Abstract: A semiconductor substrate thermal treatment apparatus enables excellent heating control in suppressing influence of mutual induction between induction heating coils even when the induction heating coils are arranged in the vertical direction while providing horizontal magnetic flux to susceptors. The apparatus indirectly heats wafers mounted on horizontally-arranged susceptors including induction heating coils to form alternate-current magnetic flux in a direction parallel to a mount face of the susceptor. The wafer are arranged at an outer circumferential side of the susceptor. The induction heating coils are structured with at least one main heating coil and subordinate heating coils electromagnetically coupled with the main heating coil.
Abstract: The ion implanter includes lens elements that arrange unit lens elements along a direction of a beam width of a ribbon ion beam and regulate a magnetic field or electric field to be created by each unit lens element in order to regulate a current density distribution of the ion beam, and a controlling portion that sets the intensity of the magnetic field or electric field to be created by the unit lens element to be regulated by the lens elements in accordance with the measured current density distribution.
Abstract: A fluorescence detecting method includes the steps of collecting a first fluorescence signal of the fluorescence received by a light receiving unit when the analyte passes a position irradiated with a laser beam, collecting a second fluorescence signal of the fluorescence received by the light receiving unit in the absence of the analyte at the position irradiated with the laser beam, and adjusting a first phase difference information on the first fluorescence signal with respect to the modulation signal by using a second phase difference information on the second fluorescence signal with respect to the modulation signal to obtain a third phase difference information on the fluorescence signal of the fluorescence, and obtaining a fluorescence relaxation time constant of the fluorescence based on the third phase difference information thus obtained.
Abstract: Oxygen gas, for example, is introduced into a film forming chamber, and high-frequency power is supplied to a plurality of monopole antennas arranged above a silicon substrate (101) in the film forming chamber to generate a plasma of the introduced oxygen gas, thereby supplying atomic oxygen (123) onto the surface of an aminosilane molecular layer (102). This plasma generation is performed for about 1 sec. With this operation, the adsorption layer (102) adsorbed onto the surface of the silicon substrate (101) is oxidized, thereby forming a silicon oxide layer (112) corresponding to one atomic layer of silicon on the surface of the silicon substrate (101).
Abstract: Disclosed is a silicon carbide substrate which has less high frequency loss and excellent heat dissipating characteristics. The silicon carbide substrate (S) is provided with a first silicon carbide layer (1), which is composed of a polycrystalline silicon carbide, and a second silicon carbide layer (2), which is composed of polycrystalline silicon carbide formed on the surface of the first silicon carbide layer. The second silicon carbide layer (2) has a high-frequency loss smaller than that of the first silicon carbide layer (1), the first silicon carbide layer (1) has a thermal conductivity higher than that of the second silicon carbide layer (2), and on the surface side of the second silicon carbide layer (2), the high-frequency loss at a frequency of 20 GHz is 2 dB/mm or less, and the thermal conductivity is 200 W/mK or more.
Abstract: The thin-film forming apparatus includes: a deposition vessel that includes a deposition space in which the thin film is formed on the substrate in a reduced-pressure state; a raw material gas introducing section configured to introduce a raw material gas for the thin-film into the deposition space of the deposition vessel; and a plasma electrode section configured to generate plasma using the raw material gas for the thin-film in the deposition space. The plasma electrode section is a plate member in which a current flows from one end surface to the other end surface, the plate member provided with, as a plasma generating electrode, an electrode plate including an outward portion and a return portion which allow the current to flow in parallel to each other by bending a direction of the current flowing through the plate member in mid-flow.
Abstract: The problem is to provide a carbon dioxide separator that, when hydrating carbon dioxide contained in a gas to be treated to separate, can separate carbon dioxide from the gas to be treated at high efficiency and a method therefor. For this, a carbon dioxide separator that includes: a carbon dioxide hydrate formation part where carbon dioxide hydrate is formed with a gas to be treated containing carbon dioxide and water as a raw material; and a carbon dioxide absorption part where high pressure gas that passed through the carbon dioxide hydrate formation part without being hydrated is brought into gas-liquid contact with water to let absorb carbon dioxide in the high pressure gas, in which water in the carbon dioxide absorption part is sent to the carbon dioxide hydrate formation part as the raw material water is provided.
