Abstract: A method and system for fabricating solid-state energy-storage and energy-conversion devices including fabrication of films for devices without an anneal step, especially for the fabrication of supercapacitors and photovoltaic cells. A film is fabricated by depositing a first material layer to a location. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of the film and controls stoichiometry.
March 23, 2001
October 25, 2001
Inegrated Power Solutions Inc.
Mark Lynn Jenson, Jody Jon Klaassen, Jenn-Feng Yan