Patents Assigned to GLOBALFOUNDRIES Inc.
  • Publication number: 20200334014
    Abstract: An adder includes a primary carry bit generation circuit and a summing circuit. The primary carry bit generation circuit is configured to generate first carry bits for a first number of pairs of bits from first and second operands, and to generate second carry bits for a second number of pairs of bits from the first and second operands. The second number of pairs being different than the first number of pairs. The summing circuit is configured to generate first sums by adding bits of pairs from the first and second number of pairs and the first and second carry bits. The summing circuit is configured to generate second sums by adding bits of other pairs of the bits from first and second operands than the pairs in the first and second number of pairs and additional carry bits generated when adding the bits of the other pairs.
    Type: Application
    Filed: July 6, 2020
    Publication date: October 22, 2020
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Ranjan B. LOKAPPA, Igor ARSOVSKI
  • Patent number: 10811409
    Abstract: Methods of manufacturing FinFETs including providing a precursor FinFET structure having a substrate with fins thereon, S/D junctions on fin tops, an STI layer on the substrate and between fins, a conformal first dielectric layer on the STI layer and S/D junctions, and a second dielectric layer on the first dielectric layer; forming a conformal third dielectric layer on the second dielectric layer and surfaces of the first dielectric layer located above the second dielectric layer; forming a fourth dielectric layer on the third dielectric layer such that third dielectric layer located between adjacent fins is exposed and such that third dielectric layer located above the adjacent fins is exposed; removing the exposed third dielectric layer and the first dielectric layer located thereunder, thereby exposing the S/D junctions; and forming a metal contact on the exposed S/D junctions and the exposed portion of the third dielectric layer between adjacent fins.
    Type: Grant
    Filed: October 16, 2018
    Date of Patent: October 20, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jiehui Shu, Hui Zang, Guowei Xu, Jian Gao
  • Patent number: 10811069
    Abstract: Structures for a non-volatile memory and methods for forming and using such structures. The structure includes a bitcell having a non-volatile memory element and a transmission gate. The transmission gate includes an n-type field-effect transistor and a p-type field effect transistor. The n-type field-effect transistor has a first drain region, a first source region, and a first gate electrode. The p-type field-effect transistor has a second drain region, a second source region coupled in parallel with the first source region, and a second gate electrode. The first drain region of the n-type field-effect transistor and the second drain region of the p-type field-effect transistor are coupled in parallel with the non-volatile memory element.
    Type: Grant
    Filed: January 15, 2019
    Date of Patent: October 20, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Harsh N. Patel, Bipul C. Paul
  • Patent number: 10811422
    Abstract: Methods according to the disclosure include forming a mask over a substrate to cover a first semiconductor region on the substrate and a first gate structure on the first semiconductor region. The second semiconductor region may be recessed from an initial height above the substrate to a reduced height above the substrate. The mask may be removed before forming a plurality of cavities by etching the first and second semiconductor regions, the plurality of cavities including a first cavity having a first depth within the first semiconductor region and a second cavity having a second depth within the second semiconductor region, wherein the second depth is greater than the first depth. The method also may include forming a plurality of epitaxial regions within the plurality of cavities.
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: October 20, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yanping Shen, Wei Hong, Hui Zang, David P. Brunco
  • Patent number: 10811411
    Abstract: Disclosed are a method of forming a fin-type field effect transistor (FINFET) and a FINFET structure. In the method, isolation regions are formed on opposing sides of a semiconductor fin. Each isolation region is shorter than the fin, has a lower isolation portion adjacent to a lower fin portion, and has an upper isolation portion that is narrower than the lower isolation portion and separated from a bottom section of an upper fin portion by a space. Surface oxidation of the upper fin portion thins the top section, but leaves the bottom section relatively wide. During gate formation, the gate dielectric layer fills the spaces between the bottom section of the upper fin portion and the adjacent isolation regions. Thus, the gate conductor layer is formed above any fin bulge area and degradation of gate control over the channel region due to a non-uniform fin width is minimized or avoided.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: October 20, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jiehui Shu, Bharat V. Krishnan
  • Patent number: 10809633
    Abstract: Structures for detecting and correcting an overlay inaccuracy and methods of detecting and correcting an overlay inaccuracy. An overlay target includes a first plurality of features arranged along a first longitudinal axis in a first line-space pattern having a first line width, and a second plurality of features arranged along a second longitudinal axis in a second line-space pattern having a second line width that is less than the first line width. The second longitudinal axis is aligned substantially parallel to the first longitudinal axis.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: October 20, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Dongyue Yang, Cheuk Wun Wong, Xintuo Dai, Sanggil Bae
  • Patent number: 10811433
    Abstract: One illustrative device disclosed herein is formed on an SOI substrate. The transistor device includes a first channel region formed in a semiconductor bulk substrate of the SOI substrate and a first gate insulation layer formed above the first channel region. In one embodiment, the first gate insulation layer includes a part of the buried insulation layer of the SOI substrate and an oxidized part of the semiconductor layer of the SOI substrate.
