Patents Assigned to The United States of America as represented by the Administrator of Natural Aeronautics and Space Administration
  • Gas sensors using SiC semiconductors and method of fabrication thereof
    Patent number: 6763699
    Abstract: Gas sensor devices are provided having an atomically flat silicon carbide top surface that, in turn, provides for a uniform, and reproducible surface thereof.
    Type: Grant
    Filed: February 6, 2003
    Date of Patent: July 20, 2004
    Assignee: The United States of America as represented by the Administrator of Natural Aeronautics and Space Administration
    Inventors: Gary W. Hunter, Philip G. Neudeck