Abstract: A sputtering chamber includes at least two sputtering targets, one of the at least two targets disposed on a first side a substrate conveyor extending within the chamber, and another of the at least two targets disposed on a second side of the conveyor. The at least two targets may be independently operable, and at least one of the targets, if inactivated, may be protected by a shielding apparatus. Both of the at least two targets may be mounted to a first wall of a plurality of walls enclosing the sputtering chamber.
Abstract: A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror. Each of the first and second probes has a first leg and a second leg that are separated from each other by a distance n so that angled reflections may be detected.
Abstract: The invention provides a substrate bearing a low-maintenance coating. In some embodiments, the coating includes a low-maintenance film that includes both titanium oxide and tungsten oxide. The invention also provides methods and equipment for depositing such coatings.
Type:
Grant
Filed:
September 3, 2010
Date of Patent:
August 13, 2013
Assignee:
Cardinal CG Company
Inventors:
Kari B. Myli, Annette J. Krisko, James E. Brownlee, Gary L. Pfaff
Abstract: The invention is a method for obtaining a reactive sputtering process with a reduced or eliminated hysteresis behavior. This is achieved by employing a target made from a mixture of metal and compound materials. In the method according to the present invention, the fraction of compound material is large enough to eliminate or significantly reduce the hysteresis behavior of the reactive sputtering process and enable a stable deposition of compound films at a rate significantly higher than what is possible from a target completely made from compound material.
Type:
Grant
Filed:
October 31, 2006
Date of Patent:
May 7, 2013
Assignee:
Cardinal CG Company
Inventors:
Klaus Hartig, Sören Berg, Tomas Nyberg
Abstract: Low-emissivity coatings that are highly reflective to infrared-radiation. The coating includes three infrared-reflection film regions, which may each include silver.
Abstract: A coated substrate useful as a transparent electrode for electrical or optical devices is provided. The coated substrate includes a transparent sodium-containing substrate with a protective layer disposed over the transparent sodium-containing substrate. Characteristically, the protective layer has a thickness of at least 400 angstroms and comprises aluminum oxides and silicon oxides. An electrically conductive layer is disposed over the protective layer. In other variations, devices incorporating such coated substrates are provided.
Type:
Application
Filed:
July 12, 2011
Publication date:
January 17, 2013
Applicant:
CARDINAL CG COMPANY
Inventors:
Keith J. Burrows, Harshad P. Patil, Annette J. Krisko
Abstract: Low-emissivity coatings that are highly reflective to infrared-radiation. The coating includes three infrared-reflection film regions, which may each include silver.
Abstract: A photovoltaic element for photovoltaic applications includes a transparent substrate having a first side and a second side. A transparent electrically conductive oxide is disposed over the first side of the transparent substrate. Similarly, a hydrophilic oxide coating is disposed over and contacts the transparent electrically conductive oxide. Finally, a removable protective coating is disposed over the hydrophilic oxide coating.
Abstract: The invention provides low-emissivity coatings that are highly reflective of infrared radiation. The coating includes three infrared-reflection film regions, which may each comprise silver.
Abstract: The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed.
Type:
Grant
Filed:
May 16, 2005
Date of Patent:
January 10, 2012
Assignee:
Cardinal CG Company
Inventors:
Kari Myli, Gary Pfaff, James Brownlee, John German, Annette Krisko, Klaus Hartig
Abstract: The invention provides low-emissivity coatings that are highly reflective of infrared radiation. The coating includes three infrared-reflection film regions, which may each comprise silver.
Abstract: In some embodiments, the invention includes a cylindrical cathode target assembly for use in sputtering target material onto a substrate that comprises a generally cylindrical target, means for rotating the target about its axis during a sputtering operation, an elongated magnet carried within the target for generation of a plasma-containing magnetic field exterior to but adjacent the target, a framework for supporting the magnet against rotation within the target, and a power train for causing the magnet to oscillate within and axially of the target in a substantially asynchronous manner to promote generally uniform target utilization along its length, as well as its method of use. In some embodiments, the magnet is oscillated in response to rotation of the target.
Type:
Grant
Filed:
June 30, 2005
Date of Patent:
August 9, 2011
Assignees:
Cardinal CG Company, General Plasma, Inc.
Inventors:
Klaus Hartig, Steve E. Smith, John E. Madocks
Abstract: Methods and apparatus for useful for protecting a substrate bearing a coating are provided. A separator in accordance with an exemplary embodiment of the present invention comprises a film carrying a plurality of particles Each particle preferably has a covered area adhered to the film and an exposed area that is larger than the covered area.
Type:
Grant
Filed:
December 6, 2002
Date of Patent:
August 9, 2011
Assignee:
Cardinal CG Company
Inventors:
Klaus Hartig, Leah M. Miller, Gary L. Pfaff
Abstract: A sheet-like pane bearing a low-maintenance coating on one surface and a low-emissivity coating on the opposite surface, wherein one of the low-maintenance coating and the low-emissivity coating has a single surface reflectivity of less than 3 times, and more than one-third, that of the other coating.
Type:
Grant
Filed:
April 16, 2007
Date of Patent:
August 2, 2011
Assignee:
Cardinal CG Company
Inventors:
Annette J. Krisko, Kari B. Myli, Gary L. Pfaff, James Brownlee
Abstract: The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed.
Abstract: The invention provides niobium-titanium films, coatings (e.g., low-emissivity coatings) comprising one or more niobium-titanium films, and substrates bearings such coatings. Methods of depositing niobium-titanium films are also provided.
Abstract: The invention provides low-emissivity coatings that are highly reflective of infrared radiation. The coating includes three infrared-reflection film regions, which may each comprise silver.
Abstract: The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed.
Type:
Grant
Filed:
December 2, 2005
Date of Patent:
April 12, 2011
Assignee:
Cardinal CG Company
Inventors:
Kari Myli, Gary Pfaff, James Brownlee, John German, Annette Krisko, Klaus Hartig
Abstract: The invention provides a substrate bearing a low-maintenance coating. The coating includes two films: a first film comprising silica (e.g., silicon dioxide) and a second film comprising titania (e.g., titanium dioxide). Preferably, both films are provided within particular thickness ranges. The invention also provides methods of depositing such coatings.
Type:
Grant
Filed:
October 12, 2011
Date of Patent:
November 20, 2012
Assignee:
Cardinal CG Company
Inventors:
Annette J. Krisko, Kari B. Myli, Gary L. Pfaff, James E. Brownlee
Abstract: The invention provides a substrate bearing a low-maintenance coating. The coating includes at least two films: a base film optionally comprising silica (e.g., silicon dioxide) and a film comprising titania (e.g., titanium dioxide). The invention also provides methods of depositing such coatings.
Type:
Grant
Filed:
October 12, 2011
Date of Patent:
April 16, 2013
Assignee:
Cardinal CG Company
Inventors:
Annette J. Krisko, Kari B. Myli, Gary L. Pfaff, James E. Brownlee