Patents Represented by Attorney Scheinberg & Griner, LLP
  • Patent number: 7845245
    Abstract: The invention relates to the extraction of a frozen hydrated sample for TEM (Transmission Electron Microscope) inspection, such as a vitrified biological sample, from a substrate and the attaching of said sample to a manipulator. Such a hydrated sample should be held at a cryogenic temperature to avoid ice formation. By melting or sublimating a part of the sample material outside the area to be studied in the TEM and freezing the material to the manipulator (10), a bond is formed between sample (1) and manipulator. This makes it possible to transport the sample from the substrate to e.g. a TEM grid. In a preferred embodiment a part (2) of the manipulator (10) is held at a cryogenic temperature, and the melting or sublimation is caused by heating the tip (3) of the manipulator by electric heating of the tip and then cooling the tip of the manipulator to a cryogenic temperature, thereby freezing the sample (1) to the manipulator.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: December 7, 2010
    Assignee: FEI Company
    Inventors: Michael Frederick Hayles, Uwe Luecken
  • Patent number: 7825378
    Abstract: A method for improving the resolution of STEM images of thick samples. In STEM, the diameter of the cross-over depends on the opening half-angle ? of the beam and can be as low as 0.1 nm. For optimum resolution an opening half-angle is chosen at which the diameter of the cross-over R(?) shows a minimum. For thick samples the resolution is, for those parts of the sample removed from the cross-over plane, limited by the convergence of the beam, resulting in a diameter D of the beam at the surface of the sample. The opening angle is chosen to balance the contribution of convergence and of diameter of the cross-over by choosing an opening half-angle smaller than the optimum opening half-angle. Effectively the sample is then scanned with a beam that has a substantially constant diameter over the length of the sample material through which the electrons have to travel.
    Type: Grant
    Filed: November 20, 2008
    Date of Patent: November 2, 2010
    Assignee: FEI Company
    Inventors: Alevtyna Yakushevska, Erwan Sourty, Uwe Luecken, Bert Freitag
  • Patent number: 7806235
    Abstract: A device that relieves lubricant pressure in a divider block lubrication system into a fluid reservoir, a container, or directly back into the compressor frame to which the tubing is connected. This eliminates housekeeping, environmental, safety, and compressor component failure concerns associated with current atmospheric rupture assemblies that relieve directly to the atmosphere. The environmental compressor protection assembly contains a spring set to a pre-determined pressure. Lubricant pressure in excess of this pre-determined set pressure results in spring compression and opening of a relief path. The assembly preferably remains in a full open position and must be must be manually reset to the closed position to prevent fluid flow in the system.
    Type: Grant
    Filed: October 4, 2007
    Date of Patent: October 5, 2010
    Inventors: Curtis Roys, Michael Easton
  • Patent number: 7800063
    Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: September 21, 2010
    Assignees: FEI Company, The Board of Trustees of the University of Illinois, The Regents of the University of California
    Inventors: Jeroen van de Water, Johannes van den Oetelaar, Raymond Wagner, Hendrik Nicolaas Slingerland, Jan Willem Bruggers, Adriaan Huibert Dirk Ottevanger, Andreas Schmid, Eric A. Olson, Ivan G. Petrov, Todor I. Donchev, Thomas Duden
  • Patent number: 7799115
    Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.
    Type: Grant
    Filed: July 17, 2007
    Date of Patent: September 21, 2010
    Assignee: Mega Fluid Systems, Inc.
