Patents Assigned to Heidelberg Instruments Mikrotechnik GmbH
  • Patent number: 9176391
    Abstract: A method and apparatus operable for displacing an image, which is transmitted by electromagnetic radiation, perpendicular to the direction of radiation by use of a rotatably disposed radiation-refracting body, located in the path of an imaging beam, having a refractive index that differs from the surrounding medium with regard to the radiation used. The method allows for precise image displacement. The rotation of the radiation-refracting body causing the displacement is measured, and the change of the optical path length caused by the angular change in a further electromagnetic beam utilized for the measurement is determined by evaluating the superimposition of the radiation reflected by a planar reflecting surface with the incident electromagnetic radiation. Part of the electromagnetic measurement beam, which is reflected on the surface of the radiation-refracting body, strikes a measurement unit, which supplies an electrical signal as a function of the incident position of the electromagnetic radiation.
    Type: Grant
    Filed: March 10, 2009
    Date of Patent: November 3, 2015
    Assignee: Heidelberg Instruments Mikrotechnik GMBH
    Inventors: Michael Fangerau, Alexander Mangold, Roland Kaplan
  • Patent number: 9052608
    Abstract: A method and apparatus for imaging a radiation-sensitive substrate, wherein a programmable template is projected onto the radiation-sensitive substrate using coherent radiation having a wavelength at which the substrate is radiation sensitive. An overall image of the programmable template having an image grid is displaced simultaneously by an acoustic-optical or electro-optical deflection unit such that multiple projections impinge on the substrate at different positions such that a fine partial grid is created in the image grid on the substrate.
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: June 9, 2015
    Assignee: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Roelof Wijnaendts Van Resandt, Roland Kaplan
  • Patent number: 8390790
    Abstract: A pattern, is imaged by means of a programmable mask, on a substrate that has a photosensitive layer, illumination spots being produced on the mask by means of an illumination unit and individual pixels being produced, via an optical unit, forming a grid of pixels on the substrate corresponding to the pattern. Structure edges that are to be reproduced on the substrate are positioned optimally. To this end at least two exposure processes for the photosensitive layer are performed, the illumination spots or exposure points of which are offset from one another. Thereby, spaces in the grid of pixels of the first exposure process, which spaces are proportionate to the number of exposure processes to be effected, are filled with pixels by the subsequent exposure processes.
    Type: Grant
    Filed: April 4, 2008
    Date of Patent: March 5, 2013
    Assignee: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Alexander Mangold, Udo Becker, Steffen Diez, Roland Kaplan
  • Patent number: 7826130
    Abstract: A device for the optical splitting and modulation of monochromatic coherent electromagnetic radiation, in particular light beams and/or laser beams, contains a beam source, an acousto-optical element disposed downstream of the latter and serving for splitting the beam generated by means of the beam source into a number of partial beams, a modulator and also a signal generator for applying to the acousto-optical element an electrical signal for splitting the beam. The device is intended to be developed to the effect that in conjunction with a simple and functionally reliable construction and independently of the number of beams emitted by the beam source, the intensity of the individual split partial beams can be kept constant.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: November 2, 2010
    Assignee: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Michael Schweitzer, Joachim Jehle
  • Publication number: 20100091256
    Abstract: A pattern, is imaged by means of a programmable mask, on a substrate that has a photosensitive layer, illumination spots being produced on the mask by means of an illumination unit and individual pixels being produced, via an optical unit, forming a grid of pixels on the substrate corresponding to the pattern. Structure edges that are to be reproduced on the substrate are positioned optimally. To this end at least two exposure processes for the photosensitive layer are performed, the illumination spots or exposure points of which are offset from one another. Thereby, spaces in the grid of pixels of the first exposure process, which spaces are proportionate to the number of exposure processes to be effected, are filled with pixels by the subsequent exposure processes.
    Type: Application
    Filed: April 4, 2008
    Publication date: April 15, 2010
    Applicant: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Alexander Mangold, Udo Becker, Steffen Diez, Roland Kaplan
  • Patent number: 7487069
    Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focused onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focused measuring spot is determined based on the measured values obtained by the light detector (12).
    Type: Grant
    Filed: September 27, 2007
    Date of Patent: February 3, 2009
    Assignee: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Sven Vogler, Roland Kaplan, Robert Weikert, Roelof Wijnaendts-Van-Resandt
  • Publication number: 20080021671
    Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focused onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focused measuring spot is determined based on the measured values obtained by the light detector (12).
