Patents Assigned to STLAB, Incorporated
  • Oxygen Partial Pressure Control Apparatuses and Methods of Using Solid Electrolytes for Oxygen Partial Pressure Control
    Publication number: 20080217187
    Abstract: The present invention provides oxygen partial pressure control apparatuses that can control the partial pressure of oxygen in atmospheric gases in processing apparatuses or the like to within the range of 0.2 to 10?30 atm, while maintaining low material and operational cost conditions.
    Type: Application
    Filed: May 19, 2005
    Publication date: September 11, 2008
    Applicants: National Institute of Advanced Industrial Science and Technology, STLAB, Incorporated
    Inventors: Naoki Shirakawa, Shinichi Ikeda, Katsuhide Uchida