Abstract: A gas hydrate production apparatus capable of reacting a raw gas with a raw water to thereby form a slurry gas hydrate and capable of removing water from the slurry gas hydrate by means of a gravitational dewatering unit. The gravitational dewatering unit is one including a cylindrical first tower body; a cylindrical dewatering part disposed on top of the first tower body; a water receiving part disposed outside the dewatering part; and a cylindrical second tower body disposed on top of the dewatering part, wherein the cross-sectional area of the second tower body is continuously or intermittently increased upward from the bottom.
Abstract: Fluorescence detection device employed in a flow site meter emits laser light intensity-modulated by a modulation signal and acquires the fluorescence signal of fluorescence emitted from a measurement object passing through a measurement point of the laser light. The device generates the reference signal, separately from the modulation signal, the reference signal having a frequency different from the frequency of the modulation signal and having a phase synchronized with a phase of the modulation. The device determines fluorescence relaxation time of the measurement object from the fluorescence signal using the reference signal.
Abstract: Disclosed herein is a fluorescence detection method. The fluorescence detection method includes the steps of: irradiating a measurement object with laser light modulated at a predetermined frequency; receiving fluorescence emitted by the measurement object and outputting two or more pulsed fluorescent signals; setting reference timing in units of period corresponding to the frequency; acquiring a generation time to output of each of the pulsed fluorescent signals based on the reference timing; generating a cumulative fluorescent signal indicating the relationship between a generation frequency of the pulsed fluorescent signal and the generation time; determining, by using a signal corresponding to modulation of the laser light as a reference signal, a phase difference between the reference signal and the cumulative fluorescent signal; and determining, by using the phase difference, a fluorescence relaxation time of the fluorescence emitted by the measurement object.
Abstract: A fluorescence detection device includes a flow cell body including a flow channel through which a measurement object flows, a laser light source unit that irradiates, with a laser beam, the measurement object passing through a measurement point in the flow channel, a light-receiving unit that receives fluorescence emitted from the measurement object irradiated with the laser beam and outputs a light-reception signal, and a processing unit that outputs an output value of fluorescence intensity based on the light-reception signal outputted by the light-receiving unit. The flow cell body has a lens provided on a surface thereof so as to traverse an optical path of the laser beam.
Abstract: Disclosed herein is a method for measuring FRET by irradiating with laser light a measurement sample. FRET is transfer of energy from a first molecule to a second molecule. The first molecule and the second molecule are included in the measurement sample in which ligands are bound to receptors. The method includes the steps of: irradiating the measurement sample with laser light; measuring fluorescence emitted by the measurement sample; calculating a fluorescence lifetime of the first molecule; calculating a binding ratio; setting a binding condition for the measurement sample; and calculating a dissociation constant. In the dissociation constant calculating step, the dissociation constant is determined by using a least-squares method to fit a function having, as variables, a total concentration of the receptor in the measurement sample and the dissociation constant to the binding ratio calculated in the binding ratio calculating step.
Abstract: A raw material supply device (105) includes an introduction pipe (152a) which introduces a carrier gas into a raw material vessel (151), a transport pipe (152b) which transports a source gas fed out from the raw material vessel, a supply pipe (155a) which is branched from the transport pipe and supplies the source gas to a film forming chamber (101), a circulation pipe (155b) which is branched from the transport pipe (152b) and returns the source gas to the introduction pipe (152a), an introduction valve (156a) which is attached to the introduction pipe, a supply valve (156b) which is attached to the supply pipe, a circulation valve (156c) which is attached to the circulation pipe, and a controller (157) which controls opening/closing of the valves. The controller controls the supply valve and the circulation valve to be in opposite open/closed states. The source gas can be supplied more stably while suppressing the waste of the raw material.
