Patents Assigned to GLOBALFOUNDRIES Singapore Pte. Ltd.
  • Patent number: 11728381
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to electrostatic discharge (ESD) devices and methods of manufacture. The structure includes a bipolar transistor device, including a base region, having a base contact region, in a first well of a first conductivity type, a collector region, having a collector contact region, in a second well of a second conductivity type, and an emitter region, having an emitter contact region, in the first well, located between the base contact region and the second well, and a reverse-doped resistance well, of the second conductivity type, located in the first well of the first conductivity type between the base contact region and the emitter contact region structured to decrease turn-on voltage of the bipolar transistor device.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: August 15, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Kyongjin Hwang, Raunak Kumar, Robert J. Gauthier, Jr.
  • Patent number: 11721731
    Abstract: A nonvolatile memory device is provided. The device comprises an active region, a floating gate over the active region and a wordline next to the floating gate. The floating gate has at least two narrow tips adjacent to the wordline and a portion of the floating gate between the narrow tips has a concave profile.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: August 8, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Zar Lwin Zin, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 11716914
    Abstract: A memory device and method of making the same is provided. The memory device comprises a first electrode having a length along a first axis, a second electrode having a length along a second axis that is perpendicular to the first axis, and a switching layer adjacent to the first electrode. A portion of the switching layer is positioned between a first electrode edge and a second electrode portion. The cross-sections of the first and second electrodes may have a polygonal shape.
    Type: Grant
    Filed: November 11, 2020
    Date of Patent: August 1, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Jianxun Sun, Juan Boon Tan, Tupei Chen
  • Patent number: 11706987
    Abstract: A semiconductor device may include: a substrate wafer, a bonding layer at least partially covering a front surface of the substrate wafer, a plurality of silicon pillars bonded to the front surface of the substrate wafer by the bonding layer, a single-crystal piezoelectric film having a first surface and an opposing second surface, a top electrode arranged adjacent to the first surface of the single-crystal piezoelectric film, and a bottom electrode arranged adjacent to the second surface of the single-crystal piezoelectric film. The single-crystal piezoelectric film may be supported by the plurality of silicon pillars such that the second surface of the piezoelectric film and the front surface of the substrate wafer enclose a cavity therebetween.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: July 18, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: You Qian, Joan Josep Giner De Haro, Rakesh Kumar
  • Patent number: 11688785
    Abstract: A semiconductor device is provided. The semiconductor device comprises a substrate having a first surface and a second surface, the substrate comprising a wide bandgap semiconductor material. An epitaxial layer is on the first surface of the substrate and a metal germanosilicide layer is above the second surface of the substrate. The metal germanosilicide layer forms an ohmic contact to the substrate.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: June 27, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yudi Setiawan, Handoko Linewih
  • Patent number: 11690306
    Abstract: A resistive memory device is provided. The resistive memory device comprises a first metal oxide layer above a body electrode. A correlated electron layer located between a source and a drain and above the first metal oxide layer. A gate above a bottom portion of the correlated electron layer.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: June 27, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Juan Boon Tan
  • Patent number: 11658240
    Abstract: A semiconductor device is provided, which includes a multi-layered substrate, a first doped region, a second doped region, and a gate structure. The multi-layered substrate has a device layer over an isolation layer and the device layer includes a first region having a first substrate thickness and a second region having a second substrate thickness that is lesser than the first substrate thickness. The first doped region is in the first region and the second doped region is in the second region. The gate structure is between the first and second doped regions.
    Type: Grant
    Filed: October 4, 2020
    Date of Patent: May 23, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventor: Bong Woong Mun
  • Patent number: 11658128
    Abstract: The embodiments herein relate to packages of semiconductor devices having a shielding element and methods of forming the same. An assembly is provided. The assembly includes a semiconductor chip having a passive component and a package within which the semiconductor chip is positioned in. The package includes a shielding element and a package conductive component, and the package conductive component is electrically coupled with the passive component of the semiconductor chip.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: May 23, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Ranjan Rajoo, Venkata Narayana Rao Vanukuru
  • Patent number: 11659709
    Abstract: A nonvolatile memory device is provided. The nonvolatile memory device comprises an active region surrounded by an isolation structure. A floating gate may be arranged over the active region, the floating gate having a first end and a second end over the isolation structure. A first doped region may be provided in the active region adjacent to a first side of the floating gate and a second doped region may be provided in the active region adjacent to a second side of the floating gate. A first capacitor may be provided over the floating gate, whereby a first electrode of the first capacitor is electrically coupled to the floating gate. A second capacitor may be provided, whereby a first electrode of the second capacitor is over the isolation structure and adjacent to the floating gate.
