Abstract: A method and system for fabricating solid-state energy-storage and energy-conversion devices including fabrication of films for devices without an anneal step, especially for the fabrication of supercapacitors and photovoltaic cells. A film is fabricated by depositing a first material layer to a location. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of the film and controls stoichiometry.
Type:
Application
Filed:
March 23, 2001
Publication date:
October 25, 2001
Applicant:
Inegrated Power Solutions Inc.
Inventors:
Mark Lynn Jenson, Jody Jon Klaassen, Jenn-Feng Yan