Patents Assigned to MKS KOREA LTD.
  • Control method of driving frequency of pulsed variable frequency RF generator
    Patent number: 11244809
    Abstract: A frequency tuning impedance matching method includes analyzing a start driving frequency, set by a user, and an RF output signal to vary a driving frequency. Specifically, a next frequency may be predicted using susceptance which is an imaginary part of measured admittance in an n-th pulse. Accordingly, impedance matching may be completed at high speed or an optimal frequency may be reached at high speed.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: February 8, 2022
    Assignee: MKS Korea Ltd.
    Inventors: Changhee Lee, Hanam Kim, Jongmin Kim, Jin Huh, Ka Sing Leung
  • Impedance matching method and impedance matching system
    Patent number: 10270418
    Abstract: An impedance matching device and an impedance matching method. A variable reactance impedance matching network is disposed between a variable frequency RF power source varying a driving frequency and a load. An impedance matching method of the variable reactance impedance matching network includes controlling variation amount of capacitance or reactance of a variable reactive component of the impedance matching network as a function of a difference between a target driving frequency ft and the driving frequency.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: April 23, 2019
    Assignee: MKS KOREA LTD.
    Inventors: Jae-Hyun Kim, Sang-Won Lee