Patents Assigned to Carl Zeiss
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Patent number: 9155462Abstract: A short coherence interferometer for measuring several axially spaced-apart regions of a sample, especially of an eye, which has a measuring optical path, through which the measuring radiation falls on the sample, a tunable interferometer for the axial, relative retardation of parts of the radiation, wherein the axial relative retardation is assigned to the axial spacing of the regions and a detector for producing an interference signal from interfering measurement radiation, scattered or reflected back from the sample as sample radiation. The tunable interferometer divides the sample radiation into two parts, which are axially relatively retarded and superimposed so as to interfere. During the superimposition, the tunable interferometer forms individual radiations, which represent quadrature components of the sample radiation, and the detector detects the individual radiations.Type: GrantFiled: June 12, 2009Date of Patent: October 13, 2015Assignee: Carl Zeiss Meditec AGInventors: Martin Hacker, Ralf Ebersbach, Thomas Pabst
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Patent number: 9158207Abstract: An optical component for transmitting radiation includes a radiation protective layer, which includes at least one oxide material selected from germanium dioxide (GeO2), antimony pentoxide (Sb2O5), aluminum oxide (Al2O3), niobium(V) oxide (Nb2O5), tin oxide (SnO2), metal oxides of rare earths, in particular lanthanum oxide (La2O3) or cerium oxide (CeO2), yttrium oxide (Y2O3), yttrium aluminum oxides, zinc oxide (ZnO), indium oxide (In2O3), bismuth trioxide (Bi2O3), barium titanate (BaTiO3) and spinels, such as magnesium aluminate (MgAl2O4). The radiation protective layer can be varnish-like, and the oxide material can be contained in a binder of the varnish-like radiation protective layer.Type: GrantFiled: August 2, 2012Date of Patent: October 13, 2015Assignee: Carl Zeiss SMT GmbHInventor: Hans-Joachim Weippert
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Patent number: 9159532Abstract: The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.Type: GrantFiled: January 8, 2014Date of Patent: October 13, 2015Assignee: Carl Zeiss Microscopy Ltd.Inventors: Edward Hill, Stewart Bean
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Patent number: 9161426Abstract: An EUV light source for a projection exposure apparatus for EUV projection lithography includes a first electron beam device in the form of an electron beam supply device. The light source furthermore includes an EUV generation device supplied with an electron beam by the electron beam supply device. The light source furthermore includes a second electron beam device in the form of an electron beam disposal device which disposes of an electron beam in the beam path downstream of the EUV generation device. At least one of the electron beam devices on the one hand and the EUV generation device on the other hand are arranged in rooms which are situated one above the other and separated by a building ceiling. At least one electron beam passage is arranged in the building ceiling. This results in an electron beam-based EUV radiation source with the possibility of a manageable operational outlay.Type: GrantFiled: December 12, 2014Date of Patent: October 13, 2015Assignee: Carl Zeiss SMT GmbHInventor: Michael Patra
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Patent number: 9159527Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.Type: GrantFiled: April 10, 2008Date of Patent: October 13, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: Billy W. Ward, Lou Farkas, John A. Notte, Randall Percival
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Patent number: 9149652Abstract: Among other things, a method for transporting radiation to a body region is described, wherein, in a first step, a canal is formed up to the body region to be irradiated and wherein, in a second step, an applicator (10) which is fitted to the diameter of the canal is introduced into the canal in order to guide a probe tip. Advantageously, applicator (10) is formed for use with a radiation therapy device for producing a defined radiation dose for irradiating a body region, whereby applicator (10) has a base body (11) with a foot region (12) for the uptake of at least one component of a radiation therapy device (30), a cylindrical guide region (13) connecting thereto for the uptake of a probe tip of a radiation therapy device, whereby a transition region (14) is formed between the foot region (12) and the guide region (13), as well as a head region (15), which is formed at the distal end (21) of base body (11). The method can be utilized especially for the treatment of tumors in the vertebral column.Type: GrantFiled: June 30, 2008Date of Patent: October 6, 2015Assignee: CARL ZEISS MEDITEC AGInventors: Frederik Wenz, Dietrich Wolf, Norbert Reng, Holger Fuchs
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Patent number: 9151936Abstract: The invention relates to an optical inspecting system designed to image an object to be inspected with a variable imaging scale, comprising a variation system for imaging the object into infinity, a lens group downstream of the variation system for imaging the object from infinity into the image plane of the whole system, and a light source for generating light in order to illuminate the object, means for imaging the illuminating light into the exit pupil of the variation system being provided in the airspace between the fifth lens group and the subsequent lens group. Of the five lens groups of the variation system, the first, second, and fourth lens groups, when seen in the imaging direction, are arranged in a movable manner in the direction of the optical axis, whereas the third and fifth lens groups are not movable.Type: GrantFiled: November 7, 2011Date of Patent: October 6, 2015Assignee: Carl Zeiss Microscopy GmbHInventors: Rolf Wartmann, Kerstin Winkler, Joerg Sprenger