    Type: Grant
    Filed: August 21, 2020
    Date of Patent: May 23, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Xinshu Cai, Shyue Seng Tan, Juan Boon Tan, Kiok Boone Elgin Quek, Eng Huat Toh
  • Patent number: 11652069
    Abstract: The present disclosure relates to semiconductor structures, and more particularly, to crackstop structures and methods of manufacture. The structure includes: a die matrix comprising a plurality of dies separated by at least one scribe lane; and a crackstop structure comprising at least one line within the at least one scribe lane between adjacent dies of the plurality of dies.
    Type: Grant
    Filed: December 8, 2020
    Date of Patent: May 16, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Ranjan Rajoo, Frank G. Kuechenmeister, Dirk Breuer
  • Publication number: 20230144064
    Abstract: Disclosed are a system and method for automatically and systematically generating device-based design rules and corresponding device-based design rule checking (DRC) codes. In the system and method, design rules associated with specific devices are generated based on at least one table of related data (e.g., maturity status information, restriction status information, etc.) for different devices. Based on the design rules and on unique definitions for the specific devices, design rule checking (DRC) codes associated with the specific devices are generated. By using this approach, comprehensive and accurate device-based design rules and corresponding device-based DRC codes can be quickly generated to ensure acceptable product reliability and yield. Furthermore, processes used to generate the device-based DRC codes can be iteratively repeated (e.g.
    Type: Application
    Filed: November 5, 2021
    Publication date: May 11, 2023
    Applicant: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Shu Zhong, Ming Zhu, Pinghui Li, Yiang Aun Nga
  • Patent number: 11646279
    Abstract: A semiconductor structure may be provided, including a conductive pad, a slot arranged through the conductive pad, a passivation layer arranged over the conductive pad and a plurality of electrical interconnects arranged under the conductive pad. The conductive pad may include an electrically conductive material and the slot may include an electrically insulating material. The passivation layer may include an opening that may expose a portion of the conductive pad and the slot may be arranged laterally between the exposed portion of the conductive pad and the plurality of electrical interconnects.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: May 9, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xiaodong Li, Ramasamy Chockalingam, Juan Boon Tan
  • Patent number: 11646360
    Abstract: Methods of forming a compact FDSOI OTP/MTP cell and a compact FinFET OTP/MTP cell and the resulting devices are provided. Embodiments include forming a SOI region or a fin over a BOX layer over a substrate; forming a first and a second gate stack, laterally separated, over respective portions of the SOI region or the fin; forming a first and a second liner along each first and second sidewall and of the first and the second gate stack, respectively, the second sidewall over respective portions of the SOI region or the fin; forming a spacer on each first and second liner; forming a S/D region in the SOI region or the fin between the first and the second gate stack; forming a CA over the S/D region; utilizing each gate of the first gate stack and the second gate stack as a WL; and connecting a BL to the CA.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: May 9, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Eng Huat Toh, Shyue Seng Tan, Elgin Kiok Boone Quek
  • Patent number: 11639959
    Abstract: A system and method for defect localization in embedded memory are provided. Embodiments include a system including automated testing equipment (ATE) interfaced with a wafer probe including a diagnostic laser for stimulating a DUT with the diagnostic laser at a ROI. The ATE is configured to simultaneously perform a test run at a test location of the DUT with a test pattern during stimulation of the DUT. Failing compare vectors of a reference failure log of a defective device are stored. A first profile module is configured to generate a first 3D profile from each pixel of a reference image of the defective device. A second profile module is configured to generate a second 3D profile from each pixel of the ROI of the DUT. A cross-correlation module is configured to execute a pixel-by-pixel cross-correlation from the first and second 3D profiles and generate an intensity map corresponding to a level of correlation between the DUT and defective device.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: May 2, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Szu Huat (Wu Shifa) Goh, Yin Hong Chan, Boon Lian Yeoh, Lin Zhao, Man Hon Thor
  • Patent number: 11641789
    Abstract: According to various embodiments, there is provided a memory cell. The memory cell may include a transistor, a dielectric member, an electrode and a contact member. The dielectric member may be disposed over the transistor. The electrode may be disposed over the dielectric member. The contact member has a first end and a second end opposite to the first end. The first end is disposed towards the transistor, and the second end is disposed towards the dielectric member. The contact member has a side surface extending from the first end to the second end. The second end may have a recessed end surface that has a section that slopes towards the side surface so as to form a tip with the side surface at the second end. The dielectric member may be disposed over the second end of the contact member and may include at least a portion disposed over the tip.
