Abstract: A membrane filter integrity test system includes a large volume mass-flow controller for rapidly supplying a larger amount of fluid to a primary side of a membrane filter under test, a small volume mass-flow controller for supplying a relatively small amount of fluid to the primary side of the membrane filter. The operation of the large volume mass-flow controller is stopped when the pressure at the primary side of said membrane filter reaches a predetermined level. This predetermined pressure is detected by a pressure sensor which senses the pressure at the primary side of the membrane filter. The pressure sensor responsively generates a detection signal corresponding to the sensed pressure at the primary side of the membrane filter.
Type:
Grant
Filed:
April 30, 1993
Date of Patent:
October 11, 1994
Assignees:
Memtec Japan Limited, Filtec Corporation