Patents Assigned to Beijing BOE Vacuum Technology Co., Ltd.
  • Patent number: 9551085
    Abstract: The invention discloses an electrochemical polishing solution, a process for electrochemically polishing a graphite gate electrode and a graphite gate electrode, which are used for providing an electrochemical polishing solution and a polishing process to efficiently remove the contaminant on the surface of a gate electrode and improve the quality of the gate electrode. Said electrochemical polishing solution comprises 900-1000 parts by weight of water; 195-205 parts by weight of an alkaline metal hydroxide; 49-51 parts by weight of a weak acid salt; and 294-306 parts by weight of an additive.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: January 24, 2017
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., Beijing BOE Vacuum Technology Co., Ltd.
    Inventor: Meiling Liao