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Patent number: 9152056Abstract: An imaging optical system includes a plurality of mirrors that image an object field in an object plane into an image field in an image plane. At least one of the mirrors is obscured, and thus has an opening for imaging light to pass through. The fourth-last mirror in the light path before the image field is not obscured and provides, with an outer edge of the optically effective reflection surface thereof, a central shadowing in a pupil plane of the imaging optical system. The distance between the fourth-last mirror and the last mirror along the optical axis is at least 10% of the distance between the object field and the image field. An intermediate image, which is closest to the image plane, is arranged between the last mirror and the image plane. The imaging optical system can have a numerical aperture of 0.9. These measures, not all of which must be effected simultaneously, lead to an imaging optical system with improved imaging properties and/or reduced production costs.Type: GrantFiled: September 25, 2013Date of Patent: October 6, 2015Assignee: Carl Zeiss SMT GmbHInventor: Hans-Juergen Mann
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Publication number: 20150273243Abstract: An ophthalmic surgical pulse control apparatus has a pulse generator, which, during a switch-on duration of the pulse generator, generates pulses having a pulse duration during which a needle of a phacoemulsification handpiece substantially vibrates at resonance and which, during a switch-on duration of the pulse generator, produces pulse pauses having a pulse pause duration during which the needle vibrates only minimally or not at all. A pulse with a follow-on pulse pause forms a pulse packet having a pulse packet duration. The pulse generator generates pulse packets which immediately follow one another and the sequence of the values of pulse duration and pulse pause duration of sequential pulse packets during the entire switch-on duration of the pulse generator is an aperiodic sequence.Type: ApplicationFiled: March 28, 2014Publication date: October 1, 2015Applicant: Carl Zeiss Meditec AGInventors: Christoph Kuebler, Michael Eichler
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Patent number: 9146002Abstract: A method is provided for producing a support structure including an at least partly reversibly deformable base body with a cut-out. A component can be held in the cut-out by friction. The method includes machining the base body in the braced state, wherein an opening is introduced into the base body and/or widened. The opening is deformed when the deformation force is removed such that the cut-out is formed. The opening is formed such that the application of a joining force makes it possible to deform the cut-out such that a component to be held can be introduced into the deformed cut-out with a clearance fit and an at least partial recovery of the deformed cut-out brings about a pressure contact between the held component and the cut-out in predefined circumferential regions.Type: GrantFiled: March 4, 2014Date of Patent: September 29, 2015Assignee: Carl Zeiss SMT GmbHInventors: Markus Hauf, Martin Latzel
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Patent number: 9144400Abstract: Non-invasive optical measurement of glucose and other dissolved substances in human or animal intraocular fluid. A method takes advantage of the fact that the wave dependence of optical activity is fundamentally different from corneal birefringence. The optical activity of substances dissolved in the intraocular fluid, such as glucose, lactate, ascorbic acid or amino acids, is scaled as a first approximation with the reciprocal value of the wavelength square. In contrast, corneal birefringence is scaled with the reciprocal value of the wavelength and therefore behaves considerably different from the optical activity. For the method according to the invention, a physical model is used, which describes the influence on the polarization of measurement radiation by the components of the eye, particularly by the intraocular fluid and the cornea.Type: GrantFiled: April 2, 2014Date of Patent: September 29, 2015Assignee: Carl Zeiss AGInventor: Peter Westphal
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Patent number: 9146475Abstract: A projection exposure system includes an illumination system configured to illuminate a mask with radiation. The projection exposure system also includes a projection objective configured to project an image of a pattern of the mask onto a radiation-sensitive substrate. The projection exposure system further includes an angle-selective filter arrangement arranged at or close to a field surface of the projection objective in a projection beam path optically downstream of the object surface. The angle-selective filter arrangement is effective to filter radiation incident on the filter arrangement according to an angle-selective filter function.Type: GrantFiled: March 5, 2013Date of Patent: September 29, 2015Assignee: Carl Zeiss SMT GmbHInventors: Paul Gräupner, Olaf Conradi, Christoph Zaczek, Wilhelm Ulrich, Helmut Beierl, Toralf Gruner, Volker Graeschus
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Patent number: 9144517Abstract: A control device for an ophthalmic surgical system includes a flow determination device for determining an actual value of fluid flow in an aspiration line. The aspiration line is coupled to a handpiece for phacoemulsification of an eye lens and an occlusion determination device determines whether there is an occlusion because of a particle of the eye lens at a suction opening of the aspiration line. An evaluation unit establishes a hardness of the particle in dependence on the determined actual value of the fluid flow in the aspiration line should the occlusion determination device have determined that an occlusion is present, and, dependent on the hardness, determines a first value of ultrasound energy, which can be supplied to the handpiece by an energy source. A control unit actuates the energy source, during the occlusion, so that it outputs the determined first value of the ultrasound energy.Type: GrantFiled: March 30, 2013Date of Patent: September 29, 2015Assignee: Carl Zeiss Meditec AGInventors: Christoph Kuebler, Wolfram Wehner, Karlheinz Rein
