Patents Assigned to Leybold-Heraeus GmbH
  • Patent number: 4632650
    Abstract: A vacuum pump includes an evacuation chamber, a gear chamber, a partition separating the evacuation chamber from the gear chamber, a rotary pump shaft extending through the partition and having one end connected to a vane arranged for rotation in the evacuation chamber and having another, opposite end extending into the gear chamber, a shaft bearing surrounding the pump shaft and received in the partition, a labyrinth seal surrounding the pump shaft and received in the partition for sealing the evacuation chamber from the gear chamber, an oil sump defined in the gear chamber for accommodating oil therein, an evacuation device for generating a vacuum in the gear chamber and an oil loss preventing arrangement for avoiding an oil deficiency in the gear chamber due to the vacuum generated therein.
    Type: Grant
    Filed: December 12, 1984
    Date of Patent: December 30, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Peter Frieden, Hans-Peter Kabelitz, Karl-Heinz Ronthaler, Jorg Thielicke
  • Patent number: 4630568
    Abstract: Apparatus for coating substrates by means of a reaction for depositing atoms or molecules which is initiated by a plasma. A reaction chamber (1) is equipped with at least one window (22, 23), penetrable by microwaves, with at least one wave-guide structure (16, 17), arranged outside the chamber (1) and in front of the window (22, 23), and with a distributing means (25) discharging into the chamber.According to the invention and for the purpose of achieving the object of facilitating inspection and repairs, the window (22, 23) penetrable by microwaves, the one or more wave-guide structures (16, 17) and the distributing means (25) are all secured in or on a support frame (10), which can be removed, or swung away, from the reaction chamber (1) as a single unit.
    Type: Grant
    Filed: May 21, 1985
    Date of Patent: December 23, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventor: Jorg Kieser
  • Patent number: 4629407
    Abstract: Apparatus for the manufacture of metal powder by atomization with noble gas or nitrogen, having an atomization tower, a gas recycling system, and a gas cleaning system is disclosed. The gas cleaning system is connected parallel to the atomization tower in order to shorten the start-up time without increasing the cost and complexity of the gas cleaning system.
    Type: Grant
    Filed: June 27, 1985
    Date of Patent: December 16, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventor: Heinrich Amlinger
  • Patent number: 4627989
    Abstract: A method and system for a vacuum-evaporative film-deposition process displays bar charts of the local evaporation power of each vapor source in the process and the film thickness deposited thereby in spatial coordination on a single display screen.
    Type: Grant
    Filed: August 8, 1984
    Date of Patent: December 9, 1986
    Assignee: Leybold Heraeus GmbH
    Inventors: Albert Feuerstein, Gernot Thorn, Horst Ranke
  • Patent number: 4622453
    Abstract: An electron beam gun comprising a beam generator (4), an acceleration chamber (7) and a beam-guide chamber (10). The beam-guide chamber is formed by a jacket tube (19) and a beam-guide tube (18), which extends to the work chamber (1) and is surrounded by a focusing lens (15) and a deflecting device (17). For the purpose of readily adapting the equipment to suit various objective distances and for making cleaning and inspection easier, the jacket tube (19) takes the form of a hollow cylinder and is secured between two connecting flanges (20, 21) in a manner whereby it can be replaced. The upper connecting flange (20) carries a centering flange (28), on which the beam-guide tube is suspended, a shut-off valve (11) being optionally provided between the centering flange and the beam-guide tube. The lower connecting flange (21) surrounds a vacuum-connecting flange (34) in which is fitted the lower end of the beam-guide tube (18).
    Type: Grant
    Filed: June 27, 1984
    Date of Patent: November 11, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventor: Helmut Spruck
  • Patent number: 4614093
    Abstract: A cryopump has a two-stage refrigerator in a housing with a pumping surface area in thermal communication with each stage of the refrigerator for gas-pumping by adsorption or absorption when the refrigerator is operated. A roughing vacuum pump provides a pressure of from about 1 to about 10.sup.-3 mbar to the housing and at least the pumping surface area of the second refrigerator stage is heated sufficiently to prevent gas adsorption or absorption thereon before the cryopump is operatively connected to a space to be evacuated therewith as a starting method for improving the cryopumping of, particularly, helium and a regenerating method after use of the cryopump.
    Type: Grant
    Filed: October 18, 1985
    Date of Patent: September 30, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Werner Bachler, Hans-Joachim Forth, Hans-Hermann Klein
  • Patent number: 4612957
    Abstract: A vacuum pump and trap combination in which the trap is configured in the manner of a siphon and comprises a tube immersed in trap liquid but having an opening lying above the trap liquid level. The tube has a wall section lying below the trap liquid level and having perforations therein to admit different amounts of trap liquid in relation to the rate of discharge gas flow, thereby preventing frothing of the trap liquid.
