Patents Assigned to Semiconductor Manufacturing (Beijing) International Corporation
  • Patent number: 10790360
    Abstract: The present disclosure relates to the technical field of semiconductor processes, and discloses a semiconductor device and a manufacturing method therefor. The manufacturing method includes: providing a substrate structure including a substrate and a first material layer on the substrate, wherein a recess is formed in the substrate and the first material layer includes a nanowire; forming a base layer on the substrate structure; selectively growing a graphene layer on the base layer; forming a second dielectric layer on the graphene layer; forming an electrode material layer on the substrate structure to cover the second dielectric layer; defining an active region; and forming a gate by etching at least a portion of a stack layer to at least the second dielectric layer so as to form a gate structure surrounding an intermediate portion of the nanowire, where the gate structure includes a portion of the electrode material layer and the second dielectric layer.
    Type: Grant
    Filed: April 23, 2019
    Date of Patent: September 29, 2020
    Assignees: Semiconductor Manufacturing (Beijing) International Corporation, Semiconductor Manufacturing (Shanghai) International Corporation
    Inventor: Ming Zhou
  • Patent number: 10784296
    Abstract: The present disclosure relates to the technical field of semiconductors, and discloses an image sensor and a manufacturing method therefor. The image sensor includes: a semiconductor substrate; a first active region located on the semiconductor substrate; a doped semiconductor layer located on the first active region; and a contact located on the semiconductor layer, where the first active region includes: a first doped region and a second doped region abutting against the first doped region, wherein the second doped region is located at an upper surface of the first active region, and wherein the second doped region is formed by dopants in the semiconductor layer that are annealed to be diffused to a surface layer of the first doped region. The present disclosure may reduce leakage current and improve device performances.
    Type: Grant
    Filed: April 23, 2019
    Date of Patent: September 22, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: Tzu Yin Chiu, Chong Wang, Haifang Zhang, Xuanjie Liu
  • Patent number: 10764693
    Abstract: The present application teaches microphones and manufacturing methods therefor and relates to the field of semiconductor technologies. In some implementations, a method may include: providing a substrate structure, the substrate structure including a substrate and a first insulating layer covering a first part of the substrate; forming a first electrode plate layer, the first electrode plate layer covering a part of the first insulating layer; and forming a second insulating layer, the second insulating layer covering a part of a region of the first insulating layer which is not covered by the first electrode plate layer and a part of the first electrode plate layer, where when seen from the top, the first electrode plate layer and the second insulating layer form an angle, the angle exposes a second part of the substrate, and a degree ? of the angle is larger than or equal to 90° and is smaller than or equal to 180°. The present application can improve a problem of unexpected holes formed in the microphone.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: September 1, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: Jian Zhang, Xin Ming Lv
  • Patent number: 10755075
    Abstract: The present disclosure relates to the field of fingerprint recognition technologies, and provides a fingerprint recognition apparatus and a manufacturing method therefor, a mobile terminal, and a fingerprint lock. The apparatus includes: a substrate defining a protrusion on a surface of the substrate; a fingerprint chip, including: a signal processing circuit connected to the protrusion by passing through a TSV structure, a plurality of sensing electrodes connected to the signal processing circuit, and a protection layer covering the plurality of sensing electrodes; and a touch cover plate located on the protection layer.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: August 25, 2020
    Assignees: Semiconductor Manufacturing (Beijing) International Corporation, Semiconductor Manufacturing (Shanghai) International Corporation
    Inventors: Wenlei Chen, Qifeng Wang
  • Patent number: 10749511
    Abstract: The present disclosure provides an IO circuit and an access control signal generation circuit for the IO circuit. In one implementation, the access control signal generation circuit includes: a bias module coupled with an IO port, for generating an access control signal according to an IO port signal and an IO control signal, where a voltage value of the access control signal is a maximum value of a voltage value of an IO port voltage division signal and a voltage value of the IO control signal, and the voltage value of the IO port voltage division signal is a percentage of a voltage value of the IO port signal; an access control module coupled with the bias module, the access control module configured to control cut-off or conduction when receiving the access control signal and the IO port signal and outputting a first interface signal; and a higher-selection module configured to generate a second interface signal according to an IO power source signal and the IO port signal.
    Type: Grant
    Filed: August 9, 2019
    Date of Patent: August 18, 2020
    Assignees: Semiconductor Manufacturing (Beijing) International Corporation, Semiconductor Manufacturing (Shanghai) International Corporation
    Inventors: Yan Geng, Jie Chen, Xiao Yuan Ma, Kai Zhu, Yan Ling
  • Patent number: 10714343
    Abstract: A semiconductor structure and a method for forming the same are provided.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: July 14, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: Zhuofan Chen, Haiyang Zhang
  • Patent number: 10707117
    Abstract: The present disclosure teaches interconnection structures and methods for manufacturing the same.