    Inventors: David Kandiyeli, Todd Graves, Rhey Yang
  • Patent number: 7791020
    Abstract: A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: September 7, 2010
    Assignee: FEI Company
    Inventors: Marek Uncovsky, Milos Toth, William Ralph Knowles
  • Patent number: 7772564
    Abstract: The invention relates to an electron impact gas ion with high brightness and low energy spread. This high brightness is achieved by injecting electrons in a small ionization volume (from less than 1 ?m to several tens of micrometers in size) from one side and extracting ions from the other. The electrons injected are produced by a high brightness electron source, such as a field emitter or a Schottky emitter. In one embodiment of the invention the required high electron density in the ionization volume is realized by placing a field emitter close to the ionization volume (e.g. 30 ?m), without optics between source and ionization volume. In another embodiment of the invention the source is imaged onto a MEMS structure. Two small diaphragms of e.g. 50 nm are spaced e.g. 1 ?m apart. The electrons enter through one of these diaphragms, while the ions leave the ionization volume through the other one. The two diaphragms are manufactured by e.g.
    Type: Grant
    Filed: February 21, 2007
    Date of Patent: August 10, 2010
    Assignee: Fei Company
    Inventors: Pieter Kruit, Vipin Nagnath Tondare
  • Patent number: 7727681
    Abstract: Transmissivity is restored to a gallium stained substrate by directing an electron beam to the substrate in the presence of an etching gas. For higher concentrations of implanted gallium, the transparency can be substantially restored without reducing the thickness of the substrate. For lower doses of implanted gallium, the transmission is restored to 100%, although the thickness of the substrate is reduced. The invention is suitable for use in the repair of photolithography masks.
    Type: Grant
    Filed: January 16, 2004
    Date of Patent: June 1, 2010
    Assignee: FEI Company
    Inventors: Diane K. Stewart, J. David Casey, Jr., Joan Williams Casey, legal representative, John Beaty, Christian R. Musil, Steven Berger, Sybren J. Sijbrandij
  • Patent number: 7720574
    Abstract: A fluid flow monitoring, evaluation, and control system providing accurate dispensing of fluids in low volume, high pressure systems. The system includes one or more fluid flow sensors mounted on positive displacement dispensing valves and a processor that receives cycle signals from the fluid flow sensors to determine fluid flow information. If the fluid flow is not within specified limits, a signal is sent to a pump control device to adjust the pump to return the fluid flow to desired level. A dispensing valve can include a display to show cycle time or other fluid flow measurement. The system can include dispensing valves having single inputs and single outputs for measuring fluid dispensed at a point of use, which measurement can be compared to measurements taken at a divider block earlier in the hydraulic path to verify that fluid sent into the path was actually dispensed.
    Type: Grant
    Filed: December 3, 2004
    Date of Patent: May 18, 2010
    Inventor: Curtis Roys
  • Patent number: 7718979
    Abstract: A particle-optical apparatus, such as an ESEMĀ®, for simultaneous observing a sample with particles and photons. A pressure limiting aperture (PLA) is placed in a diaphragm between the objective lens of the ESEMĀ® and the sample position. The distance between the sample position and the aperture is sufficiently small to allow a large collection angle of the photons through this aperture. A mirror is placed between the diaphragm and the objective lens. Due to the large collection angle for photons a large NA is achieved. The small distance between sample position and aperture also result in less scattering of electrons than occurs in ESEM's where a mirror is placed between aperture and sample position, as the electrons have to travel through only a limited length in a high pressure area. Embodiments describe combinations where e.g. an immersion lens is used.
    Type: Grant
    Filed: February 6, 2008
    Date of Patent: May 18, 2010
    Assignee: FEI Company
    Inventor: William Ralph Knowles
  • Patent number: 7705610
    Abstract: Wet and dry film thickness can be measured non-invasively on structures, such as surfaces associated with vessels, aircraft and buildings, using calibrated microwave sensors. The film is measured by directing microwave energy toward the film. The microwave energy passes through the film and is reflected by a reflective or semi-reflective substrate surface below the film. Properties of the reflected wave are compared with properties of reflected waves that were passed through calibration samples of known thicknesses to determine the unknown thickness of the film. In some embodiments, one or more sensors are maintained at a fixed altitude above the conductive/semi-conductive substrate for measurement, and in other embodiments, one or more sensors are maintained at a fixed altitude above the film.
