Abstract: Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
Type:
Grant
Filed:
April 20, 2018
Date of Patent:
January 8, 2019
Assignee:
J.A. Woollam Co., Inc.
Inventors:
Stefan Schoeche, Jeremy A. Van Derslice, Jeffrey S. Hale, Craig M. Herzinger
Abstract: Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
Type:
Grant
Filed:
October 13, 2017
Date of Patent:
September 11, 2018
Assignees:
BOARD OF REGENTS FOR THE UNIVERSITY OF NEBRASKA, J.A. WOOLLAM CO., INC.
Inventors:
Tino Hofmann, Mathias M. Schubert, Stefan Schoeche, Philipp Kuehne, Craig M. Herzinger, John A. Woollam, Gregory K. Pribil, Thomas E. Tiwald, Sean R. Knight
Abstract: A system for providing variable wavelength intensity attenuation to said focused beams by application of an aperture-like element that comprises at least two regions of “filter” material, or comprises different materials graded into one another, which different materials that have different responses to different wavelengths, wherein said system is applied to reduce differences in wavelength intensity levels when applied in collimated portions of a beam as a Spectral Angle Adjustor (SAA) or to preserve information in a beam while changing said beam effective diameter as a Spectral Aperture Stop (SAS); or to affect a Spectral Field Stop (SFS) that controls source image size when applied at a convergent/divergent beam focal point as a Spectrally Varying Aperture, (SVA) the end result depending on where in a beam it is applied.
Abstract: A substantially achromatic multiple element compensator system for use in a wide spectral range, (for example 190-1700 nm), rotating compensator spectroscopic ellipsometer or polarimeter or the like system, which does not require external surface coatings at locations whereat total internal reflections occur. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation. Berek-type retarders on both input and output sides of the multiple elements are oriented to minimize changes in the net retardance vs. wavelength via adjustment of Berek-type retarders. Berek-type retarders.
Type:
Grant
Filed:
February 27, 2017
Date of Patent:
August 28, 2018
Assignee:
J.A. WOOLLAM CO., INC.
Inventors:
Craig M. Herzinger, Ping He, Jeffrey S. Hale
Abstract: Disclosed are systems and methods that enable determination of uncorrelated thickness of a working electrode and surface region optical constants in settings involving electrochemical processing at a working electrodes in a Piezoelectric Balance system, by simultaneous application of an Ellipsometer system, the working electrode optionally having a multiplicity of nanofibers that are oriented non-normally to a surface of said working electrode. Further disclosed is, simultaneous with said determinations, the monitoring of electrochemical processes at a piezoelectric balance working electrode driven by electrical energy applied between said working electrode and counter electrode.
Type:
Grant
Filed:
August 11, 2016
Date of Patent:
August 14, 2018
Assignees:
J. A. WOOLLAM CO., INC, THE BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA
Inventors:
Mathias M. Schubert, Tino Hofmann, John A. Woollam, Rebecca Y. Lai
Abstract: Anisotropic contrast methodology in combination with use of sample investigating polarized electromagnetic radiation to provide Jones or Mueller Matrix imaging data corresponding to areas on samples.
Type:
Grant
Filed:
December 9, 2015
Date of Patent:
July 17, 2018
Assignees:
BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA, J. A. WOOLLAM CO., INC.
Inventors:
Tino Hofmann, Mathias M. Schubert, Tadas Kasputis, Angela K. Pannier, Craig M. Herzinger, John A. Woollam
Abstract: An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.
Type:
Grant
Filed:
June 22, 2016
Date of Patent:
April 24, 2018
Assignee:
J.A. WOOLLAM CO., INC.
Inventors:
Jeffrey S. Hale, Craig M. Herzinger, Martin M. Liphardt
Abstract: An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.
Type:
Grant
Filed:
February 3, 2017
Date of Patent:
April 3, 2018
Assignee:
J. A. WOOLLAM CO., INC.
Inventors:
Ping He, Gregory K. Pribil, Martin M. Liphardt
Abstract: A retarder system that comprises at least two plates, each of which comprise two surfaces that are parallel to, or substantially parallel to one another, said plates being tipped with respect to one another so that the surfaces of one thereof are not parallel to the surfaces of the other, each said plate further comprising a biased fast axis that is neither parallel to, or perpendicular to surfaces of said plates.
Abstract: A reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved. This invention is also a combination of a focusing element and a filtering element that provides an optimum electromagnetic beam cross-sectional area based on optimizing the beam cross-sectional area in view of conflicting effects of aberration and diffraction inherent in said focusing element, which, for each wavelength, vary oppositely to one another with electromagnetic beam cross-sectional area.
Type:
Grant
Filed:
November 18, 2016
Date of Patent:
March 20, 2018
Assignee:
J.A. WOOLLAM CO., INC.
Inventors:
Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
Abstract: System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
Type:
Grant
Filed:
June 24, 2015
Date of Patent:
December 26, 2017
Assignees:
J.A. WOOLLAM CO., INC., UNIVERSITY OF NEBRASKA BOARD OF REGENTS
Inventors:
Tino Hofmann, Mathias M. Schubert, Stefan Schoeche, Sean Knight, Craig M. Herzinger, John A. Woollam, Greg K. Pribil, Thomas E. Tiwald
Abstract: Methodology of characterizing surface properties and determining refractive index and extinction coefficient of a prism shaped material, including simultaneously for a multiplicity of wavelengths, using an easy to practice technique.
Abstract: In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.
Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
Type:
Grant
Filed:
April 28, 2016
Date of Patent:
March 21, 2017
Assignee:
J.A. WOOLLAM CO., INC.
Inventors:
Thomas E. Tiwald, Jeremy A. Van Derslice
Abstract: A system for and method of investigating changes in optical properties of a porous effective substrate surface related to, for instance, effective surface depth and refractive index, pore size, pore volume and pore size distribution at atmospheric pressure.
Type:
Grant
Filed:
March 18, 2016
Date of Patent:
January 17, 2017
Assignee:
J.A. WOOLLAM CO., INC
Inventors:
Jeremy A. Vanderslice, Christopher A. Goeden, Martin M. Liphardt
Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
Type:
Application
Filed:
August 8, 2016
Publication date:
December 8, 2016
Applicant:
J.A. WOOLLAM CO., INC
Inventors:
MARTIN M. LIPHARDT, JEFFREY S. HALE, PING HE, GALEN L. PFEIFFER
Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
Type:
Grant
Filed:
August 8, 2016
Date of Patent:
November 22, 2016
Assignee:
J.A. WOOLLAM CO., INC
Inventors:
Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
Type:
Application
Filed:
April 28, 2016
Publication date:
September 22, 2016
Applicant:
J.A. WOOLLAM CO., INC.
Inventors:
Thomas E. Tiwald, Jeremy A. Van Derslice
Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
Type:
Grant
Filed:
November 4, 2014
Date of Patent:
September 13, 2016
Assignee:
J.A. WOOLLAM CO., INC
Inventors:
Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
Abstract: A system for easily determining average ellipsometric parameters based on data obtained from two different locations on a planar or non-planar shaped object, along with its method of use.