Abstract: A clean room system has filter-fan units each having at least one fan motor and being connected to an electric network. At least one central control unit is provided. A connecting bus system for connecting the filter-fan units to one another and to the at least one central control unit is provided.

Abstract: A clean room ceiling structure includes a support structure and filter units with a filter frame and a filter secured in the filter frame. The filter frames are connected to the support structure. The filter units have sealing fluid grooves for sealing the filter units relative to the support structure.

Abstract: A grounding arrangement, especially for clean rooms, is provided. The arrangement includes grounding conductors to which electrically conductive components, such as metallic housings of machines, are connected by connecting lines. The conductors are flexible leads that are conductively interconnected by connecting terminals. The conductors are connected to a foundation by at least one shunt line.

Abstract: A blower unit for clean rooms has a housing with a bottom, a cover, and first and second sidewalls. A filter is connected to the bottom. At least one blower is mounted in the housing. At least one air flow channel is connected to the blower and extends within the housing in an upward direction between two opposite ones of the first sidewalls. In the airflow channel clean air flows from the blower to the filter. Soundproofing material is connected to at least one side of the airflow channel.

Abstract: A mounting system for mounting filter-fan units in a clean room has support rails arranged at the ceiling of the clean room in a grid structure that provides receiving openings for the filter-fan units. The support rails have support surfaces for the filter-fan units, wherein opposing ones of the support surfaces define the receiving openings. Support members are placed onto the support surfaces so as to project into the receiving openings. The receiving openings have at least one of the support members placed onto at least two opposing ones of the support surfaces, respectively, for supporting the filter-fan units thereon.

Abstract: A clean room system has at least one clean room through which clean air is guided. The clean room has a bottom through which the clean air exits. At least one blower for sucking the clean air from the clean room through the bottom is provided. The blower is in the form of an axial blower operating at low pressure. At least one inlet channel for introducing the clean air leaving the blower into the clean room is provided. Filter units are positioned at the ceiling of the clean room for filtering the clean air before entering the clean room.

Abstract: A cleaning device for a clean room has at least two filter-fan units each comprising a filter and a fan. Connecting elements connect the filter-fan units to one another to form a self-supporting construction unit. Each filter-fan unit comprises a housing having profiled elements for engaging the connecting elements in the form of bars or angled pieces. The connecting elements can be T-shaped or cross-shaped. The construction units can be supported on supports on the floor or suspended from the ceiling.

Abstract: A filter-ventilator-arrangement for employment with clean chambers with at least one ventilator of which the pressure side is located toward an air flow chamber which is limited by boundary walls including a flow chamber formed by at least one annular channel of which one of two boundary walls at least consists of a noise-damping material. Furthermore at least an outer boundary wall consists of noise-damping material. The arrangement includes modular units having several annular channels of which the boundary walls decrease in height from the outside to the inside. Each unit has at least one filter which is arranged in a region below the flow chamber. Innermost boundary walls with inner sides thereof adjoin a plate consisting of noise-damping material. The boundary walls are secured, hanging or suspended on the cover sealing part. At least one heat exchanger lies in a suction region of the ventilator via which the return air flows.

Abstract: The container and transfer process are intended to prevent stop contamination of semiconductor devices from occurring, even if the container is stored or handled under unclean room conditions. The semiconductor devices are subjected to an approximately laminar clean air stream passing around them in a clean air zone. A higher static pressure is maintained in the clean air zone than in the surrounding space which might be polluted with an inadmissibly high number of particles. The clean air stream carries along any dirt particles there may still be, so that they cannot settle on the semiconductor devices. Owing to the higher static pressure, a forced flow from the clean air zone of the higher static pressure outwards into the surrounding space is achieved, thus preventing an ingress of dirt particles from the surrounding space.