    Type: Application
    Filed: September 27, 2007
    Publication date: January 24, 2008
    Applicant: HEIDELBERG INSTRUMENTS MIKROTECHNIK GmbH
    Inventors: Sven VOGLER, Roland Kaplan, Robert Weikert, Roelof Wijnaendts-Van-Resandt
  • Patent number: 7202990
    Abstract: The invention relates to a method and a device for light modulation, wherein the intensity of light can be altered by means of electrically chargeable or charged particles (5). The aim of the invention is to obtain light modulation in an economical, fast and reliably reproducible manner. According to the invention, a gas or vacuum is provided wherein the particles (5) can be displaced; a granular gas (6) is produced using said gas or vacuum between at least two electrodes (1, 2) in such a manner that electrically charged particles (5) in the electric field between the electrodes (1, 2) can be moved backwards and forth and the light which is to be modulated is guided through the granular gas (6) between the electrodes (1, 2).
    Type: Grant
    Filed: March 25, 2003
    Date of Patent: April 10, 2007
    Assignee: Heidelberg Instruments Mikrotechnik GmbH
    Inventor: Sven Preuss
  • Publication number: 20070021939
    Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focussed onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focussed measuring spot is determined based on the measured values obtained by the light detector (12).
    Type: Application
    Filed: September 28, 2006
    Publication date: January 25, 2007
    Applicant: HEIDELBERG INSTRUMENTS MIKROTECHNIK GmbH
    Inventors: Sven Vogler, Roland Kaplan, Robert Weikert, Roelof Wijnaendts-Van-Resandt
  • Publication number: 20060106552
    Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focussed onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focussed measuring spot is determined based on the measured values obtained by the light detector (12).
    Type: Application
    Filed: December 22, 2005
    Publication date: May 18, 2006
    Applicant: HEIDELBERG INSTRUMENTS MIKROTECHNIK GmbH
    Inventors: Sven Vogler, Roland Kaplan, Robert Weikert, Roelof Wijnaendts-Van-Resandt
  • Publication number: 20050171725
    Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focussed onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focussed measuring spot is determined based on the measured values obtained by the light detector (12).
    Type: Application
    Filed: March 28, 2005
    Publication date: August 4, 2005
    Applicant: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Sven Vogler, Roland Kaplan, Robert Weikert, Roelof Wijnaendts-Van-Resandt
  • Publication number: 20040024563
    Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focussed onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (10) of the intensity distribution of the focussed measuring spot is determined based on the measured values obtained by the light detector (12).
    Type: Application
    Filed: July 29, 2003
    Publication date: February 5, 2004
    Applicant: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Sven Vogler, Roland Kaplan, Robert Weikert, Roelof Wijnaendts-Van-Resandt
  • Patent number: 6639179
    Abstract: A method of producing microbore holes in a multi-layer substrate (5), preferably a printed circuit board substrate, that is displaced below writing optics (4) by an XY stage (6), using the optics to generate a spot from a light source (1), preferably a laser. The method reduces the treatment time and preferably compensates for distortions in the substrate material. To this end, the position of the spot within a working field is changed simultaneously with the treatment positions by electronically controlled, movable mirrors. The position of the substrate is determined by an interferometer (9, 11), and the signals corresponding to the substrate position are processed by a suitable computer system (16) to obtain an actual position of the table system. The computer system (16) is preferably provided with all bore hole coordinates and additional information such as bore hole diameter, especially in tabular form.
    Type: Grant
    Filed: January 23, 2002
    Date of Patent: October 28, 2003
    Assignee: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Sven Vogler, Roland Kaplan
  • Publication number: 20030033112
    Abstract: A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focussed onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focussed measuring spot is determined based on the measured values obtained by the light detector (12).
    Type: Application
    Filed: July 19, 2002
    Publication date: February 13, 2003
    Applicant: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Sven Vogler, Roland Kaplan, Robert Weikert, Roelof Wijnaendts-Van-Resandt
  • Publication number: 20010009751
    Abstract: In a lithographic process for producing microstructures by means of a direct write system, predefined areas are exposed by means of a focussed beam, particularly a laser beam, in order to produce microstructures. This process is to be further developed such that structures can be produced which are smaller than the optical resolution of the system. For this purpose, the intensity of the focussed beam is modulated as a function of the spatial frequency of the structure to be produced, and the structure is produced by removing the photosensitive layer in accordance with a serially scanned grid pattern. The exposure is advantageously carried out in two successive exposure steps.
    Type: Application
    Filed: February 15, 2001
    Publication date: July 26, 2001
    Applicant: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Roelof Wijnaendts, Christian Buchner