    Type: Grant
    Filed: November 6, 2018
    Date of Patent: July 7, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: Qiuhua Han, Kai Yan, Duan Yi Wu
  • Patent number: 10700281
    Abstract: The present disclosure discloses a resistive random access memory (RRAM) and a method for manufacture the RRAM. The method includes: providing a bottom interconnection layer; forming a bottom dielectric layer above the bottom interconnection layer, the bottom dielectric layer comprising a via through the bottom dielectric layer that exposes a portion of the bottom interconnection layer; and forming a bottom electrode layer in the via, the bottom electrode layer including a first electrode selectively grown above the bottom interconnection layer. The bottom electrode layer manufactured in such a way provides improved filling capability of the bottom electrode layer in the via.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: June 30, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: Changzhou Wang, Jiquan Liu
  • Patent number: 10685838
    Abstract: Disclosed are a semiconductor structure and a method for forming the same.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: June 16, 2020
    Assignees: Semiconductor Manufacturing (Beijing) International Corporation, Semiconductor Manufacturing (Shanghai) International Corporation
    Inventors: Ji Shiliang, Zhang Yiying, Zhang Haiyang
  • Patent number: 10658511
    Abstract: The present disclosure is directed to a semiconductor device and a manufacturing method therefor. In one implementations, a method includes: providing a semiconductor structure, where the semiconductor structure includes: a substrate, and a first fin and a second fin spaced on the substrate; depositing a first interlayer dielectric layer on the semiconductor structure; performing first partial etching on the first interlayer dielectric layer to expose a top of the first fin; after the top of the first fin is exposed, removing a part of the first fin to form a first groove; epitaxially growing a first electrode in the first groove; performing second partial etching on the first interlayer dielectric layer to expose a top of the second fin; after the top of the second fin is exposed, removing a part of the second fin to form a second groove, where the second groove is separated from the first groove; and epitaxially growing a second electrode in the second groove.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: May 19, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventor: Yong Li
  • Patent number: 10629646
    Abstract: The present disclosure relates to the technical field of semiconductors, and discloses an image sensor and a manufacturing method therefor. The method includes: providing a semiconductor structure, where the semiconductor structure includes: a semiconductor substrate, and a first active region located on the semiconductor substrate, the first active region including a first doped region and a second doped region abutting against the first doped region, and the second doped region being located at an upper surface of the first active region; forming a semiconductor layer on an upper surface of the second doped region; and forming a contact connected to the semiconductor layer. The present disclosure enables defects or damages caused when forming the contact to be kept away from a junction field formed by the second doped region and the first doped region. Therefore, leakage current may be reduced and device performances may be improved.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: April 21, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: Tzu Yin Chiu, Chong Wang, Haifang Zhang, Xuanjie Liu
  • Patent number: 10622441
    Abstract: The present disclosure relates to the field of semiconductor technologies, and discloses semiconductor apparatus and manufacturing methods for the same.
    Type: Grant
    Filed: July 11, 2018
    Date of Patent: April 14, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventor: Hai Zhao
  • Patent number: 10600700
    Abstract: This application relates to the field of semiconductor technologies, and discloses a test structure and a manufacturing method therefor. Forms of the method may include: providing a top wafer structure, where the top wafer structure includes a top wafer and multiple first pads that are spaced from each other at a bottom of the top wafer; providing a bottom wafer structure, where the bottom wafer structure includes a bottom wafer and multiple second pads that are spaced from each other at a top of the bottom wafer, where a side surface of at least one of two adjacent second pads has an insulation layer; bonding the multiple first pads with the multiple second pads in a eutectic bonding manner, where each first pad is bonded with a second pad, to form multiple pads. This application may mitigate a problem that bonded pads are connected to each other.
    Type: Grant
    Filed: June 1, 2018
    Date of Patent: March 24, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: YiPing Mao, GuangNing Li
  • Patent number: 10593550
    Abstract: This application relates to the technical field of semiconductors, and teaches methods for manufacturing a semiconductor structure. One implementation of a method includes: forming a semiconductor layer at a surface of a to-be-etched material layer on a substrate; forming an amorphous carbon layer on the semiconductor layer; forming a patterned mask layer on the amorphous carbon layer; and etching the amorphous carbon layer, the semiconductor layer, and the to-be-etched material layer using the patterned mask layer as a mask. This application may improve uniformity of the amorphous carbon layer, so that a position of a pattern that is formed after the to-be-etched material layer is etched does not deviate from an expected position, and a shape of the pattern is an expected shape.
    Type: Grant
    Filed: May 10, 2018
    Date of Patent: March 17, 2020
    Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International Corporation
    Inventors: Erhu Zheng, Jinhe Qi