Patents Assigned to Carl Zeiss
  • Patent number: 9155462
    Abstract: A short coherence interferometer for measuring several axially spaced-apart regions of a sample, especially of an eye, which has a measuring optical path, through which the measuring radiation falls on the sample, a tunable interferometer for the axial, relative retardation of parts of the radiation, wherein the axial relative retardation is assigned to the axial spacing of the regions and a detector for producing an interference signal from interfering measurement radiation, scattered or reflected back from the sample as sample radiation. The tunable interferometer divides the sample radiation into two parts, which are axially relatively retarded and superimposed so as to interfere. During the superimposition, the tunable interferometer forms individual radiations, which represent quadrature components of the sample radiation, and the detector detects the individual radiations.
    Type: Grant
    Filed: June 12, 2009
    Date of Patent: October 13, 2015
    Assignee: Carl Zeiss Meditec AG
    Inventors: Martin Hacker, Ralf Ebersbach, Thomas Pabst
  • Patent number: 9158207
    Abstract: An optical component for transmitting radiation includes a radiation protective layer, which includes at least one oxide material selected from germanium dioxide (GeO2), antimony pentoxide (Sb2O5), aluminum oxide (Al2O3), niobium(V) oxide (Nb2O5), tin oxide (SnO2), metal oxides of rare earths, in particular lanthanum oxide (La2O3) or cerium oxide (CeO2), yttrium oxide (Y2O3), yttrium aluminum oxides, zinc oxide (ZnO), indium oxide (In2O3), bismuth trioxide (Bi2O3), barium titanate (BaTiO3) and spinels, such as magnesium aluminate (MgAl2O4). The radiation protective layer can be varnish-like, and the oxide material can be contained in a binder of the varnish-like radiation protective layer.
    Type: Grant
    Filed: August 2, 2012
    Date of Patent: October 13, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Joachim Weippert
  • Patent number: 9159532
    Abstract: The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: October 13, 2015
    Assignee: Carl Zeiss Microscopy Ltd.
    Inventors: Edward Hill, Stewart Bean
  • Patent number: 9161426
    Abstract: An EUV light source for a projection exposure apparatus for EUV projection lithography includes a first electron beam device in the form of an electron beam supply device. The light source furthermore includes an EUV generation device supplied with an electron beam by the electron beam supply device. The light source furthermore includes a second electron beam device in the form of an electron beam disposal device which disposes of an electron beam in the beam path downstream of the EUV generation device. At least one of the electron beam devices on the one hand and the EUV generation device on the other hand are arranged in rooms which are situated one above the other and separated by a building ceiling. At least one electron beam passage is arranged in the building ceiling. This results in an electron beam-based EUV radiation source with the possibility of a manageable operational outlay.
    Type: Grant
    Filed: December 12, 2014
    Date of Patent: October 13, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Michael Patra
  • Patent number: 9159527
    Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: October 13, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, Lou Farkas, John A. Notte, Randall Percival
  • Patent number: 9149652
    Abstract: Among other things, a method for transporting radiation to a body region is described, wherein, in a first step, a canal is formed up to the body region to be irradiated and wherein, in a second step, an applicator (10) which is fitted to the diameter of the canal is introduced into the canal in order to guide a probe tip. Advantageously, applicator (10) is formed for use with a radiation therapy device for producing a defined radiation dose for irradiating a body region, whereby applicator (10) has a base body (11) with a foot region (12) for the uptake of at least one component of a radiation therapy device (30), a cylindrical guide region (13) connecting thereto for the uptake of a probe tip of a radiation therapy device, whereby a transition region (14) is formed between the foot region (12) and the guide region (13), as well as a head region (15), which is formed at the distal end (21) of base body (11). The method can be utilized especially for the treatment of tumors in the vertebral column.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: October 6, 2015
    Assignee: CARL ZEISS MEDITEC AG
    Inventors: Frederik Wenz, Dietrich Wolf, Norbert Reng, Holger Fuchs
  • Patent number: 9151936
    Abstract: The invention relates to an optical inspecting system designed to image an object to be inspected with a variable imaging scale, comprising a variation system for imaging the object into infinity, a lens group downstream of the variation system for imaging the object from infinity into the image plane of the whole system, and a light source for generating light in order to illuminate the object, means for imaging the illuminating light into the exit pupil of the variation system being provided in the airspace between the fifth lens group and the subsequent lens group. Of the five lens groups of the variation system, the first, second, and fourth lens groups, when seen in the imaging direction, are arranged in a movable manner in the direction of the optical axis, whereas the third and fifth lens groups are not movable.
