Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.
Type:
Grant
Filed:
September 9, 2011
Date of Patent:
July 3, 2012
Assignee:
Northeastern University
Inventors:
Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim