Abstract: A reaction tank (5) holds crushed cells comprising a pellicle of Bacillus midousuji cultured in the presence of a chlorinated aromatic compound such as dioxins and holds wastewater comprising a contaminated matter such as fly ash which comprises dioxins and which is produced by washing of a facility such as an incinerator. Air is supplied by a blower (6) to a matter held in the reaction tank (5). Accordingly, dioxins having three or more chlorine atoms in the contaminated matter can be decomposed, and the contaminated matter can be easily cleaned at a site where dioxins generate such as a washing or dismantling site of an incineration facility.

Abstract: The present invention relates to an air filter having an inorganic material layer in which the following adsorbent is fixed on the surface of the supporter using powder of an inorganic substance as a binder. That is, the adsorbent is prepared by impregnating a salt of an inorganic acid to powder of an inorganic substance consisting of at least one of diatom earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, activated clay, activated bentonite, or synthetic zeolite. The air filter according to the present invention can adsorb and remove both of gaseous basic impurities and gaseous organic impurities, thus making a very effective filter for manufacturing semiconductor and LCD.

Abstract: An air cleaning apparatus such as a clean room or the like having an air circulation mechanism which circulates the humidity controlled air through a predetermined air circulation path, wherein the air circulation path is provided with a filter which has a hydrophobic zeolite layer formed on its base filter media surface and another filter which is disposed downstream from the filter having a hydrophobic zeolite layer and is used for removing particulate impurities contained in the circulating air. According to this air cleaning apparatus, gaseous organic impurities and particulate impurities contained in the air circulating in the air cleaning apparatus can be removed without lowering the humidity of the circulating air. Furthermore, since this air cleaning apparatus includes no activated charcoal which is inflammable, the apparatus is excellent from the standpoint of disaster prevention.

Abstract: Apparatus and a method for evaluating the contamination over the surface of a substrate for use in manufacturing semiconductor devices, liquid crystal devices and so on, said contamination being caused by contaminants, for instance airborne organic substances or the equivalent in the clean room atmosphere. For evaluation, there is measured with passage of time in the atmosphere having a substantially constant relative humidity the surface resistivity (R) of the substrate 104 by bringing electrodes 106 into close contact with an insulating film as formed on said substrate surface, or a contact angle (.alpha.) of a liquid-drop 207 dropped on the substrate 206. From this measurement, the degree of said contamination is judged by comparing the value of the surface resistivity or contact angle as measured immediately after rinsing the substrate, with the values of the same as measured after exposing the substrate to the objective atmosphere to be evaluated.

Abstract: A storehouse is constituted including a clean room 12 and a storage space 10 for storing clean materials, which is isolated from the clean room. The clean air for storage is generated by a storage air generator 36 and is supplied to the storage space 10 through air supply systems 32, 46. The clean air for storage is purified to such a cleanliness level that it contains hydrocarbon group including methane of less than 10 ppb by using the method of combustion with a catalyst, or purified to such a cleanliness level extent that the contact angle of a pure water droplet or the surface resistivity to the clean material surface can be kept at substantially the same level as that which is indicated immediately after cleaning the material, by using a catalytic reaction tower, an activated charcoal filter, or a fluid bed type adsorbing tower, all of which are made by using materials generating no gaseous impurities.

Abstract: An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor articles, includes a AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positioned apart from the discharge end of each emitter by a predetermined distance. Each opposite conductor is grounded. Emitters of some of the discharge pairs are connected to a high voltage AC source having added thereto negative voltage bias to thereby form pseudo negative pole emitters, and emitters of the other discharge pairs are connected to a high voltage AC source having added thereto a more positive voltage bias relative to the negative voltage bias to thereby form pseudo positive pole emitters.

Abstract: An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor devices, includes an AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positiond apart from each emitter by a predetermined distance. A DC voltage (or voltages) is applied to the opposite conductors. By adjusting the DC voltage (or voltages), the positive and negative ion concentration generated by each emitter is controlled. Further, a bias voltage may be added to the DC to increase the ion concentration.

Abstract: In a system for constructing a ceiling surface exhaling and inhaling system clean room in an existing building without having any exhaust plenum provided under the floor or at the back of walls by supporting fan filter units, air inlet port units and blind panels to a moduled ceiling bars while selecting at will the numbers and positions of these units, a flexible clean room system is provided in which clean zones having necessary degree of cleanliness can be prepared at necessary positions and the changes of the layout of the clean zones, expansion or reduction of the room space can be freely performed.

Abstract: Apparatus for dehydrating air to be supplied to a blast furnace comprising a dehydration assembly wherein intake air is dehydrated by contact with a circulating hygroscopic liquid and a regeneration assembly wherein the liquid is regenerated by contact with air under heating with steam, characterized in that a cylinder through which a part of the circulating liquid is caused to flow is provided for comparing the pressure of the liquid with a reference liquid to detect the concentration of the circulating liquid, the regeneration assembly is divided into a plurality of independently operable units each having regeneration means, means for controlling the steam flow rate according to the detected concentration, means for controlling the liquid flow rate according to the detected concentration, and at least one heat exchanger for transferring sensible heat between at least one fluid entering said regeneration means and at least one fluid leaving said regeneration means.

Abstract: Arrangement for preparing dry hot compressed air to be supplied to blast furnace, wherein a heat exchanger and a dehydrater assembly comprising a gas permeable regenerative moisture absorbing rotor are arranged in the air passage from blower to hot air furnaces so that the hot compressed air from the blower may be used to heat the dehydrated air and to regenerate the rotor. Air leakage between regenerating and dehydrating zones in the dehydrater is prevented by sealing those clearances where otherwise such leakage would occur by packing elements to form sealed spaces and externally introducing dry pressurized air into each of said spaces.

Abstract: Assembly for dehydrating atmospheric air at the input side of a blower for supplying air to a blast furnace comprising at least one gas permeable rotor containing a regenerative moisture absorbent wherein a hot combustion gas obtained by burning a waste gas from the blast furnace is utilized for regenerating the absorbent and wherein means for regulating the relative humidity of the moist air to be dehydrated, which does not need any external heat source, is provided to avoid deliquescence of the absorbent. The rotor preferably comprises a layer containing the absorbent and a layer of an adsorbent capable of adsorbing impurities contained in the air.