    Type: Grant
    Filed: January 29, 1985
    Date of Patent: September 23, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Lutz Arndt, Paul Bachmann, Hanns-Peter Berges, Wolfgang Leier, Dieter Vorberg
  • Patent number: 4613306
    Abstract: Evaporator crucible for vacuum depositing systems, having a crucible bottom with at least one bottom opening for the introduction of material in rod form for evaporation. At a distance from the bottom opening there is provided at least one metal crucible rim which preferably is provided with a coolant passage. To solve the problem of reducing the heat losses, the crucible rim is provided internally on at least a part of its depth with a lagging comprising ceramic material. This lagging preferably comprises individual ceramic building blocks which are preferably compressed from magnesium oxide.
    Type: Grant
    Filed: May 2, 1985
    Date of Patent: September 23, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Volker Bauer, Albert Feuerstein, Horst Ranke
  • Patent number: 4605832
    Abstract: A differential pressure switch with a housing having two faces opposite each other which comprises two approximately coaxial bellows arranged in the housing, so that each bellows has one of its sides securely fastened to a face of the housing, with a dividing sheet arranged between the bellows such that two separated work chambers are formed. Each work chamber is defined by one face of the housing, by a bellows and by the dividing sheet. The dividing sheet has a section projecting sideways through the bellows for switch control.
    Type: Grant
    Filed: June 4, 1984
    Date of Patent: August 12, 1986
    Assignee: Leybold Heraeus GmbH
    Inventor: Gerd Koopmann
  • Patent number: 4590983
    Abstract: A precision vacuum melting and casting furnace with a melting chamber containing a melting device. A casting chamber is positioned below the melting chamber. The casting chamber can be raised, lowered, and swung out to the side. The casting chamber communicates with the melting chamber through a valve chamber, which contains a vacuum valve. The valve chamber accommodates a lift platform for raising the mold up under the melting device. The casting chamber has a lifting mechanism, and the vacuum valve has an activating rod. In order to essentially simplify precise alignment of the different movable parts and to convert an existing conventional casting furnace into a furnace in accordance with the present invention, a hollow vertical shaft is attached to the valve chamber. The rod that activates the vacuum valve extends vacuum-tight through the shaft. A sleeve that guides the casting chamber is positioned at the outer surface of the shaft.
    Type: Grant
    Filed: April 25, 1985
    Date of Patent: May 27, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Wolfgang Reuter, Manfred Hartmann
  • Patent number: 4589369
    Abstract: A device for holding one or more substrates, each of substantially circular profile, especially in vacuum coating apparatus. In a vertical plate there is provided an opening on whose edge holding means are provided into which each substrate is fitted. In accordance with the invention, the opening has in its bottom area an approximately semicircular radial groove which is defined on both sides by semicircular rims. In its upper portion the opening has on one side a lip which merges with one of the rims in the lower part of the opening. On the other side there is disposed a counterbore offset eccentrically upward from the opening, whose radius is at least as great as the radius of the groove bottom. In this manner an insertion opening is formed on one side of the plate for the eccentric insertion of the substrate.
    Type: Grant
    Filed: March 20, 1985
    Date of Patent: May 20, 1986
    Assignee: Leybold Heraeus GmbH
    Inventor: Peter Mahler
  • Patent number: 4588504
    Abstract: An oil-sealed vacuum pump has an oil circuit which has an externally located oil filter that may be operatively connected to or disconnected from the oil circuit by a coupler. The coupler has a rotatably supported valve disc having a first face oriented towards oil circuit ports in the pump and a second face oriented towards the filter. The valve disc further has spaced first and second apertures passing therethrough and a groove provided in the first face and oriented approximately perpendicularly to an imaginary line connecting the first and second apertures with one another.
    Type: Grant
    Filed: October 1, 1985
    Date of Patent: May 13, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hanns-Peter Berges, Wolfgang Leier
  • Patent number: 4574178
    Abstract: An electron gun with a beam generator 4, a high-voltage connection 25 and a high-voltage insulator 23 is equipped with at least one insulating transformer 26, 27 and circuit elements 43 for producing auxiliary voltages at high-voltage potential. The beam generator 4 and the high-voltage insulator 23. are surrounded by a grounded metallic jacket 32. The insulating transformer is arranged above the high-voltage insulator 23. For the purpose of solving the problem of permitting use of a single-pole high-voltage cable, the one or more insulating transformers 26, 27 are embedded in an insulating member 24 which is mounted directly on the high-voltage insulator 23. The portion of the insulating member 24 that projects beyond the grounded jacket 32 is surrounded by a metallic hood which, together with the jacket 32, forms a common Faraday cage. The circuit elements 43 for the auxiliary voltages are likewise arranged in the Faraday cage.
    Type: Grant
    Filed: September 13, 1984
    Date of Patent: March 4, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventor: Helmut Spruck
  • Patent number: 4572842
    Abstract: Method for reactive vapor deposition of compounds of metals and semi-conductors on at least one substrate by glow discharge. Into a space between a magnetron cathode (1) with a target (5) and the substrate (11) an inert gas and a reaction gas for the formation of the desired compound with the target material are separately introduced. Two solve the problem of making it possible to maintain the vapor deposition process stable over long time periods, according to the invention, a flow restriction is introduced between the target (5) and the substrate (11) by a diaphragm (20), which amounts to at least 40% of the cross-section of the space. Further, the inert gas is fed between target (5) and aperture (20) at the periphery of the target.
