Patents Assigned to Nikon Corporation
  • Patent number: 10686001
    Abstract: An image sensor includes: a photoelectric conversion unit that photoelectrically converts incident light transmitted through a microlens to generate electric charge; an accumulation unit that accumulates the electric charge generated by the photoelectric conversion unit; and a transfer unit that transfers the electric charge generated by the photoelectric conversion unit to the accumulation unit, wherein: the photoelectric conversion unit, the transfer unit, and the accumulation unit are provided along a direction of an optical axis of the microlens.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Toru Takagi, Satoshi Nakayama, Ryoji Ando, Takashi Seo, Yohei Matsuoka, Yoshiyuki Watanabe
  • Patent number: 10683185
    Abstract: A processing system and a device manufacturing method that can perform manufacturing of an electronic device without stopping the entire manufacturing system, even when the processing state actually implemented on a sheet substrate by a processing device differs from the target processing state.
    Type: Grant
    Filed: February 14, 2019
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Kito, Masaki Kato, Kei Nara, Masakazu Hori
  • Patent number: 10685995
    Abstract: An image sensor includes: a photoelectric conversion layer where light having entered therein undergoes photoelectric conversion; a first electrode disposed at one surface located on one side of the photoelectric conversion layer; and a second electrode disposed at the one surface so as to surround the first electrode.
    Type: Grant
    Filed: January 6, 2017
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yuki Kita, Shiro Tsunai
  • Patent number: 10686987
    Abstract: An electronic apparatus includes: an input unit that inputs image data generated by an image capturing unit that has a plurality of pixel groups, each pixel group including at least one pixel, and that is capable of performing image-capturing under different imaging conditions for each of the pixel groups and data for the imaging conditions for each of the pixel groups; and a recording control unit that generates image data for each of pixel groups having the same imaging conditions based on the image data inputted from the input unit and records the image data generated for each of the pixel groups having the same imaging conditions in a recording unit.
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Miyakawa, Naoki Yamagata
  • Patent number: 10684562
    Abstract: A measurement device is equipped with a surface plate, a slider which holds a substrate and which is movable relative to the surface plate, a drive system that moves the slider, a first position measurement system which measures the slider's first position information relative to the surface plate, a measurement unit having a mark detection system that detects a mark on a substrate, a second position measurement system which measures a relative second position information between the mark detection system and substrate, and a controller which obtains the first position information from the first position measurement system and second position information from the second position measurement system while controlling the slider's movement by the drive system, and obtains position information of a plurality of marks based on detection signals of the mark detection system having detected marks on the substrate, the first position information, and the second position information.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10686004
    Abstract: An image sensor having a plurality of pixels along a first direction includes: a first pixel having a first photoelectric conversion unit that generates an electric charge through photoelectric conversion and a reflecting portion disposed at least in a part of an area located in the first direction relative to a center of the first photoelectric conversion unit, which reflects part of light having been transmitted through the first photoelectric conversion unit toward the first photoelectric conversion unit; and a second pixel having a second photoelectric conversion unit that generates an electric charge through photoelectric conversion and a second reflecting portion disposed at least in a part of an area located in a direction opposite from the first direction relative to a center of the second photoelectric conversion unit, which reflects part of light having been transmitted through the second photoelectric conversion unit toward the second photoelectric conversion unit.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Shutaro Kato, Toru Takagi, Takashi Seo, Ryoji Ando
  • Publication number: 20200183291
    Abstract: A liquid crystal exposure apparatus that exposes a substrate with an illumination light via a projection optical system is equipped with: a substrate holder that holds the substrate; a substrate encoder system that includes head units and scales, and acquires the position information of the substrate holder on the basis of the output of the head units; and a drive section that relatively moves one of the head units and the scales on the substrate holder with respect to the other.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 11, 2020
    Applicant: NIKON CORPORATION
    Inventors: Yasuo AOKI, Atsushi HARA, Takachika SHIMOYAMA, Toru KAWAGUCHI, Katsuhiro SHIMATAKE, Iori NODA
  • Publication number: 20200180214
    Abstract: A photocurable composition for three-dimensional stereolithography which has a lower viscosity and from which a cured product having a high refractive index is obtained, and a three-dimensional object formed by using the composition. The composition is a photocurable composition for three-dimensional stereolithography containing a fluorene monomer, a carbazole monomer, a diluent monomer, and a photopolymerization initiator, the carbazole monomer being contained in an amount of less than 30 wt % with respect to the total amount of the fluorene monomer and the carbazole monomer, and the diluent monomer being contained in an amount of at least 20 wt % with respect to total solids.
