Abstract: An apparatus for handling and transporting plate like substrates comprises a first flat carrier member and a second flat carrier member, the second flat carrier member being arranged at least along one side wall of the first carrier member, the first and second carrier members being arranged horizontally and provided with at least four vertically extending guiding members, arranged at spaced locations to each other in two sets of at least two guiding members each, whereby each carrier member comprises at least one guiding member of each set of guiding members, the first and second carrier member being mounted on a robot and moveable relative to each other in a longitudinal direction.

Abstract: The invention relates to a tool for the free support of plate-like substrates, comprising a flat plate-like body with at least one supporting surface wherein at least one gas channel is provided within the body, extending from an outer gas supply end to an inner gas discharge end, the gas discharge end being in fluid communication with a gas distribution chamber, through which gas passes into a dynamically balanced gas slit being arranged radially with respect to the gas distribution chamber predominantly parallel to the supporting surface and opening into the supporting surface at its outer end at an angle >90 and <180.degree..