Abstract: A support device of the present invention includes an expansible means attached to at least one of plural support systems for supporting an object. Even when the object has dimensional errors caused in its making process, therefore, the interval between the support systems which contact the object to be supported can be self- and micro-adjusted. This enables objects, different in shape, to be correctly positioned and supported.
Abstract: A chuck for transporting wafer carriers is designed to hold the wafer carriers in a cantilever manner and with support members supporting one sides of the wafer carriers. This enables the whole chuck to be extremely compact. This also enables the wafer carriers to be made freer fron any limit while they are being transported and prevents them from being damaged because they can be steadily transported.