    Type: Application
    Filed: July 28, 2017
    Publication date: June 11, 2020
    Applicants: NIKON CORPORATION, ESSILOR INTERNATIONAL
    Inventors: Christophe PROVIN, Akiko MIYAKAWA
  • Publication number: 20200183256
    Abstract: An interchangeable device that is attachable to an electronic device includes a first communication unit communicating with the electronic device via a first path; and a second communication unit communicating with the electronic device via a second path. The first path includes a first contact that outputs to the electronic device a signal indicating whether it is possible to perform communication via the first path, a second contact that communicates a first clock signal with the electronic device, a third contact to which a signal is input from the electronic device synchronized with the first clock signal, and a fourth contact that outputs a signal to the electronic device synchronized with the first clock signal. The second path includes a seventh contact communicating a second clock signal with the electronic device, and an eighth contact that outputs to the electronic device a signal synchronized with the second clock signal.
    Type: Application
    Filed: February 18, 2020
    Publication date: June 11, 2020
    Applicant: NIKON CORPORATION
    Inventors: Kazuharu IMAFUJI, Masafumi OIKAWA
  • Patent number: 10678030
    Abstract: A zoom optical system comprises, in order from an object: a first lens group (G1) having positive refractive power; a second lens group (G2) having negative refractive power; and a subsequent group (GR) including at least one lens group. Upon zooming, distances between the first lens group (G1) and the second lens group (G2) and between the second lens group (G2) and the subsequent group (GR) change. The subsequent group (GR) comprises a focusing group (Gfc) having negative refractive power for focusing. The first lens group (G1) comprises a 1-1st lens that has positive refractive power and is disposed closest to the object. The focusing group comprises a lens (L37) having positive refractive power and a lens (L38) having negative refractive power. Following conditional expressions are satisfied: 1.00<fFP/(?fFN)<2.00 1.80<f1/fw<2.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: June 9, 2020
    Assignee: Nikon Corporation
    Inventor: Kosuke Machida
  • Patent number: 10680031
    Abstract: A first circuit layer including a first semiconductor substrate with photoelectric conversion unit that photoelectrically converts incident light and generates charge, and a first wiring layer with wiring that reads out signal based upon charge generated by the photoelectric conversion unit; second circuit layer including a second wiring layer with wiring connected to the wiring of the first wiring layer, and a second semiconductor substrate with a through electrode connected to the wiring of the second wiring layer; third circuit layer including a third semiconductor substrate with a through electrode connected to the through electrode of the second circuit layer, and third wiring layer with wiring connected to the through electrode of the third semiconductor substrate; and a fourth circuit layer including a fourth wiring layer with wiring connected to the wiring of the third wiring layer, and fourth semiconductor substrate connected to the wiring of the fourth wiring layer.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: June 9, 2020
    Assignee: NIKON CORPORATION
    Inventors: Shigeru Matsumoto, Toru Takagi
  • Patent number: 10678034
    Abstract: A variable magnification optical system includes, in order from an object: a first lens group (G1) having a negative refractive power; a second lens group (G2); a third lens group (G3); a fourth lens group (G4) having a negative refractive power; and a fifth lens group (G5) having a positive refractive power, the system performing varying magnification by changing the distance between the first and second lens groups, the distance between the second and third lens groups, the distance between the third and fourth lens groups, and the distance between the fourth and fifth lens groups, and the fourth lens group including a 42nd lens group (G42) configured to be movable so as to have a component in a direction orthogonal to an optical axis and a 41st lens group (G41) disposed at an object-side of the 42nd lens group.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: June 9, 2020
    Assignee: Nikon Corporation
    Inventor: Atsushi Shibayama
  • Patent number: 10677791
    Abstract: A fluidic device includes a valve configured to adjust a fluid flow in a first direction of a flow path. The fluidic device includes: a diaphragm of the valve; a first substrate having a groove that constitutes the flow path and a protrusion part at a position facing the diaphragm in the groove; and a second substrate to which the diaphragm is fixed at a first fixation part and a second fixation part, wherein a length from a first end part of the protrusion part to a second end part of the protrusion part seen in the first direction is greater than a length from the first fixation part to the second fixation part.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: June 9, 2020
