Abstract: A substrate stage and an empty-weight canceling mechanism that supports an empty weight of the substrate stage are made up of separate bodies. Accordingly, the size and weight of the substrate stage (a structure including the substrate stage) can be reduced, compared with the case where the substrate stage and the empty-weight canceling mechanism are integrally configured. Further, due to movement of an X coarse movement stage and a Y coarse movement stage by an X drive mechanism and a Y drive mechanism, the substrate stage is driven in an XY plane and also the empty-weight canceling mechanism that supports the empty weight of the substrate stage is driven. With this operation, the substrate stage can be driven without difficulty even when the substrate stage and the empty-weight canceling mechanism are configured of separate bodies.
Abstract: An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a Y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the Y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.
Abstract: A lightweight lens barrel that includes two focus lenses. The first lens holding frame for holding a first lens L5, a first drive unit STM5 for causing the first lens holding frame to move in the optical axis direction, a second lens holding frame for holding a second lens L6, and a second drive unit STM6 for causing the second lens holding frame to move in the optical axis direction, the first lens holding frame being arranged on an inner peripheral side of the second lens holding frame.
Abstract: An image-capturing device includes: an image sensor that includes an imagecapturing area where an image of a subject is captured; a setting unit that sets imagecapturing conditions to be applied to the image-capturing area; a selection unit that selects pixels to be used for interpolation from pixels present in the image-capturing area; and a generation unit that generates an image of the subject captured in the image-capturing area with signals generated through interpolation executed by using signals output from the pixels selected by the selection unit, wherein: the selection unit makes a change in selection of at least some of the pixels to be selected depending upon the image-capturing conditions set by the setting unit.
Abstract: A compound expressed in the following formula (1) (where R1 and R2 independently denote a hydrogen atom or a methyl group, Y1 and Y2 independently denote an alkylene group having a carbon number of 1 to 9, and n1 and n2 independently denote an integer of 0 to 3).
Abstract: A certain material irregularly expressed in an observation area is effectively observed. An observing apparatus includes a first observing unit performing a time lapse shooting of a predetermined observation area, a first discriminating unit discriminating whether or not a first material is expressed in the observation area based on an image obtained by the first observing unit, and a second observing unit starting a time lapse shooting relating to a part where the first material is expressed at a timing when the first material is expressed in the observation area, in which a shooting frequency of the time lapse shooting by the second observing unit is higher than a shooting frequency of the time lapse shooting by the first observing unit.
Abstract: The present invention relates to a microscope of which visibility, controllability and operability can be improved. In the microscope, an optical path and optical path of an image forming system are set so as to be perpendicular to each other when viewed from the top. In other words, in this microscope, there exists an ocular optical system that guides light, which propagates the optical path to optical path of the image forming system, to a user. The optical path is formed in a direction perpendicular to a direction of the light from a sample emitted from the ocular optical system to the user. The present invention can be applied to an inverted microscope.
March 2, 2020
July 16, 2020
Toru MURAYAMA, Atsushi TAKEUCHI, Yumiko OUCHI, Yuki YOSHIDA
Abstract: An accessory mount can be inserted through the camera body mount without any of the first through third tabs being hindered by any of three camera body-side tabs at the camera body mount, as long as the accessory mount is inserted into the camera body mount at a correct interlock phase. The first, second, and third tabs extend over varying lengths along the circumferential direction. The first tab extends over a greatest length and the third tab extends over a smallest length, along the circumferential direction. The accessory mount includes a restricting member, a fitting portion, and a lock pin hole. The restricting member is disposed at a position assumed on a side substantially opposite from the lock pin hole across the fitting portion.
Abstract: An extreme ultraviolet lithography system (10) that creates a new pattern (330) having a plurality of densely packed parallel lines (332) on a workpiece (22), the system (10) includes a patterning element (16); an EUV illumination system (12) that directs an extreme ultraviolet beam (13B) at the patterning element (16); a projection optical assembly (18) that directs the extreme ultraviolet beam diffracted off of the patterning element (16) at the workpiece (22) to create a first stripe (364) of generally parallel lines (332) during a first scan (365); and a control system (24). The workpiece (22) includes an existing pattern (233) that is distorted. The control system (24) selectively adjusts a control parameter during the first scan (365) so that the first stripe (364) is distorted to more accurately overlay the portion of existing pattern (233) positioned under the first stripe (364).
Abstract: Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.
Abstract: An image-capturing element manufacturing method includes: preparing a first substrate having a plurality of pixels that are two-dimensionally continuously arrayed; preparing a second substrate having a plurality of circuit blocks that respectively have connection terminals to a power supply and a reference potential and that are electrically independent from each other, each of the plurality of circuit blocks having at least some of circuits to read out signals from the plurality of pixels; laminating the first substrate and the second substrate to electrically couple the plurality of circuit blocks and the plurality of pixels overlapping therewith; and cutting circuit blocks around at least one of the plurality of circuit blocks and pixels overlapping therewith to form a laminate in which the plurality of pixels are laminated onto the at least one of the plurality of circuit blocks.