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Patent number: 9144375Abstract: For the pre-operative calculation of the power of an intraocular lens, three input parameters are needed: the axial length of the eye (AL), the refractive power of the cornea, and the distance between the front of the cornea and the back focal plane of the intraocular lens, the so-called effective lens position (ELP). The invention shows a novel approach to the determination of the ELP.Type: GrantFiled: December 3, 2009Date of Patent: September 29, 2015Assignee: Carl Zeiss Meditec AGInventors: Rudolf Murai Von Bünau, Burkhart Wagner, Scott A. Meyer, Xunchang Chen
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Patent number: 9146472Abstract: The invention relates to a microlithography projection lens for wavelengths <=248 nm <=, preferably <=193 mm, in particular EUV lithography for wavelengths ranging from 1-30 nm for imaging an object field in an object plane onto an image field in an image plane, the microlithography projection lens developed in such a manner that provision is made for an accessible diaphragm plane, into which for instance an iris diaphragm can be introduced.Type: GrantFiled: November 14, 2013Date of Patent: September 29, 2015Assignee: Carl Zeiss SMT GmbHInventor: Hans-Juergen Mann
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Patent number: 9140994Abstract: A method for adjusting an optical system in a microlithographic projection exposure apparatus includes establishing, for a given actual position of a polarization-influencing component, a distribution of IPS values in a pupil plane of the projection exposure apparatus. Each IPS value denotes the degree of realization of a predetermined polarization state for a light ray reflected at a respective mirror element of the mirror arrangement. The method also includes changing the position of the polarization-influencing component on the basis of the established distribution.Type: GrantFiled: August 13, 2014Date of Patent: September 22, 2015Assignee: Carl Zeiss SMT GmbHInventors: Ingo Saenger, Bastian Trauter
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Patent number: 9140656Abstract: A method of operating a particle beam microscope includes: directing a particle beam onto a sample and detecting particles emanating from the sample during a first period for generating an image of the sample; generating electrons having a first distribution of kinetic energies and directing these electrons onto the sample during a second period for reducing a charge of the sample being generated while the directing the particle beam onto the sample; and generating electrons having a second distribution of their kinetic energies and directing these electrons onto the sample during a third period for further reducing the charge of the sample being generated while the directing of the particle beam onto the sample. An average value of the kinetic energy of the first distribution of the kinetic energy is greater than an average value of the kinetic energy of the second distribution of kinetic energies.Type: GrantFiled: July 7, 2014Date of Patent: September 22, 2015Assignee: Carl Zeiss Microscopy GmbHInventor: Lorenz Lechner
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Patent number: 9142382Abstract: An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.Type: GrantFiled: November 18, 2011Date of Patent: September 22, 2015Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: David L. Adler, Wenbing Yun, Thomas Anthony Case
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Patent number: 9140532Abstract: A measuring head for a coordinate measuring machine for determining spatial coordinates on a measurement object has a coupling part for detachably receiving a measurement tool. The coupling part has a number of first bearing elements, a magnet and a retaining pin. The measurement tool has a disk with a number of second bearing elements, an anchoring plate and at least one adjustable locking element. The magnet is configured to attract the anchoring plate so as to bring the first and second bearing elements into engagement with one another. The first and second bearing elements, in the engaged state, define a defined position of the measurement tool on the coupling part. The at least one locking element secures the measurement tool to the retaining pin. The anchoring plate is detachably secured to the disk and the at least one locking element retains the anchoring plate on the retaining pin.Type: GrantFiled: October 30, 2013Date of Patent: September 22, 2015Assignee: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBHInventors: Kurt Brenner, Walter Jenisch, Tobias Woletz, Dieter Kaufmann
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Patent number: RE45691Abstract: The present invention is directed to a fast, nondestructive measurement method for determining the contents of solid, liquid and/or suspended flowing organic compounds. The arrangement according to the invention comprises a sample vessel, a pump, and a measurement cell which form a unit together with a spectroscopic measurement head. The measurement cell is connected to the pump, which can be regulated to vary the flow rate, and to the sample vessel by a pipe, and the spectroscopic measurement head and the regulatable pump have electrical connections to a controlling and evaluating unit. Due to its compact construction, the solution which makes use of the principle of transflection is also particularly suited to mobile use, for example, to determine the components of liquid manure while the latter is being dispensed. In principle, the solution can be transferred to any applications with suspensions or pumpable, homogeneous and inhomogeneous materials.Type: GrantFiled: September 21, 2012Date of Patent: September 29, 2015Assignees: Carl Zeiss Microscopy GmbH, Christian-Albrechs-Universitaet Zu KielInventors: Michael Rode, Helga Andree, Diane F Malley