    Type: Grant
    Filed: March 3, 2008
    Date of Patent: April 27, 2010
    Assignee: System & Material Research Corporation
    Inventors: Alan V. Bray, Claude H. Garrett, Christian J. Corley
  • Patent number: 7681348
    Abstract: An improved device for signaling traffic on roadways including a fixed display surface with one or more additional display surfaces rotatably attached, such that different indicia can be displayed to motorists. A rotation grip allows an operator to manually change the position of the additional display surfaces. This manual adjustment ensures the operator is displaying the appropriate messages not only to oncoming traffic but also to traffic approaching from the rear.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: March 23, 2010
    Inventor: Will Saylor
  • Patent number: 7674170
    Abstract: A method for lottery wagering on actual events. The method according to the present invention includes selecting a subset of wagering data DW from a set of pre-qualifying data DPQ prior to conclusion of a pre-qualifying event of a phased competition consisting of a pre-qualifying event and a final event. The method further includes assembling pre-qualifying data DPQ for preliminary participants after conclusion of a pre-qualifying event and assembling concluding data DC for final participants after conclusion of the final event. Winners are selected from the final participants after the final event based on the concluding data. Winning lottery data DL is determined from a correlation between the winners' and their respective pre-qualifying data.
    Type: Grant
    Filed: June 25, 2003
    Date of Patent: March 9, 2010
    Inventors: James M. Odom, Scott D. Yellich
  • Patent number: 7675034
    Abstract: An optical microscope slide in a charged particle instrument such as an electron microscope or a focused ion beam instrument. Conventional microscope slides are not fit for use in an electron microscope as they are insulating and would thus charge when viewed in an electron microscope due to the impinging beam of charged particles. However, microscope slides exist that show a coating with a conductive layer of e.g. Indium Tin Oxide (ITO). These microscope slides are normally used for heating the object mounted on the slide by passing a current through the conductive layer. Experiments show that these microscope slides can be used advantageously in a charged particle instrument by connecting the conductive layer to e.g. ground potential, thereby forming a return path for the impinging charged particles and thus avoiding charging. The invention further relates to a charged particle instrument that is further equipped with an optical microscope.
    Type: Grant
    Filed: May 30, 2008
    Date of Patent: March 9, 2010
    Assignee: FEI Company
    Inventor: Jacob Simon Faber
  • Patent number: 7674706
    Abstract: A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.
    Type: Grant
    Filed: March 16, 2005
    Date of Patent: March 9, 2010
    Assignee: FEI Company
    Inventors: George Y. Gu, Neil J. Bassom, Thomas J. Gannon, Kun Liu
  • Patent number: 7675049
    Abstract: A coating is applied to a work piece in a charged particle beam system without directing the beam to work piece. The coating is applied by sputtering, either within the charged particle beam vacuum chamber or outside the charged particle beam vacuum chamber. In one embodiment, the sputtering is performed by directing the charged particle beam to a sputter material source, such as a needle from a gas injection system. Material is sputtered from the sputter material source onto the work piece to form, for example, a protective or conductive coating, without requiring the beam to be directed to the work piece, thereby reducing or eliminating damage to the work piece.
    Type: Grant
    Filed: February 14, 2007
    Date of Patent: March 9, 2010
    Assignee: FEI Company
    Inventors: Michael Schmidt, Jeff Blackwood
  • Patent number: D613077
    Type: Grant
    Filed: July 18, 2008
    Date of Patent: April 6, 2010
    Inventor: Terry Markwardt
  • Patent number: D613631
    Type: Grant
    Filed: May 5, 2009
    Date of Patent: April 13, 2010
    Inventor: Curtis Roys
  • Patent number: D615619
    Type: Grant
    Filed: January 30, 2009
    Date of Patent: May 11, 2010
    Inventor: Curtis Roys
  • Patent number: D616473
    Type: Grant
    Filed: August 7, 2009
    Date of Patent: May 25, 2010
    Inventors: Daniel Richard Higgins, Michael J. Kranda