    Assignee: NIKON CORPORATION
    Inventors: Kenji Miyamoto, Masaru Kato
  • Patent number: 10681322
    Abstract: A plurality of kinds of color filters are disposed at each of pixels in accordance with a color array of two rows and two columns at a pixel section of a solid state imaging device. A first signal outputting circuit and a second signal outputting circuit each perform an addition read of electrical signals from the pixels of one/the other color included in a line to be read. An addition controlling circuit shifts sampling positions of the pixels which are added at a time of the addition read by a unit of the color array between the first signal outputting circuit and a second signal outputting circuit.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: June 9, 2020
    Assignee: NIKON CORPORATION
    Inventor: Taku Arii
  • Patent number: 10678141
    Abstract: An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the liquid, a driving apparatus configured to move the second member with respect to the first member; and a controller configured to control the driving apparatus. The controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: June 9, 2020
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Patent number: 10678152
    Abstract: On a substrate conforming to a layout method for a plurality of marks for detection using a plurality of mark detection systems of which the detection centers are arranged at a predetermined spacing along an X-axis direction, a plurality of shot areas are formed in both an X-axis direction and a Y-axis direction orthogonal thereto in an XY plane, and sets including at least two marks separated in the X-axis direction are repeatedly arranged along the X-axis direction at spacing of a length in the X-axis-direction of each shot area, and the marks belonging to each set are separated from each other in the X-axis direction by a spacing determined based arrangement in the X-axis direction of the plurality of mark detection systems and the length. It is thereby possible to reliably detect a plurality of marks on a substrate using a plurality of mark detection systems.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: June 9, 2020
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20200173911
    Abstract: A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion un
    Type: Application
    Filed: February 4, 2020
    Publication date: June 4, 2020
    Applicant: NIKON CORPORATION
    Inventors: Takanori KOJIMA, Satoru ODATE, Toru TAKAGI
  • Publication number: 20200174375
    Abstract: An illumination optical system is used with a reflective imaging optical system configured to form an image of a pattern arranged on a first plane onto a second plane, and is configured to illuminate an illumination area on the first plane with a light from a light source. The illumination optical system includes one or more reflecting mirrors configured to reflect the light from the light source to the first plane such that the reflected light reaches the first plane after crossing an optical path of a light which travels in the reflective imaging optical system.
    Type: Application
    Filed: February 6, 2020
    Publication date: June 4, 2020
    Applicant: NIKON CORPORATION
    Inventor: Yoshio KAWABE
  • Publication number: 20200176298
    Abstract: In a carrier system, a chuck unit is used to hold a placed wafer from above, and vertical-motion pins use suction to hold the wafer from below. Then, the chuck unit and the vertical-motion pins are subsequently lowered until a bottom surface of the wafer comes into contact with a wafer table. During the lowering, the holding force exerted by the chuck unit and the arrangement of chuck members are optimally adjusted such that, as a result of the restraint of the wafer by the chuck unit and the vertical-motion pins, localized surplus-restraint is imparted to the wafer, and warping does not occur.
    Type: Application
    Filed: February 3, 2020
    Publication date: June 4, 2020
    Applicant: NIKON CORPORATION
    Inventors: Go ICHINOSE, Taisuke IBE
  • Publication number: 20200174373
    Abstract: An exposure apparatus that scans and exposes each of a plurality of areas on a glass substrate, by irradiating the substrate with an illumination light via a projection optical system and relatively driving the substrate with respect to the illumination light, is equipped with: a substrate holder that levitates and supports a first area of the substrate; a substrate carrier that holds the glass substrate levitated and supported by the substrate holder; an X coarse movement stage that drives the substrate holder; an X voice coil motor that drives the substrate carrier; and a controller that controls the X coarse movement stage and the X voice coil motor so that the substrate holder and the substrate carrier are driven, respectively, in scanning exposure. Accordingly, an exposure apparatus with improved position controllability of an object can be provided.
    Type: Application
    Filed: February 4, 2020
    Publication date: June 4, 2020
    Applicant: NIKON CORPORATION
    Inventor: Yasuo AOKI