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: October 6, 2015
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Rolf Wartmann, Kerstin Winkler, Joerg Sprenger
  • Patent number: 9152056
    Abstract: An imaging optical system includes a plurality of mirrors that image an object field in an object plane into an image field in an image plane. At least one of the mirrors is obscured, and thus has an opening for imaging light to pass through. The fourth-last mirror in the light path before the image field is not obscured and provides, with an outer edge of the optically effective reflection surface thereof, a central shadowing in a pupil plane of the imaging optical system. The distance between the fourth-last mirror and the last mirror along the optical axis is at least 10% of the distance between the object field and the image field. An intermediate image, which is closest to the image plane, is arranged between the last mirror and the image plane. The imaging optical system can have a numerical aperture of 0.9. These measures, not all of which must be effected simultaneously, lead to an imaging optical system with improved imaging properties and/or reduced production costs.
    Type: Grant
    Filed: September 25, 2013
    Date of Patent: October 6, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Publication number: 20150273243
    Abstract: An ophthalmic surgical pulse control apparatus has a pulse generator, which, during a switch-on duration of the pulse generator, generates pulses having a pulse duration during which a needle of a phacoemulsification handpiece substantially vibrates at resonance and which, during a switch-on duration of the pulse generator, produces pulse pauses having a pulse pause duration during which the needle vibrates only minimally or not at all. A pulse with a follow-on pulse pause forms a pulse packet having a pulse packet duration. The pulse generator generates pulse packets which immediately follow one another and the sequence of the values of pulse duration and pulse pause duration of sequential pulse packets during the entire switch-on duration of the pulse generator is an aperiodic sequence.
    Type: Application
    Filed: March 28, 2014
    Publication date: October 1, 2015
    Applicant: Carl Zeiss Meditec AG
    Inventors: Christoph Kuebler, Michael Eichler
  • Patent number: 9146002
    Abstract: A method is provided for producing a support structure including an at least partly reversibly deformable base body with a cut-out. A component can be held in the cut-out by friction. The method includes machining the base body in the braced state, wherein an opening is introduced into the base body and/or widened. The opening is deformed when the deformation force is removed such that the cut-out is formed. The opening is formed such that the application of a joining force makes it possible to deform the cut-out such that a component to be held can be introduced into the deformed cut-out with a clearance fit and an at least partial recovery of the deformed cut-out brings about a pressure contact between the held component and the cut-out in predefined circumferential regions.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: September 29, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Markus Hauf, Martin Latzel
  • Patent number: 9144400
    Abstract: Non-invasive optical measurement of glucose and other dissolved substances in human or animal intraocular fluid. A method takes advantage of the fact that the wave dependence of optical activity is fundamentally different from corneal birefringence. The optical activity of substances dissolved in the intraocular fluid, such as glucose, lactate, ascorbic acid or amino acids, is scaled as a first approximation with the reciprocal value of the wavelength square. In contrast, corneal birefringence is scaled with the reciprocal value of the wavelength and therefore behaves considerably different from the optical activity. For the method according to the invention, a physical model is used, which describes the influence on the polarization of measurement radiation by the components of the eye, particularly by the intraocular fluid and the cornea.
    Type: Grant
    Filed: April 2, 2014
    Date of Patent: September 29, 2015
    Assignee: Carl Zeiss AG
    Inventor: Peter Westphal
  • Patent number: 9146475
    Abstract: A projection exposure system includes an illumination system configured to illuminate a mask with radiation. The projection exposure system also includes a projection objective configured to project an image of a pattern of the mask onto a radiation-sensitive substrate. The projection exposure system further includes an angle-selective filter arrangement arranged at or close to a field surface of the projection objective in a projection beam path optically downstream of the object surface. The angle-selective filter arrangement is effective to filter radiation incident on the filter arrangement according to an angle-selective filter function.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: September 29, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Paul Gräupner, Olaf Conradi, Christoph Zaczek, Wilhelm Ulrich, Helmut Beierl, Toralf Gruner, Volker Graeschus
  • Patent number: 9144517
    Abstract: A control device for an ophthalmic surgical system includes a flow determination device for determining an actual value of fluid flow in an aspiration line. The aspiration line is coupled to a handpiece for phacoemulsification of an eye lens and an occlusion determination device determines whether there is an occlusion because of a particle of the eye lens at a suction opening of the aspiration line. An evaluation unit establishes a hardness of the particle in dependence on the determined actual value of the fluid flow in the aspiration line should the occlusion determination device have determined that an occlusion is present, and, dependent on the hardness, determines a first value of ultrasound energy, which can be supplied to the handpiece by an energy source. A control unit actuates the energy source, during the occlusion, so that it outputs the determined first value of the ultrasound energy.