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: May 2, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yi Jiang, Benfu Lin, Lup San Leong, Curtis Chun-I Hsieh, Wanbing Yi, Juan Boon Tan
  • Patent number: 11641739
    Abstract: A memory device is provided. The memory device includes an active region in a substrate, an electrically-isolated electrode, and a dielectric layer. The electrically-isolated electrode is disposed over the active region. The dielectric layer is disposed between the electrically-isolated electrode and the active region and has a first dielectric portion having a first thickness and a second dielectric portion having a second thickness.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: May 2, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yongshun Sun, Eng Huat Toh, Shyue Seng Tan, Xinshu Cai, Lanxiang Wang
  • Patent number: 11637100
    Abstract: The present disclosure generally relates to a semiconductor device having a capacitor and a resistor and a method of forming the same. More particularly, the present disclosure relates to a metal-insulator-metal (MIM) capacitor and a thin film resistor (TFR) formed in a back end of line portion of an integrated circuit (IC) chip.
    Type: Grant
    Filed: August 11, 2021
    Date of Patent: April 25, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Qiying Wong, Handoko Linewih, Yudi Setiawan, Chengang Feng, Siow Lee Chwa
  • Patent number: 11631470
    Abstract: A semiconductor chip may include a memory, a power supply line, a noise generator and a switch. The power supply line may include first and second power supply line portions. The power supply line may be configured to provide a power supply signal through each of the first power supply line portion and the second power supply line portion. The noise generator may be connected to the second power supply line portion. The noise generator may be configured to receive the power supply signal from the second power supply line portion, and output a noisy power supply signal based on the power supply signal. The switch may be coupled to the memory, the first power supply line portion, and the noise generator. The switch may be configured to selectively electrically connect the memory to one of the first power supply line portion and the noise generator.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: April 18, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Szu Huat Goh, Shaalini Sivaramakrishnan, Li Song, Wei Fong Soh
  • Patent number: 11631800
    Abstract: In a non-limiting embodiment, a device may include a substrate, and a hybrid active structure disposed over the substrate. The hybrid active structure may include an anchor region and a free region. The hybrid active structure may be connected to the substrate at least at the anchor region. The anchor region may include at least a segment of a piezoelectric stack portion. The piezoelectric stack portion may include a first electrode layer, a piezoelectric layer over the first electrode layer, and a second electrode layer over the piezoelectric layer. The free region may include at least a segment of a mechanical portion. The piezoelectric stack portion may overlap the mechanical portion at edges of the piezoelectric stack portion.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: April 18, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Jia Jie Xia, Ranganathan Nagarajan, Bevita Kallupalathinkal Chandran, Miles Jacob Gehm
  • Patent number: 11626512
    Abstract: An ESD protection device may include a substrate having first and second substrate layers, and first and second bridged regions. Each substrate layer may include first and second border regions and a middle region laterally therebetween. Each bridged region may be arranged within the middle region and a respective border region of the second substrate layer. The middle region of the second substrate layer may be laterally narrower than the middle region of the first substrate layer. Each border region of the second substrate layer may be partially arranged over the middle region of the first substrate layer and partially arranged over a respective border region of the first substrate layer. The border regions of the substrate layers, and the bridged regions may have a first conductivity type, and the middle regions of the substrate layers may have a second conductivity type different from the first conductivity type.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: April 11, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Jie Zeng, Milova Paul, Sagar Premnath Karalkar