Abstract: A gas hydrate slurry dewatering apparatus adapted to feed a raw as into a cylindrical main body of dewatering column so gas to attain pressuriation and so suction any gas from the interior of a drainage chamber disposed around the cylindrical main body so as to attain depressurization. An internal tube (8) as a constituent of a dewatering apparatus (6) in which the gas hydrate slurry (S) is introduced is provided with a separating section (7). A drainage chamber (10) is formed by the internal tube (8) and, disposed with a given spacing therefrom, an external tube (9). An exhaust blower (B2) and a drainage pump (P2) are connected to the drainage chamber (10). A gas feed blower (B3) for a raw gas (G1) is connected to the internal tube (8). A differential pressure detector (x1) is provided for detecting any pressure difference between the interior of the internal tube (8) and the interior of the drainage chamber (10).
Abstract: For work in which reflecting mirrors (or facets (31)) to be mounted on a heliostat 3 coincide with a pseudo toroid (53), an adjustment method of, and a mounting posture measuring device for, accurately measuring mounting postures of the respective facets (31) are provided for performing mounting adjustment efficiently and simply. In a method of installing the reflecting mirrors (or the facets (31)) constituting the heliostat 3 for sunlight condensation, each facet (31) is installed in such so that a reflected laser beam (52) reflected by the facet 31 can reach a virtual passage point (52b) in a laser point measuring unit (12).
Abstract: This thin-film forming device includes: a deposition vessel in which a reduced-pressure deposition space, to which a raw material gas and a reactant gas are alternately supplied on different timings, is formed in order to form a thin film on the substrate; and a gas supply unit configured to supply the raw material gas and the reactant gas to the deposition vessel. The gas supply unit is provided with at least one partition that bends a gas passage from an inlet port of each of the raw material gas and the reactant gas toward the deposition space.
Abstract: Provided are a gas hydrate percentage measuring device and a method of controlling the same which are capable of measuring a gas hydrate percentage with high accuracy even if source gas exists dissolved in gas hydrate slurry or as gas bubble therein.
Abstract: A fluorescence detection device for a flow site meter emits laser light intensity-modulated in accordance with a modulation signal and acquires a fluorescent signal of fluorescence emitted from a measurement object that passes through a measurement point of the laser light. The fluorescence detection device generates, separately from the modulation signal, a reference signal having a frequency different from a frequency of the modulation signal and a phase in synchronization with a phase of the modulation signal. The fluorescence detection device determines a fluorescent relaxation time of the measurement object from the fluorescent signal by using the reference signal.
Abstract: An automatic vessel position holding control method for holding a vessel position and a vessel heading of a vessel on the ocean in order to reduce a positional deviation and a heading deviation sharply as compared with the conventional automatic vessel position holding control by performing feedforward control for estimating and then compensating for at least one of a wave drifting force and a wave drifting moment that act on the vessel, wherein a vessel position holding control is performed that includes such controls as estimating waves entering the vessel from motion thereof, calculating at least one of the wave drifting force and the wave drifting moment from the estimated waves and performing feedforward control for at least one of the calculated wave drifting force and the calculated wave drifting moment.
August 22, 2011
Date of Patent:
December 4, 2012
Mitsui Engineering & Shipbuilding Co., Ltd., Japan Agency for Marine-Earth Science and Technology
Abstract: Two or more kinds of fluorescent beads containing at least two kinds of basic fluorochromes different in fluorescence intensity, fluorescence wavelength, and fluorescence relaxation time from each other, wherein a content ratio between the at least two kinds of basic fluorochromes and absolute amounts of contents of the basic fluorochromes are set so as to be different between different kinds of fluorescent beads. The fluorescent beads are used in a flow cytometer for fluorescence detection. This makes it possible to identify a greater variety of beads than before with high accuracy in a single measurement.