    Type: Grant
    Filed: March 30, 2013
    Date of Patent: September 29, 2015
    Assignee: Carl Zeiss Meditec AG
    Inventors: Christoph Kuebler, Wolfram Wehner, Karlheinz Rein
  • Patent number: 9144375
    Abstract: For the pre-operative calculation of the power of an intraocular lens, three input parameters are needed: the axial length of the eye (AL), the refractive power of the cornea, and the distance between the front of the cornea and the back focal plane of the intraocular lens, the so-called effective lens position (ELP). The invention shows a novel approach to the determination of the ELP.
    Type: Grant
    Filed: December 3, 2009
    Date of Patent: September 29, 2015
    Assignee: Carl Zeiss Meditec AG
    Inventors: Rudolf Murai Von Bünau, Burkhart Wagner, Scott A. Meyer, Xunchang Chen
  • Patent number: 9146472
    Abstract: The invention relates to a microlithography projection lens for wavelengths <=248 nm <=, preferably <=193 mm, in particular EUV lithography for wavelengths ranging from 1-30 nm for imaging an object field in an object plane onto an image field in an image plane, the microlithography projection lens developed in such a manner that provision is made for an accessible diaphragm plane, into which for instance an iris diaphragm can be introduced.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: September 29, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Patent number: 9140994
    Abstract: A method for adjusting an optical system in a microlithographic projection exposure apparatus includes establishing, for a given actual position of a polarization-influencing component, a distribution of IPS values in a pupil plane of the projection exposure apparatus. Each IPS value denotes the degree of realization of a predetermined polarization state for a light ray reflected at a respective mirror element of the mirror arrangement. The method also includes changing the position of the polarization-influencing component on the basis of the established distribution.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: September 22, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ingo Saenger, Bastian Trauter
  • Patent number: 9140656
    Abstract: A method of operating a particle beam microscope includes: directing a particle beam onto a sample and detecting particles emanating from the sample during a first period for generating an image of the sample; generating electrons having a first distribution of kinetic energies and directing these electrons onto the sample during a second period for reducing a charge of the sample being generated while the directing the particle beam onto the sample; and generating electrons having a second distribution of their kinetic energies and directing these electrons onto the sample during a third period for further reducing the charge of the sample being generated while the directing of the particle beam onto the sample. An average value of the kinetic energy of the first distribution of the kinetic energy is greater than an average value of the kinetic energy of the second distribution of kinetic energies.
    Type: Grant
    Filed: July 7, 2014
    Date of Patent: September 22, 2015
    Assignee: Carl Zeiss Microscopy GmbH
    Inventor: Lorenz Lechner
  • Patent number: 9142382
    Abstract: An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.
    Type: Grant
    Filed: November 18, 2011
    Date of Patent: September 22, 2015
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: David L. Adler, Wenbing Yun, Thomas Anthony Case
  • Patent number: 9140532
    Abstract: A measuring head for a coordinate measuring machine for determining spatial coordinates on a measurement object has a coupling part for detachably receiving a measurement tool. The coupling part has a number of first bearing elements, a magnet and a retaining pin. The measurement tool has a disk with a number of second bearing elements, an anchoring plate and at least one adjustable locking element. The magnet is configured to attract the anchoring plate so as to bring the first and second bearing elements into engagement with one another. The first and second bearing elements, in the engaged state, define a defined position of the measurement tool on the coupling part. The at least one locking element secures the measurement tool to the retaining pin. The anchoring plate is detachably secured to the disk and the at least one locking element retains the anchoring plate on the retaining pin.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: September 22, 2015
    Assignee: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
    Inventors: Kurt Brenner, Walter Jenisch, Tobias Woletz, Dieter Kaufmann
  • Patent number: RE45691
    Abstract: The present invention is directed to a fast, nondestructive measurement method for determining the contents of solid, liquid and/or suspended flowing organic compounds. The arrangement according to the invention comprises a sample vessel, a pump, and a measurement cell which form a unit together with a spectroscopic measurement head. The measurement cell is connected to the pump, which can be regulated to vary the flow rate, and to the sample vessel by a pipe, and the spectroscopic measurement head and the regulatable pump have electrical connections to a controlling and evaluating unit. Due to its compact construction, the solution which makes use of the principle of transflection is also particularly suited to mobile use, for example, to determine the components of liquid manure while the latter is being dispensed. In principle, the solution can be transferred to any applications with suspensions or pumpable, homogeneous and inhomogeneous materials.
    Type: Grant
    Filed: September 21, 2012
    Date of Patent: September 29, 2015
    Assignees: Carl Zeiss Microscopy GmbH, Christian-Albrechs-Universitaet Zu Kiel
    Inventors: Michael Rode, Helga Andree, Diane F Malley