    Type: Grant
    Filed: June 20, 2019
    Date of Patent: October 20, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Elliot John Smith, Nigel Chan, Nilesh Kenkare
  • Patent number: 10811319
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to middle of line structures and methods of manufacture. The structure includes: a plurality of gate structures; source and drain regions adjacent to respective gate structures of the plurality of gate structures; metallization features contacting selected source and drain regions; and recessed metallization features contacting other selected source and drain regions.
    Type: Grant
    Filed: November 29, 2018
    Date of Patent: October 20, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hui Zang, Ruilong Xie
  • Patent number: 10804398
    Abstract: A device including source-drain epitaxy contacts with a trench silicide (TS) liner wrapped around the source-drain contacts, and method of production thereof. Embodiments include a device having a gate structure formed over a substrate; source-drain epitaxy contacts including a trench silicide (TS) liner covering the source-drain epitaxy contacts; TS contacts formed on the TS liner over the source-drain epitaxy contacts; and a dielectric pillar disposed in a TS cut between the source-drain epitaxy contacts. The TS liner wraps around the source-drain epitaxy contacts, including bottom negatively tapered surfaces of the source-drain epitaxy contacts.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: October 13, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Julien Frougier, Ruilong Xie
  • Patent number: 10804416
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plurality of non-planar fin structures.
    Type: Grant
    Filed: June 12, 2019
    Date of Patent: October 13, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Ajey P. Jacob
  • Patent number: 10804170
    Abstract: The present disclosure relates to a method which includes generating a device layout of an eBeam based overlay (EBO OVL) structure with a minimum design rule, simulating a worst case process margin for the generated device layout of the EBO OVL structure, enabling a plurality of devices for the simulated worst case process margin for the generated device layout of the EBO OVL structure, and breaking a plurality of design rules for the enabled plurality of devices of the EBO OVL structure to generate an OVL measurement layout of the EBO OVL structure.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: October 13, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hongliang Shen, Guoxiang Ning, Erfeng Ding, Dongsuk Park, Xiaoxiao Zhang, Lan Yang
  • Patent number: 10802393
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an extreme ultraviolet (EUV) lithography mask and methods of manufacture. The EUV mask structure includes: a reflective layer; a capping material on the reflective layer; a buffer layer on the capping layer; alternating absorber layers on the buffer layer; and a capping layer on the top of the alternating absorber layers.
    Type: Grant
    Filed: October 16, 2017
    Date of Patent: October 13, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Lei Sun, Obert R. Wood, II, Genevieve Beique, Yulu Chen, Erik Verduijn, Francis Goodwin
  • Patent number: 10804199
    Abstract: A method of fabricating interconnects in a semiconductor device is provided, which includes forming an interconnect layer with a plurality of first conductive lines formed of a first conductive material in a dielectric layer. At least one via opening is formed over the plurality of first conductive lines and an interconnect via formed of a second conductive material is formed in the via opening, wherein the formed interconnect via has a convex top surface.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: October 13, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Yongjun Shi, Ruilong Xie, Nan Fu, Chun Yu Wong
  • Patent number: 10804379
    Abstract: A method for producing a finFET to prevent gate contact and trench silicide (TS) electrical shorts. Embodiments include forming a finFET over a substrate, the finFET comprising an epi S/D region formed at sides of a gate; forming an ?-Si layer in a recess over the epi S/D; forming an oxide layer over the ?-Si layer; forming a non-TS isolation opening over the substrate; forming a low dielectric constant layer in the non-TS isolation opening; removing the oxide layer and ?-Si layer; forming an opening over the gate and an opening over the epi S/D region; and forming a gate contact in the opening over the gate and an epi S/D contact over the opening over the epi S/D region.
