Patents Assigned to Nikon Corporation
  • Publication number: 20200225589
    Abstract: A substrate stage and an empty-weight canceling mechanism that supports an empty weight of the substrate stage are made up of separate bodies. Accordingly, the size and weight of the substrate stage (a structure including the substrate stage) can be reduced, compared with the case where the substrate stage and the empty-weight canceling mechanism are integrally configured. Further, due to movement of an X coarse movement stage and a Y coarse movement stage by an X drive mechanism and a Y drive mechanism, the substrate stage is driven in an XY plane and also the empty-weight canceling mechanism that supports the empty weight of the substrate stage is driven. With this operation, the substrate stage can be driven without difficulty even when the substrate stage and the empty-weight canceling mechanism are configured of separate bodies.
    Type: Application
    Filed: March 30, 2020
    Publication date: July 16, 2020
    Applicant: NIKON CORPORATION
    Inventors: Yasuo AOKI, Hiroshi SHIRASU, Yoshihiko KUDO
  • Publication number: 20200225592
    Abstract: An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a Y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the Y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.
    Type: Application
    Filed: March 31, 2020
    Publication date: July 16, 2020
    Applicant: NIKON CORPORATION
    Inventor: Akihiro UEDA
  • Publication number: 20200225441
    Abstract: A lightweight lens barrel that includes two focus lenses. The first lens holding frame for holding a first lens L5, a first drive unit STM5 for causing the first lens holding frame to move in the optical axis direction, a second lens holding frame for holding a second lens L6, and a second drive unit STM6 for causing the second lens holding frame to move in the optical axis direction, the first lens holding frame being arranged on an inner peripheral side of the second lens holding frame.
    Type: Application
    Filed: August 7, 2018
    Publication date: July 16, 2020
    Applicant: NIKON CORPORATION
    Inventors: Takashi KISHIMOTO, Kenichi KITANO, Osamu GOMIBUCHI
  • Publication number: 20200228705
    Abstract: An image-capturing device includes: an image sensor that includes an imagecapturing area where an image of a subject is captured; a setting unit that sets imagecapturing conditions to be applied to the image-capturing area; a selection unit that selects pixels to be used for interpolation from pixels present in the image-capturing area; and a generation unit that generates an image of the subject captured in the image-capturing area with signals generated through interpolation executed by using signals output from the pixels selected by the selection unit, wherein: the selection unit makes a change in selection of at least some of the pixels to be selected depending upon the image-capturing conditions set by the setting unit.
    Type: Application
    Filed: March 23, 2020
    Publication date: July 16, 2020
    Applicant: NIKON CORPORATION
    Inventors: Takashi SHIONOYA, Toshiyuki KANBARA, Naoki SEKIGUCHI
  • Publication number: 20200223781
    Abstract: A compound expressed in the following formula (1) (where R1 and R2 independently denote a hydrogen atom or a methyl group, Y1 and Y2 independently denote an alkylene group having a carbon number of 1 to 9, and n1 and n2 independently denote an integer of 0 to 3).
    Type: Application
    Filed: March 26, 2020
    Publication date: July 16, 2020
    Applicant: NIKON CORPORATION
    Inventors: Yoshihiro SOMEYA, Masayuki SHIJO
  • Publication number: 20200224663
    Abstract: A certain material irregularly expressed in an observation area is effectively observed. An observing apparatus includes a first observing unit performing a time lapse shooting of a predetermined observation area, a first discriminating unit discriminating whether or not a first material is expressed in the observation area based on an image obtained by the first observing unit, and a second observing unit starting a time lapse shooting relating to a part where the first material is expressed at a timing when the first material is expressed in the observation area, in which a shooting frequency of the time lapse shooting by the second observing unit is higher than a shooting frequency of the time lapse shooting by the first observing unit.
    Type: Application
    Filed: March 24, 2020
    Publication date: July 16, 2020
    Applicant: NIKON CORPORATION
    Inventor: Hiroaki KII
  • Publication number: 20200225455
    Abstract: The present invention relates to a microscope of which visibility, controllability and operability can be improved. In the microscope, an optical path and optical path of an image forming system are set so as to be perpendicular to each other when viewed from the top. In other words, in this microscope, there exists an ocular optical system that guides light, which propagates the optical path to optical path of the image forming system, to a user. The optical path is formed in a direction perpendicular to a direction of the light from a sample emitted from the ocular optical system to the user. The present invention can be applied to an inverted microscope.
    Type: Application
    Filed: March 2, 2020
    Publication date: July 16, 2020
    Applicant: NIKON CORPORATION
    Inventors: Toru MURAYAMA, Atsushi TAKEUCHI, Yumiko OUCHI, Yuki YOSHIDA
  • Patent number: 10712638
    Abstract: An accessory mount can be inserted through the camera body mount without any of the first through third tabs being hindered by any of three camera body-side tabs at the camera body mount, as long as the accessory mount is inserted into the camera body mount at a correct interlock phase. The first, second, and third tabs extend over varying lengths along the circumferential direction. The first tab extends over a greatest length and the third tab extends over a smallest length, along the circumferential direction. The accessory mount includes a restricting member, a fitting portion, and a lock pin hole. The restricting member is disposed at a position assumed on a side substantially opposite from the lock pin hole across the fitting portion.