Abstract: An image processor includes an image generator configured to generate corresponding image data corresponding to first microscopic image data obtained under a first observation condition, based on second microscopic image data and third microscopic image data obtained under a second observation condition, and an image output unit configured to output the corresponding image data. The corresponding image data may be image data corresponding to a first focal plane from which the first microscopic image data are obtained, and wherein the second microscopic image data and the third microscopic image data may be image data on a second focal plane and a third focal plane, respectively, which are different from the first focal plane.
January 16, 2017
July 9, 2020
Ichiro SASE, Yutaka SASAKI, Takaaki OKAMOTO, Yuki TERUI, Kohki KONISHI, Masafumi MIMURA, Martin BERGER, Petr GAZAK, Miroslav SVOBODA
Abstract: In an ophthalmic imaging system an image imaged by an imaging section for a right eye is formed as an imaging image on a display, and then displayed through a right-eye optical unit and a reflection member. An image imaged by an imaging section for a left eye is formed as an imaging image on a display, and then displayed through an optical unit and the reflection member. This thereby enables the object to be visually inspected as a three-dimensional image by the observer viewing the right-eye imaging image and the left-eye imaging image, which differ from each other according to the parallax therebetween, by viewing the respective images through right and left eyes.
Abstract: A lightweight lens barrel with two focus lenses; a first lens holding frame for holding a first lens, a first drive unit for causing the first lens holding frame to move in the optical axis direction, a second lens holding frame for holding a second lens, a second drive unit for causing the second lens holding frame to move in the optical axis direction, and a moving tube with the first driving unit and the second driving unit, and movable in the optical axis direction, wherein the first lens holding frame and the second lens holding frame are each movable in the optical axis direction with respect to the moving tube.
Abstract: A thin film forming apparatus including: a first chamber configured to generate a mist of a dispersion liquid, and including an outlet; a second chamber configured to receive the generated mist from the first chamber and collect particles of the generated mist having a size greater than a predetermined value, and including an inlet provided on a top of the second chamber and connected to the outlet of the first chamber, and an outlet provided on the top of the second chamber and configured to transfer, as homogenized mist, particles of the generated mist having a size less than or equal to the predetermined value due to the effect of gravity on the particles of the mist; and a third chamber configured to receive the homogenized mist from the second chamber, and including an inlet connected to the outlet of the second chamber.
Abstract: There is a demand for increasing the dynamic range of an imaging unit. Provided is an imaging unit comprising a pixel section that outputs a pixel signal corresponding to a reset potential after a reset and a signal potential after charge accumulation; an amplifying section that amplifies the pixel signal with a first amplification ratio or a second amplification ratio that is different from the first amplification ratio; and a control section that causes the amplifying section to amplify the pixel signal corresponding to a change from the reset potential to the signal potential with the first amplification ratio, and then causes the amplifying section to amplify the pixel signal corresponding to a change from the signal potential to the reset potential with the second amplification ratio.
Abstract: Provided is an x-ray device capable of suppressing reduction in detection precision. The X-ray device irradiates x-rays on an object and detects X-rays that pass through the object. The X-ray device comprises: an X-ray source that emits X-rays; a stage that holds the object; a detection device that detects at least some of the x-rays that have been emitted from the X-ray source and have passed through the object; a chamber member that forms an internal space wherein the X-ray source, the stage, and the detection device are arranged; and a partitioning section that separates the internal space into a first space wherein the X-ray source is arranged and a second space wherein the detection device is arranged.
Abstract: To easily process model information or information from which the model information is generated, provided is an imaging device including: an imager that images an object from a predetermined viewpoint; a distance measurer that measures distances from the predetermined viewpoint to points on the object; an object data generator that uses an image taken by the imager and measurement results of the distance measurer to generate object data in which unit data including pairs each having a pixel value in the taken image and a distance from a point on the object corresponding to the pixel value to the predetermined viewpoint is arranged in a first arrangement order; and a point cloud data generator that calculates positional information on points on the object based on the object data and arranges point data including the positional information in the first arrangement order to generate point cloud data.
Abstract: An apparatus and method for measuring thermo-mechanically induced reticle distortion or other distortion in a lithography device enables detecting distortion at the nanometer level in situ. The techniques described use relatively simple optical detectors and data acquisition electronics that are capable of monitoring the distortion in real time, during operation of the lithography equipment. Time-varying anisotropic distortion of a reticle can be measured by directing slit patterns of light having different orientations to the reticle and detecting reflected, transmitted or diffracted light from the reticle. In one example, corresponding segments of successive time measurements of secondary light signals are compared as the reticle scans a substrate at a reticle stage speed of about 1 m/s to detect temporal offsets and other features that correspond to spatial distortion.
Abstract: Provided is a variable magnification optical system comprising, in order from an object side along an optical axis, a first lens group G1 having positive refractive power, a second lens group G2 having negative refractive power, a third lens group G3 having positive refractive power, and a fourth lens group G4; upon zooming from a wide angle end state to a telephoto end state, a distance between the first lens group G1 and the second lens group G2 being varied, a distance between the second lens group G2 and the third lens group G3 being varied, and a distance between the third lens group and the fourth lens group being varied; the third lens group G3 comprising, in order from the object side along the optical axis, a 3a-th lens group G3a having positive refractive power, an aperture S, and a 3b-th lens group G3b having positive refractive power; a lens group having negative refractive power within the 3b-th lens group G3b being used as a vibration reduction lens group and moved so as to include a component i