    Type: Grant
    Filed: May 15, 2018
    Date of Patent: October 13, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hui Zang, Ruilong Xie, Scott Beasor
  • Patent number: 10796750
    Abstract: The present disclosure relates to a structure including a sequential mode read controller which is configured to receive a sequential read enable burst signal and a starting word line address, identify consecutive read operations from an array of storage cells accessed via a plurality of word lines, precharge a plurality of bit lines of the storage cells no more than once during the consecutive read operations, and hold a word line of the word lines active throughout the consecutive read operations. The sequential read enable burst signal and a starting word line address are decoded to select a row address and activate the corresponding word line from a plurality of word lines in the array.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: October 6, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Igor Arsovski, Akhilesh Patil, Eric D. Hunt-Schroeder
  • Patent number: 10797154
    Abstract: A method for forming self-aligned contacts includes patterning a mask between fin regions of a semiconductor device, etching a cut region through a first dielectric layer between the fin regions down to a substrate and filling the cut region with a first material, which is selectively etchable relative to the first dielectric layer. The first dielectric layer is isotropically etched to reveal source and drain regions in the fin regions to form trenches in the first material where the source and drain regions are accessible. The isotropic etching is super selective to remove the first dielectric layer relative to the first material and relative to gate structures disposed between the source and drain regions. Metal is deposited in the trenches to form silicide contacts to the source and drain regions.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: October 6, 2020
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC.
    Inventors: Andrew M. Greene, Balasubramanian Pranatharthiharan, Ruilong Xie
  • Patent number: 10795083
    Abstract: Structures for a directional coupler and methods of fabricating a structure for a directional coupler. A first section of a first waveguide core is laterally spaced from a second section of a second waveguide core. A coupling element is arranged either over or under the first section of the first waveguide core and the second section of the second waveguide core. The first and second waveguide cores are comprised of a material having a first refractive index, and the first coupling element is comprised of a material having a second refractive index that is different from the first refractive index. The first coupling element is surrounded by a side surface that overlaps with the first section of the first waveguide core and the second section of the second waveguide core.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: October 6, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yusheng Bian, Ajey Poovannummoottil Jacob, Steven M. Shank
  • Patent number: 10795082
    Abstract: Structures that include a Bragg grating and methods of fabricating a structure that includes a Bragg grating. Bragg elements are positioned adjacent to a waveguide. The Bragg elements are separated by grooves that alternate with the Bragg elements. A dielectric layer includes portions positioned to close the grooves to define airgaps. The airgaps are respectively arranged between adjacent pairs of the Bragg elements. The Bragg elements may be used to form the Bragg grating.
    Type: Grant
    Filed: August 14, 2019
    Date of Patent: October 6, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ajey Poovannummoottil Jacob, Yusheng Bian, Theodore Letavic, Kenneth J. Giewont, Steven M. Shank
  • Patent number: 10795430
    Abstract: A semiconductor device is disclosed that includes, among other things, a computing device including a plurality of transistors, an activity monitor to determine an activity metric associated with the plurality of transistors, and a power controller to, responsive to the activity metric indicating a first activity level, set a power supply voltage for the plurality of transistors to a first value, and responsive to the activity metric indicating a second activity level less than the first activity level, set the power supply voltage to a second value greater than the first value and apply a first reverse back bias voltage to the plurality of transistors to increase a threshold voltage of the plurality of transistors.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: October 6, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Igor Arsovski, Kushal Kamal
  • Patent number: 10797046
    Abstract: Embodiments of the disclosure provide a resistor structure for an integrated circuit (IC) and related methods. The resistor structure may include: a shallow trench isolation (STI) region on a substrate; a resistive material above a portion of the shallow trench isolation (STI) region; a gate structure on another portion of the STI region, above the substrate, and horizontally displaced from the resistive material; an insulative barrier above the STI region and contacting an upper surface and sidewalls of the resistive material, an upper surface of the insulative barrier being substantially coplanar with an upper surface of the gate structure; and a pair of contacts within the insulative barrier, and each positioned on an upper surface of the resistive material.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: October 6, 2020
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Jiehui Shu, Hui Zang