    Type: Grant
    Filed: March 12, 2018
    Date of Patent: July 14, 2020
    Assignee: NIKON CORPORATION
    Inventors: Masanori Hasuda, Noriyasu Kotani, Hideaki Hoshikawa
  • Patent number: 10712671
    Abstract: An extreme ultraviolet lithography system (10) that creates a new pattern (330) having a plurality of densely packed parallel lines (332) on a workpiece (22), the system (10) includes a patterning element (16); an EUV illumination system (12) that directs an extreme ultraviolet beam (13B) at the patterning element (16); a projection optical assembly (18) that directs the extreme ultraviolet beam diffracted off of the patterning element (16) at the workpiece (22) to create a first stripe (364) of generally parallel lines (332) during a first scan (365); and a control system (24). The workpiece (22) includes an existing pattern (233) that is distorted. The control system (24) selectively adjusts a control parameter during the first scan (365) so that the first stripe (364) is distorted to more accurately overlay the portion of existing pattern (233) positioned under the first stripe (364).
    Type: Grant
    Filed: June 15, 2017
    Date of Patent: July 14, 2020
    Assignee: NIKON CORPORATION
    Inventor: Michael B. Binnard
  • Patent number: 10714351
    Abstract: Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: July 14, 2020
    Assignee: Nikon Corporation
    Inventors: Hidehiro Maeda, Satoshi Katagiri
  • Publication number: 20200219923
    Abstract: An image-capturing element manufacturing method includes: preparing a first substrate having a plurality of pixels that are two-dimensionally continuously arrayed; preparing a second substrate having a plurality of circuit blocks that respectively have connection terminals to a power supply and a reference potential and that are electrically independent from each other, each of the plurality of circuit blocks having at least some of circuits to read out signals from the plurality of pixels; laminating the first substrate and the second substrate to electrically couple the plurality of circuit blocks and the plurality of pixels overlapping therewith; and cutting circuit blocks around at least one of the plurality of circuit blocks and pixels overlapping therewith to form a laminate in which the plurality of pixels are laminated onto the at least one of the plurality of circuit blocks.
    Type: Application
    Filed: March 19, 2020
    Publication date: July 9, 2020
    Applicant: NIKON CORPORATION
    Inventors: Tadashi NARUI, Toru TAKAGI
  • Publication number: 20200218054
    Abstract: An image processor includes an image generator configured to generate corresponding image data corresponding to first microscopic image data obtained under a first observation condition, based on second microscopic image data and third microscopic image data obtained under a second observation condition, and an image output unit configured to output the corresponding image data. The corresponding image data may be image data corresponding to a first focal plane from which the first microscopic image data are obtained, and wherein the second microscopic image data and the third microscopic image data may be image data on a second focal plane and a third focal plane, respectively, which are different from the first focal plane.
    Type: Application
    Filed: January 16, 2017
    Publication date: July 9, 2020
    Applicant: NIKON CORPORATION
    Inventors: Ichiro SASE, Yutaka SASAKI, Takaaki OKAMOTO, Yuki TERUI, Kohki KONISHI, Masafumi MIMURA, Martin BERGER, Petr GAZAK, Miroslav SVOBODA
  • Publication number: 20200214562
    Abstract: In an ophthalmic imaging system an image imaged by an imaging section for a right eye is formed as an imaging image on a display, and then displayed through a right-eye optical unit and a reflection member. An image imaged by an imaging section for a left eye is formed as an imaging image on a display, and then displayed through an optical unit and the reflection member. This thereby enables the object to be visually inspected as a three-dimensional image by the observer viewing the right-eye imaging image and the left-eye imaging image, which differ from each other according to the parallax therebetween, by viewing the respective images through right and left eyes.
    Type: Application
    Filed: March 19, 2020
    Publication date: July 9, 2020
    Applicant: NIKON CORPORATION
    Inventors: Tomohiro KAWASAKI, Masahiro MIZUTA, Ryoichi SATAKA, Toshiyuki NAMIKAWA
  • Publication number: 20200218030
    Abstract: A lightweight lens barrel with two focus lenses; a first lens holding frame for holding a first lens, a first drive unit for causing the first lens holding frame to move in the optical axis direction, a second lens holding frame for holding a second lens, a second drive unit for causing the second lens holding frame to move in the optical axis direction, and a moving tube with the first driving unit and the second driving unit, and movable in the optical axis direction, wherein the first lens holding frame and the second lens holding frame are each movable in the optical axis direction with respect to the moving tube.
