Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: October 10, 2006
    Assignee: Shipley Company LLC
    Inventors: Charles R. Szmanda, George G. Barclay, Peter Trefonas, III, Wang Yueh
  • Patent number: 7056824
    Abstract: A method of manufacturing electronic devices containing one or more layers of materials that are sensitive to the strong chemicals used to remove cross-linked polymeric layers such as photoresists and antireflective coatings is provided. The cross-linked polymeric layers can be easily removed following etching through the use of certain removable layers disposed between the substrate and the cross-linked polymeric layers.
    Type: Grant
    Filed: December 19, 2003
    Date of Patent: June 6, 2006
    Assignee: Shipley Company, L.L.C.
    Inventor: George P. Mirth
  • Patent number: 7045451
    Abstract: Methods of preparing Group IVA and Group VIA organometallic compounds, particularly Group IVA organometallic compounds, are provided. Such manufacturing methods employ an amine and/or phosphine catalyst in a transalkylation step and may be performed in a batch, semi-continuous or continuous manner.
    Type: Grant
    Filed: April 2, 2004
    Date of Patent: May 16, 2006
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventor: Deodatta Vinayak Shenai-Khatkhate
  • Patent number: 7041331
    Abstract: Compositions suitable for use as underfill materials in an integrated circuit assembly are provided. Also provided are methods of preparing integrated circuit assemblies containing certain underfill materials as well as electronic devices containing such integrated circuit assemblies.
    Type: Grant
    Filed: April 2, 2004
    Date of Patent: May 9, 2006
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Angelo A. Lamola, Nathaniel E. Brese
  • Patent number: 7018678
    Abstract: Methods for depositing uniform, pinhole-defect free organic polysilica coatings are provided. These methods allow for the use of these materials as spin-on cap layers in the manufacture of integrated circuits.
    Type: Grant
    Filed: June 3, 2003
    Date of Patent: March 28, 2006
    Assignee: Shipley Company, L.L.C.
    Inventors: Dana A. Gronbeck, Michael K. Gallagher, Jeffrey M. Calvert, Gregory P. Prokopowicz, Timothy G. Adams
  • Patent number: 6998148
    Abstract: Porous thermoset dielectric materials having low dielectric constants useful in electronic component manufacture are provided along with methods of preparing the porous thermoset dielectric materials. Also provided are methods of forming integrated circuits containing such porous thermoset dielectric material.
    Type: Grant
    Filed: March 26, 2002
    Date of Patent: February 14, 2006
    Assignee: Shipley Company, L.L.C.
    Inventors: Yujian You, Nikoi Annan, Michael K. Gallagher, Robert H. Gore
  • Patent number: 6994757
    Abstract: Electrically resistive material including platinum and from about 5 and about 70 molar percent of iridium, ruthenium or mixtures thereof, calculated based on platinum as 100%, are disclosed.
    Type: Grant
    Filed: June 21, 2004
    Date of Patent: February 7, 2006
    Assignee: Shipley Company, L.L.C.
    Inventors: Craig S. Allen, John Schemenaur, David D. Senk, Marc Langlois, Xiaodong Hu, Jan Tzyy-Jiuan Hwang, Jud Ready, Trifon Tomov
  • Patent number: 6991675
    Abstract: An object of the present invention is to provide an electroless displacement gold plating solution, an additive for use in preparing the plating solution, and a metal composite material obtained by treatment with the plating solution. The electroless displacement gold plating solution contains a water-soluble gold compound, a complexing agent, and a water-soluble silver compound, and optionally a water-soluble thallium compound, a water-soluble lead compound, a water-soluble copper compound or a water-soluble nickel compound, or any combination thereof. The plating solution has good stability and, even not only immediately after the preparation but also after a lapse of a certain time period from the preparation, can be used for production of a metal composite material exhibiting an even plated appearance and also having a thick gold coating film.
    Type: Grant
    Filed: August 21, 2001
    Date of Patent: January 31, 2006
    Assignee: Shipley Company, L.L.C.
    Inventors: Kazuyuki Suda, Yasushi Takizawa, Kazunori Hibi
  • Patent number: 6977035
    Abstract: A method for electrolytic copper plating using an electrolytic copper plating solution including a compound containing a structure of ā€”Xā€”Sā€”Yā€”, wherein X and Y are independently chosen from hydrogen atom, carbon atom, sulfur atom, nitrogen atom, and oxygen atom, and X and Y may be the same only when they are a carbon atom, and by contacting the electrolytic copper plating solution with ozone is disclosed.
    Type: Grant
    Filed: November 26, 2003
    Date of Patent: December 20, 2005
    Assignee: Shipley Company, L.L.C.
    Inventors: Hideki Tsuchida, Masaru Kusaka, Shinjiro Hayashi
  • Patent number: 6967222
    Abstract: Methods of preparing porous optical materials are provided. These methods allow for the selection of the desired pore size and level of porosity in the porous optical material. Such methods utilize a preformed polymeric porogen.
    Type: Grant
    Filed: May 24, 2002
    Date of Patent: November 22, 2005
    Assignee: Shipley Company, L.L.C.
    Inventors: Garo Khanarian, Yujian You, Robert H. Gore, Angelo A. Lamola
  • Patent number: 6956127
    Abstract: Disclosed are methods of preparing monoalkyl Group VA metal dihalide compounds in high yield and high purity by the reaction of a Group VA metal trihalide with an organo lithium reagent or a compound of the formula RnM1X3?n, where R is an alkyl, M1 is a Group IIIA metal, X is a halogen and n is an integer fro 1 to 3. Such monoalkyl Group VA metal dihalide compounds are substantially free of oxygenated impurities, ethereal solvents and metallic impurities. Monoalkyl Group VA metal dihydride compounds can be easily produced in high yield and high purity by reducing such monoalkyl Group VA metal dihalide compounds.
    Type: Grant
    Filed: January 17, 2003
    Date of Patent: October 18, 2005
    Assignee: Shipley Company, L.L.C.
    Inventors: Deodatta Vinayak Shenai-Khatkhate, Michael Brendan Power, Artashes Amamchyan, Ronald L. DiCarlo, Jr.
  • Patent number: 6939983
    Abstract: A method of preparing Group VA organometal compounds in high yield and high purity by the reaction of a Grignard reagent with a Group VA metal halide in certain ethereal solvents is provided. A method of preparing Group VA organometal hydrides is also provided.
    Type: Grant
    Filed: May 7, 2004
    Date of Patent: September 6, 2005
    Assignee: Rohm and Haas Electronic Materials, LLC
    Inventors: Deodatta Vinayak Shenai-Khatkhate, Artashes Amamchyan, Michael Brendan Power, Ronald L. DiCarol, Jr., James Edward Felton