Patents Assigned to KOKUSAI ELETRIC CORPORATION
  • Patent number: 10724137
    Abstract: According to one aspect of the present disclosure, there is provided a cleaning method including: cleaning a component in which a deposit adhering to the component constituting an apparatus is removed by supplying and discharging a cleaning gas, wherein the act of cleaning includes controlling the apparatus so that a signal, which indicates a concentration of a predetermined gas generated by a reaction of the deposit and the cleaning gas, reaches a predetermined upper limit value or less and then stays within a range between the predetermined upper limit value and a predetermined lower limit value for a predetermined time period.
    Type: Grant
    Filed: January 28, 2014
    Date of Patent: July 28, 2020
    Assignee: KOKUSAI ELETRIC CORPORATION
    Inventors: Osamu Morita, Shinichiro Mori, Kenji Kameda