    Type: Application
    Filed: August 7, 2018
    Publication date: July 9, 2020
    Applicant: NIKON CORPORATION
    Inventors: Takashi KISHIMOTO, Osamu GOMIBUCHI, Kenichi KITANO
  • Patent number: 10702887
    Abstract: A thin film forming apparatus including: a first chamber configured to generate a mist of a dispersion liquid, and including an outlet; a second chamber configured to receive the generated mist from the first chamber and collect particles of the generated mist having a size greater than a predetermined value, and including an inlet provided on a top of the second chamber and connected to the outlet of the first chamber, and an outlet provided on the top of the second chamber and configured to transfer, as homogenized mist, particles of the generated mist having a size less than or equal to the predetermined value due to the effect of gravity on the particles of the mist; and a third chamber configured to receive the homogenized mist from the second chamber, and including an inlet connected to the outlet of the second chamber.
    Type: Grant
    Filed: May 9, 2019
    Date of Patent: July 7, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yasutaka Nishi, Makoto Nakazumi
  • Patent number: 10708518
    Abstract: There is a demand for increasing the dynamic range of an imaging unit. Provided is an imaging unit comprising a pixel section that outputs a pixel signal corresponding to a reset potential after a reset and a signal potential after charge accumulation; an amplifying section that amplifies the pixel signal with a first amplification ratio or a second amplification ratio that is different from the first amplification ratio; and a control section that causes the amplifying section to amplify the pixel signal corresponding to a change from the reset potential to the signal potential with the first amplification ratio, and then causes the amplifying section to amplify the pixel signal corresponding to a change from the signal potential to the reset potential with the second amplification ratio.
    Type: Grant
    Filed: August 14, 2019
    Date of Patent: July 7, 2020
    Assignee: NIKON CORPORATION
    Inventor: Wataru Funamizu
  • Patent number: 10705030
    Abstract: Provided is an x-ray device capable of suppressing reduction in detection precision. The X-ray device irradiates x-rays on an object and detects X-rays that pass through the object. The X-ray device comprises: an X-ray source that emits X-rays; a stage that holds the object; a detection device that detects at least some of the x-rays that have been emitted from the X-ray source and have passed through the object; a chamber member that forms an internal space wherein the X-ray source, the stage, and the detection device are arranged; and a partitioning section that separates the internal space into a first space wherein the X-ray source is arranged and a second space wherein the detection device is arranged.
    Type: Grant
    Filed: March 21, 2014
    Date of Patent: July 7, 2020
    Assignee: Nikon Corporation
    Inventor: Takashi Watanabe
  • Patent number: 10706571
    Abstract: To easily process model information or information from which the model information is generated, provided is an imaging device including: an imager that images an object from a predetermined viewpoint; a distance measurer that measures distances from the predetermined viewpoint to points on the object; an object data generator that uses an image taken by the imager and measurement results of the distance measurer to generate object data in which unit data including pairs each having a pixel value in the taken image and a distance from a point on the object corresponding to the pixel value to the predetermined viewpoint is arranged in a first arrangement order; and a point cloud data generator that calculates positional information on points on the object based on the object data and arranges point data including the positional information in the first arrangement order to generate point cloud data.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: July 7, 2020
    Assignee: NIKON CORPORATION
    Inventors: Takeaki Sugimura, Yoshihiro Nakagawa
  • Publication number: 20200209104
    Abstract: An apparatus and method for measuring thermo-mechanically induced reticle distortion or other distortion in a lithography device enables detecting distortion at the nanometer level in situ. The techniques described use relatively simple optical detectors and data acquisition electronics that are capable of monitoring the distortion in real time, during operation of the lithography equipment. Time-varying anisotropic distortion of a reticle can be measured by directing slit patterns of light having different orientations to the reticle and detecting reflected, transmitted or diffracted light from the reticle. In one example, corresponding segments of successive time measurements of secondary light signals are compared as the reticle scans a substrate at a reticle stage speed of about 1 m/s to detect temporal offsets and other features that correspond to spatial distortion.
    Type: Application
    Filed: March 12, 2020
    Publication date: July 2, 2020
    Applicant: Nikon Corporation
    Inventor: Michael Sogard
  • Patent number: 10698188
    Abstract: Provided is a variable magnification optical system comprising, in order from an object side along an optical axis, a first lens group G1 having positive refractive power, a second lens group G2 having negative refractive power, a third lens group G3 having positive refractive power, and a fourth lens group G4; upon zooming from a wide angle end state to a telephoto end state, a distance between the first lens group G1 and the second lens group G2 being varied, a distance between the second lens group G2 and the third lens group G3 being varied, and a distance between the third lens group and the fourth lens group being varied; the third lens group G3 comprising, in order from the object side along the optical axis, a 3a-th lens group G3a having positive refractive power, an aperture S, and a 3b-th lens group G3b having positive refractive power; a lens group having negative refractive power within the 3b-th lens group G3b being used as a vibration reduction lens group and moved so as to include a component i
    Type: Grant
    Filed: November 29, 2015
    Date of Patent: June 30, 2020
    Assignee: Nikon Corporation
    Inventors: Hiroshi Yamamoto, Satoru Shibata