    Type: Grant
    Filed: August 24, 1984
    Date of Patent: February 25, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Anton Dietrich, Klaus Hartig, Michael Scherer
  • Patent number: 4572776
    Abstract: A magnetron cathode for sputtering ferromagnetic targets. The magnet system consists of magnet poles of opposite polarity lying one within the other disposed on a basic cathode body. Between the target and the pole shoes, which consist of target material, two circumferential air gaps in the direction of the depth of the system are formed. The surfaces of projection of the magnet poles and target do not overlap. For the purpose of making the target ablation uniform while simultaneously achieving high sputtering rates, the pole shoes are separated, in accordance with the invention, each by a distance S from the magnet poles. The magnet poles lie in an area which runs from a plane passing through the sputtering surface in the direction of the depth of the system. Between the pole shoes and the target, on the one hand, and the magnet poles on the other, there is disposed a thermally conductive metal body which is in communication with at least one coolant passage and consists of a nonferromagnetic material.
    Type: Grant
    Filed: December 5, 1984
    Date of Patent: February 25, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Jorg Kieser, Reiner Kukla
  • Patent number: 4569738
    Abstract: A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atomsphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substrate provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.
    Type: Grant
    Filed: May 4, 1984
    Date of Patent: February 11, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Jorg Kieser, Michael Neusch
  • Patent number: 4562943
    Abstract: An arrangement for controlling the pouring of a melt out of a crucible with a hole in the bottom which hole is blocked while the material is being melted with a closure plate that melts through locally as the result of heat transferred from the melt. To precisely establish the time at which the closure plate melts through, the plate is cooled from below while the starting material is being melted. Cooling is at least decreased and preferably terminated when it is time to pour out the melt. The plate can be cooled by a flow of a gas coolant directed against it or by contact with a cooling element that is raised into position against it from below.
    Type: Grant
    Filed: July 8, 1983
    Date of Patent: January 7, 1986
    Assignee: Leybold-Heraeus GmbH
    Inventors: Friedrich-Carl Freytag, Josef Gediga, Rolf Ruthardt, Wolfgang Wagner
  • Patent number: 4550593
    Abstract: A turbomolecular pump for counterflow leakage tests and the method of its use arranges two, tandem turbomolecular pump stages for pumping toward each other and connects opposite ends of the tandem pump stages respectively to a container or test tank through which a test gas is provided when there is a leak and a detector for detecting the test gas. A connection between the tandem pump stages connects to a forepump for assisting the turbomolecular pump. Arranging the turbomolecular pump in this way permits different pressures in the container or test tank and detector, as is often desired when, for example, the detector is a mass spectrometer, without partition and conduit arrangements therefor.
    Type: Grant
    Filed: July 19, 1982
    Date of Patent: November 5, 1985
    Assignee: Leybold-Heraeus GmbH
    Inventor: Gunter Reich
  • Patent number: 4548691
    Abstract: A method of producing glass sheets having good transmission behavior in the visible spectrum range and having good reflection behavior as regards heat radiation. A transparent substrate S is coated by cathodic atomization with, successively, a first oxide layer 1 comprising indium oxide, tin oxide or mixtures thereof, a layer 2 consisting of silver in a thickness of 5 to 50 n, a metallic layer 3 selected from aluminium, titanium, tantalum, chromium, manganese and zirconium in a thickness ranging from 1 to 5 nm and applied directly to the silver layer 2 for the purpose of maintaining the condition thereof, and a final protective oxide layer 4 of indium oxide, tin oxide or mixtures thereof.
    Type: Grant
    Filed: February 29, 1984
    Date of Patent: October 22, 1985
    Assignee: Leybold-Heraeus GmbH
    Inventors: Anton Dietrich, Klaus Hartig, Werner Lenz, Michael Scherer
  • Patent number: 4548698
    Abstract: The invention concerns equipment for producing coatings having a rotationally symmetric thickness profile on substrates. The equipment comprises an evaporizing cathode and, for each substrate, a mask and a rotatable substrate holder arranged behind the mask. The mask has a cut-away portion such that the desired thickness profile of the coating can be produced by rotating the substrate.According to the invention and for the purpose of increasing the throughput of the equipment while maintaining close tolerances for the thickness profile of the coatings, a plurality of masks (6) and a plurality of substrate holders (13) associated with the masks are provided on a common movable frame (1). The movable frame (1) is displaceable relatively to the evaporizing cathode (10), continuous rotary movement being imparted to the substrate holders.
    Type: Grant
    Filed: February 1, 1984
    Date of Patent: October 22, 1985
    Assignee: Leybold-Heraeus GmbH
    Inventor: Michael Sellschopp